JPH033414Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Industrial application field]

The present invention relates to a thin film printing device,
More particularly, the present invention relates to a thin film printing apparatus for easily printing a polymer thin film used in electronic components into a desired pattern shape with a uniform and accurate film thickness.

[Conventional technology]

In recent years, polymer thin films have been required and used for various electronic components such as insulating coatings for semiconductor devices and alignment films for liquid crystal display devices. Generally, these thin films have
It is used by forming a film with a thickness of 100 to 3000 Å using a very low viscosity polymer solution of 2000 cp to 10 cp, but the uniformity of the film thickness and the accuracy of the pattern shape and size are strictly required. . Therefore, when trying to print a polymer thin film using existing printing equipment, the uniformity and stability of the film thickness are still insufficient. In addition, as a method for forming a polymer thin film, there is a so-called spinner method in which a polymer solution is applied while rotating a substrate on which a printing object is fixed.

[Problem that the idea aims to solve]

However, this method has the problem that the film thickness differs between the center and periphery of the substrate, and when attempting to form a thin film into a pattern, complex processing steps such as masking and etching are required.
It was time-consuming and expensive. SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and provide a thin film printing apparatus that can easily print a thin polymer film in a desired pattern shape with a uniform and accurate film thickness.

[Means to solve the problem]

In order to achieve the above object, the present invention includes a thin film printing device that includes a surface plate that supports an intaglio plate having a uniform group of cells, an ink supply device and a doctor that fills the intaglio plate with ink, and a thin film printing device that supports the intaglio plate having a uniform cell group. It consists of a plate cylinder provided with a relief plate having the same pattern as that of the plate cylinder, and a support part that supports the printing material. It is configured so that it is brought into pressure contact with the surface of the printing material to form a thin film on the surface of the printing material.

[Example] An example of the present invention will be described in more detail with reference to the drawings. 1 and 2 are a plan view and a side view showing an embodiment of the thin film printing apparatus of this invention. 1 is intaglio,
2 is a surface plate, 3 is an ink supply section, 4 is a doctor, 5
is a letterpress, 6 is a plate cylinder, 7 is a printing medium, 8 is a support part,
9 indicates each stand. A surface plate 2 that supports the intaglio plate 1 and a support section 8 that supports the printing medium 7 are each fixed to a stand 9. The inside of the cell group of the intaglio plate 1 supported on the surface plate 2 is filled with ink to form a thin film by the ink supply section 3 and the doctor 4. The ink used is of low viscosity, its viscosity is 2000 cp
~10 cp using an ink consisting of a mixture of resin or resin precursor and solvent. The intaglio plate 1 has an area larger than the thin film pattern to be formed,
It has many small holes called cells in the printing industry on its surface. After the intaglio plate 1 is filled with ink, the plate cylinder 6 is positioned above the surface plate 2 that supports the intaglio plate 1, and the letterpress plate 5 provided on its side rotates while being pressed against the surface of the intaglio plate 1.
The ink is transferred to the surface of the relief plate 5. This letterpress 5 is
For example, it is made of rubber such as butyl rubber or resin such as nylon resin. Alternatively, it may be made of photosensitive rubber or photosensitive resin. The surface roughness is preferably about 50 μm according to JIS standard Rz. The relief plate 5 is configured to exhibit the pattern of the thin film to be formed. In addition, the thickness of the relief plate 5 is preferably 0.2 to 0.3 mm. After the ink has been transferred to the surface of the letterpress plate 5, the plate cylinder 6 is moved to the upper part of the support part 8 that supports the printing material 7, and the letterpress plate 5 and the surface of the printing material 7 are brought into pressure contact to transfer the ink to the surface of the printing material 7. Transfer and form a thin film. Printing material 7
Use something with a smooth surface, such as a glass plate. Moreover, FIGS. 3 to 5 are a plan view, a side view, and a front view showing other embodiments of the present invention. The components of this device and the functions of each element are the same as in the embodiment described above. In this embodiment, the plate cylinder 6 is reciprocated by a combination of a ball screw 10 and a servo motor, but in this case, the plate cylinder 6 can be fed over a wide constant speed range, and can be used for thin film printing on a wide area. Are suitable.

[Effect of the idea]

The thin film printing device of the present invention includes a surface plate that supports an intaglio plate having a uniform group of cells, an ink supply device and a doctor that fill the intaglio plate with ink, and a letterpress plate that has the same pattern as the pattern of the thin film to be formed. Consisting of a plate cylinder and a supporting part that supports the printing material, the printing cylinder and the intaglio are pressed against each other to transfer ink to the surface of the letterpress, and then the printing cylinder and the surface of the printing material are pressed against each other to transfer the ink to the surface of the printing material. It is configured to form a thin film on the surface. Therefore, the thin film printing apparatus of the present invention can easily form a thin film with an accurate, stable and uniform thickness even with low viscosity ink. Further, the dimensional accuracy of the desired pattern shape can also be accurately obtained. Therefore, it is expected that it will be widely used to form polymer thin films for various electronic components.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an embodiment of the thin film printing apparatus of the present invention, and FIG. 2 is a side view thereof. Figure 3,
4 and 5 are a plan view, a side view, and a front view, respectively, showing other embodiments of the present invention. DESCRIPTION OF SYMBOLS 1... Intaglio, 2... Surface plate, 3... Ink supply section, 4... Doctor, 5... Letterpress, 6... Plate cylinder, 7... Printing medium, 8... Support part, 9... Base, 10...Ball screw.

Claims (1)

[Scope of utility model registration request] a surface plate that supports an intaglio having a uniform group of cells;
an ink supply device and a doctor for filling ink into an intaglio plate; a plate cylinder provided with a letterpress plate having the same pattern as the pattern of a thin film to be formed;
It consists of a support part that supports the printing material, and presses the plate cylinder and intaglio to transfer ink to the surface of the letterpress, and then presses the plate cylinder and the surface of the printing material to form a thin film on the surface of the printing material. A thin film printing device featuring: