JPH03359B2 - - Google Patents

Info

Publication number
JPH03359B2
JPH03359B2 JP5879087A JP5879087A JPH03359B2 JP H03359 B2 JPH03359 B2 JP H03359B2 JP 5879087 A JP5879087 A JP 5879087A JP 5879087 A JP5879087 A JP 5879087A JP H03359 B2 JPH03359 B2 JP H03359B2
Authority
JP
Japan
Prior art keywords
sulfur
sic whiskers
raw material
hydrogen
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5879087A
Other languages
Japanese (ja)
Other versions
JPS63225600A (en
Inventor
Tooru Kida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Carbon Co Ltd
Original Assignee
Tokai Carbon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Carbon Co Ltd filed Critical Tokai Carbon Co Ltd
Priority to JP5879087A priority Critical patent/JPS63225600A/en
Publication of JPS63225600A publication Critical patent/JPS63225600A/en
Publication of JPH03359B2 publication Critical patent/JPH03359B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 本発明は気相法によるアスペクト比の大きな
SiCウイスカーの製造方法に関する。 〔従来の技術〕 SiCウイスカーは強度及び弾性率が極めて優れ
ている上に耐熱性、耐蝕性も高く、しかも軽量で
あるという特徴から複合材の強化材として注目さ
れている。特に、近年自動車や航空機をはじめと
する広い用途分野においてFRM、FRP、FRC用
の補強材として有用されつつある。一般に、補強
性の優れたSiCウイスカーとしては繊維長が長
く、アスペクト比の大きなものが要求されてい
る。 このSiCウイスカーの製造方法としては、ケイ
素を含む原料と炭素を含む原料とを気相で反応さ
せる気相法と、ケイ素を含む原料と炭素を含む原
料として共に固体を使用する固相法とがある。気
相法としては、例えばSiCl4や(CH34Si等のケ
イ素化合物とCH4、C3H8、CCl4等の炭素化合物
とを高温の水素気流中で反応させる方法、あるい
はCH3SiCl3等のシラン化合物を水素気流中で熱
分解する方法等がある。しかし、更に繊維長が長
く、高アスペクト比のSiCウイスカーが得られれ
ば、シート化あるいは長繊維状に連続化等が容易
となり、より広汎な用途分野での応用が可能とな
る。 一般に、SiCウイスカーの生成過程に硫化水素
が存在すると、ウイスカーの成長反応が促進され
ることが知られている。硫化水素は、ケイ素を含
む分解生成物と反応して硫化ケイ素を生成し、こ
の硫化ケイ素が炭素を含む分解生成物と反応して
SiCウイスカーに転化するものと考えられてい
る。硫化水素のウイスカー生成促進機能を利用す
るものとして、メルカプト変成シリコンオイルを
水素あるいはアルゴンをキヤリアガスとして、
1200〜1400℃の温度で熱分解することによりSiC
ウイスカーを生成する方法が提案されている。
(昭和62年1月窯業基礎討論会資料)。この方法に
よるSiCウイスカーは、直径0.3〜3μm、長さは数
cmに達する長いウイスカーが得られている。 しかしながら、原料となるメルカプト変性シリ
コンオイルは高価であり、また入手し難い上に長
期安定性も乏しい等の欠点がある。 〔発明が解決しようとする問題点〕 本発明は上記欠点を解消して、入手が容易であ
り、かつ安価な原料系を使用して、アスペクト比
の大きな、長いウイスカーを効率よく製造する方
法を提供するものである。 〔問題点を解決するための手段〕 すなわち、本発明のSiCウイスカーの製造方法
は、炭素を含むシラン化合物に、硫黄含有物質を
添加して溶解もしくは分散させた原料を、水素雰
囲気中1200〜1600℃の温度に加熱することを構成
的特徴とする。 本発明で使用するシラン化合物としては、構成
分子中にアルキル基やアルコキシル基等の炭素を
含む基を有するもの、例えば(CH34Si、
(CH32SiCl2、Si(OC2H54等が用いられる。こ
れらのシラン化合物は、水素雰囲気中で加熱する
と熱分解して、ケイ素を含む分解生成物及び炭素
を含む分解生成物を生成する。なお、炭素を含む
分解生成物の量を調節するために、シラン化合物
とは別にCH4、C3H8等の炭化水素を別途供給す
ることもできる。 この場合に、硫黄含有物質をシラン化合物に添
加すると、硫黄含有物質も熱分解されて硫化水素
を生成する。生成した硫化水素は、ケイ素を含む
分解生成物と反応して硫化ケイ素に変換し、次い
で硫化ケイ素は炭素を含む分解生成物と反応して
SiCに転化し、長いウイスカーに成長する。 硫黄含有物質としては、チオフエン、ジメチル
サルフアイド、ジメチルスルホキサイド等の硫黄
含有炭化水素、あるいは単体硫黄や硫化水素等が
好ましく使用される。この硫黄含有物質は、シラ
ン化合物に溶解あるいは分散させた状態で反応炉
に供給する。硫黄含有物質の添加量は、硫黄量に
換算してシラン化合物に対して0.05〜10wt%が適
当である。添加量が0.05wt%未満では硫化ケイ素
の生成量が少ないためにウイスカー生成反応が効
率よく進行しないためである。また、10wt%を
越える場合は、過剰の硫化ケイ素が未反応のま
ま、反応系外に排出されるので好ましくない。 この硫黄含有物質を添加したシラン化合物原料
は、水素をキヤリアガスとして反応炉に導入し
て、水素雰囲気中1200〜1600℃の温度で熱分解さ
せると、反応炉中に設けた基板上にSiCウイスカ
ーが生成する。基板としては、黒鉛やアルミナ等
が用いられる。原料の導入量は液体として、水素
ガスに対して0.005〜0.04Vol.%の割合で反応炉に
導入する。0.005Vol.%未満ではSiCウイスカーの
生成能率が悪く、また0.04Vol.%を越えると生成
した熱分解炭素がSiCウイスカー中に混在して、
その除去が必要となる場合が生じるためである。
導入する水素ガスは、基板上を10〜180cm/分程
度の速度に設定される。速度が10cm/分を下回る
とSiCウイスカーの生成能率が悪く、180cm/分
を上回る場合は生成効率が低下するためである。 これらの条件下に、所定温度に0.5〜4時間保
持することにより、直径が0.1〜2μ、長さ数cmの
SiCウイスカーを効率よく製造することができ
る。 〔作用〕 上記構成に基づき、SiCウイスカーの成長促進
機能のを有する硫化ケイ素の生成を、安価かつ入
手容易な原料系を用いて、効果的に達成すること
ができる。 〔実施例〕 実施例 1 電気炉内にムライト製の反応炉管(内径80mm、
長さ1600mm)を挿着し、両端を黒鉛栓でシールし
た。一端にSUS316製原料導入管(内径1mm)及
び水素ガス供給管(内径6mm)を挿入し、他端に
は排気管(内径15mm)を挿入した。また、反応炉
管の中央部にはムライトの基板を設置した。 まず、アルゴンガスを流しながら昇温して反応
炉管内の空気を置換し、次いで水素ガスに切替え
て系内を高温水素雰囲気にした。このようにして
1300℃に設定した反応炉管に、ジメチルジクロル
シラン100gにチオフエンを15g及び25g溶解し
た原料を0.1ml/分の割合で導入した。 なお、水素ガスの流量は500ml/分に設定した。
この条件で2時間保持して得られたSiCウイスカ
ーの形状特性及び収率を表−1に示した。 また、比較のために、原料としてメルカプト変
性シリコンオイル(信越化学(株)製X−22−980)
を使用し、その他の条件は実施例1と同じ方法で
製造したSiCウイスカーの形状特性及び収率を同
表中に併記した。
[Industrial field of application] The present invention is a method for producing large aspect ratio
