JPH0329746Y2 - - Google Patents
Info
- Publication number
- JPH0329746Y2 JPH0329746Y2 JP14679084U JP14679084U JPH0329746Y2 JP H0329746 Y2 JPH0329746 Y2 JP H0329746Y2 JP 14679084 U JP14679084 U JP 14679084U JP 14679084 U JP14679084 U JP 14679084U JP H0329746 Y2 JPH0329746 Y2 JP H0329746Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- generated gas
- analyzer
- happo
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 80
- 239000012159 carrier gas Substances 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 9
- 238000004817 gas chromatography Methods 0.000 claims description 4
- 238000002076 thermal analysis method Methods 0.000 description 16
- 238000005259 measurement Methods 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Sampling And Sample Adjustment (AREA)
Description
【考案の詳細な説明】
(イ) 産業上の利用分野
本考案は、熱分析過程で発生する発生ガスの分
析を行う発生ガス分析装置に関し、特に、熱分析
過程における個々の温度で発生する発生ガスの分
析と熱分析の全過程で発生する発生ガスの分析、
所謂全量分析とを、一台の装置で行い得る発生ガ
ス分析装置に関する。[Detailed explanation of the invention] (a) Industrial application field The present invention relates to an evolved gas analyzer that analyzes evolved gases generated during a thermal analysis process. Analysis of gases generated during the entire process of gas analysis and thermal analysis,
The present invention relates to an evolved gas analyzer that can perform so-called total analysis with a single device.
(ロ) 従来技術
発生ガス分析装置は、熱分析過程において発生
する分解ガス等の発生ガスの定性及び定量を行な
うために使用され、熱分析の結果を更に詳細かつ
正確にするが、従来の発生ガス分析装置は、ガス
クロマトグラフ分析用分離カラムを、計量管を備
える六方コツクを介して熱分析装置の発生ガス路
に接続させた構造となつているために熱分析にお
ける個々の温度での発生ガスの各成分分析を行う
にとどまり、熱分析の全温度域において発生する
全発生ガスの各成分分析は困難であつた。そこ
で、このような熱分析の全温度域において発生す
る全発生ガスの各成分分析は、個々の発生ガスの
分析結果から積算により求められている。(b) Prior art Generated gas analyzers are used to qualitatively and quantitatively quantify generated gases such as decomposed gases generated in the thermal analysis process, and make the results of thermal analysis more detailed and accurate. The gas analyzer has a structure in which a separation column for gas chromatography analysis is connected to the generated gas path of the thermal analyzer through a hexagonal tube equipped with a measuring tube. However, it was difficult to analyze each component of all gases generated in the entire temperature range of thermal analysis. Therefore, the analysis of each component of all generated gases generated in the entire temperature range of such thermal analysis is obtained by integrating the analysis results of each generated gas.
しかしながら、このように積算による結果は、
とかく偏りを生じ易く、また、より正確な結果を
得るためには、測定温度間隔を小さくしなければ
ならず、必要以上に分析回数が多くなり、問題で
あつた。しかも、例えば、分解ガスは、比較的に
広い温度範囲に亘つて発生するために、微量成分
の検出が困難となり、分析誤差の原因となつてい
る。 However, the result of integration in this way is
This tends to cause bias, and in order to obtain more accurate results, it is necessary to reduce the measurement temperature interval, which causes a problem in that the number of analyzes is increased more than necessary. Furthermore, for example, decomposed gas is generated over a relatively wide temperature range, making it difficult to detect trace components and causing analysis errors.
(ハ) 目的
本考案は、従来の発生ガス分析装置の問題点を
解消することを目的とするものであり、一台の発
生ガス分析装置により、しかも、簡単な操作によ
り、熱分析における個々の温度での発生ガスの各
成分分析を行うことができ、また、熱分析の全温
度域において発生する発生ガスの各成分の全量を
定量することができる発生ガス分析装置を提供す
るものである。(C) Purpose The purpose of this invention is to solve the problems of conventional generated gas analyzers. The object of the present invention is to provide a generated gas analyzer that can analyze each component of generated gas at different temperatures and can quantify the total amount of each component of generated gas in the entire temperature range of thermal analysis.
