JPH03250570A - Conductive connection method - Google Patents

Conductive connection method

Info

Publication number
JPH03250570A
JPH03250570A JP2044319A JP4431990A JPH03250570A JP H03250570 A JPH03250570 A JP H03250570A JP 2044319 A JP2044319 A JP 2044319A JP 4431990 A JP4431990 A JP 4431990A JP H03250570 A JPH03250570 A JP H03250570A
Authority
JP
Japan
Prior art keywords
conductive
fine particles
connection terminals
particles
conductive fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2044319A
Other languages
Japanese (ja)
Inventor
Yoshinori Atsumi
厚見 好則
Kazuhiro Sugiyama
和弘 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Casio Computer Co Ltd
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Priority to JP2044319A priority Critical patent/JPH03250570A/en
Priority to EP90113759A priority patent/EP0413161B1/en
Priority to DE69017553T priority patent/DE69017553T2/en
Priority to KR1019900012470A priority patent/KR940001260B1/en
Priority to US07/602,715 priority patent/US5123986A/en
Priority to US07/713,822 priority patent/US5180888A/en
Publication of JPH03250570A publication Critical patent/JPH03250570A/en
Pending legal-status Critical Current

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  • Multi-Conductor Connections (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)

Abstract

PURPOSE:To connect each pair of mating connection terminals by electroconductive particulate by mixing particulate for electric continuity with an insulative adhesive to constitute a bond agent for continuity, interposing it between No.1 and No.2 connection terminals oppositely situated, and performing joining by hot press. CONSTITUTION:An Au plating film 2 is applied to the surface of resin particulate 1, and insulative particulate 4 is attached and melted to cause covering with an insulative film 5, and thus particles 6 for electric continuity are prepared. These particles 6 are put in mutual contact, arranged into a plane, and embedded in a thermo- plastic resin 7 having a low melting point. Connection terminals 11 are provided on a glass plate 9 at a certain pitch while other connection terminals 12 are formed on the undersurface of a film form base board 10 at the same pitch, and a bond agent 8 for continuity is interposed between the upper and lower base boards 9, 10, which are joined together by hot press. The insulative film 5 of particles for continuity 6 melts to cause exposure of the electroconductive particulate 3, and now the terminals 11, 12 continued provided in the direction of orientation. This constitution ensures connections are made with high reliance even though the pitch of connection terminals is small.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は互いに離間対向する接続端子を電気的に接続
する導電接続方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a conductive connection method for electrically connecting connection terminals that are spaced apart from each other and that face each other.

[従来の技術] 相互に離間して配置された接続端子を電気的に接続する
方法として各種の方式が知られている。
[Prior Art] Various methods are known as methods for electrically connecting connection terminals that are spaced apart from each other.

最も一般的な手法としては半田付けによる方法がある。The most common method is soldering.

近年の接続端子のピッチ微細化の要求に即応して、半田
付は手法も腑分と進歩している。最新の設備と細心の注
意力をもってすれば、半田付けは、200μm程度のビ
ー2チの接続端子の接続に適用することが可能である。
In response to the recent demand for finer pitches of connection terminals, soldering techniques have advanced considerably. With modern equipment and extreme care, soldering can be applied to connect connection terminals of about 200 μm.

しかし、この手法における欠点は、接続端子が半田濡れ
性を有していなければならず、従って、少なくとも、導
電性金属箔で形成されていなければならないことと、高
温接合のため、耐熱性絶縁基板が用いられる必要がある
ことである。これらの条件は、材料の価格を上昇させる
However, the disadvantages of this method are that the connecting terminals must have solder wettability and therefore must be made of at least a conductive metal foil, and because of the high temperature bonding, a heat-resistant insulating substrate is required. need to be used. These conditions increase the price of materials.

安価な樹脂基板に形成された接続端子を電子部品に接続
する方法として、導電性接着剤による方法が知られてい
る。しかし、この方法は、接続端子上に導電性接着剤を
正確に位置決めして被着しなければならず、極めて非能
率的である。また、導電性接着剤が被着されていない部
分すなわち、接続端子間は全く接着されない為、接合力
が極度に不足し、接合強度の補強手段を必要とされる。
As a method for connecting connection terminals formed on inexpensive resin substrates to electronic components, a method using a conductive adhesive is known. However, this method requires accurately positioning and applying the conductive adhesive onto the connection terminal, which is extremely inefficient. Further, since the portions to which the conductive adhesive is not applied, that is, the connecting terminals are not bonded at all, the bonding force is extremely insufficient, and means for reinforcing the bonding strength is required.

このため、接合部分が広い容積を占めることになる。し
かも、このような欠点に加えて、接続作業に伴なう位置
合わせの精度不良のため、接続端子のピッチが200〜
300μm以下の場合には、短絡や導通不良が極度に増
大する。
Therefore, the joint portion occupies a large volume. Moreover, in addition to these drawbacks, due to poor alignment accuracy during connection work, the pitch of the connection terminals is 200~200mm.
When the thickness is less than 300 μm, short circuits and conduction failures are extremely likely to occur.

他の従来技術として、−この方法は、上述した手法と比
較すると本発明の概念に割と近い一興方導電性接着剤を
用いる方法がある。異方導電性接着剤とは、絶縁性接着
剤中に導電性微粒子を分散混合したものである。この異
方導電性接着剤を用いて基板の接続端子を電子部品の接
続端子に接続する場合、異方導電性接着剤は基板に設け
られた接続端子上のみでなく接続端子間の基板上にも被
着される。基板の接続端子と電子部品の接続端子を異方
導電性接着剤を介在して熱圧着すると、各導電性微粒子
と基板もしくは電子部品の接続端子間に介在される絶縁
性接着剤は接続端子間に流動し、基板および電子部品の
接続端子は導電性微粒子に直接接触する。この際、各導
電性微粒子が互いに導通しないように十分に離間して分
散されていれば、基板または電子部品に設けられた接続
端子は短絡することはない、すなわち、異方導電性接着
剤とは接合された状態において、厚み方向には導電性を
有するが面方向には絶縁性を呈するものであり、導電性
に方向性を有する接着剤ということである。
Another prior art technique is the use of a one-sided electrically conductive adhesive, which is relatively close to the concept of the present invention when compared to the techniques described above. Anisotropically conductive adhesive is a mixture of conductive particles dispersed in an insulating adhesive. When using this anisotropic conductive adhesive to connect the connection terminals of a board to the connection terminals of electronic components, the anisotropic conductive adhesive is applied not only on the connection terminals provided on the board, but also on the board between the connection terminals. is also covered. When the connection terminal of the board and the connection terminal of the electronic component are bonded by thermocompression with an anisotropic conductive adhesive interposed, the insulating adhesive interposed between each conductive fine particle and the connection terminal of the board or electronic component is bonded between the connection terminals. The conductive particles come into direct contact with the conductive particles. At this time, if the conductive particles are dispersed at sufficient distances so that they do not conduct with each other, the connection terminals provided on the board or electronic component will not be short-circuited. In the bonded state, it has conductivity in the thickness direction but exhibits insulation in the surface direction, and is an adhesive that has directionality in conductivity.

