JPH0329236U - - Google Patents

Info

Publication number
JPH0329236U
JPH0329236U JP9051989U JP9051989U JPH0329236U JP H0329236 U JPH0329236 U JP H0329236U JP 9051989 U JP9051989 U JP 9051989U JP 9051989 U JP9051989 U JP 9051989U JP H0329236 U JPH0329236 U JP H0329236U
Authority
JP
Japan
Prior art keywords
stage
movement
fine movement
thin fine
lifting stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9051989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9051989U priority Critical patent/JPH0329236U/ja
Publication of JPH0329236U publication Critical patent/JPH0329236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)

Description

【図面の簡単な説明】
第１図は本考案の薄型微動Ｚステージ装置の一
実施例を示す平面図、第２図は第１図の薄型微動
Ｚステージ装置の断面図、第３図は従来の薄型微
動Ｚステージ装置の一例を示す平面図、第４図は
第３図の薄型微動Ｚステージ装置の断面図である
。 １……ベース部、２……水平移動プレート、３
……昇降ステージ、４……モータ、５……ボール
ねじ、６……テーパブロツク、７……カムフオロ
ワ、８，９……板ばね。

Claims (1)

    【実用新案登録請求の範囲】
  1. 放射状に配置して昇降ステージに取付けること
    により前記昇降ステージの移動を上下方向に限定
    して案内する複数の板ばねを備えることを特徴と
    する薄型微動Ｚステージ装置。
JP9051989U 1989-07-31 1989-07-31 Pending JPH0329236U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9051989U JPH0329236U (ja) 1989-07-31 1989-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9051989U JPH0329236U (ja) 1989-07-31 1989-07-31

Publications (1)

Publication Number Publication Date
JPH0329236U true JPH0329236U (ja) 1991-03-22

Family

ID=31640035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9051989U Pending JPH0329236U (ja) 1989-07-31 1989-07-31

Country Status (1)

Country Link
JP (1) JPH0329236U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138938A1 (ja) * 2010-05-07 2011-11-10 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138938A1 (ja) * 2010-05-07 2011-11-10 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置
JP5702373B2 (ja) * 2010-05-07 2015-04-15 Ｎｓｋテクノロジー株式会社 支持装置及び露光装置

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