JPH0332974U - - Google Patents
Info
- Publication number
- JPH0332974U JPH0332974U JP8904789U JP8904789U JPH0332974U JP H0332974 U JPH0332974 U JP H0332974U JP 8904789 U JP8904789 U JP 8904789U JP 8904789 U JP8904789 U JP 8904789U JP H0332974 U JPH0332974 U JP H0332974U
- Authority
- JP
- Japan
- Prior art keywords
- processing tank
- vacuum
- vacuum processing
- concentration meter
- microwave oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004215 Carbon black (E152) Substances 0.000 claims description 5
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 150000002430 hydrocarbons Chemical class 0.000 claims description 5
- 238000009832 plasma treatment Methods 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000003973 paint Substances 0.000 description 2
Landscapes
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
第１図は本考案によるプラズマ処理装置の好ま
しい一例を示した略示フローシート、第２図はＨ
Ｃ測定濃度と塗膜付着の関係を示したグラフ、第
３図は単位時間濃度と塗膜付着の関係を示したグ
ラフ、そして、第４図は濃度オーバー時の処理パ
ターンを示したグラフである。
図中、１……真空処理槽、２……被処理物、３
……マイクロ波発振器、４……マイクロ波導波管
、５……プラズマ発生部、６……プラズマ輸送管
、７……シヤワー管、８……真空ポンプ、８……
配管、１０……炭化水素濃度計、１１……炭化水
素センサ、１２……制御装置、そして１３及び１
４……指示回路である。
FIG. 1 is a schematic flow sheet showing a preferred example of the plasma processing apparatus according to the present invention, and FIG.
C A graph showing the relationship between measured concentration and paint film adhesion, Figure 3 is a graph showing the relationship between unit time concentration and paint film adhesion, and Figure 4 is a graph showing the processing pattern when the concentration is exceeded. . In the figure, 1...vacuum processing tank, 2...workpiece, 3
...Microwave oscillator, 4...Microwave waveguide, 5...Plasma generation section, 6...Plasma transport tube, 7...Shower tube, 8...Vacuum pump, 8...
Piping, 10...hydrocarbon concentration meter, 11...hydrocarbon sensor, 12...control device, and 13 and 1
4...This is an instruction circuit.
Claims (1)
で洗浄した後であつて塗装を行う前にプラズマ処
理するための装置であつて、下記の手段： プラズマ処理を行う真空処理槽、 プラズマ発生部を介して真空処理槽に連通した
マイクロ波発振器、 真空処理槽に接続された真空ポンプ、 真空処理槽内かもしくはその真空排気系内に配
置された炭化水素センサを装備した炭化水素濃度
計、そして 炭化水素濃度計の出力信号を処理しかつ適正化
された駆動信号を真空ポンプ及び／又はマイクロ
波発振器に入力する制御装置、 を含んでなることを特徴とするプラズマ処理装
置。[Scope of Claim for Utility Model Registration] An apparatus for subjecting a workpiece made of a synthetic resin material to plasma treatment after cleaning it with organic solvent vapor and before painting, which performs the following means: Plasma treatment. Equipped with a vacuum processing tank, a microwave oscillator connected to the vacuum processing tank via a plasma generator, a vacuum pump connected to the vacuum processing tank, and a hydrocarbon sensor placed within the vacuum processing tank or its vacuum evacuation system. a hydrocarbon concentration meter, and a control device that processes the output signal of the hydrocarbon concentration meter and inputs an optimized drive signal to a vacuum pump and/or a microwave oscillator. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8904789U JPH0717421Y2 (en) | 1989-07-31 | 1989-07-31 | Plasma processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8904789U JPH0717421Y2 (en) | 1989-07-31 | 1989-07-31 | Plasma processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0332974U true JPH0332974U (en) | 1991-03-29 |
| JPH0717421Y2 JPH0717421Y2 (en) | 1995-04-26 |
Family
ID=31638639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8904789U Expired - Fee Related JPH0717421Y2 (en) | 1989-07-31 | 1989-07-31 | Plasma processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0717421Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (en) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | Adhesive member and method of manufacturing the same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4660702B2 (en) * | 2005-05-19 | 2011-03-30 | 国立大学法人名古屋大学 | Injection molding apparatus with plasma generator, injection molding and surface treatment method |
| JP4669522B2 (en) * | 2008-01-08 | 2011-04-13 | セイコーエプソン株式会社 | Coloring structure manufacturing apparatus and manufacturing method of coloring structure |
-
1989
- 1989-07-31 JP JP8904789U patent/JPH0717421Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000073029A (en) * | 1998-08-26 | 2000-03-07 | Nitto Denko Corp | Adhesive member and method of manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0717421Y2 (en) | 1995-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |