JPH03255404A - Production of color solid-state image pickup device - Google Patents
Production of color solid-state image pickup deviceInfo
- Publication number
- JPH03255404A JPH03255404A JP2053435A JP5343590A JPH03255404A JP H03255404 A JPH03255404 A JP H03255404A JP 2053435 A JP2053435 A JP 2053435A JP 5343590 A JP5343590 A JP 5343590A JP H03255404 A JPH03255404 A JP H03255404A
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- light
- forming
- layer
- color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000003384 imaging method Methods 0.000 claims description 23
- 230000031700 light absorption Effects 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 12
- 108090000623 proteins and genes Proteins 0.000 claims description 9
- 102000004169 proteins and genes Human genes 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 10
- 239000010409 thin film Substances 0.000 abstract description 2
- 238000004040 coloring Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 1
- 239000000975 dye Substances 0.000 description 13
- 108010010803 Gelatin Proteins 0.000 description 8
- 229920000159 gelatin Polymers 0.000 description 8
- 239000008273 gelatin Substances 0.000 description 8
- 235000019322 gelatine Nutrition 0.000 description 8
- 235000011852 gelatine desserts Nutrition 0.000 description 8
- 235000018102 proteins Nutrition 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 6
- 239000005018 casein Substances 0.000 description 5
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 5
- 235000021240 caseins Nutrition 0.000 description 5
- 238000004043 dyeing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 235000021384 green leafy vegetables Nutrition 0.000 description 2
- 239000003086 colorant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000001046 green dye Substances 0.000 description 1
- AJDUTMFFZHIJEM-UHFFFAOYSA-N n-(9,10-dioxoanthracen-1-yl)-4-[4-[[4-[4-[(9,10-dioxoanthracen-1-yl)carbamoyl]phenyl]phenyl]diazenyl]phenyl]benzamide Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2NC(=O)C(C=C1)=CC=C1C(C=C1)=CC=C1N=NC(C=C1)=CC=C1C(C=C1)=CC=C1C(=O)NC1=CC=CC2=C1C(=O)C1=CC=CC=C1C2=O AJDUTMFFZHIJEM-UHFFFAOYSA-N 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 239000001043 yellow dye Substances 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はカラーフィルタを形成するための材料とカラー
フィルタを有するカラー固体撮像装置の製造方法に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a material for forming a color filter and a method of manufacturing a color solid-state imaging device having the color filter.
従来の技術
近年、固体撮像装置をカラー化する方法として、固体撮
像装置の形成された基板上に直接カラーフィルタを形成
する方法が主流になってきている。従来のカラー固体撮
像装置の製造方法を図面を参照しながら説明する。第２
図（ａ）〜（ｇ）は従来のカラー固体撮像装置の製造方
法を工程順に示した断面図である。第２図（ａ）〜（ｇ
）において、１は固体撮像装置の形成された基板、２は
受光部、３は感光性透明樹脂、４はマゼンタ層、５はイ
エロー層、６はシアン層を示している。2. Description of the Related Art In recent years, as a method for colorizing a solid-state imaging device, a method of directly forming a color filter on a substrate on which a solid-state imaging device is formed has become mainstream. A method of manufacturing a conventional color solid-state imaging device will be described with reference to the drawings. Second
Figures (a) to (g) are cross-sectional views showing a conventional method for manufacturing a color solid-state imaging device in order of steps. Figure 2 (a)-(g
), 1 is a substrate on which a solid-state imaging device is formed, 2 is a light receiving section, 3 is a photosensitive transparent resin, 4 is a magenta layer, 5 is a yellow layer, and 6 is a cyan layer.
このように構成されたカラー固体撮像装置の製造方法に
ついて、その動作を説明する。The operation of the method for manufacturing the color solid-state imaging device configured as described above will be described.
