JPH033281B2 - - Google Patents
Info
- Publication number
- JPH033281B2 JPH033281B2 JP21254581A JP21254581A JPH033281B2 JP H033281 B2 JPH033281 B2 JP H033281B2 JP 21254581 A JP21254581 A JP 21254581A JP 21254581 A JP21254581 A JP 21254581A JP H033281 B2 JPH033281 B2 JP H033281B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- soft magnetic
- block
- soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000696 magnetic material Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 3
- 238000005304 joining Methods 0.000 claims 2
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004804 winding Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1871—Shaping or contouring of the transducing or guiding surface
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
本発明は垂直磁気記録のための磁気ヘツドの製
造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a magnetic head for perpendicular magnetic recording.
従来の磁気記録方式は、リング型ヘツドにより
記録媒体を、その走行方向（長手方向）に磁化す
る長手磁気記録方式であるが、記録媒体を厚み方
向に磁化する垂直磁気記録方式は、長手磁気記録
方式に比べて、高密度記録が容易である。垂直磁
気記録においては、記録媒体を長手方向に磁化す
るのに適したリング型ヘツドより、第１図に示す
ような構成の磁気ヘツドが適している。同図にお
いて、１は軟磁性体、２は記録媒体、３は巻線、
４は軟磁性体ブロツクである。同図ａは軟磁性体
薄膜に直接巻線を施して、これを励磁する方式で
あり、ｂは軟磁性体ブロツク４を介して励磁する
方式である。これらの磁気ヘツドにおいて、軟磁
性体薄膜は、第１図に示すように非磁性体ブロツ
ク５で保持・保護されている。 The conventional magnetic recording method is a longitudinal magnetic recording method in which the recording medium is magnetized in the running direction (longitudinal direction) using a ring-shaped head, but a perpendicular magnetic recording method in which the recording medium is magnetized in the thickness direction is a longitudinal magnetic recording method. High-density recording is easier than with other methods. In perpendicular magnetic recording, a magnetic head having the configuration shown in FIG. 1 is more suitable than a ring-type head which is suitable for longitudinally magnetizing a recording medium. In the figure, 1 is a soft magnetic material, 2 is a recording medium, 3 is a winding wire,
4 is a soft magnetic block. Figure a shows a method in which a wire is directly wound on a soft magnetic thin film to excite it, and b shows a method in which it is excited through a soft magnetic block 4. In these magnetic heads, the soft magnetic thin film is held and protected by a non-magnetic block 5 as shown in FIG.
さて、第２図のように、前記薄膜１の側面に、
軟磁性体ブロツク６を、前記薄膜１の先端面から
少し後退させて添付すると、前記先端面へ磁束が
集中しやすくなり、記録・再生の効率が改善され
ることがわかつている。 Now, as shown in FIG. 2, on the side of the thin film 1,
It has been found that if the soft magnetic block 6 is attached a little backward from the tip end surface of the thin film 1, the magnetic flux will be more likely to concentrate on the tip end surface, and the efficiency of recording and reproduction will be improved.
現在、第２図ｂのような磁気ヘツドを作成する
ためには、第３図に示すように先ず(ア)非磁性体ブ
ロツク５に溝を堀り、(イ)フエライト等の軟磁性体
ブロツク６を埋め込み、前記ブロツクの露出した
面を研摩して平面に仕上げた後、(ウ)この平面にパ
ーマロイ等の軟磁性体薄膜１をスパツタ等で形成
してから、所望の形状にエツチングし、(エ)ア〜イ
と同様の過程で作成した部材と張り合わせ、(オ)先
端面を前記軟磁性体ブロツクの近傍まで研摩して
仕上げている。第２図ａのような磁気ヘツドを構
成するには更に、基板５に巻線を施すための切欠
きを設ける必要がある。 Currently, in order to create a magnetic head as shown in Figure 2b, first (a) a groove is dug in the non-magnetic block 5, and (b) a soft magnetic block such as ferrite is formed, as shown in Figure 3. After embedding 6 and polishing the exposed surface of the block to make it flat, (c) forming a thin film 1 of soft magnetic material such as permalloy on this flat surface by sputtering or the like, and then etching it into a desired shape, (d) It is laminated with a member made in the same process as A to A, and (e) the tip end surface is polished to the vicinity of the soft magnetic block. In order to construct a magnetic head as shown in FIG. 2a, it is further necessary to provide a notch in the substrate 5 for winding.
このような構成方法は、大量生産には不適当で
あり、より筒便な製造方法が望まれる。 Such a construction method is unsuitable for mass production, and a more convenient manufacturing method is desired.
本発明はかかる情況に鑑みてなされたもので、
その目的は、軟磁性体薄膜に軟磁性体ブロツクを
添付した構造の磁気ヘツドを容易に製造する手段
を提供することにある。以下、本発明を詳しく説
明する。 The present invention was made in view of such circumstances,
The object is to provide a means for easily manufacturing a magnetic head having a structure in which a soft magnetic block is attached to a soft magnetic thin film. The present invention will be explained in detail below.