(ニ) 構成
本考案は、カラムに適当な充填剤を充填するこ
とにより、熱分析の全温度域において発生する発
生ガスから、測定すべき成分がカラムに容易に捕
集できる点に注目して、温度が調節できる適当な
充填剤を充填した測定成分捕集用のカラムと計量
管を八方コツクに接続させることによりなされた
ものである。(D) Structure The present invention focuses on the fact that by filling the column with an appropriate packing material, the components to be measured can be easily collected in the column from the gas generated in the entire temperature range of thermal analysis. This was achieved by connecting a measuring tube and a column filled with a suitable temperature-adjustable packing material to collect the component to be measured.
すなわち、本考案は、熱分析装置の発生ガス路
にクロマトグラフ分析装置を接続した発生ガス分
析装置において、流路切り替え用の四つの接続路
を有する八方コツクの一つの接続口を熱分析装置
の発生ガス路に接続し、隣合う八方コツクの二つ
の接続口を、計量管の入口及び出口に接続し、隣
合う八方コツクの二つの接続口を、捕集カラム温
度設定装置に設けられた捕集カラムの入口及び出
口に接続し、残る八方コツクの接続口を、ガスク
ロマトグラフ分析用分離カラムの入口、キヤリヤ
ーガス流路及びガス排出路に接続して、八方コツ
クが設けられていることを特徴とする発生ガス分
析装置にある。 That is, the present invention provides a developed gas analyzer in which a chromatographic analyzer is connected to the generated gas path of the thermal analyzer, and one connection port of the Happo Kotsukku, which has four connection paths for flow path switching, is connected to the generated gas path of the thermal analyzer. Connect to the generated gas path, connect the two connection ports of the adjacent Happo Kotsu to the inlet and outlet of the metering tube, and connect the two connection ports of the adjacent Happo Kotuku to the collection column temperature setting device. It is characterized in that it is connected to the inlet and outlet of the collection column, and the remaining connection port of the Happo-kottoku is connected to the inlet of the separation column for gas chromatography analysis, the carrier gas flow path, and the gas discharge path. It is located in the generated gas analyzer.
本考案において、八方コツクは、8個の流路を
有し、この流路間の接続を適宜切換えるものであ
り、このようなことができるものであれば如何な
る八方コツク(八方バルブを含む。)も使用する
ことができる。八方コツクとしては、ロータリス
ライドバルブ、リニヤスライドバルブ、ピストン
バルブ等各種の型式のバルブ及びコツクが使用で
きる。ロータリスライドバルブ型式の場合は、8
個の接続口から個々に延びる8個の流路を有する
ステータと、これらの流路間を適宜切換え接続す
る流路を有するロータを有する。 In the present invention, the Happo Kotsuku has eight channels, and the connections between these channels can be changed as appropriate, and any Happo Kotsuku (including Happo valves) can be used as long as it can do this. can also be used. As the eight-way valve, various types of valves and valves such as rotary slide valves, linear slide valves, piston valves, etc. can be used. For rotary slide valve models, 8
The rotor has a stator having eight flow channels extending individually from eight connection ports, and a rotor having flow channels for appropriately switching and connecting these flow channels.
この八方コツクは、分解ガス等の発生ガスが、
この流路内で凝縮しないように保温槽内に収容さ
れる。 This Happo Kotuku is designed to prevent gases generated from decomposition gas, etc.
It is housed in a heat insulating tank to prevent condensation within this flow path.
捕集カラムは、分解ガス等の発生ガス中の少く
とも一成分が容易にかつ円滑に凝縮捕集できると
共に容易にかつ円滑に流出するように、容易に温
度設定ができる捕集カラム温度設定装置内に配置
される。捕集カラムには、このようなガスの捕集
を行うために充填剤が充填される。 The collection column is a collection column temperature setting device that can easily set the temperature so that at least one component in generated gas such as cracked gas can be easily and smoothly condensed and collected, and can also flow out easily and smoothly. placed within. The collection column is filled with a packing material to perform such gas collection.