This invention relates to a method for producing SiC whiskers. [Prior Art] SiC whiskers are attracting attention as reinforcing materials for composite materials because they have extremely excellent strength and elastic modulus, as well as high heat resistance and corrosion resistance, and are lightweight. In particular, in recent years it has become useful as a reinforcing material for FRM, FRP, and FRC in a wide range of application fields including automobiles and aircraft. Generally, SiC whiskers with excellent reinforcing properties are required to have long fiber length and a large aspect ratio. There are two methods for producing SiC whiskers: a gas phase method in which a silicon-containing raw material and a carbon-containing raw material are reacted in the gas phase, and a solid-phase method in which solids are used as both the silicon-containing raw material and the carbon-containing raw material. be. Gas phase methods include, for example, a method in which a silicon compound such as SiCl 4 or (CH 3 ) 4 Si is reacted with a carbon compound such as CH 4 , C 3 H 8 , or CCl 4 in a high-temperature hydrogen stream, or a method in which a silicon compound such as SiCl 4 or (CH 3 ) 4 Si is reacted in a high-temperature hydrogen stream; There is a method of thermally decomposing a silane compound such as SiCl 3 in a hydrogen stream. However, if SiC whiskers with longer fiber lengths and higher aspect ratios can be obtained, they can be easily made into sheets or continuous into long fibers, making it possible to apply them in a wider range of fields. It is generally known that the presence of hydrogen sulfide during the SiC whisker generation process accelerates the whisker growth reaction. Hydrogen sulfide reacts with silicon-containing decomposition products to produce silicon sulfide, which in turn reacts with carbon-containing decomposition products.
It is thought that it converts into SiC whiskers. To utilize the whisker generation promoting function of hydrogen sulfide, mercapto-modified silicone oil can be used with hydrogen or argon as a carrier gas.
SiC by pyrolysis at a temperature of 1200-1400℃
A method of generating whiskers has been proposed.
(January 1988 Ceramics Basics Discussion Meeting Materials). SiC whiskers produced by this method have a diameter of 0.3 to 3 μm and a length of several
Long whiskers reaching cm have been obtained. However, the mercapto-modified silicone oil used as a raw material is expensive, difficult to obtain, and has shortcomings such as poor long-term stability. [Problems to be Solved by the Invention] The present invention solves the above-mentioned drawbacks and provides a method for efficiently producing long whiskers with a large aspect ratio using readily available and inexpensive raw material systems. This is what we provide. [Means for Solving the Problems] That is, the method for producing SiC whiskers of the present invention involves adding a sulfur-containing substance to a carbon-containing silane compound and dissolving or dispersing the raw material in a hydrogen atmosphere at 1200 to 1600 °C. The structural feature is heating to a temperature of °C. The silane compounds used in the present invention include those having carbon-containing groups such as alkyl groups and alkoxyl groups in their constituent molecules, such as (CH 3 ) 4 Si,
(CH 3 ) 2 SiCl 2 , Si(OC 2 H 5 ) 4 , etc. are used. These silane compounds thermally decompose when heated in a hydrogen atmosphere to produce decomposition products containing silicon and decomposition products containing carbon. Note that in order to adjust the amount of decomposition products containing carbon, hydrocarbons such as CH 4 and C 3 H 8 can also be separately supplied in addition to the silane compound. In this case, when a sulfur-containing substance is added to the silane compound, the sulfur-containing substance is also thermally decomposed to produce hydrogen sulfide. The generated hydrogen sulfide reacts with silicon-containing decomposition products to convert into silicon sulfide, and silicon sulfide then reacts with carbon-containing decomposition products.