まず、第２図（ａ）において、固体撮像装置の形成され
た基板１上に感光性透明樹脂３を塗布し、表面を平坦化
する。続いて、カラーフィルタ層として感光性を持たせ
、かつ粘度調整されたゼラチン、カゼイン、グリユーな
どのタンパク質材料を塗布し、露光・現像・リンス処理
により所望のパターンを形成し、さらにマゼンタ染料で
染色することにより、第２図（ｂ）に示すようにマゼン
タ層４が形成される。そして次の工程での混色を防止す
る目的から前記平坦化で使用した感光性透明樹脂３を中
間層として塗布した状態が第２図（ｅ）である。以下、
染料を変えて前記第２図（ｂ）、第２図（Ｃ）と同様な
工程を行なうことにより、第２図（ｆ）に示すようにマ
ゼンタ層４、イエロー層５、シアン層６の各色層が形成
され、最後に表面保護として、平坦化および中間層に用
いているものと同じ感光性透明樹脂３を塗布して、カラ
ー固体撮像装置を実現している。First, in FIG. 2(a), a photosensitive transparent resin 3 is applied onto a substrate 1 on which a solid-state imaging device is formed, and the surface is flattened. Next, a photosensitive and viscosity-adjusted protein material such as gelatin, casein, or greens is applied as a color filter layer, and the desired pattern is formed by exposure, development, and rinsing, and then dyed with magenta dye. By doing so, a magenta layer 4 is formed as shown in FIG. 2(b). FIG. 2(e) shows a state in which the photosensitive transparent resin 3 used in the planarization is applied as an intermediate layer for the purpose of preventing color mixing in the next step. below,
By performing the same steps as in FIG. 2(b) and FIG. 2(C) with different dyes, each color of magenta layer 4, yellow layer 5, and cyan layer 6 is obtained as shown in FIG. 2(f). A layer is formed, and finally, a photosensitive transparent resin 3, which is the same as that used for planarization and the intermediate layer, is applied as surface protection to realize a color solid-state imaging device.
発明が解決しようとする課題
しかしながら、上記従来の方法では例えばマゼンタ、イ
エロー、シアン、グリーンのフィルタを形成する場合、
通常マゼンタ、イエロー、シアンの染色ベース層の形成
が必要となり、それに伴い、混色防止のために少なくと
も２つの中間層が必要である。この構成である従来の構
成ではカラーフィルタのトータル厚みが厚くなるだけで
なく、各色の染色ベース層が高さ方向で段違い構造とな
るため、パターンサイズ、中間層の厚みいかんによって
は光が漏れて受光部に入射する場合があり、フリッカ等
画質に悪影響をおよぼす。フィルタのトータル厚みが厚
くなると、受光部とそれに対応するフィルタまでの距離
が大きくなり、フィルタを通過した光が隣接した受光部
に入射し、混色するという問題もある。また、従来の方
法では染色ベース層を形成する際の染色ベース材料であ
る感光性を持たせたゼラチン、カゼイン。Problems to be Solved by the Invention However, in the above conventional method, for example, when forming magenta, yellow, cyan, and green filters,
Usually, it is necessary to form dyed base layers of magenta, yellow, and cyan, and accordingly, at least two intermediate layers are necessary to prevent color mixing. With conventional configurations like this, not only does the total thickness of the color filter become thicker, but also the dyed base layer of each color has a structure with different levels in the height direction, which can cause light to leak depending on the pattern size and the thickness of the intermediate layer. The light may enter the light receiving section, causing flicker and other negative effects on image quality. As the total thickness of the filter increases, the distance between the light receiving section and the corresponding filter increases, and there is also the problem that light that has passed through the filter enters an adjacent light receiving section and mixes colors. In addition, in the conventional method, photosensitive gelatin and casein are used as dyeing base materials when forming a dyed base layer.
グリユーなどの露光において、下地基板からの乱反射光
により、不要な箇所まで感光され、実際の染色ベースパ
ターンのサイズは目的とする染色ベースパターンのサイ
ズよりも太き（なり、結果的には各色のフィルタ同志で
重なり合いが生じ、混色するという問題がある。During exposure of greens, etc., unnecessary areas are exposed due to diffusely reflected light from the base substrate, and the actual size of the dyed base pattern is thicker than the intended size of the dyed base pattern (and as a result, the size of each color is There is a problem in that the filters overlap and cause color mixing.
また、工程上の問題としては、カラーフィルタ形成は染
色ベース層形成、染色、中間層形成など処理工程が多（
、多大な時間と労力を要するという問題がある。In addition, as a process problem, color filter formation requires many processing steps such as dyeing base layer formation, dyeing, and intermediate layer formation (
However, there is a problem in that it requires a great deal of time and effort.
本発明は上記従来の課題を解決するものであり、従来に
比較し、薄膜で隣接受光部間で光の混入もなく、フィル
タ形状の優れたカラーフィルタを短工程で実現し、その
カラーフィルタを具備したカラー固体撮像装置の製造方
法を提供することを目的とする。The present invention solves the above-mentioned conventional problems, and realizes a color filter with a thin film, no light contamination between adjacent light-receiving parts, and an excellent filter shape in a short process compared to the conventional method. An object of the present invention is to provide a method for manufacturing a color solid-state imaging device.
