JPH03280481A - Manufacturing method of electrostrictive effect element - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing an electrostrictive effect element, and more particularly to a method for insulating end faces of internal electrode layers.

[Conventional technology]

Conventionally, a method for manufacturing this type of electrostrictive element has been carried out using an electrostrictive material 11.
and a step of printing an insulating material 14 on the electrostrictive material 11 on which the internal electrodes 12 are printed (third step).
FIG. 3(a)), a step of laminating the electrostrictive materials 11 to form a laminate, and a step of sintering the laminate (FIG. 3(b)),
The process consists of a process of cutting the laminate to form a slice plate, and a process of forming external electrodes 15a and 15b on the slice plate (FIG. 3(C)).

[Problem to be solved by the invention]

The conventional method for manufacturing an electrostrictive element described above has the following drawbacks.

■ Difficulty in positioning when screen printing insulating materials.

■ It is difficult to determine the cutting position when cutting the laminate at a predetermined position.

■　There is a big problem in mass production due to the above reasons ■ and ■.

(Means for Solving the Problems) The method for manufacturing an electrostrictive element of the present invention includes removing one end portion of the internal electrode layer exposed on a pair of opposing side surfaces of a laminate alternately on the pair of side surfaces. a step of forming an insulating material on the pair of side surfaces; a step of removing the insulating material so that the end portions of the internal electrodes are alternately exposed; and a connecting step.

[For production]

After the laminate is sintered, one end of the internal electrode layer exposed on a pair of opposing side surfaces of the laminate is alternately removed on the pair of side surfaces, and then an insulating layer is formed. Alignment becomes unnecessary.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a cross-sectional view shown in order of steps to explain an embodiment of the method for manufacturing an electrostrictive effect element of the present invention, and FIG. FIG. 2 is a cross-sectional view showing an example of an element.

First, a pre-fired ceramic powder made of lead titanate or the like is prepared and dispersed in an organic solvent such as ethyl cellosolve along with a small amount of an organic binder such as polyvinyl butyral and a plasticizer such as diocl phthalate to form a slurry. . This slurry is caused to flow down onto the surface of the polyester film moving at a constant speed by a slip casting method using a doctor blade to form a continuous green sheet (not shown) having a thickness of about 100 μm. Next, this green sheet continuous body is peeled off from the polyester film surface to form an electrostrictive material 1. A mixed powder of silver powder and palladium powder is screen printed on the surface of this electrostrictive material 1 together with a vehicle to form internal electrodes 2 (FIG. 1(a)). Next, a composite sheet 6 on which internal electrodes 2 are printed on the electrostrictive material 1 is laminated and temporarily formed by heat pressing, and then heated in a firing furnace at a temperature of approximately 125°C.
By sintering at 0° C., a laminate having the electrostrictive material 1 and the internal electrodes 2 can be obtained. Next, after cutting this laminate at a predetermined position (FIG. 1(b)), the end surfaces of the internal electrodes 2 are cut at every other layer by electrophoresis, and each side surface is coated with insulating material such as glass. A substance is deposited to form an insulating mask portion 3 (FIG. 1(C)). Next, about 100 scales of the internal electrode 2 are dissolved by dipping it in a phosphoric acid or nitric acid etching solution (FIG. 1(d)).

Next, a mixed paste of an insulating material such as ceramic and an organic binder is printed and fired again to form the insulating portion 4 (FIG. 1(e)). Next, the insulating portion 4 is polished until the surface of the laminate is exposed (FIG. 1(f)). At this time, the insulating parts 4a and 4b imprinted in the gap between the internal electrode 2 and the electrostrictive material 1, which were removed by etching, remain in the laminate as they are. Next, conductive pastes 5a, 5b made of platinum or the like are applied to the side surfaces and upper and lower surfaces where the internal electrodes 1 of this laminate are exposed alternately.
and electrically connect the internal electrodes 1 to each other (
An electrostrictive effect element as shown in FIG. 1(g) and FIG. 2 is obtained.

〔Effect of the invention〕

As explained above, in the present invention, after the laminate is sintered, one end of the internal electrode layer exposed on a pair of opposing side surfaces of the laminate is alternately removed on the pair of side surfaces, and then an insulating layer is formed. By doing so, you will have the following effects.

(1) Since the internal electrodes are reliably removed by etching, the reliability of electrical insulation is dramatically improved.

(2) Since alignment is not required during printing and cutting, the number of man-hours can be significantly reduced.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an example of the method for manufacturing an electrostrictive effect element of the present invention in the order of steps, and FIG. FIG. 3 is a sectional view showing one embodiment of an effect element, and FIG. 3 is a diagram showing the order of steps for explaining a conventional example of a method of manufacturing an electrostrictive effect element. DESCRIPTION OF SYMBOLS 1... Electrostrictive material, 2... Internal electrode, 3--- Insulating mask part, 4.4a, 4b---
---Insulating part, 5a, 5b... conductive paste,
6...Composite sheet. Figure 2 (a) (c) Figure 2

Claims (1)

[Claims] 1. In a method for manufacturing a laminated electrostrictive effect element in which electrostrictive material layers and internal electrode layers are alternately laminated, one end of the internal electrode layer exposed on a pair of opposing side surfaces of the laminate is connected to the pair of internal electrode layers. forming an insulating material on the pair of side surfaces;
An electrostrictive effect element comprising the steps of: removing the insulating material so that the internal electrode ends are alternately exposed; and electrically connecting the alternately exposed internal electrode ends. Production method.