JPH0325262U - - Google Patents
Info
- Publication number
- JPH0325262U JPH0325262U JP4555490U JP4555490U JPH0325262U JP H0325262 U JPH0325262 U JP H0325262U JP 4555490 U JP4555490 U JP 4555490U JP 4555490 U JP4555490 U JP 4555490U JP H0325262 U JPH0325262 U JP H0325262U
- Authority
- JP
- Japan
- Prior art keywords
- electrode pair
- laser
- ionization
- main
- main electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図は本考案実施例の構成図で、レーザ光放
出方向に直交する方向に切断した示すレーザチヤ
ンバ１の内部構造と、励起回路図を併記した図、
第２図はその主電極対ＥｄのカソードＥｄｃと予
備電離用電極対Ｅｐの関係を示す要部斜視図、第
３図はその等価回路図である。第４図は本考案の
他の実施例の要部構成図である。第５図は放電励
起エキシマレーザの一般的な励起回路を示す等価
回路図、第６図は自動予備電離型レーザの一般的
な励起回路を示す等価回路図、第７図は従来のコ
ンデンサ内蔵型レーザの構成図である。
１……レーザチヤンバ、１１……本体、１２…
…フランジ部、１３……絶縁体、１４，１４……
支柱、１５……支持板、２……フアン、３，３…
…熱交換器、４……ガイド板、Ｃ２……ピーキン
グコンデンサ、Ｅｄ主電極対、Ｅｄｃ……カソー
ド、Ｅｄａ……アノード、Ｅｐ……予備電離用電
極対、Ｅｐｌ……板状電極、Ｅｐｉ……ヒン電極
。
FIG. 1 is a configuration diagram of an embodiment of the present invention, which shows the internal structure of a laser chamber 1 cut in a direction perpendicular to the laser beam emission direction and an excitation circuit diagram.
FIG. 2 is a perspective view of a main part showing the relationship between the cathode E dc of the main electrode pair E d and the pre-ionization electrode pair E p , and FIG. 3 is an equivalent circuit diagram thereof. FIG. 4 is a block diagram of main parts of another embodiment of the present invention. Fig. 5 is an equivalent circuit diagram showing a general excitation circuit of a discharge-pumped excimer laser, Fig. 6 is an equivalent circuit diagram showing a general excitation circuit of an automatic pre-ionization laser, and Fig. 7 is a conventional capacitor built-in type laser. FIG. 2 is a configuration diagram of a laser. 1... Laser chamber, 11... Main body, 12...
...Flange part, 13... Insulator, 14, 14...
Pillar, 15...Support plate, 2...Fan, 3,3...
...Heat exchanger, 4...Guide plate, C2 ...Peaking capacitor, E d main electrode pair, E dc ...Cathode, E da ...Anode, Ep ...Preliminary ionization electrode pair, E pl ... Plate electrode, E pi ...Hin electrode.
Claims (1)
ーザ放電用の主電極対と、この主電極対の放電に
先立つて放電する予備電離用電極対と、この予備
電離用電極対に直列接続されるピーキングコンデ
ンサと、上記主電極対間にガス流を与えるための
フアンを内蔵したレーザー装置において、上記予
備電離用電極対を、その一方の電極を板状電極で
、他方を複数のピン状電極で構成したことを特徴
とする、エキシマレーザ装置。 A laser chamber filled with a medium gas includes a main electrode pair for laser discharge, a pre-ionization electrode pair that discharges prior to discharging the main electrode pair, and a peaking capacitor connected in series to this pre-ionization electrode pair. and a laser device having a built-in fan for applying a gas flow between the main electrode pair, wherein the pre-ionization electrode pair is configured such that one electrode is a plate electrode and the other is a plurality of pin electrodes. An excimer laser device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555490U JPH0325262U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555490U JPH0325262U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325262U true JPH0325262U (en) | 1991-03-15 |
Family
ID=31559838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4555490U Pending JPH0325262U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325262U (en) |
-
1990
- 1990-04-27 JP JP4555490U patent/JPH0325262U/ja active Pending
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