JPH03282004A - Speed control device and cylinder device - Google Patents

Abstract

PURPOSE:To control the movement of an electroviscous fluid by voltage changes to stabilize the control of speed and a stopping position by providing a driven piston in a cylinder in which the electroviscous fluid is fightly enclosed, and providing a sliding member which is interlocked with the driven piston by magnetic force. CONSTITUTION:In an inner tube 1 a driving piston 5 having a rod 6, a magnet 5b is provided, and between the inner tube and an outer tube 2 a driven piston 9 having a magnet 9b is provided. For example, compressed air pressure is supplied into or discharged from the inner tube 1 through ports 7, 8 to move the driving piston 5. The driven piston 9 is interlocked with the driving piston by action of the magnets 5b, 9b to move in fightly enclosed electroviscous fluid 10. The electroviscous fluid 10 moves on both sides of the driven piston 9 in a connecting passage 2b provided with a throttle valve 12, and its flow rare is controlled by changes in its viscosity caused by voltage applied to a fluid control unit 11 provided in the connecting passage. The speed and stopping position of the driven piston can thus be stably controlled.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a speed control device and a cylinder device, and particularly to a speed control device and a cylinder device, and in particular, a method for controlling the moving speed and stopping position of a controlled object or load by using the viscous resistance of a fluid. Regarding control technology.

[Prior Art] For example, pneumatic cylinder devices are suitable for load driving and speed control in high-speed ranges due to their characteristics, but because the working fluid air is compressible, they are suitable for driving loads in high-speed ranges and controlling speed. There is a problem that control accuracy is poor.

For this reason, countermeasures have been taken, such as using a hydro converter that converts pneumatic energy into hydraulic energy to drive the load, and connecting a hydro checker that generates a certain load resistance during the stroke to the cylinder device together with the desired load. However, they all have many problems and are not preferred for use.

In particular, it is very difficult to obtain any speed at any position during the stroke, and even if you try to achieve it,
The current situation is that it is not put into practical use due to cost considerations.

In order to solve such problems, a technique disclosed in, for example, Japanese Unexamined Patent Publication No. 1-312208 has been proposed.

That is, the piston rod of the drive cylinder and the piston rod of the brake cylinder are coupled and interlocked, and the fluid chamber formed in the cylinder by the piston on the brake cylinder side is communicated via a brake passage having an electric field, Both fluid chambers and the braking passage are filled with an electrorheological fluid whose viscosity changes depending on the strength of the electric field, and the viscosity of the electrorheological fluid that generates braking force in the braking passage is controlled by the strength of the electric field in the braking passage. This is what I did.

[Problem to be solved by the invention]

However, in the case of the above-mentioned prior art, the effect is that any control speed can be obtained at any position in the stroke of the piston rod of the drive cylinder by stepless and continuous control of the viscosity value of the electrorheological fluid. Although there is
Since the drive cylinder and brake cylinder are mechanically connected via a piston rod, there is a concern that electrorheological fluid may leak from the piston rod insertion part on the brake cylinder side, resulting in a reduction in the amount of electrorheological fluid sealed. There is a problem in that control accuracy decreases due to the intrusion of compressible air due to the intrusion of compressible air.

Therefore, an object of the present invention is to stably control the speed and stop position of a controlled object by controlling the voltage applied to the electrorheological fluid, without causing leakage of the electrorheological fluid that generates the braking force. The object of the present invention is to provide a possible speed control device.

Another object of the present invention is to provide a speed control device that can easily automate control of the speed and stop position of a controlled object.

Another object of the present invention is to provide a speed control device that is easy to maintain.

Another object of the present invention is to stably control the speed and stop position of a load by controlling the voltage applied to the electrorheological fluid, without causing leakage of the electrorheological fluid that generates the braking force. An object of the present invention is to provide a cylinder device.

Another object of the present invention is to provide a cylinder device in which control of load speed and stop position can be easily automated.

Another object of the present invention is to provide a cylinder device that is easy to maintain and manage.

The foregoing and other objects and novel features of the present invention are as follows:
It will become clear from the description herein and the accompanying drawings.

[Means to solve the problem]

A brief overview of typical inventions disclosed in this application is as follows.