八方コツクの接続口を、熱分析装置の発生ガス
路、計量管の入口及び出口、捕集カラムの入口及
び出口、ガスクロマトグラフ分析用分離カラム入
口、キヤリヤーガス流路並びにガス排出路に接続
するには、切換操作が、例えば、ロータの回転方
向に従つて、順になるように接続するのが好まし
い。 To connect the connection port of the Happo Kotuku to the generated gas path, metering tube inlet and outlet, collection column inlet and outlet, separation column inlet for gas chromatography analysis, carrier gas flow path, and gas discharge path of the thermal analyzer. , it is preferable that the switching operations are connected in order, for example, according to the rotational direction of the rotor.
以下、添付図面を参照して、本考案の具体化を
示す一実施例について説明するが、本考案の技術
的範囲は、この説明によつて制限されるものでは
ない。 An embodiment of the present invention will be described below with reference to the accompanying drawings, but the technical scope of the present invention is not limited by this description.
(ホ) 実施例
図は、本発明の発生ガス分析装置の一実施例を
示す概略の説明図である。(E) Embodiment The figure is a schematic explanatory diagram showing an embodiment of the generated gas analyzer of the present invention.
本例において発生ガス分析装置は、熱分析装置
1、例えば示差熱分析装置、八方バルブ2、計量
管3、発生ガス中の測定成分捕集用のカラム4、
捕集カラム温度設定槽5、ガスクロマトグラフ
6、保温槽7、熱分析用キヤリヤーガス8、キヤ
リヤーガス流路9及びガス排出流路10を接続し
て形成される。 In this example, the generated gas analyzer includes a thermal analyzer 1, such as a differential thermal analyzer, an eight-way valve 2, a metering tube 3, a column 4 for collecting components to be measured in the generated gas,
It is formed by connecting a collection column temperature setting tank 5, a gas chromatograph 6, a heat insulating tank 7, a carrier gas for thermal analysis 8, a carrier gas passage 9, and a gas discharge passage 10.
八方バルブ2には、接続口11,12,13,
14,15,16,17及び18の合計8個の流
路が形成されている。これらの接続口の中、接続
口11は熱分析装置1の発生ガス路19に接続し
ており、接続口12は計量管3の入口20に、ま
た、接続口13は計量管を一点鎖線27,27
1,272及び273のようにして、定速加熱過
程にある熱分析装置1の発生ガスを、発生ガス路
19から接続口11、接続流路27、接続口1
3、計量管3の入口20及び出口21、接続口1
2、接続流路271並びに接続口18からガス排
出路10へ流す。他方、キヤリヤーガスは、キヤ
リヤーガス流路9から接続口17、接続流路27
2、接続口14、前記捕集用のカラム4の入口2
2及び出口23、接続口15、接続流路273、
接続口16からガスクロマトグラフの分析用分離
カラム24へ流れる。 The Happo valve 2 has connection ports 11, 12, 13,
A total of eight channels, 14, 15, 16, 17, and 18, are formed. Among these connection ports, connection port 11 connects to the generated gas path 19 of the thermal analyzer 1, connection port 12 connects to the inlet 20 of the metering tube 3, and connection port 13 connects the metering tube to the dashed line 27. ,27
1, 272, and 273, the generated gas of the thermal analyzer 1 in the constant-rate heating process is transferred from the generated gas path 19 to the connection port 11, the connection flow path 27, and the connection port 1.
3. Inlet 20 and outlet 21 of metering tube 3, connection port 1
2. Flow from the connection channel 271 and connection port 18 to the gas discharge channel 10. On the other hand, the carrier gas flows from the carrier gas flow path 9 to the connection port 17 and the connection flow path 27.
2, connection port 14, inlet 2 of the collection column 4
2 and outlet 23, connection port 15, connection flow path 273,
It flows from the connection port 16 to the analytical separation column 24 of the gas chromatograph.