この異方導電性接着剤は、絶縁性接着剤として100〜
300℃の比較的低温で溶融する材料が用いられている
ため樹脂基板にも適用できる。また、基板の接続端子上
に被着する際、位置合せが必要でないので能率的である
。さらに、接続端子間にも接着剤が介在されているため
、接合強度を大きくできる、という特徴を有する。
This anisotropic conductive adhesive is used as an insulating adhesive with a
Since it uses a material that melts at a relatively low temperature of 300°C, it can also be applied to resin substrates. Furthermore, it is efficient because alignment is not required when it is applied onto the connection terminals of the board. Furthermore, since the adhesive is also interposed between the connecting terminals, the bonding strength can be increased.

[発明が解決しようとする課Ill 上述した如く、異方導電性接着剤は、厚さ方向には導電
性を、面方向には絶縁性を呈することが絶対的条件であ
る。厚さ方向に導電性を呈するためには、基板の接続端
子と電子部品の接続端子間には、最低(単に理論的には
)、−個の導電性微粒子が介在される必要がある0面方
向に絶縁性を呈するためには、どの導電性微粒子も隣接
する導電性微粒子とは絶縁性接着剤により電気的に不導
通となる間隔に隔てられていることが理想である。隣接
する導電性微粒子が、たまたま隣の接続端子と絶縁され
ていることを仮定すれば、そのような条件においてのみ
導電性微粒子同志が導通することが許容される。しかし
、そのような導電性微粒子が隣の接続端子から絶縁され
ているという保証はない、それ故、どの導電性微粒子も
隣接の導電性微粒子とは導通することがないような構造
にする必要がある。
[Problems to be Solved by the Invention] As described above, it is an absolute condition for the anisotropically conductive adhesive to exhibit conductivity in the thickness direction and insulation in the surface direction. In order to exhibit conductivity in the thickness direction, at least (in theory) - conductive fine particles must be interposed between the connection terminal of the board and the connection terminal of the electronic component. In order to exhibit insulating properties in the direction, it is ideal that each conductive fine particle is separated from adjacent conductive fine particles by an insulating adhesive at a distance that provides electrical non-conductivity. Assuming that adjacent conductive particles happen to be insulated from adjacent connection terminals, conduction between the conductive particles is allowed only under such conditions. However, there is no guarantee that such conductive fine particles are insulated from adjacent connection terminals, and therefore it is necessary to create a structure in which no conductive fine particles are electrically connected to adjacent conductive fine particles. be.

しかしながら、異方導電性接着剤において、絶縁性接着
剤中に分散される導電性微粒子の配置は単に撹拌によっ
てのみ決定される。このため、導電性微粒子の分布は、
当然のことながら、−様ではなく密の部分と疎の部分を
有している。従って、密の部分においても導電性微粒子
が相互に導通しないこと、および疎の部分においても必
ず1つの接続端子に対して、1以上の導電性微粒子が位
置付けられなければならない、という条件が生じる。
However, in an anisotropic conductive adhesive, the arrangement of conductive fine particles dispersed in the insulating adhesive is determined only by stirring. Therefore, the distribution of conductive fine particles is
Naturally, it is not negative-like, but has dense parts and sparse parts. Therefore, the conditions arise that conductive fine particles do not conduct with each other even in dense areas, and that one or more conductive fine particles must be positioned for one connection terminal even in sparse areas.

接続端子のピッチが小さくなり、従って、接続端子の巾
が狭くなるに比例して、上記の条件を満足することは困
難になる。1つの接続端子上に位置する導電性微粒子は
、接続端子が中挟になるにつれ小数となる。しかしなが
ら、接続端子上に位置する導電性微粒子の数の増大を図
って、絶縁性接着剤中に混合する導電性微粒子の割合を
増やせば、密の部分の導電性微粒子の密度がさらに増大
される。言う迄もなく、この導電性微粒子の密の部分は
中挟の接続端子間を満たし回路を短絡させる。
As the pitch of the connection terminals becomes smaller and therefore the width of the connection terminals becomes narrower, it becomes more difficult to satisfy the above conditions. The number of conductive fine particles located on one connection terminal decreases as the connection terminal becomes more intermediate. However, if you increase the number of conductive particles located on the connection terminal and increase the proportion of conductive particles mixed in the insulating adhesive, the density of the conductive particles in the dense areas will further increase. . Needless to say, the dense part of the conductive fine particles fills the space between the connecting terminals in the middle and short-circuits the circuit.

このような構造および作用のため、異方導電性接着剤に
よる接続は、接続端子のピッチが導電性微粒子の直径の
数倍程度の場合にまで適用可能であるとみられるにも拘
わらず、現実的には、これには程遠いものであった。−
例として直径lO〜20ILm程度の導電性微粒子を用
いた場合、接続端子のピッチは200〜300 Bmと
することが限界であった。この方法による限り、理論的
にも、接続端子のピッチが導電性微粒子の直径よりも小
さい場合には適用は不可能である。
Because of this structure and action, connections using anisotropic conductive adhesives are considered to be applicable even when the pitch of the connection terminals is several times the diameter of the conductive particles, but it is not practical. was far from this. −
For example, when conductive fine particles having a diameter of about 10 to 20 ILm are used, the pitch of the connecting terminals is limited to 200 to 300 Bm. Theoretically, this method cannot be applied when the pitch of the connecting terminals is smaller than the diameter of the conductive fine particles.