That is, the speed control device according to the present invention includes a cylinder,
a driven piston that separates first and second fluid chambers within the cylinder; a slide member that is located outside the cylinder and engages with the object to be controlled and that moves in conjunction with the driven piston using magnetic force; a communication passage connecting the fluid chamber and the second fluid chamber; an electrorheological fluid sealed in the cylinder and whose viscosity changes depending on the magnitude of the applied voltage; The passage resistance of the electrorheological fluid is controlled by changing the voltage applied to the electrorheological fluid moving between the first fluid chamber and the second fluid chamber through the communication path according to the displacement of the piston. It is equipped with a fluid control section.

Further, the cylinder device according to the present invention includes a first cylinder, a second cylinder, a third fluid chamber, and a fourth fluid chamber, which are separated from each other inside the first cylinder. a driving piston that generates thrust by discharged fluid pressure; a piston rod that projects outward from at least one end of the first cylinder and couples a load to the piston; and fifth and sixth fluid chambers within the second cylinder. a communication path connecting the fifth fluid chamber and the sixth fluid chamber; An electrorheological fluid whose viscosity changes depending on the voltage level, and a part of the communication path is interposed,
By changing the voltage applied to the electrorheological fluid moving between the fifth fluid chamber and the sixth fluid chamber through the communication path according to the displacement of the driven piston that interlocks with the driving piston, the electrorheological fluid is and a fluid control section that controls the passage resistance of the fluid.

[Effect]

According to the above-described speed control device of the present invention, the driven piston that generates braking force using the viscosity of the electrorheological fluid and the controlled object are connected via the slide member that engages with the driven piston via magnetic force. Because of the interlocking, there is no need to provide a driven piston rod that protrudes outside from a cylinder filled with electrorheological fluid, for example, for the purpose of coupling the driven piston and the controlled object, and There is no need to worry about electrorheological fluid leakage.

As a result, there is no reduction in braking accuracy due to leakage of the electrorheological fluid that generates the braking force, or in other words, intrusion of outside air due to a decrease in the amount of electrorheological fluid sealed, and moreover, the electric current passing through the fluid control section is prevented. By appropriately controlling the voltage applied to the viscous fluid, it is possible to stably control any speed and stop position of the controlled object.

In addition, by controlling the voltage applied to the electrorheological fluid,
Because it has a structure that arbitrarily adjusts the viscous resistance of the electrorheological fluid, that is, the braking force obtained by the driven piston, it is compatible with automatic control such as computers, and can be used to automate the control of the speed and stop position of the controlled object. This can be easily achieved.

Furthermore, the structure is such that the electrorheological fluid that generates the braking force is sealed in a sealed space that does not have any moving parts that require a fluid seal, such as the insertion part of the piston rod.
This eliminates the need for complicated operations such as replacing seals and replenishing electrorheological fluid, making maintenance management of the speed control device easier.

Furthermore, according to the cylinder device of the present invention described above, since the driving piston that drives the load and the driven piston that generates braking force by the viscous resistance of the electrorheological fluid are interlocked using magnetic force, For example, there is no need to provide, on the driven piston side, a piston rod or the like that protrudes outside from the second cylinder in which the driven piston is accommodated, and there is no fear of leakage of electrorheological fluid from the insertion portion of the piston rod.

As a result, the electrorheological fluid that generates the braking force can be applied to the electrorheological fluid passing through the fluid control section without reducing the control accuracy due to leakage of the electrorheological fluid that generates the braking force, that is, a decrease in the amount of the electrorheological fluid sealed. By appropriately controlling the voltage applied to the drive piston, it is possible to stably control the arbitrary speed and stop position of the load driven by the drive piston.

In addition, by controlling the voltage applied to the electrorheological fluid,
Since it has a structure that arbitrarily adjusts the viscous resistance of the electrorheological fluid, that is, the braking force obtained by the driven piston, it is compatible with automatic controls such as combinators, and it is easy to automate the control of load speed and stop position. It can be realized.

Furthermore, the structure is such that the electrorheological fluid that generates the braking force is sealed in a sealed space that does not have any moving parts that require a fluid seal, such as the insertion part of the piston rod.
This eliminates the need for complicated operations such as replacing seals and replenishing electrorheological fluid, making maintenance management of the cylinder device easier.

[Embodiment 1] FIG. 1 is a cross-sectional view showing an example of the structure of a cylinder device according to an embodiment of the present invention, and FIG. 2 shows a portion indicated by the line U-]I in FIG. FIG.

An inner tube 1 having a circular cross section is covered almost coaxially with an outer tube 2 formed by hollowing out a solid member having a square outer shape circularly in the longitudinal direction, and both ends of the inner tube 1 are covered with a fixing ring 3a and a fixing ring 3a. It is closed by a rod cover 3 and a head cover 4, which are locked to the outer tube 2 by a ring 4a.