熱分析装置1の温度が所定温度に至つたところ
で、八方バルブのロータを右回りに回して、ロー
タの接続用流路を点線の態様にすると、キヤリヤ
ーガスが、キヤリヤーガス流路9から八方バルブ
2の接続口17に入り、接続流路281から接続
口12を経て、計量管3の入口20から計量管3
に入り、計量管3に計量された発生ガスを、計量
管3の出口21から接続流路282及び接続口1
6を経て、ガスクロマトグラフ6の分析用分離カ
ラム24に入口25から流入し、検出器30で成
分濃度が検出される。このように、一点鎖線2
7,271,272及び273の接続流路により
接続して、発生ガスを計量管3に計量し、ついで
点線の28,281,282及び283の接続流
路に3の出口21に接続し、接続口14は発生ガ
ス中の測定成分捕集用のカラム4の入口22に、
また接続口15は該捕集用のカラム4の出口23
に接続し、接続口16はガスクロマトグラフの分
析用分離カラム24の入口25に、そして、接続
口17はキヤリヤーガス流路9に、また接続口1
8はガス排出流路10に接続している。八方バル
ブのロータリ側の接続用流路は、実線路26,2
61,262及び263、一点鎖線路27,27
1,272及び273並びに点線路28,28
1,282,283に示されるように、接続口1
1乃至18間において、少くとも3態様の接続を
行うことができるものである。 When the temperature of the thermal analyzer 1 reaches a predetermined temperature, the rotor of the eight-way valve is turned clockwise so that the connection passage of the rotor is set as shown by the dotted line, and the carrier gas flows from the carrier gas passage 9 to the eight-way valve 2. It enters the connection port 17, passes through the connection channel 281 to the connection port 12, and enters the metering tube 3 from the inlet 20 of the metering tube 3.
The generated gas is metered into the metering tube 3 from the outlet 21 of the metering tube 3 to the connecting flow path 282 and the connecting port 1.
6, it flows into the analysis separation column 24 of the gas chromatograph 6 from the inlet 25, and the component concentration is detected by the detector 30. In this way, the dashed line 2
7, 271, 272 and 273 are connected, and the generated gas is metered into the metering tube 3, and then the dotted line connection channels 28, 281, 282 and 283 are connected to the outlet 21 of 3, and connected. The port 14 is connected to the inlet 22 of the column 4 for collecting the component to be measured in the generated gas.
In addition, the connection port 15 is connected to the outlet 23 of the column 4 for collection.
, the connection port 16 is connected to the inlet 25 of the analytical separation column 24 of the gas chromatograph, the connection port 17 is connected to the carrier gas flow path 9, and the connection port 1
8 is connected to a gas exhaust flow path 10. The connection flow path on the rotary side of the eight-way valve is the real line 26, 2.
61, 262 and 263, chain lines 27, 27
1,272 and 273 and dotted lines 28, 28
1,282,283, connection port 1
Between 1 and 18, connections can be made in at least three ways.
ガスクロマトグラフ6は、分析用分離用カラム
24と並んで標準側のカラム29が設けられてお
り、共に検出器30を経由して流出路31に接続
している。 The gas chromatograph 6 is provided with a standard side column 29 alongside an analytical separation column 24, both of which are connected to an outflow path 31 via a detector 30.
本例の発生ガス分析装置は以上のように形成さ
れるので、八方バルブのロータの接続用流路を切
り換えて、個々の温度における発生ガスの成分分
析が行われる。このようにして、発生ガスの濃度
変化を測定することができる。 Since the generated gas analyzer of this example is constructed as described above, the component analysis of the generated gas at each temperature is performed by switching the flow path for connecting the rotor of the eight-way valve. In this way, changes in the concentration of the generated gas can be measured.
発生ガスの各成分の全量を定量する場合には、
まず、ロータの接続流路を実線26,261,2
62及び263にする。熱分析で発生する発生ガ
スは、熱分析装置1の発生ガス路19から接続口
11、接続流路261、接続口14を経て、発生
ガス中の測定成分捕集用のカラム4に入口22か
ら入り、その出口23から、接続口15、接続流
路262、接続口18を経てガス排出路10に流
れる。 When quantifying the total amount of each component of generated gas,
First, connect the rotor to the solid lines 26, 261, 2.