この発明は、上述した実情に鑑みてなされたものであり
、その目的とするところは、配線材料および基板材料と
して如何なるものにも対応できるよう低温接合が可能で
あり、且つ接続端子のピッチが従来よりも遥かに微小の
場合にも適用することのできる、全く新規な構造の導通
用結合剤を用いた導電接続方法を提供することにある。
This invention was made in view of the above-mentioned circumstances, and its purpose is to enable low-temperature bonding to be applied to any wiring material and board material, and to reduce the pitch of connection terminals from conventional ones. The object of the present invention is to provide a conductive connection method using a conductive binder with a completely new structure, which can be applied even to cases of much smaller dimensions.

[課題を解決するための手段J この発明は上述した目的を達成するために、導電性微粒
子と、該導電性微粒子の外周面を外部から電気的に隔絶
する絶縁膜とからなり、前記絶縁膜が前記導電性微粒子
よりも微細で低融点を有する多数の絶縁性微粒子を相互
に接合することにより形成された導通用微粒子を形成し
、この導通用微粒子を絶縁性接着剤中に混合して導通用
結合剤を構成し、この導通用結合剤を互いに対向する第
1、第2の接続端子間に介在して熱圧着することにより
、前記導通用微粒子の絶縁膜の厚み方向の部分が破壊さ
れ、かつ面方向の部分が残存することにより、前記第1
.第2の接続端子を前記導電性微粒子で接続することで
ある。
[Means for Solving the Problems J] In order to achieve the above-mentioned object, the present invention comprises conductive fine particles and an insulating film that electrically isolates the outer peripheral surface of the conductive fine particles from the outside, and the insulating film A large number of insulating particles that are finer than the conductive particles and have a lower melting point are bonded together to form conductive fine particles, and these conductive fine particles are mixed into an insulating adhesive to form a conductive particle. By forming a general-purpose binder and interposing this conductive binder between the first and second connecting terminals facing each other and thermocompression bonding, the portion of the conductive fine particles in the thickness direction of the insulating film is destroyed. , and the portion in the plane direction remains, so that the first
.. The second connection terminal is connected using the conductive fine particles.

[作用] 異方導電性接着剤における問題点は、導電性微粒子を相
互に電気的に絶縁するために、絶縁性接着剤中に混入で
きる導電性微粒子の割合を所定値以上にすることができ
ない点にあった。従って。
[Function] The problem with anisotropic conductive adhesives is that in order to electrically insulate the conductive fine particles from each other, the proportion of conductive fine particles that can be mixed into the insulating adhesive cannot exceed a predetermined value. It was on point. Therefore.

もし仮に導電性微粒子が相互に電気的に導通しないこと
が保証されれば、上記の問題点は解消される。すなわち
、導電性微粒子の割合が十分に密になれば、接続端子の
巾が如何に小さくなろうとも、導通に必要な十分な数の
導電性微粒子を、各接続端子上に位置付けすることがで
きる。しかも、この場合、接続端子間に導電性微粒子が
どのように密に分布しようとも、導電性微粒子相互が導
通しない限り、接続端子が短絡されることはない。
If it is guaranteed that the conductive fine particles are not electrically conductive with each other, the above problem will be solved. In other words, if the proportion of conductive fine particles is sufficiently dense, a sufficient number of conductive fine particles necessary for continuity can be positioned on each connecting terminal, no matter how small the width of the connecting terminal becomes. . Furthermore, in this case, no matter how densely the conductive particles are distributed between the connection terminals, the connection terminals will not be short-circuited unless the conductive particles are electrically connected to each other.

この発明の導通用結合剤は、絶縁性接着剤中に混合する
導通用微粒子として、導電性微粒子の外周面に該導電性
微粒子よりも微細で低融点の絶縁性微粒子の相互の接合
により構成される絶縁膜を形成したものを用いている。
The conductive binder of the present invention is composed of conductive fine particles that are mixed into an insulating adhesive and are formed by mutually bonding insulating fine particles that are finer than the conductive fine particles and have a lower melting point on the outer peripheral surface of the conductive fine particles. A material with an insulating film formed thereon is used.

この絶縁膜は導電性微粒子相互の電気的導通を防止、す
る、従って、この発明の導通用微粒子は上記した作用を
呈する。
This insulating film prevents electrical conduction between the conductive fine particles. Therefore, the conductive fine particles of the present invention exhibit the above-mentioned effect.

このような導通用結合剤において、結合剤の厚さ方向に
対して電気的な導通を達成できるならば、この結合剤は
、如何に小さなピッチで配列された接続端子に対しても
適用できるものであることは明らかである。この目的の
ため、この発明の導通用微粒子の絶1j1mlは低融点
のもので形成され且つ結合剤に加えられる熱圧着力によ
り厚み方向の部分は破壊されかつ面方向の部分が残存す
るものである。
If electrical continuity can be achieved in the thickness direction of such a conductive binder, this binder can be applied to connection terminals arranged at a pitch no matter how small. It is clear that For this purpose, 1 ml of conductive fine particles of the present invention are made of a material with a low melting point, and the thickness direction part is destroyed by the thermocompression bonding force applied to the binder, while the planar direction part remains. .

従って、この導通用結合剤を用いた導電接続方法は、互
いに対向する第1、第2の接続端子間に導通用結合剤を
介在させて熱圧着治具等により熱圧着すると、導通用結
合剤に含まれた導通用微粒子によって、結合剤の厚み方
向には導電性を呈するが、導通用微粒子が配列された方
向、すなわち面方向には絶縁性を呈するので、隣接する
第1、第2の接続端子同士を短絡させずに、対向する第
1、第2の接続端子のみを導電性微粒子で確実に接続す
ることができる。
Therefore, in the conductive connection method using this conductive binder, the conductive binder is interposed between the first and second connecting terminals facing each other and the conductive binder is bonded using a thermocompression jig or the like. Due to the conductive particles contained in the binder, the binder exhibits conductivity in the thickness direction, but exhibits insulation in the direction in which the conductive particles are arranged, that is, in the plane direction, so that the adjacent first and second Only the opposing first and second connection terminals can be reliably connected using the conductive fine particles without short-circuiting the connection terminals.

[実施例] 以下、図面を参照して、この発明の実施例を説明する。[Example] Embodiments of the present invention will be described below with reference to the drawings.