Inside the inner tube 1, a pair of holding members 5a are attached to the inner end of the piston rod 6 passing through the rod cover 3.
A yoke 5C consisting of a plurality of magnets 5b and a magnetic material between
Driving pistons 5 are arranged such that they are alternately arranged and held and fixed via screws 5d, separating the fluid chambers R1 and R2.

Fluid chambers R1 and R2 inside the inner tube 1 are in communication with ports 7 and 8 provided in the rod cover 3 and the head cover 4, respectively. By introducing compressed air pressure, the driving piston 5 generates thrust, and this thrust is transmitted to an external load (not shown) via the piston rod 6.

Drive piston 50 both ends outer periphery and inner tube 1
A packing 5e and a packing l are provided on the inner periphery of both ends of the piston rod 6, and further on the penetrating portion of the rod cover 3 of the piston rod 6.
A, a gasket 6-a is provided to keep fluid chambers R1 and R2 inside the inner tube 1 airtight.

In this case, a donut-shaped driven piston 9 is disposed between the inner tube 1 and the outer tube 2 at a position surrounding the driving piston 5, and a fluid chamber is provided in the space between the inner tube 1 and the outer tube 2. R3
and a fluid chamber R4 are separated from each other.

On the inner circumferential surface of the driven piston 9, a plurality of magnets 9b and a yoke 9C are arranged at positions corresponding to the plurality of magnets 5b and yokes 5c that constitute the driving piston 5, respectively, and the polarities of the magnets 5b and 9b are arranged. are opposite to each other, and the structure is such that a magnetic attractive force acts between the opposing yokes 5C and 90.

As a result, the driving piston 5 inside the inner tube 1 and the driven piston 9 located between the inner tube 1 and the outer tube 2 are coupled via magnetic force,
They are interconnected.

Fluid chambers R3 and R separated by driven piston 9
4 is sealed with an electrorheological fluid 10 whose viscosity changes depending on the strength of the applied electric field.

This electrorheological fluid 10 has a property that its viscosity increases in proportion to the applied voltage V (electric field E), as shown in FIG. 4, for example.

A gasket 2a and a gasket 9e are installed between the outer tube 2, the rod cover 3, and the head cover 4, and between the inner and outer peripheries of the driven piston 9, and the inner tube 1 and the outer tube 2.
And leakage of the electrorheological fluid 10 from R4 is prevented.

The fluid chambers R3 and R4 include a communication passage 3b bored inside the rod cover 3, a communication passage 2b bored in the axial direction at a corner of the outer tube 2 having a rectangular outer shape, and a head cover 4.
The electrorheological fluid 10 sealed inside the fluid chambers R3 and R4 communicates with each other via a communication path 4b bored inside the communication path 3b in accordance with the displacement of the driven piston 9.

The fluid chambers R3 and R are connected through the communication path 2b and the communication path 4b.
It has a structure that circulates between 4 and 4.

A fluid control section 11 is interposed in the path of the communication passage 4b formed in the head cover 4, through which the electrorheological fluid 10 that moves between the fluid chambers R3 and R4 as the driven piston 9 is displaced passes. There is.

The fluid control unit 11 includes, for example, a plurality of electrodes 11a arranged concentrically in parallel to the flow direction of the electrorheological fluid 10, as shown in FIG.

It is equipped with an electrode 11b and a voltage regulator 11C that applies a desired voltage between the electrodes 11a and llb.

Then, from this voltage regulator 11C, electrodes 11a and llb
That is, the voltage applied between the electrodes 11a and l
By controlling the magnitude of the electric field acting on the electrorheological fluid 10 passing between the lb and the electrorheological fluid 10, it is possible to control the passage resistance of the electrorheological fluid 10 in the fluid control unit 11 to a desired value at any time. It has become.

Furthermore, a valve 12 for controlling opening and closing of the communication passage 2b is interposed in the middle of the communication passage 2b that is bored in the wall surface of the outer tube 2 in the axial direction.

The operation of the speed control device of this embodiment will be explained below.

First, the fluid chamber R1 (R2) inside the inner tube 1
ni, bo)? When fluid pressure such as compressed air is applied through (8), the drive piston 5 and piston rod 6 move in the left (right) direction in FIG. 1, and a load (not shown) coupled to the piston rod 6 is driven. .