第４図は本発明の製造方法によつて製造される
磁気ヘツドの基本的構造を説明するための図であ
る。同図において、１は非磁性体ブロツク５に挾
み込まれた軟磁性体薄膜であり、その一端面７を
記録媒体に対向させて記録・再生を行なう。６は
前記薄膜１の前記端面７の反対側の端面に接触す
るように設置された軟磁性体ブロツクである。第
４図に基本的構成を示した磁気ヘツドは、第１図
ｂに示した磁気ヘツドと磁気回路上等価である。
また巻線を施せば第１図ａと等価である。 FIG. 4 is a diagram for explaining the basic structure of a magnetic head manufactured by the manufacturing method of the present invention. In the figure, reference numeral 1 denotes a soft magnetic thin film sandwiched between nonmagnetic blocks 5, and one end surface 7 of the soft magnetic thin film is opposed to a recording medium for recording and reproduction. Reference numeral 6 denotes a soft magnetic material block installed so as to be in contact with the end surface of the thin film 1 on the opposite side to the end surface 7. The magnetic head whose basic structure is shown in FIG. 4 is equivalent in magnetic circuit to the magnetic head shown in FIG. 1b.
Moreover, if winding is applied, it is equivalent to FIG. 1a.
第５図は本発明による磁気ヘツドの製造方法の
実施例である。先ず(ア)細長い軟磁性体ブロツク６
の一面８を平担に研摩する。(イ)非磁性体ブロツク
９を面１０が軟磁性体ブロツクの面８に対し垂直
になるように接着する。この際、接着強度を増す
ため、側面にも接着剤１１を添付した。(ウ)軟磁性
体ブロツクと非磁性体ブロツクで構成される段差
部分１０にスパツタ法、蒸着法等の薄膜形成技術
により軟磁性体薄膜を形成する。この時、面８に
も薄膜が付着するが、除去する必要はなく、軟磁
性体ブロツクと軟磁性体薄膜の磁気的結合のため
にはむしろ好都合であり、積極的に付着させるの
が良い。この後、前記薄膜をエツチングして、１
２の様な軟磁性薄膜のパターンを、一定間隔で並
べて形成する。このパターンは１３の様な先端を
紋つた形状にすると磁束の収束がより効果的に行
なわれる。(エ)次に非磁性体ブロツク１４を、軟磁
性体薄膜との間に間隙を生じないように圧力を加
えながら、少なくとも軟磁性体ブロツク６に対し
て接着する。この時非磁性体ブロツク９，１４の
境界面に接着剤を浸み込ませると接着強度が強く
なる。この後、軟磁性体薄膜のパターン１５をひ
とつづつ有する小部材に切断して磁気ヘツドを複
数個得る。(オ)最後に先端形状を整える。 FIG. 5 shows an embodiment of the method for manufacturing a magnetic head according to the present invention. First (a) Long and thin soft magnetic block 6
One side 8 of is polished flat. (a) Glue the non-magnetic block 9 so that the surface 10 is perpendicular to the surface 8 of the soft magnetic block. At this time, adhesive 11 was also applied to the sides to increase adhesive strength. (c) A soft magnetic thin film is formed on the stepped portion 10 consisting of the soft magnetic block and the nonmagnetic block by a thin film forming technique such as sputtering or vapor deposition. At this time, a thin film also adheres to the surface 8, but there is no need to remove it, and it is rather convenient for magnetic coupling between the soft magnetic block and the soft magnetic thin film, so it is better to actively adhere it. After this, the thin film is etched and
Patterns of soft magnetic thin films such as No. 2 are formed by arranging them at regular intervals. If this pattern has a patterned tip like 13, the magnetic flux can be converged more effectively. (d) Next, the non-magnetic block 14 is adhered to at least the soft magnetic block 6 while applying pressure so as not to create a gap between the non-magnetic block 14 and the soft magnetic thin film. At this time, if the adhesive is soaked into the interface between the non-magnetic blocks 9 and 14, the adhesive strength will be increased. Thereafter, a plurality of magnetic heads are obtained by cutting into small pieces each having one pattern 15 of the soft magnetic thin film. (E) Finally, adjust the tip shape.