第3図(A)〜(C)は導通用結合剤の製造工程を示す
、まず、第3図(A)に示すように、樹脂微粒子1の表
面に導電膜2を形成することにより導電性微粒子3を形
成し、この導電性微粒子3の外周面に絶縁性微粒子4を
付着する。樹脂微粒子lはアクリル等よりなる。導電膜
2は金、銀、銅、ニッケル、アルミニウム等の金属を無
電解メツキや蒸着等で被覆したものである。絶縁性微粒
子4は導電性微粒子3の外周面を外部から電気的に隔絶
するためのもので、絶縁性を有する低融点(100〜3
00℃程度)の微粉末樹脂よりなり、導電膜2の外周面
に静電気で吸着されている。なお、絶縁性微粒子4は導
電性微粒子3よりも遥かに小さなものである。−例とし
ては、導電性微粒子3は直径10pm程度に、また、絶
縁性微粒子4は直径1終m程度とされる。
3(A) to 3(C) show the manufacturing process of the conductive binder. First, as shown in FIG. 3(A), a conductive film 2 is formed on the surface of the resin fine particles 1 to make the resin conductive. Fine particles 3 are formed, and insulating fine particles 4 are attached to the outer peripheral surface of the conductive fine particles 3. The resin fine particles 1 are made of acrylic or the like. The conductive film 2 is coated with metal such as gold, silver, copper, nickel, aluminum, etc. by electroless plating, vapor deposition, or the like. The insulating fine particles 4 are for electrically isolating the outer circumferential surface of the conductive fine particles 3 from the outside, and are made of a low melting point (100 to 3
The conductive film 2 is made of fine powder resin at a temperature of about 100° C.) and is attracted to the outer circumferential surface of the conductive film 2 by static electricity. Note that the insulating fine particles 4 are much smaller than the conductive fine particles 3. - For example, the conductive fine particles 3 have a diameter of about 10 pm, and the insulating fine particles 4 have a diameter of about 1 m.

次に、絶縁性微粒子4が付着された導電性微粒子3をボ
ールミル等により50℃程度で攪拌し、第311!J(
B)に示すように、絶縁性微粒子4を膜状もしくは膜状
に近い連続した状態になるまで相互に接合する。このと
き、絶縁性微粒子4は、相互融着、または化学的結合、
もしくは物理的結合等によって接合される。この結果、
導電性微粒子3の外周面には絶縁性微粒子4が相互に接
合された絶縁膜5が形成され、これにより導通用微粒子
6が形成される。
Next, the conductive fine particles 3 to which the insulating fine particles 4 are attached are stirred at about 50° C. using a ball mill or the like, and the 311th! J(
As shown in B), the insulating fine particles 4 are bonded to each other until they form a film or a continuous state close to a film. At this time, the insulating fine particles 4 are bonded to each other or chemically bonded,
Alternatively, they may be joined by physical bonding or the like. As a result,
An insulating film 5 in which insulating fine particles 4 are bonded to each other is formed on the outer peripheral surface of the conductive fine particles 3, thereby forming conductive fine particles 6.

そして、第3図(C)に示すように、導通用微粒子6を
相互に接触させて平面的に配列した状態で絶縁性接着剤
7中に混合する。これにより、導通用結合剤8が形成さ
れる。この場合、絶縁性接着剤7は 100〜300℃
程度の低温溶融材料であり、例えば熱可塑性樹脂よりな
る熱溶融型に属するホットメルト型のものが望ましいが
、これに限らず、熱硬化性樹脂よりなるものでもよい、
なお、絶縁性接着剤7の厚さは導通用微粒子6の大きさ
よりも少し厚く形成されている。
Then, as shown in FIG. 3(C), the conductive particles 6 are mixed into the insulating adhesive 7 in a state in which they are arranged in a planar manner in contact with each other. As a result, the conductive binder 8 is formed. In this case, the temperature of the insulating adhesive 7 is 100 to 300°C.
For example, a hot-melt type material belonging to the heat-melting type made of thermoplastic resin is preferable, but it is not limited to this, and materials made of thermosetting resin may also be used.
Note that the thickness of the insulating adhesive 7 is formed to be slightly thicker than the size of the conductive fine particles 6.

このような導通用結合剤8においては、導電性微粒子3
が絶縁膜5で電気的に隔絶されているから、絶縁性接着
剤7中で導通用微粒子6・・・を相互に接触させた状態
で平面的に配列することができ、導電性微粒子3・・・
の密度を、接着力が十分と仮定する限り、限りなく増大
することができる。
In such a conductive binder 8, the conductive fine particles 3
are electrically isolated by the insulating film 5, the conductive fine particles 6 can be arranged in a plane in contact with each other in the insulating adhesive 7, and the conductive fine particles 3.・・・
The density of can be increased without limit as long as the adhesive strength is assumed to be sufficient.

また、導通用微粒子6の絶縁[15は低融点の絶縁性微
粒子4を膜状もしくはそれに近い状態に連続するように
接合させたものであるから1例えば熱圧着により加熱お
よび加圧されると、その箇所の絶縁膜5が溶融して導電
性微粒子3が露出するので、導電性微粒子3を介して加
圧方向(厚さ方向)に対して導通可能となる。しかし、
それ以外の箇所つまり加圧方向と直交する面方向の箇所
の絶縁膜5はそのまま残存するので、導通用微粒子6は
面方向に導通することはない。
In addition, since the insulation of the conductive particles 6 [15] is made by bonding the insulating particles 4 with a low melting point in a continuous manner into a film-like or similar state, 1 when heated and pressurized by thermocompression bonding, for example, Since the insulating film 5 at that location is melted and the conductive fine particles 3 are exposed, conduction is possible in the pressurizing direction (thickness direction) via the conductive fine particles 3. but,
Since the insulating film 5 at other locations, that is, locations in the planar direction perpendicular to the pressing direction, remains as it is, the conductive particles 6 do not conduct in the planar direction.