課題を解決するための手段
上記従来の課題を解決するために本発明におけるカラー
固体撮像装置の製造方法はカラーフィルタ形成以前に光
吸収層なるものを各受光部同志を区切る形で予め形成し
、各受光部が前記光吸収層により個別に区切られた状態
にしてから、色素を添加した感光性タンパク質材料であ
るカラーフィルタ形成用材料を用いてカラーフィルタを
目的とする受光部上に形成し、カラーフィルタ形成用材
料に添加する色素を変えて前記カラーフィルタ形成の工
程を複数回繰り返すことにより、１層中に複数の色群を
有するカラーフィルタを形成するという構成を有してい
る。Means for Solving the Problems In order to solve the above-mentioned conventional problems, the method for manufacturing a color solid-state imaging device according to the present invention includes forming a light absorption layer in advance to separate each light receiving part from each other before forming a color filter, After each light-receiving part is individually separated by the light-absorbing layer, forming a color filter on the intended light-receiving part using a color filter forming material which is a photosensitive protein material added with a dye, It has a structure in which a color filter having a plurality of color groups in one layer is formed by repeating the color filter forming process a plurality of times by changing the dye added to the color filter forming material.
作用
この構成によって、カラーフィルタを形成する前に、予
め、光吸収層なるものを各受光部間を区切る形で形成し
ているため、カラーフィルタを形成する際のカラーフィ
ルタ形成用材料である色素を含有し、感光性を持たせた
ゼラチン、カゼイン、グリユーなどのタンパク質を露光
する場合、下地基板からの乱反射光が発生してもその乱
反射は光吸収層なるものに吸収され、従来のように不要
な箇所まで感光することなく、目的とするカラーフィル
タを目的とする受光部上に形成することができ、前記カ
ラーフィルタ形成工程を含有色素の異なるカラーフィル
タ形成用材料を用いて繰り返すことにより１層中に複数
の色群を有したカラーフィルタを形成することができる
。複数の色群を１層中に備えているカラーフィルタであ
るため、カラーフィルタのトータル厚みは薄くなり、そ
の結果フリッカ等画像の悪影響を解消することができる
。しかもカラーフィルタ形成は感光性を持たせたゼラチ
ン、カゼイン、グリユーなどのタンパク質に目的とする
色素を予め添加したカラーフィルタ形成用材料を用いて
いるため、従来のような、染色ベース層形成、染色の工
程を一括することができるため、短工程でのカラーフィ
ルタ形成が可能となる。また、各受光部間に光吸収層が
存在するため、隣接受光部間での光の混入を解消するこ
とができる。Function: With this configuration, before forming the color filter, a light absorption layer is formed in advance to separate each light receiving area, so that the dye, which is the color filter forming material, is used when forming the color filter. When exposing proteins containing photosensitivity such as gelatin, casein, or green, even if diffusely reflected light is generated from the underlying substrate, the diffusely reflected light is absorbed by the light absorption layer, and unlike conventional methods, The desired color filter can be formed on the desired light-receiving area without exposing unnecessary parts to light, and by repeating the color filter forming process using color filter forming materials containing different dyes, 1. A color filter having multiple color groups in a layer can be formed. Since the color filter includes a plurality of color groups in one layer, the total thickness of the color filter is reduced, and as a result, adverse effects on images such as flicker can be eliminated. Moreover, color filter formation uses color filter forming materials in which the desired dye is added to photosensitized proteins such as gelatin, casein, and gris, so there is no need to form a dyed base layer or dye the dye as before. Since the steps can be performed all at once, it is possible to form a color filter in a short process. Furthermore, since the light absorption layer exists between each light receiving section, it is possible to eliminate the mixing of light between adjacent light receiving sections.
実施例
以下、本発明の実施例について、図面を参照しながら説
明する。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings.
第１図（ａ）〜（１）は本発明におけるカラー固体撮像
装置の製造方法を工程順に示したものである。第１図（
ａ）〜（１）において、１は固体撮像装置の形成された
基板、２は受光部、３は感光性透明樹脂、４はマゼンタ
層、５はイエロー層、６はシアン層、７は光吸収層形成
用材料、８は光吸収層、９はカラーフィルタ形成用材料
（Ａ）、１０はカラーフィルタ形成用材料（Ｂ）、１１
はカラーフィルタ形成用材料（Ｃ）、１２はカラーフィ
ルタ形成用材料（Ｄ）、１３はグリーン層である。FIGS. 1(a) to 1(1) show the method of manufacturing a color solid-state imaging device according to the present invention in order of steps. Figure 1 (
In a) to (1), 1 is a substrate on which a solid-state imaging device is formed, 2 is a light receiving section, 3 is a photosensitive transparent resin, 4 is a magenta layer, 5 is a yellow layer, 6 is a cyan layer, and 7 is a light absorption layer Layer forming material, 8 is a light absorption layer, 9 is a color filter forming material (A), 10 is a color filter forming material (B), 11
12 is a color filter forming material (C), 12 is a color filter forming material (D), and 13 is a green layer.
