JPH0338539B2 - - Google Patents
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- Publication number
- JPH0338539B2 JPH0338539B2 JP60167814A JP16781485A JPH0338539B2 JP H0338539 B2 JPH0338539 B2 JP H0338539B2 JP 60167814 A JP60167814 A JP 60167814A JP 16781485 A JP16781485 A JP 16781485A JP H0338539 B2 JPH0338539 B2 JP H0338539B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- optical waveguide
- coating layer
- oil
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N21/431—Dip refractometers, e.g. using optical fibres
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Geophysics And Detection Of Objects (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は油等の液体の存否を光学的に感知する
液体感知器に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a liquid sensor that optically senses the presence or absence of a liquid such as oil.
最近、石油備蓄基地や石油化学プラント等で油
洩れ事故が多発しており、このような事故を早期
に発見するための法的規制等によつて信頼度の高
い液体感知器が必要とされている。
Recently, oil leak accidents have been occurring frequently at oil storage bases, petrochemical plants, etc., and highly reliable liquid detectors are required due to legal regulations to detect such accidents early. There is.
このような液体感知器の一つとして光導波路型
の感知器がある。これは透光性基板中に形成され
た光導波路と、光導波路の入出射端間に基板表面
に露出するように光導波路に設けられている露出
部と、この露出部よりも広い面積で露出部を覆う
ように透光性基板上に配された、光導波路の屈折
率よりも小さい屈折率を有するシリコン樹脂から
成る被覆層とで構成されている。 One such liquid sensor is an optical waveguide type sensor. This consists of an optical waveguide formed in a transparent substrate, an exposed part of the optical waveguide that is exposed on the substrate surface between the input and output ends of the optical waveguide, and an exposed area that is wider than this exposed part. A coating layer made of silicone resin and having a refractive index smaller than that of the optical waveguide is disposed on a transparent substrate so as to cover the optical waveguide.
上記の感知器の両端を光源及び光検出器に光フ
アイバを介して光学的に接続し、感知器を油洩れ
を検出したい箇所に配置しておくと、油洩れが発
生していない状態、つまり液体感知器に油が付着
していない状態では光導波路中を伝搬する光はシ
リコン樹脂被覆層と光導波路との境界で全反射
し、低損失で出射端まで伝搬する。ところが屈折
率の大きな油が液体感知器に付着し、被覆層内へ
浸潤すると被覆層樹脂の屈折率が増大する。この
結果、光導波路と被覆層との境界で全反射される
ことなく伝搬光が外部に出射し、出射端まで伝搬
する光の量が油で浸潤前に比べて減少する。 By optically connecting both ends of the above sensor to a light source and a photodetector via optical fibers and placing the sensor at the location where you want to detect oil leakage, it is possible to detect a state where no oil leakage has occurred, i.e. When no oil is attached to the liquid sensor, the light propagating in the optical waveguide is totally reflected at the boundary between the silicone resin coating layer and the optical waveguide, and propagates to the output end with low loss. However, when oil with a high refractive index adheres to the liquid sensor and infiltrates into the coating layer, the refractive index of the coating layer resin increases. As a result, the propagating light is emitted to the outside without being totally reflected at the boundary between the optical waveguide and the coating layer, and the amount of light propagating to the output end is reduced compared to before being infiltrated with oil.
従つて、上記の導波路感知器に接続した光検出
器での受光量変化を監視すれば油洩れを感知する
ことができる。 Therefore, oil leakage can be detected by monitoring changes in the amount of light received by the photodetector connected to the waveguide sensor.
上記従来の光学式感知器では被覆層のシリコン
樹脂中へ浸潤しその屈折率が増加するまでに非常
に時間がかかるため、被検出液体の感知器への付
着から光検出器における受光量変化までに時間が
かかり検出が遅れるという問題があつた。
In the conventional optical sensor mentioned above, it takes a very long time for the silicone resin of the coating layer to infiltrate and its refractive index to increase. There was a problem in that it took a long time to process and the detection was delayed.
特に粘性の大きい液体の場合数時間の検出遅れ
を生じることもある。 Particularly in the case of highly viscous liquids, a detection delay of several hours may occur.
