JPH0334829B2 - - Google Patents
Info
- Publication number
- JPH0334829B2 JPH0334829B2 JP60019734A JP1973485A JPH0334829B2 JP H0334829 B2 JPH0334829 B2 JP H0334829B2 JP 60019734 A JP60019734 A JP 60019734A JP 1973485 A JP1973485 A JP 1973485A JP H0334829 B2 JPH0334829 B2 JP H0334829B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- acceleration
- vibration
- weight
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、移動体の加速度を検出する手段に関
し、２軸方向について測定することのできる振動
式加速度計に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a means for detecting acceleration of a moving body, and relates to a vibratory accelerometer capable of measuring in two axial directions.
（従来の技術）
移動体の加速度を検出するものとしては、従
来、次のようなものが知られている。(Prior Art) The following devices are conventionally known as devices for detecting the acceleration of a moving body.
(1) サーボ形
第３図に示すように、弾性体ｄにより支持さ
れた質量Ｍを有するフオースコイルａを、磁石
ｂとコアｃからなる磁気回路の途中に配置し、
加速度αによつて生じる力Mαと、フオースコ
イルによつて生じる力を平衡させ、フオースコ
イルに流れる電流から加速度αを求めるもの。(1) Servo type As shown in Figure 3, a force coil a having a mass M supported by an elastic body d is placed in the middle of a magnetic circuit consisting of a magnet b and a core c,
The force Mα generated by acceleration α is balanced with the force generated by the force coil, and the acceleration α is determined from the current flowing through the force coil.
(2) ビーム形
第４図に示すように、ベースｅに固定した薄
肉部ｉを有する支柱ｆの先端に所定の質量を有
する重りｇを固定し、支柱ｆに歪みゲージｈ、
h′を貼付して、加速度による支柱ｆの撓みによ
つて生じる抵抗変化により加速度を求めるも
の。(2) Beam shape As shown in Figure 4, a weight g having a predetermined mass is fixed to the tip of a column f having a thin wall portion i fixed to a base e, and a strain gauge h,
By attaching h', the acceleration is determined by the change in resistance caused by the deflection of the support column f due to acceleration.
(3) 振動形
第５図に示すように、振動分離体ｍを介して
振動弦w1、w2を対向するように張設し、振動
分離体ｍが受ける力の方向によつて変化する振
動弦の振動周波数f1、f2の変化から加速度を求
めるもの。(3) Vibration type As shown in Figure 5, vibrating strings w 1 and w 2 are stretched across a vibration isolator m so as to face each other, and the vibration changes depending on the direction of the force received by the vibration isolator m. This method calculates acceleration from changes in the vibration frequencies f 1 and f 2 of a vibrating string.
（発明が解決しようとする問題点）
上記従来例において、第３図に示すサーボ形は
精密形として広く用いられているが、構造が複雑
で、電流信号から高い分離能の出力信号を得よう
とすると、信号処理が難かしいという欠点があ
る。(Problems to be Solved by the Invention) In the above conventional example, the servo type shown in Fig. 3 is widely used as a precision type, but it has a complicated structure and it is difficult to obtain an output signal with high resolution from the current signal. This has the disadvantage that signal processing is difficult.
また、第４図に示すビーム形は支柱ｆに重りｇ
を固定し、歪みゲージを貼付しただけなので構造
は簡単であるが、ゲージ率が低く出力信号も小さ
いため信号処理が難しいという欠点がある。 In addition, the beam shape shown in Fig. 4 has a weight g on the support f.
The structure is simple because it is simply fixed and a strain gauge is attached, but the disadvantage is that signal processing is difficult because the gauge factor is low and the output signal is small.
そして、第５図に示す振動形は信号が周波数で
出力され、ゲージ率が大きく信号処理もやり易い
が、振動弦の張力の調整や振動分離体ｍの取付け
が難しいという欠点がある。 The vibrating type shown in FIG. 5 outputs a signal at a frequency, has a large gauge factor, and is easy to process, but has the disadvantage that it is difficult to adjust the tension of the vibrating string and to attach the vibration separator m.
これら従来例による加速度の測定方向はいずれ
も一方向のみなので、XYまたはXYZ方向の加速
度を測定する場合においては２または３個の加速
度計が必要となる。 Since acceleration is measured in only one direction in these conventional examples, two or three accelerometers are required to measure acceleration in the XY or XYZ directions.
（問題点を解決するための手段）
本発明は上記問題点に鑑みてなされたもので、
構成が簡単で、かつ、ゲージ率が高く、精度のよ
い２軸加速度計を提供することを目的とするもの
で、その構成上の特徴は、一端がベースに固定さ
れた支柱と、この支柱の自由端側に固定された所
定の質量を有する重りと、前記支柱に平行に、か
つ、対向して設けられ、前記ベースと前記重りに
両端を固定された一対の振動梁と、これらの振動
梁を振動させる励振手段と、前記振動梁の固有振
動数を検出する振動検出手段と、前記振動検出手
段で検出した各振動梁の固有振動数を加算および
減算する演算手段とを具備したものである。(Means for solving the problems) The present invention has been made in view of the above problems, and
The purpose of this is to provide a two-axis accelerometer that is simple in construction, has a high gauge factor, and has good accuracy. A weight having a predetermined mass fixed to a free end side, a pair of vibrating beams provided parallel to and facing the support column, and having both ends fixed to the base and the weight, and these vibrating beams. an excitation means for vibrating the vibrating beam, a vibration detecting means for detecting the natural frequency of the vibrating beam, and an arithmetic means for adding and subtracting the natural frequencies of the vibrating beams detected by the vibration detecting means. .
（作用）
振動梁を励振しておき、重りにＺ方向の加速度
を加えると支柱と振動梁に同時に歪みが発生し、
振動梁の固有振動数が変化する。また重りにＸ方
向の加速度を加えると、一方の振動梁には低張り
歪みが、もう一方の振動梁には圧縮歪みが発生
し、振動梁の固有振動数が差動的に変化する。こ
の振動周波数の変化を振動検出手段により検出
し、演算手段により加算および減算することによ
り、加えられた２方向の加速度を分離して検出す
る。(Function) When the vibrating beam is excited and acceleration is applied to the weight in the Z direction, distortion occurs in the support and the vibrating beam at the same time.
The natural frequency of the vibrating beam changes. Further, when acceleration in the X direction is applied to the weight, a low tensile strain occurs in one vibrating beam and a compressive strain occurs in the other vibrating beam, and the natural frequency of the vibrating beam changes differentially. This change in vibration frequency is detected by the vibration detection means, and added and subtracted by the calculation means, thereby separately detecting the applied acceleration in the two directions.
（実施例）
第１図は本発明の一実施例を示すもので、全体
構成を示す斜視図である。図において、１は大小
の径を有する断面凸状のベースであり、小径部の
中央には板状の支柱２がベース１に垂直に固定さ
れ、この支柱２の自由端側には円弧状の重り３が
固定されている。ベースの小径部および重り３に
は支柱２に対向して矩形状の切り込み４，４′，
５，５′が設けられ、この切り込みに板状の振動
梁６，６′が支柱２とは非接触の状態で、支柱２
を挟むように平行に、かつ、対向して両端を固定
されている。振動梁６，６′にはその中央部付近
に長孔７，７′（７′は図示せず）が設けられ、複
合音叉振動子を構成している。この長孔７，７′
の近傍に振動梁の励振用と検出用の圧電素子（図
示せず）が貼付され、検出用素子で検出した電圧
信号を増幅後、励振用素子に正帰還することによ
り振動梁の固有振動数での自励振が行なわれる。
８はカバーで、重り２、振動梁６，６′を覆つて
ベース１の大径部に気密に固着され、真空または
ヘリウムガス等が封入されており、振動梁のＱを
高く保ち外部気圧の影響や汚れから保護するため
のものである。９，９′は振動梁６，６′に貼付さ
れた圧電素子を励振し振動梁６，６′の固有振動
数を検出するための端子で、各端子の一端はベー
ス１を貫通してカバー８の外部に露出している。(Embodiment) FIG. 1 shows an embodiment of the present invention, and is a perspective view showing the overall configuration. In the figure, 1 is a base with a convex cross section having large and small diameters, and a plate-shaped support 2 is fixed perpendicularly to the base 1 in the center of the small diameter part, and an arc-shaped support 2 is fixed to the free end side of this support 2. Weight 3 is fixed. In the small diameter part of the base and the weight 3, there are rectangular notches 4, 4' facing the support column 2.
5, 5' are provided, and plate-shaped vibrating beams 6, 6' are provided in these cuts without contacting the column 2.
Both ends are fixed parallel to each other and facing each other. The vibrating beams 6, 6' are provided with elongated holes 7, 7'(7' not shown) near their central portions, forming a composite tuning fork vibrator. This long hole 7, 7'
A piezoelectric element (not shown) for excitation and detection of the vibrating beam is attached near the oscillating beam, and after amplifying the voltage signal detected by the detection element, positive feedback is sent to the excitation element to determine the natural frequency of the vibrating beam. Self-excited vibration takes place.