Converts to SiC and grows into long whiskers. As the sulfur-containing substance, sulfur-containing hydrocarbons such as thiophene, dimethyl sulfide, and dimethyl sulfoxide, or elemental sulfur and hydrogen sulfide are preferably used. This sulfur-containing substance is supplied to the reactor in a state in which it is dissolved or dispersed in a silane compound. The appropriate amount of the sulfur-containing substance added is 0.05 to 10 wt% relative to the silane compound in terms of sulfur content. This is because if the amount added is less than 0.05 wt%, the amount of silicon sulfide produced is small and the whisker production reaction does not proceed efficiently. Moreover, if it exceeds 10 wt%, excess silicon sulfide will remain unreacted and will be discharged from the reaction system, which is not preferable. When this silane compound raw material containing a sulfur-containing substance is introduced into a reactor using hydrogen as a carrier gas and thermally decomposed at a temperature of 1200 to 1600°C in a hydrogen atmosphere, SiC whiskers are formed on a substrate placed in the reactor. generate. Graphite, alumina, or the like is used as the substrate. The raw material is introduced into the reactor as a liquid at a ratio of 0.005 to 0.04 Vol.% relative to hydrogen gas. If it is less than 0.005 Vol.%, the generation efficiency of SiC whiskers is poor, and if it exceeds 0.04 Vol.%, the generated pyrolytic carbon will be mixed in the SiC whiskers.
This is because there may be cases where its removal becomes necessary.
The hydrogen gas introduced is set at a speed of about 10 to 180 cm/min over the substrate. This is because if the speed is less than 10 cm/min, the SiC whisker generation efficiency is poor, and if the speed is more than 180 cm/min, the generation efficiency is reduced. Under these conditions, by holding at the specified temperature for 0.5 to 4 hours, it is possible to form a specimen with a diameter of 0.1 to 2μ and a length of several centimeters.
SiC whiskers can be efficiently produced. [Operation] Based on the above configuration, silicon sulfide having the function of promoting the growth of SiC whiskers can be effectively produced using an inexpensive and easily available raw material system. [Example] Example 1 A mullite reactor tube (inner diameter 80 mm,
(length 1600 mm) was inserted and both ends were sealed with graphite plugs. A SUS316 raw material introduction pipe (inner diameter 1 mm) and a hydrogen gas supply pipe (inner diameter 6 mm) were inserted into one end, and an exhaust pipe (inner diameter 15 mm) was inserted into the other end. In addition, a mullite substrate was installed in the center of the reactor tube. First, the temperature was raised while flowing argon gas to replace the air in the reactor tube, and then hydrogen gas was switched to create a high-temperature hydrogen atmosphere in the system. In this way
Raw materials prepared by dissolving 15 g and 25 g of thiophene in 100 g of dimethyldichlorosilane were introduced into a reactor tube set at 1300° C. at a rate of 0.1 ml/min. Note that the flow rate of hydrogen gas was set at 500 ml/min.
Table 1 shows the shape characteristics and yield of SiC whiskers obtained by holding under these conditions for 2 hours. For comparison, mercapto-modified silicone oil (X-22-980 manufactured by Shin-Etsu Chemical Co., Ltd.) was used as a raw material.
The shape characteristics and yield of SiC whiskers produced using the same method as in Example 1 under other conditions are also listed in the same table.

