JPH0330841U - - Google Patents
Info
- Publication number
- JPH0330841U JPH0330841U JP9079389U JP9079389U JPH0330841U JP H0330841 U JPH0330841 U JP H0330841U JP 9079389 U JP9079389 U JP 9079389U JP 9079389 U JP9079389 U JP 9079389U JP H0330841 U JPH0330841 U JP H0330841U
- Authority
- JP
- Japan
- Prior art keywords
- case
- opening
- movable electrode
- pressure sensor
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は、この考案の一実施例に係る静電容量
式圧力センサの縦断面図、第２図は、同静電容量
式圧力センサの補正用金属ベースの外観斜視図、
第３図は、同静電容量式圧力センサに適用される
回路のブロツク図、第４図は、従来の静電容量式
圧力センサの縦断面図である。
２……ケース、２ａ……圧力導入口、２ｂ……
開口部、３……ダイヤフラム、４……可動電極、
５……固定電極、７……補正用金属ベース、９ａ
，９ｂ，９ｃ……はんだ。
FIG. 1 is a longitudinal sectional view of a capacitive pressure sensor according to an embodiment of the invention, and FIG. 2 is an external perspective view of a correction metal base of the capacitive pressure sensor.
FIG. 3 is a block diagram of a circuit applied to the capacitive pressure sensor, and FIG. 4 is a longitudinal sectional view of a conventional capacitive pressure sensor. 2...Case, 2a...Pressure inlet, 2b...
opening, 3... diaphragm, 4... movable electrode,
5...Fixed electrode, 7...Metal base for correction, 9a
, 9b, 9c...Solder.
Claims (1)
ケース内にその周縁を支持して設けられ、このケ
ース内を圧力導入口側と開口部側とに隔離するダ
イヤフラムと、このダイヤフラム上に支持される
可動電極と、この可動電極と対向し、前記開口部
を被蓋する固定電極とを備えてなる静電容量式圧
力センサにおいて、 前記固定電極と反対側で、前記可動電極と対向
する補正用電極を、前記ケースに配備したことを
特徴とする静電容量式圧力センサ。[Scope of Claim for Utility Model Registration] A case having a pressure introduction port and an opening, and a diaphragm that is provided within the case to support its periphery and isolates the inside of the case into a pressure introduction port side and an opening side. A capacitive pressure sensor comprising: a movable electrode supported on the diaphragm; and a fixed electrode facing the movable electrode and covering the opening; A capacitive pressure sensor characterized in that a correction electrode facing the movable electrode is provided in the case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9079389U JPH0330841U (en) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9079389U JPH0330841U (en) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330841U true JPH0330841U (en) | 1991-03-26 |
Family
ID=31640306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9079389U Pending JPH0330841U (en) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330841U (en) |
-
1989
- 1989-07-31 JP JP9079389U patent/JPH0330841U/ja active Pending