A cover 8 is airtightly fixed to the large diameter part of the base 1, covering the weight 2 and the vibrating beams 6 and 6', and is filled with vacuum or helium gas to keep the Q of the vibrating beam high and reduce external pressure. It is for protection from influences and dirt. 9, 9' are terminals for exciting the piezoelectric elements attached to the vibrating beams 6, 6' and detecting the natural frequencies of the vibrating beams 6, 6', and one end of each terminal passes through the base 1 and is connected to the cover. 8 is exposed outside.
上記構成において、振動梁６，６′に貼付した
圧電素子に端子９，９′を介して励振用増幅器に
接続し、振動梁を固有の振動数で励振しておき、
Ｚ方向に加速度α1を加えると、支柱２は重り３か
らMα1の力を受けて伸縮し、支柱２に平行に固定
された振動梁は圧縮または引張りの力を受ける。
その結果、振動梁６，６′の固有振動数はその加
速度に応じて変化する。次にＸ方向の加速度α2が
加わると支柱２は重り３によりMα2の力を受けて
挟み、この支柱に平行に固定された一対の振動梁
６，６′の一方は圧縮、他方は引張りの力を受け
る。その結果、振動梁６，６′の固有振動数はそ
の加速度の大きさに応じて差動的に変化する。 In the above configuration, the piezoelectric elements attached to the vibrating beams 6, 6' are connected to an excitation amplifier via the terminals 9, 9', and the vibrating beams are excited at a specific frequency.
When acceleration α 1 is applied in the Z direction, the support column 2 receives a force of Mα 1 from the weight 3 and expands and contracts, and the vibrating beam fixed parallel to the support column 2 receives a compressive or tensile force.
As a result, the natural frequency of the vibrating beams 6, 6' changes according to their acceleration. Next , when the acceleration α 2 in the receive the power of As a result, the natural frequencies of the vibrating beams 6, 6' vary differentially depending on the magnitude of their acceleration.
第２図は加速度により変化した振動梁の周波数
信号を演算する電気回路の一例を示すブロツク図
である。図において、６，６′は第１図における
振動梁を示し１０，１０′は振動梁６，６′を自励
振させるための発振用回路である。１１は加算
器、１２は減算器であり、加速度に応じて変化し
たそれぞれの振動梁の周波数f1、f2はこれらの加
算器１１および減算器１２に入力される。そして
加算器１１で加算されたf1＋f2の出力がＺ方向
の、減算器１２で減算されたf1−f2の出力がＸ方
向の加速度に関連した出力となる。 FIG. 2 is a block diagram showing an example of an electric circuit that calculates a frequency signal of a vibrating beam that changes due to acceleration. In the figure, 6 and 6' are the vibrating beams in FIG. 1, and 10 and 10' are oscillation circuits for causing the vibrating beams 6 and 6' to self-oscillate. 11 is an adder, 12 is a subtracter, and the frequencies f 1 and f 2 of the respective vibrating beams that have changed in accordance with the acceleration are input to these adder 11 and subtracter 12 . Then, the output of f 1 +f 2 added by the adder 11 becomes the output related to the acceleration in the Z direction, and the output of f 1 -f 2 subtracted by the subtracter 12 becomes the output related to the acceleration in the X direction.
歪みに対するf1およびf2の変化はほぼ直線的で
あるが、厳密に言えば若干非線形である。そこ
で、高精度な加速度測定の場合はf1およびf2を測
定して、それらの演算によりＸ、Ｚ方向の加速度
を分離して求めればよい。この出力は周波数出力
であるため、高ビツトのデジタル信号への変換が
簡単で、例えばマイクロプロセツサ等で演算する
ための信号処理が容易であり、抵抗歪みゲージ等
に比較してセンサとしてのゲージ率が高いので精
度がよい。また、支柱２に重り３を固定してこの
支柱２に対向して振動梁６，６′を設けただけな
ので、構造も簡単である。 The changes in f 1 and f 2 with respect to strain are approximately linear, but strictly speaking, they are slightly nonlinear. Therefore, in the case of highly accurate acceleration measurement, it is sufficient to measure f 1 and f 2 and calculate the accelerations in the X and Z directions separately. Since this output is a frequency output, it is easy to convert to a high-bit digital signal, and the signal processing for calculation by a microprocessor, etc., is easy. The accuracy is good because the ratio is high. Furthermore, since the weight 3 is fixed to the support 2 and the vibrating beams 6, 6' are provided opposite to the support 2, the structure is simple.
なお、本実施例においては、支柱および振動梁
の形状を板状のものとし、振動梁に長孔を設けた
ものを示したが、本例に限ることなく支柱は円柱
とし振動梁はワイヤであつてもよい。 In this example, the shape of the support and vibration beam is plate-like, and the vibration beam is provided with a long hole. However, the support is not limited to this example; It may be hot.
