JPH0327335U - - Google Patents
Info
- Publication number
- JPH0327335U JPH0327335U JP8698489U JP8698489U JPH0327335U JP H0327335 U JPH0327335 U JP H0327335U JP 8698489 U JP8698489 U JP 8698489U JP 8698489 U JP8698489 U JP 8698489U JP H0327335 U JPH0327335 U JP H0327335U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pump
- high vacuum
- vacuum pump
- exhaust system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図〜第３図は本考案の一実施例を示し、第
１図は回路図、第２図はリークテストの手順を示
すタイムチヤート、第３図は分析管による検知信
号の推移を示すグラフである。第４図は従来例を
示す第１図相当の回路図である。
１……被試験体、２……排気口、３……吸気口
、４……分析管、ＲＰ……粗引ポンプ（油回転真
空ポンプ）、Ｌ……主排気系路、ＢＶ……第１の
バルブ、ＦＶ……第２のバルブ、ＴＭＰ……高真
空ポンプ（ターボ分子ポンプ）、ＣＶ……第３の
バルブ、ＦＰ……補助粗引ポンプ（油回転真空ポ
ンプ）、ｌ……副排気系路。
Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a circuit diagram, Figure 2 being a time chart showing the leak test procedure, and Figure 3 showing the transition of the detection signal from the analysis tube. It is a graph. FIG. 4 is a circuit diagram corresponding to FIG. 1 showing a conventional example. 1...Test object, 2...Exhaust port, 3...Intake port, 4...Analysis tube, RP...Roughing pump (oil rotary vacuum pump), L...Main exhaust system path, BV...No. 1 valve, FV...second valve, TMP...high vacuum pump (turbo molecular pump), CV...third valve, FP...auxiliary roughing pump (oil rotary vacuum pump), l...sub Exhaust system path.
Claims (1)
介して被試験体を接続するとともに、前記主排気
系路に第２のバルブを介して高真空ポンプの排気
口を接続し、該高真空ポンプの吸気口に分析管を
取付けて逆拡散したＨｅ量の測定を行うようにし
たものにおいて、前記高真空ポンプの排気口に第
３のバルブを介して補助粗引ポンプによる副排気
系路を接続したことを特徴とするヘリウムリーク
デイテクタ。 The test object is connected to the main exhaust system by the roughing pump through a first valve, and the exhaust port of a high vacuum pump is connected to the main exhaust system through a second valve. In a device in which an analysis tube is attached to the intake port of the pump to measure the amount of reversely diffused He, a sub-exhaust line by an auxiliary roughing pump is connected to the exhaust port of the high vacuum pump via a third valve. A helium leak detector characterized by a connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8698489U JPH0327335U (en) | 1989-07-25 | 1989-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8698489U JPH0327335U (en) | 1989-07-25 | 1989-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0327335U true JPH0327335U (en) | 1991-03-19 |
Family
ID=31636639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8698489U Pending JPH0327335U (en) | 1989-07-25 | 1989-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0327335U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180033579A (en) * | 2015-08-31 | 2018-04-03 | 시마쯔에미트 가부시키가이샤 | Helium leak detector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57169647A (en) * | 1981-04-13 | 1982-10-19 | Ulvac Corp | He reverse diffusion type leakage detector using turbo molecular pump |
-
1989
- 1989-07-25 JP JP8698489U patent/JPH0327335U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57169647A (en) * | 1981-04-13 | 1982-10-19 | Ulvac Corp | He reverse diffusion type leakage detector using turbo molecular pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180033579A (en) * | 2015-08-31 | 2018-04-03 | 시마쯔에미트 가부시키가이샤 | Helium leak detector |
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