JPH0338627U - - Google Patents

Info

Publication number
JPH0338627U
JPH0338627U JP9796589U JP9796589U JPH0338627U JP H0338627 U JPH0338627 U JP H0338627U JP 9796589 U JP9796589 U JP 9796589U JP 9796589 U JP9796589 U JP 9796589U JP H0338627 U JPH0338627 U JP H0338627U
Authority
JP
Japan
Prior art keywords
substrate
processed
width
transfer direction
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9796589U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9796589U priority Critical patent/JPH0338627U/ja
Publication of JPH0338627U publication Critical patent/JPH0338627U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案に係る熱処理装置の一実施例を
示す要部斜視図、第２図は同装置の正面図である
。 １……熱処理装置、２……被処理基板、３……
加熱部、４……ヒータ、５……移送手段、６……
軸、７……回転板、８……駆動モータ、９……ベ
ルト。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被処理基板上に塗布された処理液を熱処理する
    熱処理装置において、それぞれヒータを有して基
    板移送方向に沿つて並列配置された複数個の加熱
    部と、加熱部間にそれぞれ一部周面を加熱部の上
    方に突出させて回転自在に配設され、駆動手段に
    よつて同期して基板移送方向に回転される複数個
    の回転板とを備え、前記加熱部の基板移送方向の
    幅は被処理基板の移送方向の幅より小さく、前記
    回転板間の距離は、被処理基板の幅よりも小さく
    、且つ被処理基板の移送時において常時被処理基
    板が少なくとも２つの回転板上に載置できる距離
    であることを特徴とする熱処理装置。
JP9796589U 1989-08-24 1989-08-24 Pending JPH0338627U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9796589U JPH0338627U (ja) 1989-08-24 1989-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9796589U JPH0338627U (ja) 1989-08-24 1989-08-24

Publications (1)

Publication Number Publication Date
JPH0338627U true JPH0338627U (ja) 1991-04-15

Family

ID=31647084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9796589U Pending JPH0338627U (ja) 1989-08-24 1989-08-24

Country Status (1)

Country Link
JP (1) JPH0338627U (ja)

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