At this time, the driven piston 9 magnetically connected to the driving piston 5 moves in conjunction with the driving piston 5, and when the driven piston 9 is displaced in the left (right) direction in FIG. The electrorheological fluid 10 is connected to the communication path 4b,
Fluid control section 11. Communication path 2b, communication path 3b (communication path 3b
, the communication path 2b, the communication path 4b, and the fluid control section 11) to the fluid chamber R3 (R4).

The driven piston 9 includes a communication passage 4b, a fluid control section 11. A braking force determined by the passage resistance of the electrorheological fluid 10 in the communication passage 2b, the communication passage 3'b, etc. acts, and this braking force is transmitted to the driving piston 5 interlocking with the driven piston 9 through magnetic force.

Therefore, in the fluid control section 11, the electrode 11a and Il
By appropriately controlling the voltage applied between the drive piston 5 and the driven piston 9 and setting the passage resistance of the electrorheological fluid 10 in the fluid control section 11 to a desired value, The speed at a desired stroke position can be set to a desired value.

In addition, the driven piston 9, that is, the driven piston 9 is interlocked with the driven piston 9 by operating the valve 12 provided in the communicating path 2b to shut off the communicating path 2b and preventing the flow of the electrorheological fluid 10. The driving piston 5 can be reliably stopped at a desired position in its stroke.

Furthermore, in the cylinder device of this embodiment, the drive piston 5
Since the structure is such that the driven piston 9 and the driven piston 9 interlock with each other through magnetic force, the rod cover 3 is penetrated from the outside on the driven piston 9 side for the purpose of mechanically coupling the driven piston 9 and the driving piston 5. There is no need to provide a piston rod or the like to be engaged with the driven piston 9.

Fluid chambers R3 and R4, in which the electrorheological fluid 10 that generates braking force on the driven piston 9 is sealed, and the communication passage 3b
, the communication path 2b, the communication path 4b, the fluid control unit 11, and other systems can be completely sealed, and there is no concern that the electrorheological fluid 10 will leak to the outside.

For this reason, the amount of the electrorheological fluid 10 sealed during operation is reduced due to leakage, and the outside air infiltrates into the fluid chambers R3 and R4. The control accuracy of speed and stop position does not deteriorate, and stable control accuracy can be maintained over a long period of time.

Furthermore, complicated operations such as replenishing the electrorheological fluid 10 are no longer necessary, making maintenance management of the cylinder device extremely easy.

In addition, although not particularly limited, the valve 12,
By connecting the voltage regulator 11c of the fluid control B11 to an external control combinator system or the like, automation of the control of the cylinder device can be easily realized.

Also, an inner tube 1 in which a driving piston 5 is located, and a driven piston 9 that exerts a braking force on this driving piston 5.
Since the outer tube 2 is located almost coaxially and has a double structure, the cylinder device can be significantly downsized and the space required for installation can be reduced.

[Two Embodiments] FIG. 5 is a sectional view schematically showing an example of the configuration of a speed control device according to an embodiment of the present invention, and FIG. FIG. 3 is a cross-sectional view of the portion shown.

A driven piston 21 is located inside the cylinder 20, and separates a fluid chamber R5 from a fluid chamber R6.

The driven piston 21 has a structure in which a plurality of magnets 21b and a plurality of yokes 21C are alternately arranged in the axial direction in the center thereof.

Further, gaskets 20e are attached to the outer circumferential portions of both ends so as to close the gap with the inner circumferential surface of the cylinder 20.

The fluid chambers R5 and R6 communicate with each other via a communication path 22 connected to both ends of the cylinder 200, and the fluid chamber R
5, R6 and the communication path 22 are filled with electrorheological fluid 10.

Further, a fluid control section 11 and a valve 12 having the same structure as in the first embodiment are interposed in the middle of the communication path 22.

A slide member 23 that is movable in the axial direction of the cylinder 20 is arranged on the outer periphery of the cylinder 20 at a position corresponding to the driven piston 21 .

A plurality of magnets 23b and a yoke 23c are provided on the inner peripheral portion of the slide member 23 in contact with the cylinder 20 so as to correspond to the plurality of magnets 21b and yoke 21C of the driven piston 21 located inside the cylinder 20, respectively. There is. The polarity of the magnet 23b of the slide member 23 is opposite to that of the magnet 21b of the driven piston 21, and the opposing yokes 23c and 21C form a magnetic circuit that attracts each other, so that the driven piston 21 and the slide member 23 The structure is such that they are interlocked via magnetic force.

