JPH0326334U - - Google Patents
Info
- Publication number
- JPH0326334U JPH0326334U JP8669689U JP8669689U JPH0326334U JP H0326334 U JPH0326334 U JP H0326334U JP 8669689 U JP8669689 U JP 8669689U JP 8669689 U JP8669689 U JP 8669689U JP H0326334 U JPH0326334 U JP H0326334U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- chamber
- vacuum
- applying
- creating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Description
図面は本考案実施例の構成を示す断面図である
。
１…真空チヤンバ、２…フイラメント、４…交
流電源、５…直流電源、ｅ…熱電子。
The drawing is a sectional view showing the structure of an embodiment of the present invention. 1...Vacuum chamber, 2...Filament, 4...AC power supply, 5...DC power supply, e...thermoelectron.
Claims (1)
装置において、上記チヤンバ内にフイラメントを
配設するとともに、そのフイラメントに、上記チ
ヤンバの壁体に対して高電位を印加する手段、お
よび上記フイラメントに電流を流す手段を設けた
ことを特徴とする、真空装置。 In an apparatus for creating a vacuum in a chamber using a vacuum pump or the like, a filament is disposed in the chamber, and means for applying a high potential to the wall of the chamber to the filament, and applying an electric current to the filament. A vacuum device characterized by having a means for flowing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8669689U JPH0326334U (en) | 1989-07-24 | 1989-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8669689U JPH0326334U (en) | 1989-07-24 | 1989-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0326334U true JPH0326334U (en) | 1991-03-18 |
Family
ID=31636313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8669689U Pending JPH0326334U (en) | 1989-07-24 | 1989-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0326334U (en) |
-
1989
- 1989-07-24 JP JP8669689U patent/JPH0326334U/ja active Pending