JPH0331295U - - Google Patents
Info
- Publication number
- JPH0331295U JPH0331295U JP8957989U JP8957989U JPH0331295U JP H0331295 U JPH0331295 U JP H0331295U JP 8957989 U JP8957989 U JP 8957989U JP 8957989 U JP8957989 U JP 8957989U JP H0331295 U JPH0331295 U JP H0331295U
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- fired
- carbon
- thickness
- nitride layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 4
- 238000010304 firing Methods 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Description
第１図ａは本考案の窒化アルミニウム焼成用治
具の一実施例であるセツターを示す斜視図、第１
図ｂは同時ａ中の−線断面図である。第２図
は本考案の他の実施例である匣鉢を示す断面図で
ある。第３図ａは従来の焼成用セツターを示す斜
視図、第３図ｂは同図ａ中のＹ−Ｙ線断面図であ
る。
１……セツター、２……基体、３……窒化アル
ミニウム層、Ａ……被焼成体。
Figure 1a is a perspective view showing a setter which is an embodiment of the aluminum nitride firing jig of the present invention;
Figure b is a cross-sectional view taken along the line - during the same period a. FIG. 2 is a sectional view showing a sagger according to another embodiment of the present invention. FIG. 3a is a perspective view showing a conventional firing setter, and FIG. 3b is a sectional view taken along the line Y--Y in FIG. 3a. DESCRIPTION OF SYMBOLS 1... Setter, 2... Substrate, 3... Aluminum nitride layer, A... Body to be fired.
Claims (1)
接する表面に、厚み０．１mm以上の窒化アルミニ
ウム層を形成したことを特徴とする窒化アルミニ
ウム焼成用治具。 An aluminum nitride firing jig, characterized in that an aluminum nitride layer with a thickness of 0.1 mm or more is formed on at least the surface of a base made of carbon that is in contact with an object to be fired.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957989U JPH0331295U (en) | 1989-07-28 | 1989-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8957989U JPH0331295U (en) | 1989-07-28 | 1989-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0331295U true JPH0331295U (en) | 1991-03-27 |
Family
ID=31639153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8957989U Pending JPH0331295U (en) | 1989-07-28 | 1989-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331295U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159638B2 (en) * | 1981-07-24 | 1986-12-17 | Scolastico Carlo | |
| JPS63290393A (en) * | 1987-05-22 | 1988-11-28 | イビデン株式会社 | Baking vessel |
-
1989
- 1989-07-28 JP JP8957989U patent/JPH0331295U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6159638B2 (en) * | 1981-07-24 | 1986-12-17 | Scolastico Carlo | |
| JPS63290393A (en) * | 1987-05-22 | 1988-11-28 | イビデン株式会社 | Baking vessel |