62 and 263. Generated gas generated during thermal analysis passes from the generated gas path 19 of the thermal analyzer 1 through the connection port 11, the connection flow path 261, and the connection port 14, and then enters the column 4 for collecting the measurement component in the generated gas from the inlet 22. The gas flows from the outlet 23 to the gas discharge path 10 via the connection port 15, the connection flow path 262, and the connection port 18.
前記測定成分捕集用のカラム4が収容されてい
る捕集カラム温度設定槽5には、液体酸素等の冷
媒が、測定成分に応じて適宜入れられており、発
生ガス中の測定成分捕集用のカラム4は所定温度
に冷却されている。また、この発生ガス中の測定
成分捕集用のカラム4には、測定される成分に応
じて、適宜の充填剤が充填されている。 A refrigerant such as liquid oxygen is appropriately placed in the collection column temperature setting tank 5 in which the column 4 for collecting the measurement component is accommodated, depending on the measurement component, and the collection column temperature setting tank 5 houses the column 4 for collecting the measurement component. The column 4 used for this purpose is cooled to a predetermined temperature. Further, the column 4 for collecting the component to be measured in the generated gas is filled with an appropriate filler depending on the component to be measured.
熱分析が終了した時点で、八方バルブのロータ
を回して、接続流路を点線の28,281,28
2及び283に切り換える。熱分析の際に発生す
る発生ガス中の測定成分は、前記測定成分捕集用
のカラム4に捕集されている。そこで捕集カラム
温度設定槽5から冷媒を抜き、湯又は加熱オイル
等の適当な加熱媒体を入れて、測定成分が捕集さ
れている前記捕集用のカラム4を加熱する。最適
な温度に前記測定成分捕集用のカラム4が加熱さ
れたところで、八方バルブのロータを回して、点
線の接続流路28,281,282及び283か
ら一点鎖線の接続流路に切換える。そこで、キヤ
リヤーガスは、キヤリヤーガス流路9から、接続
口17、接続流路272、接続口14を経て、発
生ガス中の測定成分捕集用のカラム4にその入口
22から入り、測定成分も該捕集用のカラム4の
出口23から接続流路273、接続口16を経由
して、分析用分離カラム24へその入口から一挙
に流入させ、分析する。 When the thermal analysis is completed, turn the rotor of the eight-way valve to connect the connecting channels to the dotted lines 28, 281, 28.
2 and 283. Components to be measured in gas generated during thermal analysis are collected in the column 4 for collecting the components to be measured. Therefore, the refrigerant is removed from the collection column temperature setting tank 5, and a suitable heating medium such as hot water or heating oil is added to heat the collection column 4 in which the measurement component is collected. When the column 4 for collecting the component to be measured is heated to the optimum temperature, the rotor of the eight-way valve is turned to switch from the dotted line connecting channels 28, 281, 282, and 283 to the one-dot chain line connecting channel. Therefore, the carrier gas enters from the carrier gas flow path 9, through the connection port 17, the connection flow path 272, and the connection port 14, into the column 4 for collecting the measurement component in the generated gas through its inlet 22, and the measurement component is also collected. The water flows all at once from the outlet 23 of the collection column 4, via the connection channel 273 and the connection port 16, into the analysis separation column 24 from its inlet, and is analyzed.
このようにして、本考案では、一台の発生ガス
分析装置によつて、熱分析における発生ガスの濃
度変化の測定と、発生ガスの各成分の全量を測定
することができる。 In this manner, in the present invention, it is possible to measure the concentration change of the generated gas in thermal analysis and the total amount of each component of the generated gas using a single generated gas analyzer.