第1図は上述した導通用結合剤8を用いた導電接続構造
を示す、この図において、9.lOは上下に対向する基
板である。下側の基板9は例えばガラス基板等であり、
その上面には第1の接続端子1.1・・・が同じピッチ
で複数(この実施例では2個のみを示す)配列形成され
ている。上側の基板lOは例えばフィルム基板等であり
、その下面には第2の接続端子12・・・が第1の接続
端子11・・・と同じビー2チで対向して形成されてい
る。また上下の基板9.10間には上述した導通用結合
剤8が介在されている。すなわち、上下の基板9.10
間には導通用微粒子6・・・が相互に接触した状態で配
置され、その空隙には絶縁性接着剤7が充填された状態
となる。この場合、各接続端子11.12の幅は導通用
結合剤8の導通用微粒子6の径よりも広く形成されてい
る。そのため、接続端子11.12間には少なくとも1
個以上の導通用微粒子6が配置される。
FIG. 1 shows a conductive connection structure using the above-mentioned conductive binder 8. In this figure, 9. IO are substrates facing each other vertically. The lower substrate 9 is, for example, a glass substrate,
A plurality of (only two are shown in this embodiment) first connection terminals 1, 1, . . . are arranged at the same pitch on the upper surface thereof. The upper substrate 1O is, for example, a film substrate, and on its lower surface, second connection terminals 12 are formed opposite to the first connection terminals 11 at the same distance. Further, the above-mentioned conductive binder 8 is interposed between the upper and lower substrates 9 and 10. That is, the upper and lower substrates 9.10
Conductive fine particles 6 are arranged in between and in contact with each other, and the gaps are filled with an insulating adhesive 7. In this case, the width of each connection terminal 11, 12 is formed wider than the diameter of the conductive fine particles 6 of the conductive binder 8. Therefore, at least one
More than one conductive fine particle 6 is arranged.

この状態で、上下の基板9.10を熱圧着すると、絶縁
性#着剤7により上下の基板9、lOが相互に接着され
るのと同時に、第1、第2の接続端子11.12間に位
置する導通用微粒子6の絶縁I5!5が接続端子11.
12で上下に加圧され、かつ加熱されるので、接続端子
11.12が接触する部分(厚さ方向の部分)の絶縁M
5が溶融して押し流され、内部の導電性微粒子3が露出
して接続端子11.12に接触して導通する。しかし、
接続端子11.12が接触しない部分(面方向の部分)
の絶縁膜5は厚さ方向の部分に較べ加圧力が小さいため
、そのまま残存する。なお、対向する接続端子11.1
1または12.12間に配置された導通用微粒子6は接
続端子11.12によって加圧されないので、絶縁膜5
はそのまま残存する。したがって、導電性微粒子3・・
・は接続端子11.12の配列方向に導通することはな
く、対向する接続端子11.12のみに接触して導通す
る。この結果、隣接する接続端子11゜12は導通用微
粒子6によって相互に短絡することがなく、対向する接
続端子11.12のみが確実に接続される。この場合、
仮に、接続端子11.12のピッチが導通用微粒子6の
大きさよりも小さくても、隣接する接続端子11.12
が導通することはなく、対向する接続端子11.12の
みを接続することが可能である。以下、このことについ
て説明する。
In this state, when the upper and lower substrates 9.10 are bonded by thermocompression, the upper and lower substrates 9 and 10 are bonded to each other by the insulating adhesive 7, and at the same time, the connection between the first and second connection terminals 11.12 is bonded. The insulation I5!5 of the conductive particles 6 located at the connection terminal 11.
12 is pressurized vertically and heated, so the insulation M of the part where the connecting terminals 11 and 12 come into contact (the part in the thickness direction)
5 is melted and washed away, and the internal conductive fine particles 3 are exposed and come into contact with the connection terminals 11 and 12 to establish conduction. but,
Portion where connection terminals 11 and 12 do not contact (portion in the surface direction)
Since the pressing force on the insulating film 5 is smaller than that in the thickness direction, the insulating film 5 remains as it is. In addition, the opposing connection terminal 11.1
1 or 12.12 is not pressurized by the connecting terminal 11.12, so the insulating film 5
remains as is. Therefore, conductive fine particles 3...
* does not conduct in the arrangement direction of the connecting terminals 11 and 12, but contacts only the opposing connecting terminals 11 and 12 and conducts. As a result, the adjacent connection terminals 11 and 12 are not short-circuited to each other by the conduction particles 6, and only the opposing connection terminals 11 and 12 are reliably connected. in this case,
Even if the pitch of the connecting terminals 11.12 is smaller than the size of the conductive particles 6, the adjacent connecting terminals 11.12
are not electrically connected, and it is possible to connect only the opposing connection terminals 11 and 12. This will be explained below.

第2図は接続端子13のピッチを導通用微粒子6よりも
小さくした場合の接続端子13と導電性微粒子3との導
通関係を示す、この図において、各導通用微粒子6の中
央部に示された点線の円14a−14dは熱圧着時に溶
融される絶縁膜5の部分であり、従って、この領域が接
続端子13に接触する。また、二点鎖線で示された接続
端子13は、第1図の接続端子11および12に対応す
る。ここでは、接続端子13の幅を導電性微粒子3の約
1/2程度の大きさとし、そのピッチを導電性微粒子3
とほぼ同じ長さとし、かつ接続端子13の長さを導通用
微粒子6のほぼ2倍程度とする。また、導通用微粒子6
・・・は隣接のものと相互に接触するよう隙間なく配列
されている。このことは接続端子13のピッチ方向だけ
でなく長さ方向においても同様である。したがって、例
えば左下側の導電性微粒子3と接続端子13とが接触領
域14a内に示されたハツチング部分内で接触すると、
その右隣りの導電性微粒子3の接触領域14bは右隣り
の接続端子13を飛び越してしまうため、この右隣りの
接続端子13と接触することがない、しかし、左下側の
導電性微粒子3とその右隣りの導電性微粒子3の前後に
位置する導電性微粒子3,3の接触領域14c、14d
は斜線で示すように一部が右隣りの接続端子13の前後
郡において接触する。これは、導電性微粒子3・・・が
相互に接触して配置されるため、前後の導電性微粒子3
.3が左下側の導電性微粒子3と右隣りの導電性微粒子
3との中間に位置しているからである。
FIG. 2 shows the conduction relationship between the connection terminals 13 and the conductive particles 3 when the pitch of the connection terminals 13 is smaller than that of the conduction particles 6. The dotted circles 14a to 14d are portions of the insulating film 5 that are melted during thermocompression bonding, and therefore these regions come into contact with the connection terminals 13. Furthermore, the connection terminal 13 indicated by the two-dot chain line corresponds to the connection terminals 11 and 12 in FIG. Here, the width of the connection terminal 13 is set to about 1/2 the size of the conductive fine particles 3, and the pitch is set to about 1/2 of the width of the conductive fine particles 3.
, and the length of the connecting terminal 13 is approximately twice that of the conductive fine particles 6. In addition, conduction fine particles 6
... are arranged without any gaps so that they are in contact with the adjacent ones. This is true not only in the pitch direction of the connection terminals 13 but also in the length direction. Therefore, for example, when the conductive fine particles 3 on the lower left side and the connecting terminal 13 come into contact within the hatched portion shown in the contact area 14a,
The contact area 14b of the conductive fine particles 3 on the right side jumps over the connecting terminal 13 on the right side, so it does not come into contact with the connecting terminal 13 on the right side. However, the conductive fine particles 3 on the lower left side and the contact area 14b Contact areas 14c, 14d of conductive fine particles 3, 3 located before and after the conductive fine particle 3 on the right side
As shown by diagonal lines, a part of the connecting terminal 13 on the right comes into contact with the adjacent connecting terminal 13 in the front and rear groups. This is because the conductive fine particles 3... are arranged in contact with each other, so the conductive fine particles 3 before and after
.. 3 is located between the conductive fine particles 3 on the lower left side and the conductive fine particles 3 on the right side.