このように構成されたカラー固体撮像装置の製造方法に
ついて、その動作を説明する。The operation of the method for manufacturing the color solid-state imaging device configured as described above will be described.
まず、第１図（ａ）において、固体撮像装置の形成され
た基板１上に感光性透明樹脂３を塗布し、表面を平坦化
する。続いて第１図（ｂ）において、光吸収層形成用材
料７を塗布する。そして露光、現像・リンス処理を施し
、各受光部２間に光吸収層８が形成された状態が第１図
（Ｃ）である。続いて、第１図（ｄ）において感光性を
持たせたゼラチンなどのタンパク質にマゼンタ色素を添
加したカラーフィルタ形成用材料（Ａ）９を塗布する。First, in FIG. 1(a), a photosensitive transparent resin 3 is applied onto a substrate 1 on which a solid-state imaging device is formed, and the surface is flattened. Subsequently, in FIG. 1(b), a light absorption layer forming material 7 is applied. Then, exposure, development and rinsing treatments are performed, and a light absorbing layer 8 is formed between each light receiving section 2, as shown in FIG. 1(C). Subsequently, as shown in FIG. 1(d), a color filter forming material (A) 9, which is made by adding a magenta dye to a photosensitive protein such as gelatin, is applied.
そして露光。And exposure.
現像・リンス処理を施し、目的とする受光部２上にマゼ
ンタ層４が形成された状態が第１図（ｅ）である。以下
、感光性を持たせたゼラチンなどのタンパク質にイエロ
ー色素を添加したカラーフィルタ形成用材料（Ｂ） １
０、シアン色素を添加したカラーフィルタ形成用材料（
Ｃ） １１、グリーン色素を添加したカラーフィルタ形
成用材料（Ｄ） １２を用いて第１図（ｄ） 、 （ｅ
）の工程を露光マスクを変えて行なうことにより、第１
図（りに示すようにマゼンタ層４、イエロー層５、シア
ン層６、グリーン層１３の各カラーフィルタ層が形成さ
れ、最後に表面保護として、第１図（ａ）の平坦化で使
用したものと同じ感光性透明樹脂３を塗布することによ
りカラーフィルタ形成が完了した状態が第１図（１）で
ある。FIG. 1(e) shows a state in which a magenta layer 4 is formed on the intended light-receiving section 2 after the development and rinsing processing. The following is a material for forming a color filter (B), which is made by adding a yellow dye to a photosensitive protein such as gelatin (B) 1
0. Color filter forming material added with cyan dye (
C) 11, Color filter forming material added with green dye (D) Using 12, Figure 1(d), (e
) by changing the exposure mask, the first
As shown in Figure 1, each color filter layer, magenta layer 4, yellow layer 5, cyan layer 6, and green layer 13, is formed.Finally, as a surface protection, the filter layer used in the planarization shown in Figure 1(a) is formed. FIG. 1(1) shows a state in which color filter formation is completed by applying the same photosensitive transparent resin 3 as shown in FIG.
以上のように本発明の実施例によれば、カラーフィルタ
形成前に予め光吸収層８なるものを各受光部２間に形成
し、各受光部２が光吸収層８によって個別に区切られた
状態にしてから、色素を添加した感光性をもったゼラチ
ンなどのタンパク質によるカラーフィルタ形成用材料（
Ａ）〜（Ｄ）を用いてカラーフィルタ形成を行なうこと
により、フィルタ形状の優れたカラーフィルタを短工程
で固体撮像装置の形成された基板１上に形成することが
できる。As described above, according to the embodiment of the present invention, the light absorption layer 8 is formed in advance between each light receiving section 2 before forming the color filter, and each light receiving section 2 is individually separated by the light absorption layer 8. After this, a material for forming a color filter using a photosensitive protein such as gelatin with added dye (
By forming a color filter using steps A) to (D), a color filter with an excellent filter shape can be formed in a short process on the substrate 1 on which the solid-state imaging device is formed.
