JPH0336155B2 - - Google Patents
Info
- Publication number
- JPH0336155B2 JPH0336155B2 JP59043958A JP4395884A JPH0336155B2 JP H0336155 B2 JPH0336155 B2 JP H0336155B2 JP 59043958 A JP59043958 A JP 59043958A JP 4395884 A JP4395884 A JP 4395884A JP H0336155 B2 JPH0336155 B2 JP H0336155B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- liquid
- liquid nitrogen
- chevron
- vent pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 50
- 239000007788 liquid Substances 0.000 claims description 50
- 229910052757 nitrogen Inorganic materials 0.000 claims description 25
- 239000007789 gas Substances 0.000 claims description 18
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Plasma Technology (AREA)
Description
【発明の詳細な説明】
本発明はクライオポンプの液体窒素供給装置に
係り、特に中性粒子入射装置に使用され液体ヘリ
ウムで冷却されるクライオポンプを輻射熱からシ
ールドするために供給される液体窒素の供給装置
に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a liquid nitrogen supply device for a cryopump, and in particular to a liquid nitrogen supply device used in a neutral particle injection device to shield a cryopump cooled with liquid helium from radiant heat. Regarding the supply device.
従来例を第１図に示す。該図の如く従来におけ
る液体窒素供給装置は、流量調節弁４を介しシエ
ブロンバツフル３のシールド板の下部に接続され
る供給配管５と、シエブロンバツフル３のシール
ド板の上部より気液分離器１の下部に接続される
ガス抜配管２により構成される系統を流れ、気液
分離器１で液体窒素は気液分離されていた。本系
統では、ガス抜配管２を気液分離器１側から、シ
エブロンバツフル３のシールド板側に液体窒素が
流れ込むことはなく、気液分離器１に液体窒素が
あつても、流量調節弁４よりの供給が不十分の場
合、シエブロンバツフル３のシールド板の冷却が
不十分になることがあつた。このため、液体窒素
の供給を十分に行なうと、気液分離器１より外部
に液体窒素を捨ててしまう欠点があつた。尚、６
は定常時の液体窒素液面である。 A conventional example is shown in FIG. As shown in the figure, the conventional liquid nitrogen supply device includes a supply pipe 5 connected to the lower part of the shield plate of the Chevron buttful 3 via a flow rate control valve 4, and a gas-liquid supply pipe 5 connected to the lower part of the shield plate of the Chevron buttful 3 through a flow rate control valve 4. The liquid nitrogen flowed through a system consisting of a gas vent pipe 2 connected to the lower part of the separator 1, and was separated into gas and liquid by the gas-liquid separator 1. In this system, liquid nitrogen does not flow through the gas vent pipe 2 from the gas-liquid separator 1 side to the shield plate side of the Chevron Buttfull 3, and even if liquid nitrogen is present in the gas-liquid separator 1, the flow rate is adjusted. If the supply from the valve 4 was insufficient, the cooling of the shield plate of the Chevron Buttfull 3 could become insufficient. Therefore, if a sufficient amount of liquid nitrogen is supplied, the liquid nitrogen is disposed of outside the gas-liquid separator 1. In addition, 6
is the liquid nitrogen level at steady state.
本発明は上述の点に鑑み成されたもので、その
目的とするところは、シエブロンバツフルのシー
ルド板の予冷、定常運転に最適なクライオポンプ
の液体窒素供給装置を提供するにある。 The present invention has been made in view of the above points, and its object is to provide a liquid nitrogen supply device for a cryopump that is optimal for precooling the shield plate of a Chevron buttful and for steady operation.
本発明は液体窒素の自然循環により、シエブロ
ンバツフルのシールド板を十分冷却できることを
確認し、さらに予冷をスムーズに行なえる様配管
系統を自然循環型とし、かつ、ガス抜配管を気液
分離器底板より突き出すことにより所期の目的を
達成するように成したものである。 The present invention has confirmed that the shield plate of the Chevron Batsuful can be sufficiently cooled by natural circulation of liquid nitrogen, and the piping system is of a natural circulation type for smooth precooling, and the gas vent piping is separated into gas and liquid. It was designed to achieve its intended purpose by protruding from the bottom plate of the vessel.
以下、図面の実施例に基づいて本発明を説明す
る。尚、符号は従来と同一のものは同符号を使用
する。 The present invention will be described below based on embodiments shown in the drawings. Incidentally, the same reference numerals are used for the same parts as in the past.
本発明の一実施例を第２図に示す。該図の如
く、本実施例では、液体窒素は流量調節弁４を介
し気液分離器１に供給される。この気液分離器１
の底板よりシエブロンバツフル３のシールド板の
下部に供給配管５が接続される。更にシエブロン
バツフル３のシールド板上部より気液分離器１の
底板までガス抜配管２が接続されると共に、この
ガス抜配管２の先端は、気液分離器１の内部に突
き出ている。 An embodiment of the present invention is shown in FIG. As shown in the figure, in this embodiment, liquid nitrogen is supplied to the gas-liquid separator 1 via the flow rate control valve 4. This gas-liquid separator 1
A supply pipe 5 is connected to the lower part of the shield plate of the Chevron Buttfull 3 from the bottom plate. Further, a gas venting pipe 2 is connected from the upper part of the shield plate of the Chevron buttful 3 to the bottom plate of the gas-liquid separator 1, and the tip of this gas venting pipe 2 projects into the interior of the gas-liquid separator 1.