Furthermore, a controlled object 24 that reciprocates in the axial direction of the cylinder 20 is engaged with the slide member 23 that moves in conjunction with the driven piston 21 by another cylinder device (not shown).

Hereinafter, the operation of the speed control device of the second embodiment will be explained.

First, when the controlled object 24 driven by a cylinder device (not shown) moves in the left (right) direction in FIG.
The slide member 23 engaged with the controlled object 24 also moves in the same direction, and the slide member 23 is further moved by the magnetic force.
The driven piston 21 that is interlocked also moves inside the cylinder 20 in the left (right) direction.

At this time, the electrorheological fluid 10 removed from the fluid chamber R6 (R5) by the displacement of the driven piston 21 in the left (right) direction passes through the communication path 22 to the fluid chamber R5 (R5) on the opposite side.
6), and the electrorheological fluid 1 flows into the driven piston 21.
0 communication passage 22, valve 12. A braking force is generated in accordance with the passage resistance in the fluid control section 11 and the like, and this braking force acts on the controlled object 24 via the slide member 23.

Then, in the fluid control unit 11, the electrodes 11a and llb
By appropriately controlling the strength of the voltage (electric field) applied from the voltage regulator 11C between the The magnitude of the braking force generated in the piston 21 is adjusted steplessly at a desired stroke position of the driven piston 21. That is, the speed at a desired position of the movement stroke of the controlled object engaged with the slide member 23 which is interlocked with the driven piston 21 via magnetic force is controlled to a desired value.

Furthermore, by closing the valve 12 at a desired position and blocking the flow of the electrorheological fluid IO in the communication path 22,
The driven piston 21, that is, the slide member 23 and the controlled object 24, can be accurately stopped at any position during the stroke.

As described above, in the speed control device of this embodiment, the controlled object 24 and the driven piston 21 that generates the braking force are engaged with each other via the slide member 23 that interlocks with each other using magnetic force as a medium. , fluid chambers R5 and R6 filled with electrorheological fluid 10 that generates braking force on driven piston 21;
The system such as the communication passage 22 and the like can be completely sealed.

As a result 1, there is no need to provide the driven piston 21 with a piston rod that penetrates the end of the cylinder 20 and protrudes to the outside, so there is no fear of leakage of the electrorheological fluid 10 from the penetrating portion of the piston rod. do not have.

Therefore, during operation, due to the intrusion of outside air due to a decrease in the electrorheological fluid 10 sealed in the fluid chambers R5 and R6, the controlled object 24 is moved by the driven piston 21 through the slide member 23 as described above. The speed and stop position of the object 24 will not be inaccurately controlled, and the speed and stop position of the controlled object 24 can be controlled stably over a long period of time.

Furthermore, in order to maintain control accuracy, cylinder 2
This eliminates the need for complicated operations such as disassembling the electrorheological fluid 10 and replenishing the electrorheological fluid 10, making maintenance management of the speed control device easier.

Although not particularly shown in the drawings, by coordinating the control system of a cylinder device (not shown) that drives the controlled object 24 with the valve 12 and the voltage regulator 11c of the fluid control section 11, the controlled object 24 can be controlled in this embodiment. Speed control and stop position control using the speed control device can be easily automated.

[Embodiment 3] FIG. 7 is a sectional view showing an example of the configuration of a speed control device according to another embodiment of the present invention.

Embodiment 3 is different from the speed control device of Embodiment 2 in that a communication pipe 25 that passes through the driven piston 21 in the axial direction is provided at an eccentric position inside the cylinder 20. be.

That is, the cylinder 2 supporting both ends of this communication pipe 25
The Nj section of 0 is provided with a fluid control section 11, a valve 12, and a communication hole 20a and a communication hole 20b that communicate these with fluid chambers R5 and R6 inside the cylinder 20, respectively.

In addition, gaskets 25a and 25b are attached to the support portions of the communication tube 25 at both ends of the cylinder 20 and the communication tube 250 penetration portion of the driven piston 21, to ensure that the fluid chambers R5 and R6 are free from complaints. There is.

When the driven piston 21 reciprocates, these communication pipes 25. Fluid control section 11. Valve 12, communication hole 20
a, the electrorheological fluid 10 flows between the fluid chambers R5 and R6 through the communication hole 20b, and the communication pipe 25.a. Fluid control section 1
1. Valve 12. The passage resistance of the electrorheological fluid 10 in the communication holes 20a and 20b acts on the driven piston 21 as a braking force.