発明の効果
以上のように本発明は、固体撮像装置の形成された基板
上にカラーフィルタを形成する前に予め光吸収層なるも
のを各受光部間に形成、各受光部が前記光吸収層によっ
て個別に区切られた状態にしてから、感光性をもたせた
ゼラチン、カゼイン、グリユーなどのタンパク質に色素
を予め添加したカラーフィルタ形成用材料を用いてカラ
ーフィルタを形成するため、従来のような染色へ−ス層
形成、染色の工程を一括することができ、しかも前記カ
ラーフィルタ形成用材料を露光する際、従来課題とされ
ていた下地基板からの乱反射光による不要な箇所の感光
も、各受光部間に光吸収層が存在するため、乱反射は光
吸収層に吸収されるため、目的とする箇所のみ感光させ
ることができる。また、光吸収層が各受光部間に存在す
ることにより、隣接受光部間での光の混入を解消するこ
とができる。しかも形成されたカラーフィルタも１層中
に複数の色群を有するカラーフィルタであるため、フィ
ルタのトータル厚みは薄くなリ、その結果、フリッカ等
画像の悪影響を解消することができる。Effects of the Invention As described above, in the present invention, before a color filter is formed on a substrate on which a solid-state imaging device is formed, a light absorption layer is formed between each light receiving part, and each light receiving part is formed with the light absorption layer. Since the color filters are formed using a color filter forming material in which dyes are added to photosensitized proteins such as gelatin, casein, or grieux, conventional dyeing is not possible. The process of forming the base layer and dyeing can be done all at once, and when exposing the material for forming the color filter, it is possible to eliminate unnecessary exposure of unnecessary parts due to diffusely reflected light from the base substrate, which was a conventional problem. Since there is a light absorption layer between the parts, diffused reflection is absorbed by the light absorption layer, so that only the intended area can be exposed to light. Furthermore, since the light absorption layer is present between each light receiving section, it is possible to eliminate the mixing of light between adjacent light receiving sections. Furthermore, since the formed color filter is also a color filter having a plurality of color groups in one layer, the total thickness of the filter is small, and as a result, adverse effects on images such as flicker can be eliminated.
第１図は本発明の実施例におけるカラー固体撮像装置の
製造方法を示す工程順断面図、第２図は従来のカラー固
体撮像装置の製造方法を示す工程順断面図である。
１・・・・・・固体撮像装置の形成された基板、２・・
・・・・受光部、３・・・・・・感光性透明樹脂、４・
・・・・・マゼンタ層、５・・・・・・イエロー層、６
・・・・・・シアン層、７・・・・・・光吸収層形成用
材料、８・・・・・・光吸収層、９・・・・・・カラー
フィルタ形成用材料（Ａ） 、１０・・・−・・カラー
フィルタ形成用材料（Ｂ）、１１・・・・・・カラーフ
ィルタ形成用材料（Ｃ）、１２・・・・・・カラーフィ
ルタ形成用材料（Ｄ）、１３・・・・・・グリーン層。FIG. 1 is a step-by-step sectional view showing a method of manufacturing a color solid-state imaging device according to an embodiment of the present invention, and FIG. 2 is a step-by-step sectional view showing a conventional method of manufacturing a color solid-state imaging device. 1... Substrate on which a solid-state imaging device is formed, 2...
... Light receiving part, 3 ... Photosensitive transparent resin, 4.
...Magenta layer, 5...Yellow layer, 6
... Cyan layer, 7 ... Light absorption layer forming material, 8 ... Light absorption layer, 9 ... Color filter forming material (A), 10... Material for color filter formation (B), 11... Material for color filter formation (C), 12... Material for color filter formation (D), 13. ...Green layer.
Claims (3)
樹脂を形成する工程と、前記第１の透明樹脂上に光吸収
層を形成する工程と、前記光吸収層上に第１のカラーフ
ィルタ形成用材料を形成する工程と、前記光吸収層上に
第２のカラーフィルタ形成用材料を形成する工程と、前
記光吸収層上に第３のカラーフィルタ形成用材料を形成
する工程と、前記半導体基板上に第２の透明樹脂を形成
する工程を備えたことを特徴とするカラー固体撮像装置
の製造方法。(1) A step of forming a first transparent resin on a semiconductor substrate having a plurality of light receiving parts, a step of forming a light absorption layer on the first transparent resin, and a step of forming a first transparent resin on the light absorption layer. a step of forming a second color filter forming material on the light absorption layer; and a step of forming a third color filter forming material on the light absorption layer. A method for manufacturing a color solid-state imaging device, comprising the steps of: and forming a second transparent resin on the semiconductor substrate.