このように、接続端子13の幅およびピッチを導通用微
粒子6より小さく形成しても、隣接する接続端子13を
導通させずに、対向する接続端子13のみを接続するこ
とが可能となる。実際には、接続端子13の長さは導通
用微粒子6よりも遥かに長いから、接続端子13の長さ
方向に導通用微粒子6・・・が多数配列されることとな
り、上述した接続がより一層確実なものとなる0例えば
、接続端子13の長さを1厘■としても、直径10pm
程度の導通用微粒子6ならば、長さ方向に100列程度
は配列されることになる。しかも、この100列に配列
された導通用微粒子6は、第2図に示す如く、接続端子
13のピッチ方向に少しずつ位置がずれている。従って
、理論的には、導通用微粒子6の直径よりも小さいピッ
チで配列された接続端子に対しても適用することができ
る。
In this way, even if the width and pitch of the connection terminals 13 are formed to be smaller than the conduction fine particles 6, it is possible to connect only the opposing connection terminals 13 without making the adjacent connection terminals 13 conductive. In reality, since the length of the connecting terminal 13 is much longer than the conductive particles 6, a large number of conductive particles 6 are arranged in the length direction of the connecting terminal 13, making the connection described above even more effective. For example, if the length of the connecting terminal 13 is 1 inch, the diameter is 10 pm.
If the conduction fine particles 6 are of the same size, they will be arranged in about 100 rows in the length direction. Furthermore, the conductive fine particles 6 arranged in 100 rows are slightly shifted in position in the pitch direction of the connection terminals 13, as shown in FIG. Therefore, theoretically, the present invention can also be applied to connection terminals arranged at a pitch smaller than the diameter of the conductive particles 6.

第4図および第5図は上述した導電接続構造の各変形例
を示す、この場合、両図に示された導電接続構造は上述
した導通用結合剤8の導電性微粒子3の構造が異なるだ
けで、他の部分は上述した導電接続構造と同じである。
FIGS. 4 and 5 show each modification of the above-mentioned conductive connection structure. In this case, the conductive connection structures shown in both figures differ only in the structure of the conductive fine particles 3 of the conduction binder 8 described above. The other parts are the same as the conductive connection structure described above.

したがって、ここでは、同一部分に同一符号を付し、そ
の説明を省略する。
Therefore, here, the same parts are given the same reference numerals and the explanation thereof will be omitted.

第4図に示された導通用接合剤8の導電性微粒子15は
、絶縁粒子16の表面に導電膜2を形成したものであり
、その外周面には上述と同様、絶縁性微粒子4を膜状も
しくはそれに近い状態に結合してなる絶縁膜5が形成さ
れている。この場合、絶縁粒子16は酸化シリコン(S
i0?)、酸化チタン(Ti02)等の無機材料よりな
る硬質の粒子であり、その表面には上述と同様に、無電
解メツキや蒸着等により導電M2が形成されている。こ
のような導電性微粒子15を用いた導通用接合剤8では
、接続端子11.12間に介在されて熱圧着される際に
、絶縁粒子16が無機材料よりなる硬質の粒子であるか
ら、加圧されても変形し難く、接続端子11.12に接
触する部分の絶縁膜5を確実に押し流して導電膜2を接
続端子11.12に接触させることができる。
The conductive fine particles 15 of the conductive bonding agent 8 shown in FIG. 4 are obtained by forming a conductive film 2 on the surface of an insulating particle 16, and a film of insulating fine particles 4 is formed on the outer peripheral surface thereof as described above. An insulating film 5 is formed which is bonded in a shape or in a state close to it. In this case, the insulating particles 16 are silicon oxide (S
i0? ), titanium oxide (Ti02), or other inorganic material, and conductive M2 is formed on its surface by electroless plating, vapor deposition, etc., as described above. In the conductive bonding agent 8 using such conductive fine particles 15, when the connecting terminals 11 and 12 are interposed and thermocompression bonded, the insulating particles 16 are hard particles made of an inorganic material. It is difficult to deform even when pressed, and the portion of the insulating film 5 that comes into contact with the connecting terminals 11.12 can be reliably swept away to bring the conductive film 2 into contact with the connecting terminals 11.12.

また、第5図に示された導通用接合剤8の導電性微粒子
!7は、金、銀、銅、ニッケル、スズ、アルミニウム等
の金属粒子、あるいはカーボン粒子等であり、それ自体
が導電性を有する材料よりなり、その外周面には前述と
同様、絶縁性微粒子4を膜状もしくはそれに近い状態に
結合してなる絶縁M5が形成されている。このような導
通用結合剤8においても、前述と同様、対向する接続端
子11.12のみを導電性微粒子17で確実に接続する
ことができる。
Moreover, the conductive fine particles of the conductive bonding agent 8 shown in FIG. 5! Reference numeral 7 is a metal particle such as gold, silver, copper, nickel, tin, or aluminum, or carbon particle, which itself is made of a conductive material, and the outer peripheral surface thereof is coated with insulating fine particles 4 as described above. The insulation M5 is formed by combining the two in a film form or a state close to it. With such a conductive binder 8 as well, it is possible to reliably connect only the opposing connection terminals 11 and 12 with the conductive fine particles 17, as described above.