また被検出液体の種類によつてはその浸潤によ
つてシリコン樹脂被覆層の屈折率があまり増加し
ないことがあり、例えばC重油の場合シリコン樹
脂の屈折率の増加は0.5%程度しかなく、従来構
造の感知器ではC重油を検出できず適用範囲が狭
いという問題もあつた。 Also, depending on the type of liquid to be detected, the refractive index of the silicone resin coating layer may not increase much due to its infiltration. For example, in the case of heavy oil C, the refractive index of the silicone resin increases by only about 0.5%, whereas conventional There was also the problem that the structured sensor could not detect heavy oil C and had a narrow range of application.
平板状の基板中に周囲よりも屈折率の大な光導
波路をその一部を基板面に露出させて設け、
前記光導波路の露出部およびそれに連なる近傍
の基板表面を連続多孔質体から成る被覆層で覆
い、前記光導波路を光源および光検出器に光学的
に接続して感知器を構成する。
An optical waveguide having a higher refractive index than the surrounding area is provided in a flat substrate with a part thereof exposed on the substrate surface, and the exposed portion of the optical waveguide and the adjacent substrate surface connected thereto are coated with a continuous porous material. and optically connect the optical waveguide to a light source and a photodetector to form a sensor.
上記の連続多孔質体から成る被覆層は、合成樹
脂、セラミクス等種々の材質で形成し得るが、被
検出液体が油類の場合は水分浸透による誤検出を
防ぐため撥水性をもたせることが望ましく、特に
四弗化エチレン樹脂等の弗化エチレン樹脂が好適
である。また連続気孔の毛管現象による被覆層中
への被検出液体浸透を可及的に速やかにするため
には、被覆層は導光体に対しオプテイカルコンタ
クトではなく非接着状態で圧着しておくのが望ま
しい。 The coating layer made of the continuous porous material mentioned above can be made of various materials such as synthetic resins and ceramics, but if the liquid to be detected is oil, it is desirable to have water repellency to prevent false detection due to moisture penetration. In particular, fluorinated ethylene resins such as tetrafluorinated ethylene resins are suitable. In addition, in order to ensure that the liquid to be detected penetrates into the coating layer as quickly as possible due to the capillary action of continuous pores, the coating layer should be crimped to the light guide in a non-adhesive state rather than through optical contact. is desirable.
感知器の被覆層に油等の被検出液体が付着する
と、被覆層が連続多孔質体であるので気孔を通つ
て毛管現象により速やかに液体が浸透して導光体
表面に達し、平常時つまり大気と接触している時
に比べて導光体外表面における屈折率が増大する
ので、界面の全反射臨界角が増加しそれだけ導光
体から外部へ洩れる光量が多くなる。
When a liquid to be detected such as oil adheres to the coating layer of the sensor, since the coating layer is a continuous porous material, the liquid quickly penetrates through the pores by capillary action and reaches the surface of the light guide, causing no blockage under normal conditions. Since the refractive index at the outer surface of the light guide increases compared to when it is in contact with the atmosphere, the critical angle of total reflection at the interface increases, and the amount of light leaking from the light guide to the outside increases accordingly.
この結果、導光体からの出射光量が減少するの
で、光検出器で受光量変化を監視することにより
液体の付着を知ることができる。 As a result, the amount of light emitted from the light guide decreases, and by monitoring changes in the amount of received light with a photodetector, it is possible to know whether the liquid is attached.
以下本発明を図面に示した実施例に基づいて詳
細に説明する。
The present invention will be described in detail below based on embodiments shown in the drawings.
第1図、第2図は本発明に係る液体感知器の斜
視図及び側断面図であり、屈折率がn1であるガラ
ス、プラスチツク等の透光性基板11中には、n1
よりも大な屈折率n2を有する光導波路12が形成
されている。 FIGS. 1 and 2 are a perspective view and a side sectional view of a liquid sensor according to the present invention.
An optical waveguide 12 is formed having a refractive index n 2 larger than that of n 2 .
光導波路は入射端近傍と出射端近傍において単
一路でその中間では二本の分岐路12C,12C
に分岐している。 The optical waveguide has a single path near the input end and near the output end, and two branch paths 12C and 12C in the middle.