受光部間に形成されていることを特徴とする請求項（１
）に記載したカラー固体撮像装置の製造方法。(2) Claim (1) characterized in that a light absorption layer is formed between adjacent light receiving parts of the plurality of light receiving parts.
) A method for manufacturing a color solid-state imaging device described in .
料が感光性のあるタンパク質に色素を添加したものであ
ることを特徴とする請求項（１）に記載のカラー固体撮
像装置の製造方法。(3) Manufacturing the color solid-state imaging device according to claim (1), wherein the first, second, and third color filter forming materials are made by adding a dye to a photosensitive protein. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2053435A JPH03255404A (en) | 1990-03-05 | 1990-03-05 | Production of color solid-state image pickup device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2053435A JPH03255404A (en) | 1990-03-05 | 1990-03-05 | Production of color solid-state image pickup device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03255404A true JPH03255404A (en) | 1991-11-14 |
Family
ID=12942768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2053435A Pending JPH03255404A (en) | 1990-03-05 | 1990-03-05 | Production of color solid-state image pickup device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03255404A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010147143A (en) * | 2008-12-17 | 2010-07-01 | Nikon Corp | Solid-state image sensor, process of fabricating the same, and imaging device |
| CN102280460A (en) * | 2010-06-08 | 2011-12-14 | 夏普株式会社 | Solid-state imaging element and electronic information device |
| JP4872024B1 (en) * | 2011-04-22 | 2012-02-08 | パナソニック株式会社 | Solid-state imaging device and manufacturing method thereof |
| JP4872023B1 (en) * | 2011-04-22 | 2012-02-08 | パナソニック株式会社 | Solid-state imaging device and manufacturing method thereof |
| WO2013031160A1 (en) * | 2011-09-02 | 2013-03-07 | パナソニック株式会社 | Solid state image capture device and method of manufacturing same |
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|---|---|---|---|---|
| JPS57185005A (en) * | 1981-05-08 | 1982-11-15 | Nec Corp | Color filter for solid-state image pickup element |
| JPS59167053A (en) * | 1983-03-11 | 1984-09-20 | Toshiba Corp | Manufacture of color solid-state image pickup element |
| JPS61296763A (en) * | 1985-06-25 | 1986-12-27 | Sony Corp | Manufacture of color solid-state image-pickup device |
| JPS62106404A (en) * | 1985-11-02 | 1987-05-16 | Canon Inc | Color separation filter and its manufacturing method |
-
1990
- 1990-03-05 JP JP2053435A patent/JPH03255404A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57185005A (en) * | 1981-05-08 | 1982-11-15 | Nec Corp | Color filter for solid-state image pickup element |
| JPS59167053A (en) * | 1983-03-11 | 1984-09-20 | Toshiba Corp | Manufacture of color solid-state image pickup element |
| JPS61296763A (en) * | 1985-06-25 | 1986-12-27 | Sony Corp | Manufacture of color solid-state image-pickup device |
| JPS62106404A (en) * | 1985-11-02 | 1987-05-16 | Canon Inc | Color separation filter and its manufacturing method |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010147143A (en) * | 2008-12-17 | 2010-07-01 | Nikon Corp | Solid-state image sensor, process of fabricating the same, and imaging device |
| CN102280460A (en) * | 2010-06-08 | 2011-12-14 | 夏普株式会社 | Solid-state imaging element and electronic information device |
| JP2011258728A (en) * | 2010-06-08 | 2011-12-22 | Sharp Corp | Solid state image sensor and electronic information apparatus |
| JP4872024B1 (en) * | 2011-04-22 | 2012-02-08 | パナソニック株式会社 | Solid-state imaging device and manufacturing method thereof |
| JP4872023B1 (en) * | 2011-04-22 | 2012-02-08 | パナソニック株式会社 | Solid-state imaging device and manufacturing method thereof |
| US8558338B2 (en) | 2011-04-22 | 2013-10-15 | Panasonic Corporation | Solid-state imaging device and method for manufacturing the same |
| US8711258B2 (en) | 2011-04-22 | 2014-04-29 | Panasonic Corporation | Solid-state imaging device and method for manufacturing the same |
| WO2013031160A1 (en) * | 2011-09-02 | 2013-03-07 | パナソニック株式会社 | Solid state image capture device and method of manufacturing same |
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