次に、第6図および第7図を参照して、上述した導電接
続構造を液晶表示パネルとフィルム基板の接続、または
液晶表示パネルとICチップの接続に適用した具体例に
ついて説明する。
Next, with reference to FIGS. 6 and 7, a specific example in which the above-described conductive connection structure is applied to connection between a liquid crystal display panel and a film substrate, or a connection between a liquid crystal display panel and an IC chip will be described.

第6図は上述した導電接続構造を液晶表示パネルとフィ
ルム基板との接続に適用した場合を示す、液晶表示パネ
ル18は上下一対のガラス基板19.20の対向面にI
T O(Indium Tin 0w1de)等よりな
る透明電極21.22が形成され、その間の周囲に封止
剤23が設けられ、この封止剤23によりガラス基板1
9.20間に液晶24が封入され、下側のガラス基板2
0が上側のガラス基板19から外側に突出した箇所には
接続端子25が等間隔に多数配列された構造となってい
る。一方、フィルム基板26はTAB(丁ape Au
t。
FIG. 6 shows a case where the above-described conductive connection structure is applied to the connection between a liquid crystal display panel and a film substrate.
Transparent electrodes 21 and 22 made of T O (Indium Tin 0w1de) or the like are formed, and a sealant 23 is provided around them.
9. The liquid crystal 24 is sealed between 20 and the lower glass substrate 2.
0 protrudes outward from the upper glass substrate 19, a large number of connection terminals 25 are arranged at equal intervals. On the other hand, the film substrate 26 is made of TAB (Tape Au
t.

mated Bonding)方式によりキャリアテー
プ27の下面にフィンガリード28・・・を形成し、こ
のフィンガリード28・・・にICチップ29を接合し
たものである。すなわち、キャリアテープ27の中央に
は開口部30が形成され、この開口部30内にフィンガ
リード28・・・の内側端が突出して設けられている。
Finger leads 28 are formed on the lower surface of the carrier tape 27 by a mated bonding method, and an IC chip 29 is bonded to the finger leads 28. That is, an opening 30 is formed in the center of the carrier tape 27, and inside this opening 30, the inner ends of the finger leads 28 are provided to protrude.

この突出したフィンガリード28・・・の先端にはIC
チップ29のバンプ31・・・がポンディングされた上
、樹脂32で封止されている。
At the tip of this protruding finger lead 28... is an IC.
The bumps 31 of the chip 29 are bonded and sealed with a resin 32.

この場合、フィンガリード28はキャリアテープ27に
ラミネートされた銅等の金属箔をエツチングすることに
より形成され、その外端部が接続端子33に形成されて
いる。なお、この接続端子33は液晶表示パネル18の
接続端子25と同数配列されている。
In this case, the finger leads 28 are formed by etching a metal foil such as copper laminated on the carrier tape 27, and the outer ends thereof are formed as connection terminals 33. Note that the same number of connection terminals 33 as the connection terminals 25 of the liquid crystal display panel 18 are arranged.

そして、液晶表示パネル18とフィルム基板26とを接
続する場合には、液晶表示パネル18の接続端子25の
上方にフィルム基板26の接続端子33を対向させ、そ
の間に上述した導通用結合剤8を配置する。この状態で
、フィルム基板23上にヒータチップ(図示せず)を押
し当てて導通用結合剤8を熱圧着する。すると、各接続
端子25.33は導通用結合剤8の絶縁性接着剤7によ
り相互に接着されるとともに、導通用微粒子6の導電性
微粒子3により対向する接続端子25.33が電気的に
接続される。
When connecting the liquid crystal display panel 18 and the film substrate 26, the connection terminals 33 of the film substrate 26 are placed above the connection terminals 25 of the liquid crystal display panel 18, and the above-mentioned conductive binder 8 is applied between the connection terminals 33 of the film substrate 26. Deploy. In this state, a heater chip (not shown) is pressed onto the film substrate 23 to bond the conductive binder 8 by thermocompression. Then, the respective connection terminals 25.33 are bonded to each other by the insulating adhesive 7 of the conduction binder 8, and the opposing connection terminals 25.33 are electrically connected by the conductive fine particles 3 of the conduction fine particles 6. be done.

したがって、このような液晶表示パネル18とフィルム
基板26との接続構造では、対向する接続端子25.3
3間に導通用結合剤8を配置して熱圧着するだけで、簡
単に接続することができる。この場合、各接続端子25
.33の数が多く、ファインピッチ化しても、隣接する
接続端子25.33は導通することがなく、対向する接
続端子25.33のみを確実に接続することができる。
Therefore, in such a connection structure between the liquid crystal display panel 18 and the film substrate 26, the opposing connection terminals 25.3
The connection can be easily made by simply disposing the conductive bonding agent 8 between the parts 3 and bonding them by thermocompression. In this case, each connection terminal 25
.. Even if the number of terminals 33 is large and the pitch is fine, the adjacent connection terminals 25.33 will not be electrically connected, and only the opposing connection terminals 25.33 can be reliably connected.

第7図は液晶表示パネル18にICチップ29を接続す
る所謂チップ・オン・ガラス方式に適用した場合を示す
、この場合には、液晶表示パネル18の下側のガラス基
板20が上側のガラス基板19よりも大きく突出してお
り、この突出した下側のガラス基板20上に接続端子3
4が所定の配列状態でパターン形成されている。この接
続端子34にICチー、プ29を接続する場合には、接
続端子34上に導通用結合剤8を配置し、この導通用結
合剤8を介してICチップ29のバンプ31を接続端子
34に対向配置する。この状態で。
FIG. 7 shows a case where an IC chip 29 is connected to a liquid crystal display panel 18, which is applied to the so-called chip-on-glass method. In this case, the lower glass substrate 20 of the liquid crystal display panel 18 is connected to the upper glass substrate. 19, and the connecting terminal 3 is placed on the protruding lower glass substrate 20.
4 are patterned in a predetermined arrangement. When connecting the IC chip 29 to the connecting terminal 34, a conductive binder 8 is placed on the connecting terminal 34, and the bump 31 of the IC chip 29 is connected to the connecting terminal 34 through the conductive binder 8. Place it opposite. In this condition.