【表】 実施例 2 シリコンオイル(信越化学(株)製KF−96)100g
に、チオフエンを4g及び15g溶解した原料を使
用した以外は実施例1と同じ方法で実施した。得
られた結果を表−2に示した。なお、シリコンオ
イルのみを使用し、チオフエンを添加しない原料
を用いて同一条件で熱分解したが、SiCウイスカ
ーの生成は認められなかつた。
[Table] Example 2 Silicone oil (KF-96 manufactured by Shin-Etsu Chemical Co., Ltd.) 100g
The same method as in Example 1 was carried out except that raw materials in which 4 g and 15 g of thiophene were dissolved were used. The results obtained are shown in Table-2. Although thermal decomposition was performed under the same conditions using only silicone oil and a raw material without thiophene added, no generation of SiC whiskers was observed.

〔発明の効果〕〔Effect of the invention〕

上記説明で明らかなように、本発明方法によれ
ば安価かつ入手容易であり、しかも安定な原料系
を使用して繊維長が長く、アスペクト比の大きい
SiCウイスカーを効率よく製造することが可能と
なる。
As is clear from the above explanation, the method of the present invention is inexpensive, easily available, and uses stable raw material systems to produce fibers with long fiber length and large aspect ratio.
It becomes possible to efficiently manufacture SiC whiskers.