なお、特に軟磁性薄膜をエツチングしてパター
ンを形成しなくても、２つの非磁性ブロツクはと
もに軟磁性体ブロツクに接着されているため不都
合はない。というのは軟磁性体薄膜の先端のダレ
を防止するためには非磁性体基板１４と軟磁性体
薄膜の間に接着剤が厚く入り込まないことが必要
であり、両非磁性体ブロツク９，１４の境界全面
に軟磁性体薄膜が残つている場合、非磁性体ブロ
ツク同志の接着だけでは十分な接着強度が得られ
ないからである。この点においても本発明による
磁気ヘツドの製造方法は有利であり、軟磁性薄膜
をエツチングする工程を省略することもできる。 Note that even if the soft magnetic thin film is not particularly etched to form a pattern, there is no problem because the two nonmagnetic blocks are both bonded to the soft magnetic block. This is because in order to prevent the tip of the soft magnetic thin film from sagging, it is necessary to prevent the adhesive from penetrating thickly between the nonmagnetic substrate 14 and the soft magnetic thin film. This is because if a soft magnetic thin film remains on the entire boundary surface, sufficient adhesion strength cannot be obtained just by adhering the non-magnetic blocks together. The method of manufacturing a magnetic head according to the present invention is advantageous in this respect as well, and the step of etching the soft magnetic thin film can be omitted.
以上のように本発明によると、軟磁性体薄膜に
軟磁性体ブロツクを添付した構造の磁気ヘツドを
容易かつ大量に生産することが可能となる。 As described above, according to the present invention, it is possible to easily and mass-produce a magnetic head having a structure in which a soft magnetic block is attached to a soft magnetic thin film.
第１図、第２図は垂直磁気記録のための磁気ヘ
ツドの構成を説明するための図。第３図は従来の
磁気ヘツドの製造過程を示す図。第４図は本発明
になる磁気ヘツドの製造方法により製造される磁
気ヘツドの基本的構造を示す図。第５図は本発明
の実施例を説明するための図。
１……軟磁性体薄膜。２……記録媒体。３……
巻線。４，６……軟磁性体ブロツク。５……非磁
性体ブロツク。７……軟磁性薄膜の先端面。８，
１０……平面。９，１４……非磁性体ブロツク。
１１……接着剤。１２，１３，１５……軟磁性体
薄膜のパターン。
1 and 2 are diagrams for explaining the configuration of a magnetic head for perpendicular magnetic recording. FIG. 3 is a diagram showing the manufacturing process of a conventional magnetic head. FIG. 4 is a diagram showing the basic structure of a magnetic head manufactured by the method of manufacturing a magnetic head according to the present invention. FIG. 5 is a diagram for explaining an embodiment of the present invention. 1... Soft magnetic thin film. 2...Recording medium. 3...
winding. 4, 6... Soft magnetic block. 5...Non-magnetic block. 7...Top surface of soft magnetic thin film. 8,
10...plane. 9, 14...Nonmagnetic block.
11...Adhesive. 12, 13, 15...Patterns of soft magnetic thin films.
Claims (1)
性体ブロツクの一つの面が垂直となるよう前記非
磁性体ブロツクを接合する工程と、 前記軟磁性体ブロツクの平坦な面に対して垂直
な前記非磁性体ブロツクの面に軟磁性体薄膜を形
成する工程と、 前記軟磁性体ブロツクの平坦な面に対して垂直
な前記非磁性体ブロツクの面に形成された前記軟
磁性体薄膜を複数のパターンにパターニングする
工程と、 前記軟磁性体薄膜をパターニングしたのち、前
記軟磁性体ブロツクの平坦な他の面と前記パター
ニングされた軟磁性体薄膜とに接するよう他の非
磁性体ブロツクを接合する工程と、 前記軟磁性体ブロツクに前記複数の非磁性体ブ
ロツクが接合されたものを切断して前記複数のパ
ターンを分割する工程とからなることを特徴とす
る磁気ヘツドの製造方法。[Claims] 1. A step of joining the non-magnetic block to a flat part of the soft-magnetic block so that one surface of the non-magnetic block is perpendicular to the flat surface of the soft-magnetic block; forming a soft magnetic thin film on a surface of the non-magnetic block perpendicular to the flat surface; patterning the soft magnetic thin film into a plurality of patterns, and after patterning the soft magnetic thin film, patterning the soft magnetic thin film so that the other flat surface of the soft magnetic block is in contact with the patterned soft magnetic thin film. The method is characterized by comprising a step of joining another non-magnetic material block, and a step of cutting the plurality of non-magnetic material blocks joined to the soft-magnetic material block to divide the plurality of patterns. A method of manufacturing a magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21254581A JPS58115626A (en) | 1981-12-28 | 1981-12-28 | Manufacturing method of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21254581A JPS58115626A (en) | 1981-12-28 | 1981-12-28 | Manufacturing method of magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58115626A JPS58115626A (en) | 1983-07-09 |
| JPH033281B2 true JPH033281B2 (en) | 1991-01-18 |
Family
ID=16624450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21254581A Granted JPS58115626A (en) | 1981-12-28 | 1981-12-28 | Manufacturing method of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58115626A (en) |
-
1981
- 1981-12-28 JP JP21254581A patent/JPS58115626A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58115626A (en) | 1983-07-09 |
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