そして、予冷時、気液分離器１の液体窒素液面
は、気液分離器１の底板より突き出したガス抜配
管２の下のレベル７とし、液体窒素が供給配管５
にスムーズに流れ込む様にし、かつ、ガス抜配管
２側には流れ込まず、ガスが吹き出しやすくする
（ガス抜配管２上より液体窒素を留めると、ガス
抜配管２側にも液体窒素が流れ込み、また吹き出
しの振動を生じ、気液分離器１内の圧力が一定と
ならないことがある）。 During precooling, the liquid nitrogen level in the gas-liquid separator 1 is set to level 7 below the gas vent pipe 2 protruding from the bottom plate of the gas-liquid separator 1, and the liquid nitrogen is level 7 below the gas vent pipe 2 protruding from the bottom plate of the gas-liquid separator 1.
(If liquid nitrogen is kept from above the gas vent pipe 2, liquid nitrogen will also flow into the gas vent pipe 2 side, and the gas will not flow into the gas vent pipe 2 side.) This may cause vibrations in the air outlet, and the pressure within the gas-liquid separator 1 may not be constant).
更に定常時においては、液面レベルを６とし、
自然循環によりシエブロンバツフル３のシールド
板の冷却が十分行なえる様にする。自然循環は、
シエブロンバツフル３のシールド板への入熱が、
供給配管５への入熱より大きいことにより生じる
液体窒素のヘツド差により生じる。また、流量調
節弁４は１個であるので制御上のコストが低減出
来る。 Furthermore, in steady state, the liquid level is set to 6,
To ensure that the shield plate of Chevron Batsuful 3 is sufficiently cooled by natural circulation. The natural cycle is
The heat input to the shield plate of Chevron Batsuful 3 is
This is caused by a head difference in liquid nitrogen caused by a larger heat input into the supply pipe 5. Further, since there is only one flow rate regulating valve 4, control costs can be reduced.
以上説明した本発明によれば、クライオポンプ
のシエブロンバツフルシールド板の予冷、定常運
転に最適な液体窒素供給方式を提供出来るので、
シエブロンバツフルのシールド板の冷却が十分良
好に出来、液体窒素消費量の低減、制御のコスト
低減が出来る。 According to the present invention described above, it is possible to provide a liquid nitrogen supply system that is optimal for precooling and steady operation of the Chevron buttful shield plate of a cryopump.
The shield plate of the Chevron Batsuful can be cooled sufficiently, reducing liquid nitrogen consumption and control costs.
第１図は従来の液体窒素供給装置を示す系統
図、第２図は本発明の一実施例を示す液体窒素供
給装置の系統図である。
１……気液分離器、２……ガス抜配管、３……
シエブロンバツフル、４……流量調節弁、５……
供給配管。
FIG. 1 is a system diagram showing a conventional liquid nitrogen supply device, and FIG. 2 is a system diagram of a liquid nitrogen supply device showing an embodiment of the present invention. 1... Gas-liquid separator, 2... Gas vent piping, 3...
Chevron Batsuful, 4...Flow control valve, 5...
Supply piping.
Claims (1)
クライオパネルを輻射熱からシールドするため、
液体窒素を供給してシエブロンバツフルのシール
ドを冷却するものにおいて、前記液体窒素の供給
用配管を流量調整弁を介して気液分離器に接続
し、該気液分離器の底板より前記シエブロンバツ
フルのシールド板の下部に供給配管を接続し、か
つ、前記シエブロンバツフルのシールド板上部よ
り前記気液分離器にガス抜配管を接続すると共
に、このガス抜配管を気液分離器底板より内部に
突き出したことを特徴とするクライオポンプの液
体窒素供給装置。 ２ 特許請求の範囲第１項のものにおいて、予冷
時は前記気液分離器内部に突き出したガス抜配管
下より液留し、定常時はガス抜配管上まで液留す
ることを特徴とするクライオポンプの液体窒素供
給装置。[Claims] 1. To shield a cryopanel of a cryopump cooled by liquid helium from radiant heat,
In a device that supplies liquid nitrogen to cool the shield of a Chevron Batsuful, the liquid nitrogen supply piping is connected to a gas-liquid separator via a flow rate regulating valve, and the A supply pipe is connected to the lower part of the shield plate of the Chevron Batsu Full, and a gas vent pipe is connected to the gas-liquid separator from the upper part of the shield plate of the Chevron Batsu Full, and this gas vent pipe is connected to the gas-liquid separator. A liquid nitrogen supply device for a cryopump that is characterized by protruding from the bottom plate. 2. A cryocooler according to claim 1, characterized in that during precooling, the liquid is distilled from below the gas vent pipe protruding into the gas-liquid separator, and during steady state, the liquid is distilled up to the top of the gas vent pipe. Pump liquid nitrogen supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59043958A JPS60188871A (en) | 1984-03-09 | 1984-03-09 | Feeder for liquid nitrogen to cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59043958A JPS60188871A (en) | 1984-03-09 | 1984-03-09 | Feeder for liquid nitrogen to cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60188871A JPS60188871A (en) | 1985-09-26 |
| JPH0336155B2 true JPH0336155B2 (en) | 1991-05-30 |
Family
ID=12678211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59043958A Granted JPS60188871A (en) | 1984-03-09 | 1984-03-09 | Feeder for liquid nitrogen to cryopump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60188871A (en) |
-
1984
- 1984-03-09 JP JP59043958A patent/JPS60188871A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60188871A (en) | 1985-09-26 |
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