It is branched into.
そして入射端12Aと出射端12Bの近傍の光
導波路12は基板11中に完全に埋め込まれてい
るが、分岐路12Cは基板11の表面11Aに露
出している露出部12Dをその略全長にわたつて
有している。導波路の露出部12Dとこの露出部
12Dに連なつている基板表面11Aとは共に被
覆層13によつて覆われている。この被覆層13
は連続多孔質体、例えば四弗化エチレン樹脂の連
続多孔質体のシートから成つている。この多孔質
体被覆層13は別途製作して基板11の面に載置
し、例えば端部において基板に対し図外の弾性止
着具で留めることにより圧着させておく。そして
導波路12の入射端12A側には光フアイバ15
の一端を接続しフアイバ15の他端を光源に接続
する。 The optical waveguide 12 near the input end 12A and the output end 12B is completely embedded in the substrate 11, but the branch path 12C extends over almost the entire length of the exposed portion 12D exposed on the surface 11A of the substrate 11. I have it. The exposed portion 12D of the waveguide and the substrate surface 11A connected to the exposed portion 12D are both covered with a coating layer 13. This coating layer 13
consists of a sheet of continuous porous material, such as a continuous porous material of tetrafluoroethylene resin. This porous material covering layer 13 is manufactured separately and placed on the surface of the substrate 11, and is crimped to the substrate by, for example, fixing it at the end portion with an elastic fastener (not shown). An optical fiber 15 is connected to the input end 12A side of the waveguide 12.
One end of the fiber 15 is connected and the other end of the fiber 15 is connected to a light source.
また導波路12の出射端12Bには他の光フア
イバ15の一端を接続するとともに、他端を光検
出器に接続する。光源から出て導波路12に入射
し伝播する光は導波路露出部12Dでも全反射さ
れて伝播し、出射側の光フアイバ15に低損失で
出射される。 Further, one end of another optical fiber 15 is connected to the output end 12B of the waveguide 12, and the other end is connected to a photodetector. The light that comes out from the light source, enters the waveguide 12, and propagates is also totally reflected at the exposed waveguide portion 12D and propagates, and is emitted to the optical fiber 15 on the output side with low loss.
もし屈折率の大な油等の被検出液体が被覆層1
3に付着すると連続気孔を通して被覆層13内に
浸透し導波路露出面12Dに達してこの面を濡ら
す。 If the liquid to be detected such as oil with a high refractive index is in the coating layer 1,
3, it penetrates into the coating layer 13 through continuous pores, reaches the exposed waveguide surface 12D, and wets this surface.
この結果、被検出液に接触している露出面12
Dでは伝播光が全反射されず、導波路12中を伝
播する光の量が減少し、光検出器で検出される受
光量が減少するので、光量変化を電気的に監視し
ていれば被検出液の付着を検知することができ
る。 As a result, the exposed surface 12 in contact with the liquid to be detected
At D, the propagating light is not totally reflected, the amount of light propagating through the waveguide 12 decreases, and the amount of received light detected by the photodetector decreases, so if changes in light amount are monitored electrically, Adhesion of the detection liquid can be detected.
また図示例のように、被覆層13を、導波路1
2Dのみならずこの露出面12Dに連なつている
基板面11Aをも覆うように設けておけば、露出
部12Dから外れた部分で被覆層13に付着した
油等の被検出液も連続気孔を通つて露出部12D
の部分にまで浸透し、また光導波路12が2本の
分岐路12C,12Cに分岐しているので導波路
12の幅よりもはるかに広い範囲にわたつて油洩
れを感知することができる。 Further, as in the illustrated example, the coating layer 13 is applied to the waveguide 1.
If it is provided so as to cover not only the substrate surface 2D but also the substrate surface 11A that is connected to the exposed surface 12D, the liquid to be detected such as oil that adheres to the coating layer 13 in a portion away from the exposed portion 12D will also have continuous pores. Through exposed part 12D
Since the optical waveguide 12 is branched into two branch paths 12C and 12C, oil leakage can be detected over a much wider area than the width of the waveguide 12.
