JPH0331296U - - Google Patents
Info
- Publication number
- JPH0331296U JPH0331296U JP8931989U JP8931989U JPH0331296U JP H0331296 U JPH0331296 U JP H0331296U JP 8931989 U JP8931989 U JP 8931989U JP 8931989 U JP8931989 U JP 8931989U JP H0331296 U JPH0331296 U JP H0331296U
- Authority
- JP
- Japan
- Prior art keywords
- heater element
- heater
- elongated hole
- cross
- hole size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
ａ，ｂ，ｃはそれぞれ第１図で示したリフテイン
グピースの断面図、下部サポートピースの断面図
、リフテイングピースサポートの斜視図、第３図
ａ，ｂ，ｃはそれぞれ第２図と対応した従来部品
を示す図である。
１……リフテイングピース、２……リフテイン
グピースサポート、３……ヒータ端子、４……ヒ
ータシエル、５……冷却カバー、６……下部サポ
ートピース、７……ヒータエレメント、８……断
熱材。
Figure 1 is a longitudinal sectional view of an embodiment of the present invention, and Figures 2a, b, and c are sectional views of the lifting piece shown in Figure 1, the lower support piece, and the lifting piece support, respectively. The perspective views and FIGS. 3a, 3b, and 3c are views showing conventional parts corresponding to FIG. 2, respectively. DESCRIPTION OF SYMBOLS 1... Lifting piece, 2... Lifting piece support, 3... Heater terminal, 4... Heater shell, 5... Cooling cover, 6... Lower support piece, 7... Heater element, 8... Insulating material .
Claims (1)
炉用のヒータ装置において、前記ヒータエレメン
トを支持する上部及び下部の支持部がそれぞれヒ
ータエレメントをくわえ込んで固定するための断
面長穴状に形成された穴部を有し、且つ前記上部
支持部を固定するサポート部がヒータエレメント
の長手方向に多分割されていることを特徴とする
ヒータ装置。 (2) ヒータエレメントの上部支持部の断面長穴
寸法が下部支持部の断面長穴寸法より長い穴寸法
である請求項(1)記載のヒータ装置。[Claims for Utility Model Registration] (1) In a heater device for a diffusion furnace using a linear heater element, upper and lower support parts that support the heater element each hold and fix the heater element. What is claimed is: 1. A heater device characterized in that the support part for fixing the upper support part is divided into multiple parts in the longitudinal direction of the heater element. (2) The heater device according to claim (1), wherein the cross-sectional elongated hole size of the upper support portion of the heater element is longer than the cross-sectional elongated hole size of the lower support portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8931989U JPH0636479Y2 (en) | 1989-07-28 | 1989-07-28 | Heater device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8931989U JPH0636479Y2 (en) | 1989-07-28 | 1989-07-28 | Heater device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0331296U true JPH0331296U (en) | 1991-03-27 |
| JPH0636479Y2 JPH0636479Y2 (en) | 1994-09-21 |
Family
ID=31638902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8931989U Expired - Lifetime JPH0636479Y2 (en) | 1989-07-28 | 1989-07-28 | Heater device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636479Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003092946A (en) * | 2001-09-21 | 2003-04-02 | Ricoh Co Ltd | Operating method of the owner audio reproduction system, the owner audio information transmission device, the operation method of the owner audio reproduction system, the program for operating the owner audio output device, the operation method of the food supply system, the program for operating the food supply device, Method of operating protected animal video distribution system and protected animal video distribution device |
| JP2014158023A (en) * | 2014-02-05 | 2014-08-28 | Hitachi Kokusai Electric Inc | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| US9064912B2 (en) | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| US9449849B2 (en) | 2009-07-21 | 2016-09-20 | Hitachi Kokusai Electric Inc. | Method of manufacturing semiconductor device using meander-shaped heating element |
-
1989
- 1989-07-28 JP JP8931989U patent/JPH0636479Y2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003092946A (en) * | 2001-09-21 | 2003-04-02 | Ricoh Co Ltd | Operating method of the owner audio reproduction system, the owner audio information transmission device, the operation method of the owner audio reproduction system, the program for operating the owner audio output device, the operation method of the food supply system, the program for operating the food supply device, Method of operating protected animal video distribution system and protected animal video distribution device |
| US9064912B2 (en) | 2009-07-21 | 2015-06-23 | Hitachi Kokusai Electric, Inc. | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
| US9449849B2 (en) | 2009-07-21 | 2016-09-20 | Hitachi Kokusai Electric Inc. | Method of manufacturing semiconductor device using meander-shaped heating element |
| JP2014158023A (en) * | 2014-02-05 | 2014-08-28 | Hitachi Kokusai Electric Inc | Heating device, substrate processing apparatus, and method of manufacturing semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636479Y2 (en) | 1994-09-21 |