ICチー2プ29上にヒータチップ(図示せず)を押し
当てて導通用結合剤8を熱圧着すれば、ICチップ29
とガラス基板20は導通用結合剤8の絶縁性接着剤7に
より相互に接着されるとともに、隣接する接続端子34
および隣接するバンプ31が相互に短絡することがなく
、対向する接続端子34とバンプ31のみを導通用微粒
子6の導電性微粒子3により電気的に確実に接続するこ
とができる。
If a heater chip (not shown) is pressed onto the IC chip 29 and the conductive bonding agent 8 is bonded by thermocompression, the IC chip 29
and the glass substrate 20 are bonded to each other by the insulating adhesive 7 of the conductive bonding agent 8, and the adjacent connection terminals 34
Also, adjacent bumps 31 are not short-circuited with each other, and only the opposing connection terminals 34 and bumps 31 can be reliably electrically connected by the conductive particles 3 of the conduction particles 6.

[発明の効果] 以上詳細に説明したように、この発明によれば、接続端
子のピッチが従来よりも遥かに小さい場合にも適用でき
、しかも導通用微粒子が絶縁性接着剤によって絶縁され
ている訳ではなく、導通用微粒子自体が絶縁膜を有して
いるものであるから接続端子の短絡を確実に防止でき、
また低温接合が可能であるから接続端子や絶層基板の材
料として安価なものにも適用することができ、かつ、接
続端子のピッチが小さいにも拘わらず接続の信頼性に優
れたものである。
[Effects of the Invention] As explained in detail above, the present invention can be applied even when the pitch of the connecting terminals is much smaller than that of the conventional method, and the conductive particles are insulated by an insulating adhesive. However, since the conductive particles themselves have an insulating film, short circuits of the connecting terminals can be reliably prevented.
In addition, since low-temperature bonding is possible, it can be used as an inexpensive material for connecting terminals and insulating substrates, and it has excellent connection reliability despite the small pitch of the connecting terminals. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の導電接続方法を適用した接続構造の
一例を示す要部拡大断面図、第2図は接続端子のピッチ
を導通用微粒子よりも小さくした場合の接続端子と導電
性微粒子との導通を説明するための平面図、第3図(A
)〜(C)は導通用結合剤の製造工程を示す各断面図、
第4図および第5図は導電接続構造の各変形例を示す各
断面図、第6図はこの発明の導電接続方法を液晶表示パ
ネルとフィルム基板との接続に適用した場合の断面図、
第7図は液晶表示パネルとICチップとの接続に適用し
た場合の断面図である。 3.15.17・・・・・・導電性微粒子、4・・・・
・・絶縁性微粒子、5・・・・・・絶縁膜、6・・・・
・・導通用微粒子、7・・・・・・絶縁性接着剤、8・
・・・・・導通用結合剤。 11.12.13.25.33.34・・・・・・接続
端子、29・・・・・・バンプ。 3−は敗粒各 第 図 第 図 4燵蜀i材敏粒) 5靭障 第 図
Fig. 1 is an enlarged sectional view of a main part showing an example of a connection structure to which the conductive connection method of the present invention is applied, and Fig. 2 shows connection terminals and conductive particles when the pitch of the connection terminals is smaller than that of the conductive particles. 3 (A) is a plan view for explaining the conduction of
) to (C) are cross-sectional views showing the manufacturing process of the conductive binder,
4 and 5 are cross-sectional views showing various modifications of the conductive connection structure, and FIG. 6 is a cross-sectional view when the conductive connection method of the present invention is applied to connection between a liquid crystal display panel and a film substrate.
FIG. 7 is a sectional view when applied to connection between a liquid crystal display panel and an IC chip. 3.15.17... Conductive fine particles, 4...
...Insulating fine particles, 5...Insulating film, 6...
... fine particles for conduction, 7... insulating adhesive, 8.
...Binding agent for conductivity. 11.12.13.25.33.34... Connection terminal, 29... Bump. 3- is the broken grain chart (Fig. 4) 5. Toughness chart

Claims (1)

【特許請求の範囲】[Claims]  導電性微粒子と、該導電性微粒子の外周面を外部から
電気的に隔絶する絶縁膜とからなり、前記絶縁膜が前記
導電性微粒子よりも微細で低融点を有する多数の絶縁性
微粒子を相互に接合することにより形成された導通用微
粒子を形成し、この導通用微粒子を絶縁性接着剤中に混
合して導通用結合剤を構成し、この導通用結合剤を互い
に対向する第1、第2の接続端子間に介在して熱圧着す
ることにより、前記導通用微粒子の絶縁膜の厚み方向の
部分が破壊され、かつ面方向の部分が残存することによ
り、前記第1、第2の接続端子を前記導電性微粒子で接
続することを特徴とする導電接続方法。
It consists of conductive fine particles and an insulating film that electrically isolates the outer peripheral surface of the conductive fine particles from the outside, and the insulating film interconnects a large number of insulating fine particles that are finer than the conductive fine particles and have a lower melting point. The conductive fine particles are formed by bonding, the conductive fine particles are mixed into an insulating adhesive to constitute a conductive binder, and the conductive binder is attached to first and second By thermocompression bonding between the connecting terminals, a portion of the conductive fine particles in the thickness direction of the insulating film is destroyed, and a portion in the planar direction remains, thereby forming the first and second connecting terminals. A conductive connection method characterized in that the conductive particles are connected by the conductive fine particles.
JP2044319A 1989-08-10 1990-02-27 Conductive connection method Pending JPH03250570A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2044319A JPH03250570A (en) 1990-02-27 1990-02-27 Conductive connection method
EP90113759A EP0413161B1 (en) 1989-08-15 1990-07-18 Conductive connecting structure
DE69017553T DE69017553T2 (en) 1989-08-15 1990-07-18 Conductive connection structure.
KR1019900012470A KR940001260B1 (en) 1989-08-15 1990-08-13 Conductive connecting structure
US07/602,715 US5123986A (en) 1989-08-10 1990-10-24 Conductive connecting method
US07/713,822 US5180888A (en) 1989-08-10 1991-06-12 Conductive bonding agent and a conductive connecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2044319A JPH03250570A (en) 1990-02-27 1990-02-27 Conductive connection method

Publications (1)

Publication Number Publication Date
JPH03250570A true JPH03250570A (en) 1991-11-08

Family

ID=12688167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2044319A Pending JPH03250570A (en) 1989-08-10 1990-02-27 Conductive connection method

Country Status (1)

Country Link
JP (1) JPH03250570A (en)

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