(ヘ) 効果
本考案は、捕集カラム温度設定装置に発生ガス
中の測定成分捕集用の捕集カラムを設け、この捕
集カラムを、発生ガス分析装置の切換えコツク部
に取り付けたので、熱分析における発生ガスの各
成分について、その全量を定量することが流路切
換え操作で行えるようになつたので、従来のよう
に、成分濃度変化の個々の値からいちいち積算す
る必要もなくなり、測定の偏りが倍加することも
なく、また微量成分も濃縮されるので、測定が正
確となり測定値の信頼性は向上する。しかも、本
考案においては、発生ガス分析装置の切換えコツ
ク部に八方コツクを使用し、発生ガス中の測定成
分捕集用の捕集カラムを接続すると共に計量管を
も接続したので、コツクによる流路の切換えとい
う簡単な操作により、しかも、一台の装置で、熱
分析における発生ガスについて、温度変化に伴う
発生ガスの各成分濃度の変化が測定できると共に
発生ガスの各成分の全量をも測定することができ
るので使用に便利である。(f) Effects In this invention, a collection column for collecting measurement components in the generated gas is provided in the collection column temperature setting device, and this collection column is attached to the switching unit of the generated gas analyzer. It is now possible to quantify the total amount of each component of the generated gas in thermal analysis by switching the flow path, so there is no need to integrate each component concentration change individually, as in the past. Since the bias in the sample does not double and trace components are concentrated, the measurement becomes more accurate and the reliability of the measured value is improved. Furthermore, in the present invention, a Happo Kotoku is used in the switching part of the generated gas analyzer, and a collection column for collecting the measured components in the generated gas is connected, as well as a measuring tube. With the simple operation of switching paths, and with a single device, it is possible to measure changes in the concentration of each component of the generated gas due to temperature changes in thermal analysis, as well as measure the total amount of each component of the generated gas. It is convenient to use because it can be
このように、本考案の発生ガス分析装置は、従
来の装置に比して機能上等すぐれた点が多く、そ
の与える影響は大きい。 As described above, the generated gas analyzer of the present invention has many functional advantages over conventional devices, and its influence is significant.
図は、本発明の発生ガス分析装置の一実施例を
示す概略の説明図である。
1は熱分析装置、2は八方コツク、3は計量
管、4は発生ガス中の測定成分捕集用のカラム、
5はカラム温度設定槽、6はガスクロマトグラ
フ、7は保温槽、8及び9はキヤリヤーガス流
路、10はガス排出路である。
The figure is a schematic explanatory diagram showing one embodiment of the generated gas analyzer of the present invention. 1 is a thermal analysis device, 2 is a Happo Kotoku, 3 is a metering tube, 4 is a column for collecting measurement components in the generated gas,
5 is a column temperature setting tank, 6 is a gas chromatograph, 7 is a heat insulating tank, 8 and 9 are carrier gas channels, and 10 is a gas discharge channel.
Claims (1)
装置を接続した発生ガス分析装置において、流路
切り替え用の四つの接続路を有する八方コツクの
一つの接続口を熱分析装置の発生ガス路に接続
し、隣合う八方コツクの二つの接続口を、計量管
の入口及び出口に接続し、隣合う八方コツクの二
つの接続口を、捕集カラム温度設定装置に設けら
れた捕集カラムの入口及び出口に接続し、残る八
方コツクの接続口を、ガスクロマトグラフ分析用
分離カラムの入口、キヤリヤーガス流路及びガス
排出路に接続して、八方コツクが設けられている
ことを特徴とする発生ガス分析装置。 In a generated gas analyzer in which a chromatographic analyzer is connected to the generated gas path of the thermal analyzer, one connection port of the Happo Kotoku, which has four connection paths for flow path switching, is connected to the generated gas path of the thermal analyzer. , connect the two connection ports of the adjacent Happo Kotsu to the inlet and outlet of the measuring tube, and connect the two connection ports of the adjacent Happo Kotsu to the inlet and outlet of the collection column provided in the collection column temperature setting device. What is claimed is: 1. A generated gas analyzer, characterized in that an Happo kettle is provided by connecting the remaining Happo kettle to the inlet of a separation column for gas chromatography analysis, a carrier gas flow path, and a gas discharge path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14679084U JPH0329746Y2 (en) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14679084U JPH0329746Y2 (en) | 1984-09-28 | 1984-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161461U JPS6161461U (en) | 1986-04-25 |
| JPH0329746Y2 true JPH0329746Y2 (en) | 1991-06-25 |
Family
ID=30705027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14679084U Expired JPH0329746Y2 (en) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0329746Y2 (en) |
-
1984
- 1984-09-28 JP JP14679084U patent/JPH0329746Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161461U (en) | 1986-04-25 |
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