第3図に本発明の第2実施例を示す。 FIG. 3 shows a second embodiment of the invention.
本例では透光性基板11中の光導波路12は基
板表面に対し一定の角度ψで遠近を繰り返す屈曲
路となつており、一定間隔をおいた屈曲部が基板
11の表面11Aに露出して露出部12Dを形成
している。そしてこれら間隔をおいた露出部12
D…が連続多孔質体から成る共通の被覆層13で
覆つてある。 In this example, the optical waveguide 12 in the translucent substrate 11 is a bent path that repeatedly moves near and far at a constant angle ψ with respect to the substrate surface, and the bent portions at regular intervals are exposed on the surface 11A of the substrate 11. An exposed portion 12D is formed. The exposed portions 12 are spaced apart from each other.
D... are covered with a common covering layer 13 made of a continuous porous material.
このように構成すると露出面12Dに入射する
光の入射角がψだけ小さくなるので、第1の実施
例構造に比べ、より小さい屈折率を有する液体の
付着も感知できる。 With this structure, the incident angle of light incident on the exposed surface 12D is reduced by ψ, so that it is possible to detect the attachment of a liquid having a smaller refractive index than in the structure of the first embodiment.
つまり第1実施例では基板の屈折率n1よりも小
さい屈折率の液体の検出は困難であるが、第2実
施例では前記角度ψを適当な値に設定することに
よつて、n1よりも小さい屈折率を有する液体を感
知できる。また露出面12Dの数を増やせば光量
の変化も大きくなり検出感度が上がる。第4図に
自己集束性の導光体を用いた他の実施例を示す。 In other words, in the first embodiment, it is difficult to detect a liquid with a refractive index smaller than n 1 of the substrate, but in the second embodiment, by setting the angle ψ to an appropriate value, the refractive index is smaller than n 1 . can also sense liquids with a small refractive index. Furthermore, if the number of exposed surfaces 12D is increased, the change in the amount of light becomes larger, and the detection sensitivity increases. FIG. 4 shows another embodiment using a self-focusing light guide.
本例は、イオン拡散法、CVD法、共重合法等
の方法によりガラスあるいはプラスチツクの平板
基材21中に屈折率が中心軸線上で最大で幅方向
両側に向けて次第に減少する分布をもつた半円柱
状の導波路12を、露出部12Dを基材21の板
面21Aと一致させて一体に埋め込み形成し、さ
らに基板21の面に、上記露出部12Dを覆うよ
うに且つ導波路12の幅W1よりも広い幅W2望ま
しくはW1の2倍以上の幅に恒つて前記実施例と
同様の連続多孔質体の被覆層13を設けた構造で
ある。 This example has a distribution in which the refractive index is maximum on the central axis and gradually decreases toward both sides in the width direction in the glass or plastic flat base material 21 by a method such as an ion diffusion method, a CVD method, or a copolymerization method. A semi-cylindrical waveguide 12 is integrally embedded with the exposed portion 12D aligned with the plate surface 21A of the base material 21, and is further embedded in the surface of the substrate 21 so as to cover the exposed portion 12D and the portion of the waveguide 12. It has a structure in which a covering layer 13 of a continuous porous material similar to the above embodiment is provided with a width W2 wider than the width W1 , preferably twice or more of W1.
上記構造によれば導波路露出部12Dの幅方向
の外側で被検出液が付着しても被覆層13で捕捉
され、液の浸透によつて露出部12D上の被覆部
分に液体が達する。第5図は感知器の導光体とし
て単一モード光導波路を用いた実施例であり、透
光性基板11中に単一モード光導波路22を設
け、さらにこの単一モード光導波路上に、連続多
孔質体から成る被覆層13が設けられている。 According to the above structure, even if the liquid to be detected adheres to the outside of the exposed waveguide portion 12D in the width direction, it is captured by the coating layer 13, and the liquid reaches the coated portion on the exposed portion 12D by penetration of the liquid. FIG. 5 shows an embodiment in which a single mode optical waveguide is used as the light guide of the sensor. A covering layer 13 made of a continuous porous material is provided.
