JPH0338636U - - Google Patents

Info

Publication number
JPH0338636U
JPH0338636U JP1989099460U JP9946089U JPH0338636U JP H0338636 U JPH0338636 U JP H0338636U JP 1989099460 U JP1989099460 U JP 1989099460U JP 9946089 U JP9946089 U JP 9946089U JP H0338636 U JPH0338636 U JP H0338636U
Authority
JP
Japan
Prior art keywords
substrate
processing unit
self
propelled
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989099460U
Other languages
Japanese (ja)
Other versions
JPH0648849Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989099460U priority Critical patent/JPH0648849Y2/en
Publication of JPH0338636U publication Critical patent/JPH0338636U/ja
Application granted granted Critical
Publication of JPH0648849Y2 publication Critical patent/JPH0648849Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • General Factory Administration (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る基板処理装置の模式的平
面図、第２図は熱処理部を構成する各ユニツトの
１例を示す正面図、第３図は従来例の模式的平面
図である。 ５…自走式基板搬送手段、１０〜１６…基板処
理ユニツト、１８…定置式基板移載手段。 FIG. 1 is a schematic plan view of a substrate processing apparatus according to the present invention, FIG. 2 is a front view showing one example of each unit constituting a heat treatment section, and FIG. 3 is a schematic plan view of a conventional example. 5... Self-propelled substrate transfer means, 10-16... Substrate processing unit, 18... Stationary substrate transfer means.

Claims (1)

【実用新案登録請求の範囲】 複数種の基板処理ユニツトと、各基板処理ユニ
ツトへ基板を給排する自走式基板搬送手段とを具
備して成る基板処理装置において、 少なくとも１以上の基板処理ユニツトに定置式
基板移載手段を付設配置し、定置式基板移載手段
は、当該処理ユニツトの処理完了後、自走式基板
搬送手段が当該処理ユニツトに到着していない時
、自走式基板搬送手段が受取り可能になるまで、
当該処理ユニツトによる処理済み基板をバツフア
スペースへ停留させるように構成したことを特徴
とする基板処理装置。[Scope of Claim for Utility Model Registration] In a substrate processing apparatus comprising a plurality of types of substrate processing units and a self-propelled substrate transport means for supplying and discharging substrates to each substrate processing unit, at least one or more substrate processing units are provided. A stationary substrate transfer means is attached to the processing unit, and the stationary substrate transfer means transfers the self-propelled substrate when the self-propelled substrate transfer means has not arrived at the processing unit after the processing of the processing unit is completed. until the means are available for pick up.
1. A substrate processing apparatus, characterized in that the substrate processing unit is configured to park a substrate processed by the processing unit in a buffer space.
JP1989099460U 1989-08-25 1989-08-25 Substrate processing equipment Expired - Lifetime JPH0648849Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989099460U JPH0648849Y2 (en) 1989-08-25 1989-08-25 Substrate processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989099460U JPH0648849Y2 (en) 1989-08-25 1989-08-25 Substrate processing equipment

Publications (2)

Publication Number Publication Date
JPH0338636U true JPH0338636U (en) 1991-04-15
JPH0648849Y2 JPH0648849Y2 (en) 1994-12-12

Family

ID=31648512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989099460U Expired - Lifetime JPH0648849Y2 (en) 1989-08-25 1989-08-25 Substrate processing equipment

Country Status (1)

Country Link
JP (1) JPH0648849Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003056624A1 (en) * 2001-12-25 2003-07-10 Tokyo Electron Limited Processed body carrying device, and processing system with carrying device
JP2006224002A (en) * 2005-02-18 2006-08-31 Hidemitsu Okinaga Garbage disposal apparatus and disposal method
CN104443951A (en) * 2014-11-26 2015-03-25 芜湖懒人智能科技有限公司 Rotary blade type intelligent trash can and control circuit thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215048A (en) * 1987-03-04 1988-09-07 Toshiba Corp Group control method for semiconductor assembly component
JPH01209737A (en) * 1988-02-17 1989-08-23 Teru Kyushu Kk Semiconductor manufacturing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63215048A (en) * 1987-03-04 1988-09-07 Toshiba Corp Group control method for semiconductor assembly component
JPH01209737A (en) * 1988-02-17 1989-08-23 Teru Kyushu Kk Semiconductor manufacturing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003056624A1 (en) * 2001-12-25 2003-07-10 Tokyo Electron Limited Processed body carrying device, and processing system with carrying device
JP2006224002A (en) * 2005-02-18 2006-08-31 Hidemitsu Okinaga Garbage disposal apparatus and disposal method
CN104443951A (en) * 2014-11-26 2015-03-25 芜湖懒人智能科技有限公司 Rotary blade type intelligent trash can and control circuit thereof

Also Published As

Publication number Publication date
JPH0648849Y2 (en) 1994-12-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term