Claims (1)

【特許請求の範囲】 1 炭素を含むシラン化合物に硫黄含有物質を添
加して溶解もしくは分散させた原料を、水素雰囲
気中1200〜1600℃の温度に加熱することを特徴と
するSiCウイスカーの製造方法。 2 硫黄含有物質が硫黄含有炭化水素、単体硫黄
または硫化水素である特許請求の範囲第1項記載
のSiCウイスカーの製造方法。 3 シラン化合物に硫黄含有物質を、硫黄として
0.05〜10wt%添加する特許請求の範囲第1項記載
のSiCウイスカーの製造方法。
[Claims] 1. A method for producing SiC whiskers, which comprises heating a raw material prepared by adding a sulfur-containing substance to a carbon-containing silane compound and dissolving or dispersing the mixture to a temperature of 1200 to 1600°C in a hydrogen atmosphere. . 2. The method for producing SiC whiskers according to claim 1, wherein the sulfur-containing substance is a sulfur-containing hydrocarbon, elemental sulfur, or hydrogen sulfide. 3 Adding a sulfur-containing substance to a silane compound as sulfur
The method for producing SiC whiskers according to claim 1, wherein 0.05 to 10 wt% is added.
JP5879087A 1987-03-16 1987-03-16 Method for manufacturing SiC whiskers Granted JPS63225600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5879087A JPS63225600A (en) 1987-03-16 1987-03-16 Method for manufacturing SiC whiskers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5879087A JPS63225600A (en) 1987-03-16 1987-03-16 Method for manufacturing SiC whiskers

Publications (2)

Publication Number Publication Date
JPS63225600A JPS63225600A (en) 1988-09-20
JPH03359B2 true JPH03359B2 (en) 1991-01-07

Family

ID=13094367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5879087A Granted JPS63225600A (en) 1987-03-16 1987-03-16 Method for manufacturing SiC whiskers

Country Status (1)

Country Link
JP (1) JPS63225600A (en)

Also Published As

Publication number Publication date
JPS63225600A (en) 1988-09-20

Similar Documents

Publication Publication Date Title
US4560589A (en) Method for providing a coating layer of silicon carbide on substrate surface
CN102199872A (en) Method for in-situ growing carbon nanotubes on fiber surfaces
Zhang et al. Synthesis of SiC nanowires by a simple chemical vapour deposition route in the presence of ZrB2
Liu et al. Theoretical and experimental study of the mechanism for preparation of SiC nanowires by carbothermal reduction
US4552740A (en) Process for producing amorphous and crystalline silicon nitride
JPH03359B2 (en)
JPH0313189B2 (en)
KR920701535A (en) Transition Metal Carbide and Nitride Whiskers Grown by Chemical Vapor Deposition (CVD)
JP6422779B2 (en) An improved method for synthesizing carbon nanotubes on multiple supports
JPH06508176A (en) Polysilane composition
JPH0476359B2 (en)
CN100391834C (en) Preparation method of high-purity multi-walled carbon nanotubes
JP2604753B2 (en) Method for producing silicon carbide whiskers
JPH03360B2 (en)
US4855119A (en) Method of manufacturing silicon carbide whisker
Arizumi Some Aspects of the Epitaxial Vapor Growth of Semiconductors: Elements, III--V Compounds and Alloys
Liu et al. Chemical vapor deposition derived ultralong SiC nanofibers: structural characterization and growth mechanism
JP3631976B2 (en) Method for growing silicon carbide single crystal
CN1055324C (en) Amorphous in-situ synthesized nm silicon nitride crystal whisker
JPS62162699A (en) Production of carbonaceous whisker
JP2579949B2 (en) Method for producing silicon carbide whisker
JPH0196098A (en) Method for producing carbonaceous whiskers
JPH0192424A (en) Manufacturing method of vapor grown carbon fiber
JP2531739B2 (en) Method for producing vapor grown carbon fiber
JPH0649767B2 (en) Organometallic ceramic precursors based on boron, nitrogen and silicon