上記構造の感知器の対向する両側面にそれぞれ
単一モード光フアイバ15A,15Bを結合し、
一方の光フアイバ15Aを通して単一モード光を
導波路22に入射させ、また導波路からの出射光
をフアイバ15Bに受光させる。 Single mode optical fibers 15A and 15B are coupled to opposite sides of the sensor having the above structure, respectively,
Single mode light is made to enter the waveguide 22 through one optical fiber 15A, and light emitted from the waveguide is received by the fiber 15B.
上記構造において、油が被覆層13表面に付着
すると油は速やかに被覆層13中に浸透し導波路
22の表面に達する。この結果、導波路22を通
る単一モード光の外部に浸み出るエバネツセント
波23の割合が増加し、さらに油で吸収される光
の割合が増加する。 In the above structure, when oil adheres to the surface of the coating layer 13, the oil quickly penetrates into the coating layer 13 and reaches the surface of the waveguide 22. As a result, the proportion of the evanescent wave 23 leaking out of the single mode light passing through the waveguide 22 increases, and the proportion of the light absorbed by the oil also increases.
したがつて導波路22出口からの出射光量が減
少するので油洩れを検出することができる。 Therefore, since the amount of light emitted from the exit of the waveguide 22 is reduced, oil leakage can be detected.
このように単一モード光導波路からのエバネツ
セント波浸み出し量変化により検出するため、多
モード光導波路を用いた場合のように導波路への
光の入射角度を一定角度範囲に制御するための加
工が不要で製作が容易になる。 In this way, since detection is performed based on changes in the amount of evanescent waves seeping out from a single mode optical waveguide, it is necessary to control the incident angle of light into the waveguide within a fixed angle range, as in the case of using a multimode optical waveguide. No machining is required, making production easier.
なお、感知器を構成するための基板の材質とし
て、多成分系ガラス、石英系ガラス或いはプラス
チツクを用いた場合は、イオン交換法、光フアイ
バ等の製作に利用されている火炎加水分解法、或
いは光重合法等の周知の技術をそれぞれ利用する
ことによつて光導波路を形成することができる。 In addition, when multicomponent glass, quartz glass, or plastic is used as the substrate material for configuring the sensor, ion exchange method, flame hydrolysis method used for manufacturing optical fibers, etc. Optical waveguides can be formed by using well-known techniques such as photopolymerization.
また単一モード光導波路の垂直断面における屈
折率分布は均一であつてもよいし勾配を有してい
てもよい。また光導波路の形成は上記以外に蒸
着・スパツタリング・イオン注入・熱拡散などの
方法でも何らさしつかえない。第6図は感知器1
4を適用して実際に油洩れを感知するための装置
を示している。まず油タンク24の油漏れが発生
しそうな箇所に感知器14を配置し、これらの感
知器14…を光フアイバ15によつて直列もしく
は並列に接続しておく。最側端の光フアイバ15
へは光源25からの光を入射させ、また他側端の
光フアイバ15から射出される光を光検出器26
で検知する。そして光検出器26からの電気信号
を、増巾器27及び比較器28を介して警報器2
9へ導く。なお、光フアイバコネクタの接続損失
や光フアイバの伝送損失の測定に利用されている
後方散乱法を併用すれば、単に油漏れを感知する
のみではなく、油漏れの箇所をも知ることができ
る。 Further, the refractive index distribution in the vertical cross section of the single mode optical waveguide may be uniform or may have a slope. Further, the optical waveguide may be formed by methods other than those described above, such as vapor deposition, sputtering, ion implantation, and thermal diffusion. Figure 6 shows sensor 1
4 shows a device for actually detecting oil leaks. First, sensors 14 are placed at locations in the oil tank 24 where oil leakage is likely to occur, and these sensors 14 are connected in series or in parallel via optical fibers 15. Optical fiber 15 at the sidemost end
The light from the light source 25 is input to the optical fiber 15, and the light emitted from the optical fiber 15 at the other end is transmitted to the photodetector 26.
Detect with. Then, the electric signal from the photodetector 26 is transmitted to the alarm 2 through an amplifier 27 and a comparator 28.
Leads to 9. If the backscattering method, which is used to measure the connection loss of optical fiber connectors and the transmission loss of optical fibers, is used in combination, it is possible to not only detect oil leaks, but also to know the location of oil leaks.
以上の説明では油の感知について述べたが、被
覆層13の気孔中に浸透し得る液体であれば油に
限られることなく感知することができる。 Although the above description deals with sensing oil, any liquid that can penetrate into the pores of the coating layer 13 can be sensed without being limited to oil.
以下に具体的数値例を示す。 Specific numerical examples are shown below.
第4図に示した実施例において基板として屈折
率1.51の光学ガラスを用い、二段階電界イオン交
換法を用いてこの基板中に、最大屈折率が1.53で
中心から外周に向けて漸減する屈折率勾配をもつ
屈折率分布型光導波路を形成した。そして上記導
波路の露出面を含む基板面上に、別途製作した比
重0.68、厚さ0.035mmの連続多孔質の四弗化エチ
レン樹脂シートを載せ、このシートと基板とを端
部においてピンチで挾持して上記シートを基板面
に圧着した。 In the example shown in Fig. 4, an optical glass with a refractive index of 1.51 is used as the substrate, and a two-stage electric field ion exchange method is used to create a material in which the maximum refractive index is 1.53 and the refractive index gradually decreases from the center to the outer periphery. A graded index optical waveguide with a gradient was formed. Then, a separately manufactured continuous porous polytetrafluoroethylene resin sheet with a specific gravity of 0.68 and a thickness of 0.035 mm was placed on the substrate surface including the exposed surface of the waveguide, and the sheet and the substrate were pinched together at the edges. The sheet was then pressure-bonded to the substrate surface.
上記の感知器の導波路入射端および出射端に光
フアイバを介してそれぞれ光源および光検出器を
接続し、導波路からの出射光量を測定しつつ感知
器の被覆層にA、B及びC重油をそれぞれ数滴付
着させたところ、それぞれ0.5dB、1.25dB、
0.98dBの光量の変化があり油の付着を検出でき
た。また検出に要した時間は何れの場合も1〜2
分以内と極めて短時間であつた。 A light source and a photodetector are connected to the waveguide input end and output end of the above sensor via optical fibers, and while measuring the amount of light emitted from the waveguide, the coating layer of the sensor is coated with heavy oil A, B, and C. When a few drops of each were applied, the results were 0.5dB, 1.25dB, and
There was a change in light intensity of 0.98 dB, and oil adhesion could be detected. In addition, the time required for detection was 1 to 2 in each case.
It took an extremely short time, less than a minute.
本発明による液体感知器では検出面を成す被覆
層に連続多孔質体を用いているので、被覆層シリ
コン樹脂自体への油の浸潤現象を利用した従来の
ものに比べ、導光体表面へ検出液が到達する速度
が極めて早く感知器に被検出液体が付着してから
光検出器で感知するまでの応答速度が早く安全性
の高い検出を行なうことができる。
In the liquid sensor according to the present invention, since a continuous porous material is used for the coating layer forming the detection surface, it is possible to detect the liquid on the surface of the light guide, compared to conventional ones that utilize the phenomenon of oil infiltration into the coating layer silicone resin itself. The speed at which the liquid arrives is extremely fast, and the response speed from when the liquid to be detected adheres to the sensor until it is sensed by the photodetector is fast, and highly safe detection can be performed.
また、光導波路を平板基板中に作成し、上記の
連続多孔質体の被覆層を、光導波路の露出部およ
びそれに連なる近傍の基板表面を覆うように設け
ているので、導波路露出部の幅方向の外側で油等
の被検出液が付着しても被覆層で捕捉され、液の
浸透によつて光導波路の露出部分上の被覆部分に
液体が達することになるので、例えば光フアイバ
に多孔質被覆を設ける場合に比べて、実質的な検
知面積をより広くすることができる。 In addition, since the optical waveguide is created in a flat substrate and the coating layer of the continuous porous material described above is provided to cover the exposed portion of the optical waveguide and the surface of the substrate adjacent to the exposed portion of the optical waveguide, the width of the exposed portion of the waveguide is Even if the liquid to be detected, such as oil, adheres to the outside of the optical fiber, it will be captured by the coating layer, and the liquid will reach the coating on the exposed part of the optical waveguide due to penetration of the liquid. The effective detection area can be made wider than when a solid coating is provided.
光フアイバの径を大にしてその検知面積を広げ
た場合には透過光路断面積も大になるため、その
分感知限界漏光損失が大になる、言い換えれば感
知器の感度が鈍くなるが、本発明によれば、導光
路の径はそのままで、実質的な感知面積を広げる
ことができるという大きな利点がある。 If the diameter of the optical fiber is increased to widen its detection area, the cross-sectional area of the transmitted light path will also increase, which will increase the sensitivity limit light leakage loss.In other words, the sensitivity of the sensor will decrease, but this According to the invention, there is a great advantage that the substantial sensing area can be expanded while the diameter of the light guide path remains the same.
第1図は本発明の第一実施例を示す斜視図、第
2図は同側断面図、第3図は本発明の第二実施例
を示す側断面図、第4図は本発明の第三実施例を
示す斜視図、第5図は本発明の第四実施例を示す
側断面図、第6図は本発明に係る感知器を用いた
油洩れ警報装置を示す模式図である。
11……透光性基板、12……光導波路、12
A……入射端、12B……出射端、12C……分
岐路、12D……露出部、13……連続多孔質被
覆層、14……感知器、15,15A,15B…
…光フアイバ、24……油タンク、25……光
源、26…光検出器、27……増巾器、28……
比較器、29……警報器。
Fig. 1 is a perspective view showing a first embodiment of the present invention, Fig. 2 is a sectional view of the same side, Fig. 3 is a side sectional view showing a second embodiment of the invention, and Fig. 4 is a sectional view of the same side. FIG. 5 is a side sectional view showing a fourth embodiment of the present invention, and FIG. 6 is a schematic diagram showing an oil leak alarm system using a sensor according to the present invention. 11... Transparent substrate, 12... Optical waveguide, 12
A...Incidence end, 12B...Output end, 12C...Branch path, 12D...Exposed portion, 13...Continuous porous coating layer, 14...Sensor, 15, 15A, 15B...
...Optical fiber, 24... Oil tank, 25... Light source, 26... Photodetector, 27... Amplifier, 28...
Comparator, 29... Alarm.
Claims (1)
導波路をその一部を基板面に露出させて設け、 前記光導波路の露出部およびそれに連なる近傍
の基板表面を連続多孔質体から成る被覆層で覆
い、前記光導波路を光源および光検出器に光学的
に接続した液体感知器。[Claims] 1. An optical waveguide having a higher refractive index than the surrounding area is provided in a flat substrate with a part of the optical waveguide exposed on the substrate surface, and the exposed portion of the optical waveguide and the adjacent substrate surface connected thereto are A liquid sensor covered with a coating layer made of a continuous porous material, the optical waveguide being optically connected to a light source and a photodetector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60167814A JPS6228641A (en) | 1985-07-31 | 1985-07-31 | Liquid sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60167814A JPS6228641A (en) | 1985-07-31 | 1985-07-31 | Liquid sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6228641A JPS6228641A (en) | 1987-02-06 |
| JPH0338539B2 true JPH0338539B2 (en) | 1991-06-11 |
Family
ID=15856595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60167814A Granted JPS6228641A (en) | 1985-07-31 | 1985-07-31 | Liquid sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228641A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0718792B2 (en) * | 1988-05-27 | 1995-03-06 | 日立電線株式会社 | Optical salt particle deposition amount detection sensor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337494A (en) * | 1976-09-18 | 1978-04-06 | Denki Kagaku Keiki Kk | Apparatus for detecting oil and so on |
| JPS59171903A (en) * | 1983-03-18 | 1984-09-28 | Furukawa Electric Co Ltd:The | Liquid detecting optical fiber |
| JPS6025940U (en) * | 1983-07-27 | 1985-02-21 | 株式会社 潤工社 | Water resistant oil leak detection sensor |
-
1985
- 1985-07-31 JP JP60167814A patent/JPS6228641A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6228641A (en) | 1987-02-06 |
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| EXPY | Cancellation because of completion of term |