また、支柱２、振動梁６，６′は同一の材質で、
かつ、熱弾性係数の小さなものが温度変化による
誤差を受けにくく、例えば商品名Ni−Span−Ｃ
等が望ましい。 In addition, the pillar 2 and the vibration beams 6 and 6' are made of the same material.
In addition, those with a small thermoelastic coefficient are less susceptible to errors due to temperature changes, such as the product name Ni-Span-C.
etc. is desirable.
（発明の効果）
以上説明したように、本発明によれば、構造が
簡単でゲージ率が高く、２軸を同時に測定するこ
とのできる加速度計を実現することができる。(Effects of the Invention) As described above, according to the present invention, it is possible to realize an accelerometer that has a simple structure, a high gauge factor, and can measure two axes simultaneously.
第１図は本発明の全体構成を示す斜視図、第２
図は電気回路の一例を示すブロツク図、第３図〜
第５図は従来例を示す説明図である。
１……ベース、２……支柱、３……重り、６，
６′……振動梁、１０，１０′……励振手段、１１
……加算器、１２……減算器。
Fig. 1 is a perspective view showing the overall configuration of the present invention;
The figure is a block diagram showing an example of an electric circuit.
FIG. 5 is an explanatory diagram showing a conventional example. 1...base, 2...post, 3...weight, 6,
6'... Vibration beam, 10, 10'... Excitation means, 11
...Adder, 12...Subtractor.
Claims (1)
の自由端側に固定された所定の質量を有する重り
と、前記支柱に平行に、かつ、対向して設けら
れ、前記ベースと前記重りに両端を固定された一
対の振動梁と、これらの振動梁を振動させる励振
手段と、前記振動梁の固有振動数を検出する振動
検出手段と、前記振動検出手段で検出した各振動
梁の固有振動数を加算および減算する演算手段と
を具備したことを特徴とする振動式加速度計。1. A column with one end fixed to a base, a weight having a predetermined mass fixed to the free end side of this column, and a column provided parallel to and facing the column, with both ends attached to the base and the weight. a pair of vibrating beams fixed to each other, excitation means for vibrating these vibrating beams, vibration detecting means for detecting the natural frequency of the vibrating beams, and a natural frequency of each vibrating beam detected by the vibration detecting means. A vibration type accelerometer characterized by comprising: arithmetic means for adding and subtracting .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019734A JPS61178667A (en) | 1985-02-04 | 1985-02-04 | Vibration type accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60019734A JPS61178667A (en) | 1985-02-04 | 1985-02-04 | Vibration type accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61178667A JPS61178667A (en) | 1986-08-11 |
| JPH0334829B2 true JPH0334829B2 (en) | 1991-05-24 |
Family
ID=12007550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60019734A Granted JPS61178667A (en) | 1985-02-04 | 1985-02-04 | Vibration type accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61178667A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010078489A (en) * | 2008-09-26 | 2010-04-08 | Nagano Keiki Co Ltd | Fiber optic sensor |
| JP2011203228A (en) * | 2010-03-26 | 2011-10-13 | Toshiba Corp | Acceleration sensor |
| JP2013217668A (en) * | 2012-04-04 | 2013-10-24 | Seiko Epson Corp | Physical quantity detection device, physical quantity detector, and electronic apparatus |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2215449B (en) * | 1988-03-09 | 1991-07-10 | Yazaki Corp | Headlight moving apparatus for automotive vehicle |
| JP3446732B2 (en) | 2000-09-29 | 2003-09-16 | 株式会社村田製作所 | Acceleration sensor |
| JP3574898B2 (en) * | 2001-01-12 | 2004-10-06 | 株式会社村田製作所 | Acceleration sensor and method of manufacturing the same |
| JP3642026B2 (en) * | 2001-01-12 | 2005-04-27 | 株式会社村田製作所 | Acceleration sensor and manufacturing method thereof |
| KR20020095963A (en) * | 2001-06-18 | 2002-12-28 | 현대자동차주식회사 | A resonance type frequency detect device and method thereof |
-
1985
- 1985-02-04 JP JP60019734A patent/JPS61178667A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010078489A (en) * | 2008-09-26 | 2010-04-08 | Nagano Keiki Co Ltd | Fiber optic sensor |
| JP2011203228A (en) * | 2010-03-26 | 2011-10-13 | Toshiba Corp | Acceleration sensor |
| JP2013217668A (en) * | 2012-04-04 | 2013-10-24 | Seiko Epson Corp | Physical quantity detection device, physical quantity detector, and electronic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61178667A (en) | 1986-08-11 |
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