In the case of this embodiment as well, in the fluid control unit 11, the voltage regulator 11C is connected to the electrode 11a through which the electrorheological fluid 10 passes.
By appropriately changing the voltage applied between The braking force acting on the controlled object can be adjusted to a desired magnitude at a desired position in the stroke of the driven piston 21 (controlled object), and the speed of the controlled object 24 can be controlled to a desired value.

Further, if necessary, by closing the valve 12 and blocking the flow of the electrorheological fluid 10 in the communication pipe 25, the controlled object 24 can be moved to a desired position during the stroke via the driven piston 2I and the slide member 23. can be stopped with high accuracy.

In addition, the driven piston 21 that generates braking force by the electrorheological fluid 10 and the slide member 23 that transmits this braking force to the controlled object 24 are indirectly coupled and interlocked via magnetic force. There is no need to provide the driven piston 21 with a piston-rod or the like that would impair the airtightness of the cylinder 20 in which the electrorheological fluid 10 is sealed.

Therefore, it is possible to avoid deterioration in the control accuracy of the speed and stop position of the driven piston 21 by the electrorheological fluid 10 due to a decrease in the enclosed electrorheological fluid 10 due to leakage, etc. 10 can stably control the speed and stop position of the driven piston 21 over a long period of time.

In addition, the above-mentioned Example 2 also facilitates maintenance management and automation.
The same is true for the speed control device.

[Embodiment 4] FIG. 8 is a sectional view showing an example of the configuration of a cylinder device according to another embodiment of the present invention.

The cylinder device of this embodiment includes a cylinder 30, a fluid chamber R7 and a fluid chamber R8 located inside the second cylinder 30.
The cylinder 30 includes a drive piston 31 that separates the cylinder 30 from the drive piston 31, and a slide member 32 that is disposed on the outer periphery of the cylinder 30 in correspondence with the position of the drive piston 31 and is movable in the axial direction.

The fluid chambers R7 and R8 include a plurality of ports 30a and 30a formed at both ends of the cylinder 300, respectively.
b are in communication, and these ports 30a and 30b
By supplying and discharging fluid pressure such as compressed air into and out of the fluid chambers R7 and R8, a thrust force of a desired magnitude is generated in a desired direction to the drive piston 31.

A plurality of magnets 31b and a plurality of yokes 31C made of magnetic material are alternately arranged on the outer circumference of the drive piston 31, and a slide member is provided on the outer circumference of the cylinder 30 facing the drive piston 31. 32, a plurality of magnets 32b and a plurality of yokes 32c are arranged alternately so as to correspond to the magnets 32b and yokes 32c of the drive piston 31.

Then, the polarities of the plurality of magnets 31b of the drive piston 31 and the plurality of magnets 32b on the slide member 32 side are set to be opposite to each other, and both yokes 31c and yokes 32c are set to have opposite polarities.
The drive piston 31 and the slide member 32 are designed to interlock with each other so that a magnetic attraction force is generated between the drive piston 31 and the slide member 32.

Further, a portion of the outer periphery of the slide member 32 is cut out in a linear shape, and a plurality of magnets 32b and yokes 32c are exposed to the outside.

By connecting a desired load (not shown) to this slide member 32, the load is driven.

Further, gaskets 3 are provided on the outer periphery of both ends of the drive piston 31.
1e is installed, and the airtightness of fluid chambers R7 and R8 is maintained.

In this case, the speed control device exemplified in the second embodiment is placed near the cylinder 30 in an attitude in which the cylinder 20 is parallel to the cylinder 30.

In addition, in this case, the slide member 23 on the side of the speed control device
The outer periphery of A is cut out at the portion facing the slide member 32 on the cylinder device side, and the slide member 23A of the speed control device and the slide member 32 on the cylinder device side are each exposed from both the notches. The magnet 23b and yoke 23c and the magnet 32b and yoke 32c are magnetically coupled by attractive force between them.

As a result, the drive piston 31 on the cylinder device side has
Via the slide member 32 and slide member 23A,
Electrorheological fluid 10 is applied to the driven piston 21 on the speed control device side.
The braking force generated by the viscous resistance is transmitted, and the magnitude of this braking force is controlled by the voltage applied between the electrodes 11a and 11b from the voltage regulator 11c in the fluid control unit 11.

Further, by opening and closing the valve 12 on the speed control device side as necessary, the drive piston 31 can be stopped at an arbitrary position with high precision.

In this way, in the cylinder device of this embodiment, the driven piston 21 on the speed control device side is coupled to the drive piston 31 via magnetic force, and the magnitude of the braking force on the driven piston 21 on the speed control device side is is controlled by the voltage value applied to the electrorheological fluid 10 in the fluid control unit 11, so that the speed and stop position at any position during the stroke of the load (not shown) driven by the drive piston 31 can be arbitrarily controlled. becomes possible.

Further, the driving piston 31 on the cylinder device side and the driven piston 21 on the speed control device side are connected to both sliding members 32.
Since they are magnetically coupled via the sliding member 23A, the overall structure is simplified compared to, for example, the conventional case where the coupling is via piston rods provided on both sides.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, the configurations of the cylinder device and speed control device are not limited to those exemplified in each of the embodiments described above.

〔Effect of the invention〕

Among the inventions disclosed in this application, the effects obtained by typical inventions are briefly described below.

That is, according to the speed control device of the present invention, a cylinder, a driven piston that separates first and second fluid chambers in the cylinder, and a driven piston that is located outside the cylinder and engages with a controlled object. a slide member that interlocks with the driven piston through magnetic force; a communication passage that connects the first fluid chamber and the second fluid chamber; An electrorheological fluid whose viscosity changes, and an electrorheological fluid that is interposed in a part of the communication path and moves between the first fluid chamber and the second fluid chamber through the communication path in accordance with the displacement of the driven piston. The fluid control section controls the passage resistance of the electrorheological fluid by changing the voltage applied to the electrorheological fluid. There is no need to provide a driven piston rod that protrudes from inside the cylinder to the outside, and there is no risk of electrorheological fluid leaking from the insertion portion of the driven piston wood.

As a result, there is no reduction in control accuracy due to leakage of the electrorheological fluid that generates braking force, or in other words, intrusion of outside air due to an insufficient amount of electrorheological fluid.
By appropriately controlling the voltage applied to the electrorheological fluid passing through the fluid control section, it is possible to stably control any speed and stop position of the controlled object.

In addition, by controlling the voltage applied to the electrorheological fluid,
Since it has a structure that adjusts the viscous resistance of the electrorheological fluid, that is, the braking force obtained by the driven piston, at will, it is compatible with automatic control such as computers, and can automate the control of the speed and stop position of the controlled object. can be easily realized.

Furthermore, the structure is such that the electrorheological fluid that generates the braking force is sealed in a sealed space that does not have any moving parts that require a fluid seal, such as the insertion part of the piston rod.
This eliminates the need for complicated operations such as replacing seals and replenishing electrorheological fluid, making maintenance management of the speed control device easier.

Further, according to the cylinder device of the present invention, the first and N2 cylinders and the third and fourth fluid chambers are separated from each other inside the first cylinder, and the third and fourth fluid chambers are separated from each other. a driving piston that generates thrust by fluid pressure supplied to and discharged from the first cylinder; a piston rod that projects outward from at least one end of the first cylinder and couples a load to the piston; a driven piston that separates a sixth fluid chamber and interlocks with the driving piston through magnetic force; a communication path that connects the fifth fluid chamber and the sixth fluid chamber; an electrorheological fluid whose viscosity changes depending on the magnitude of the applied voltage; and an electrorheological fluid which is interposed in a part of the communication passage and passes through the communication passage according to the displacement of the driven piston that interlocks with the drive piston. and a fluid control unit that controls the passage resistance of the electrorheological fluid by changing the voltage applied to the electrorheological fluid moving between the fifth fluid chamber and the sixth fluid chamber, for example. There is no need to provide, on the driven piston side, a piston rod or the like that protrudes to the outside from the second cylinder in which the driven piston is accommodated, and there is no fear of leakage of electrorheological fluid from the insertion portion of the piston rod.

As a result, there is no reduction in control accuracy due to leakage of the electrorheological fluid that generates the braking force, or in other words, intrusion of outside air due to a reduction in the amount of electrorheological fluid sealed, and furthermore,
By appropriately controlling the voltage applied to the electrorheological fluid passing through the fluid control section, it is possible to stably control the arbitrary speed and stop position of the load driven by the drive piston.

In addition, by controlling the voltage applied to the electrorheological fluid,
Since it has a structure that arbitrarily adjusts the viscous resistance of the electrorheological fluid, that is, the braking force obtained by the driven piston, it is compatible with automatic control such as a computer, making it easy to automate control of load speed and stop position. It can be realized.

Furthermore, the structure is such that the electrorheological fluid that generates the braking force is sealed in a sealed space that does not have any moving parts that require a fluid seal, such as the insertion part of the piston rod.
This eliminates the need for complicated operations such as replacing seals and replenishing electrorheological fluid, making maintenance management of the cylinder device easier.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an example of the structure of a cylinder device according to an embodiment of the present invention, and FIG.
3 is an explanatory diagram schematically showing an example of the configuration of the fluid control section, FIG. 4 is a diagram showing an example of the characteristics of electrorheological fluid, and FIG. 5 is a diagram showing an example of the characteristics of the electrorheological fluid. FIG. 6 is a cross-sectional view schematically showing an example of the configuration of a speed control device according to an embodiment, FIG. 6 is a cross-sectional view of the portion indicated by line VI-VI in FIG. 5, and FIG. FIG. 8 is a sectional view showing an example of the configuration of a speed control device according to another embodiment of the present invention. FIG. 8 is a sectional view showing an example of the configuration of a cylinder device according to another embodiment of the present invention. l... Inner tube, 1a... Packing, 2... Outer chinive, 2a... Packing, 2b... Communication path, 3... Rod cover 3a... Fixing ring, 3b... Communication path, 4--Head cover 4a...Fixing ring, 4b...Communication path, 5...Drive piston, 5a...Holding member, 5b...Magnet, 5C...Q yoke, 5d.・ ・Screw, 5e1″ packing, 6... Piston rod, 6a... Packing, 11 a. 20 a. 23°7, 8... Port, 9... Driven piston, 9b... Magnet, 9C...Yoke, 9e...Packing, 10...Electrorheological fluid, 11...Fluid control unit, 11b...Electrode, IC...Voltage regulator, 12...Valve, 20. ...Cylinder, 20b...Communication hole, 20e...Packing, 21...Driven piston, 21b...Magnet, 2IC...Yoke, 22...Communication path, 23A...Slide member, 23b... Magnet, 23C... Yoke, 24... Controlled object, 25... Communication tube, 25a, 25b... Packing, 30... Cylinder, 30a... Port, 30b...・Port, 31... Drive piston, 31b... Magnet, 31c... Yoke, 31e... Packet, 32... Slide member, 32b... Magnet, 32c... Yoke, R1-R8 ...Fluid chamber.

Claims (1)

[Claims] 1. A cylinder, a driven piston that separates first and second fluid chambers within the cylinder, and a driven piston located outside the cylinder that engages with a controlled object and mediates magnetic force. a sliding member interlocking with the driven piston; a communication passage connecting the first fluid chamber and the second fluid chamber; and an electric current sealed in the cylinder whose viscosity changes depending on the magnitude of applied voltage. A viscous fluid is interposed in a part of the communication path, and the first
and a fluid control section that controls the passage resistance of the electrorheological fluid by changing the voltage applied to the electrorheological fluid moving between the fluid chamber and the second fluid chamber. Control device. 2. First and second cylinders and third and fourth fluid chambers are separated from each other inside the first cylinder, and thrust is generated by fluid pressure supplied to and discharged from the third and fourth fluid chambers. a driving piston that generates a flow, a piston rod that projects outward from at least one end of the first cylinder and couples a load to the piston, and fifth and sixth fluid chambers that are separated within the second cylinder. , a driven piston interlocking with the driving piston through magnetic force, a communication passage connecting the fifth fluid chamber and the sixth fluid chamber, and an applied voltage sealed in the fifth and sixth fluid chambers. an electrorheological fluid whose viscosity changes depending on the size of the fluid; and an electrorheological fluid that is interposed in a part of the communicating path and passes through the communicating path to the fifth fluid chamber and the sixth fluid chamber in accordance with the displacement of the driven piston that interlocks with the driving piston. A cylinder device comprising: a fluid control unit that controls passage resistance of the electrorheological fluid by changing a voltage applied to the electrorheological fluid moving between the fluid chamber and the fluid chamber of the cylinder device. 3. The first and second cylinders are composed of an inner tube and an outer tube having a double structure,
The driven piston has a donut shape that defines the fifth and sixth fluid chambers between the inner tube and the outer tube, and surrounds the driving piston via the inner tube. Section 2
The cylinder device described. 4. The first and second cylinders are arranged in parallel at a desired interval, and the driving piston and the driven piston are provided outside the first and second cylinders so as to be freely displaceable in the axial direction, 3. The cylinder device according to claim 2, wherein the cylinder device is interlocked with the driving piston and the driven piston through slide members that are respectively connected to the driving piston and the driven piston via magnetic force.