JPH0325452Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention relates to a surface plate for mounting equipment, and in particular provides a honeycomb panel surface plate with necessary and sufficient damping properties to transmit external vibrations to the mounted equipment. It is designed to reduce the

[Conventional technology]

Generally, precision measuring instruments, such as electron microscopes and hardness meters, which require prevention of external vibration transmission, are generally mounted on a surface plate. The performance that this surface plate should have is that it is highly rigid and does not cause resonance with the mounted equipment, that the surface plate itself has high damping properties and does not amplify vibrations, and that the surface plate is light in weight. It is required to be easy to transport and handle during installation.

Conventionally, this type of surface plate has been made of steel plates, cast iron, and stone, but in addition to these, surface plates made of honeycomb panels are also widely used.

As shown in FIG. 6, the honeycomb panel surface plate has face plates 13 and 14 glued to the upper and lower edges of the honeycomb core 11, respectively, and side plates 13 and 14 to the side surfaces.
5 are glued together to form a sandwich structure. The honeycomb core 11 is a hollow regular hexahedron made of aluminum foil or plastic, and the walls are glued together to form a honeycomb shape.
3, 14 and the side plate 15 are made of aluminum;
Flat plates such as stainless steel and iron plates are used.

Furthermore, as shown in FIG. 7, the damping properties of the honeycomb panel surface plate described above are improved by interposing vibration damping materials 16 and 17 such as rubber-like elastic bodies on the surfaces of the upper and lower face plates 13 and 14. steel plates 18, 19
Surface plates with a structure glued together are also used.

[Problem that the invention attempts to solve]

Each type of conventional surface plate has its advantages and disadvantages.
For example, those made of steel plates, cast iron, and stone have high rigidity, but have the disadvantages that vibrations are amplified because of their low damping properties, and they are also heavy and inconvenient to handle.

In addition, the honeycomb panel shown in Figure 6 is lightweight and has high rigidity, so resonance with the mounted equipment can be avoided and it is easy to handle, but it has the advantage of being easy to handle. The disadvantage is that vibrations are amplified.

Furthermore, the one made of honeycomb panel shown in Fig. 7 is
Although it has damping properties, restraining steel plates are bonded to both sides of the damping material on the top and bottom surfaces of the honeycomb panel, which increases extra weight and impairs the honeycomb panel's lightweight and high rigidity functions. acts,
In addition, since the load of the mounted equipment is constantly applied to the damping material, if used for a long period of time, the damping material deforms and the flatness of the equipment mounting surface changes over time, increasing errors in the mounting accuracy of the mounted equipment. There are drawbacks.

This invention eliminates all of the drawbacks of conventional surface plates, and provides a honeycomb panel surface plate that maintains a predetermined damping property over a long period of time and does not cause changes in the flatness of the equipment mounting surface over time. The purpose is to

[Means for solving problems]

At least the equipment mounting side of the hollow core of the honeycomb panel is filled with a damping material made of a resin composition, and this damping material is applied to the face plate and the honeycomb core from the inner surface of the face plate on the equipment mounting side to a required thickness. Adhere to the inner surface of the

[Effect]

A resin composition having an appropriate damping property depending on the temperature of the place where the surface plate is installed and the natural frequency of the honeycomb panel is filled into the core hollow part to a predetermined thickness and bonded.

The damping material made of this resin composition exhibits its damping function when it is filled in the hollow core, which is not subjected to the load of the mounted equipment, so the original damping properties are maintained even if the surface plate is used for a long period of time. Moreover, the flatness of the equipment mounting surface does not change over time.

〔Example〕

FIG. 1 is a longitudinal sectional view showing an embodiment of this invention.

Since the structure of the honeycomb panel itself and the materials of each component shown in the same figure are the same as those shown in FIG. 6 described above, the same parts are given the same reference numerals and detailed explanations will be omitted.

The honeycomb panel in the same figure has an upper face plate 1.
3 shall be used as the equipment mounting surface.

The core hollow part 12 of the honeycomb core 11 is filled with a vibration damping material 20 made of a resin composition at an appropriate thickness from the inner surface of the top plate 13 on the device mounting side. and is bonded to the honeycomb core 11 and the inner surface.

FIG. 2 is a longitudinal sectional view showing another embodiment of this invention. In this embodiment, the damping material 20 made of a resin composition is completely filled into the core hollow part 12 and is adhered to the entire inner surface of the upper surface plate 13 and the lower surface plate 14 and the inner surface of the honeycomb core 11. ing.

In each of the above embodiments, the resin composition used as the vibration damping material 20 has an appropriate damping function depending on the temperature conditions of the installation location of the surface plate, the shape and size of the honeycomb panel, and the primary natural frequency region. You need to choose the one you have.

When using a honeycomb panel with the above configuration as a surface plate for mounting precision measuring equipment, it is usually installed in a constant temperature room or laboratory, so the temperature of the installation location is room temperature, and the honeycomb panel's primary natural vibration The number is usually 100-500Hz considering its shape and size.
This is the area of The resin composition under the above usage conditions is preferably one that imparts damping properties such that the finished surface plate has a loss coefficient of 0.05 or more, such as an epoxy or polyester thermosetting resin. Alternatively, thermoplastic resins such as polyvinyl chloride are suitable, but latex mortar can also be used.

These resin compositions are poured into the core hollow part in liquid form and cured in a conventional manner when the surface plate is manufactured.

In addition to using the above resin composition separately,
It is also possible to select a material with a large vibration damping effect as the adhesive for bonding the honeycomb core and the upper and lower face plates, and to use the same material.

Figure 3 shows the state of use of the surface plate of this invention, and Figure a shows the surface plate 10 directly placed on the floor surface 30.
Figure b shows a case where a precision measuring instrument 50 is mounted on the surface plate 10, and FIG. The board 10 and the vibration isolation member 35 together constitute a vibration isolation table 40.

Next, a comparison test was conducted on the damping properties of the conventional honeycomb panel surface plate and the surface plate of this invention, and the results of recording vibration acceleration waveforms during impact are shown in FIGS. 4 and 5, respectively.

The temperature of the test site is 20 degrees Celsius.

The surface plates used as test items were all 15 in height.
A top plate and a bottom plate (SUS430) each having a thickness of 3 mm are glued to the upper and lower edges of a honeycomb core (aluminum) of 500 mm in planar size.
This is a honeycomb panel molded to a diameter of 500 mm, and the test product of this invention used one whose core hollow part was completely filled with epoxy resin-based damping material.

The natural frequency (f ₀ ) of the test item is higher than that of the conventional surface plate.
The frequency is 504Hz, but it is 460Hz with the surface plate of this invention.

In addition, the loss coefficient (η) of the test product was 0.015 for the conventional surface plate, but 0.15 for the surface plate of this invention.
It has 10 times more damping than conventional surface plates.

Comparing and contrasting the vibration acceleration waveforms shown in FIGS. 4 and 5, it can be seen that the damping effect of the surface plate of this invention is far superior to that of the conventional surface plate.

[Effect of idea]

As explained above, the surface plate of this invention has the characteristics of being lightweight and having high rigidity because it has a structure in which vibration damping material made of a resin composition is filled and bonded to at least the equipment mounting side of the core hollow part of the honeycomb panel. Damping properties are provided by the vibration damping material to the honeycomb panel surface plate having the following characteristics.

Therefore, according to this invention, not only is it possible to obtain a surface plate that has all the characteristics that a surface plate for mounting precision measuring instruments should have, but also because the damping material is filled in the hollow core. The damping device of the vibration damping material does not deteriorate due to the load of the mounted equipment, and it is also possible to solve the problem of mounting accuracy due to aging of the flatness of the equipment mounting surface.

In addition, according to this invention, by appropriately selecting the type and filling thickness of the resin composition filled as a vibration damping material, honeycomb panels of the same shape and size can be used without changing the height of the honeycomb panel itself. Therefore, various types of surface plates with different damping properties can be easily manufactured.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing an embodiment of this invention;
FIG. 2 is a longitudinal sectional view showing another embodiment of this invention, FIGS. 3 a and b are front views showing the surface plate in use, and FIG. 4 is a vibration acceleration waveform of a conventional surface plate. 5 is a vibration acceleration waveform diagram of the surface plate of this invention, FIG. 6 is a partially cutaway perspective view showing a conventional surface plate made of honeycomb panels, and FIG. 7 is a diagram of another conventional surface plate made of honeycomb panels. FIG. 3 is a vertical cross-sectional view showing the structure. In the figure, 11 is a honeycomb core, 12 is a hollow part of the core, 13 and 14 are face plates, and 20 is a damping material.

Claims (1)

[Scope of utility model registration request] In a honeycomb panel surface plate comprising a honeycomb core and a face plate bonded to both upper and lower edges of the honeycomb panel, one of the face plates serving as an equipment mounting surface, at least on the equipment mounting side of the core hollow part of the honeycomb panel, A set for mounting equipment, characterized in that a vibration damping material made of a resin composition is filled, and this damping material is bonded from the inner surface of the face plate on the equipment mounting side to the inner surface of the face plate and the honeycomb core to a required thickness. Board.