JPH0339712A - Light beam coupler - Google Patents
Light beam couplerInfo
- Publication number
- JPH0339712A JPH0339712A JP17653189A JP17653189A JPH0339712A JP H0339712 A JPH0339712 A JP H0339712A JP 17653189 A JP17653189 A JP 17653189A JP 17653189 A JP17653189 A JP 17653189A JP H0339712 A JPH0339712 A JP H0339712A
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- fabry
- interferometer
- reflected
- transmitted light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 239000012780 transparent material Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 abstract description 12
- 230000005540 biological transmission Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- -1 as shown in (a) Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ光等のビーム結合器に関し、特に偏光
特性を有しない波長の極めて近い光の光ビーム結合器に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a beam combiner for laser beams and the like, and more particularly to a light beam combiner for light having very similar wavelengths and without polarization characteristics.
従来、異なる発生源から出た２つの光を結合して同一光
路上を伝搬させるためには第３図に示すような方法が用
いられていた。第３図のＩＯは光ビーム結合のための素
子であり、半透鏡、ダイクロイックミラー、偏光子など
が用いられている。Conventionally, a method as shown in FIG. 3 has been used to combine two lights emitted from different sources and make them propagate on the same optical path. IO in FIG. 3 is an element for combining light beams, and a semi-transparent mirror, dichroic mirror, polarizer, etc. are used.
１１は結合素子を透過する光ビームであり、１２は結合
素子により反射される光ビームである。11 is a light beam transmitted through the coupling element, and 12 is a light beam reflected by the coupling element.
上述した従来の結合器は、半透鏡の場合は透過する光ビ
ーム１１の反射損失と反射する光ビーム１２の透過損失
とにより、おのおの約半分に減衰する。波長が異なる場
合は、ダイクロイックミラーを用いることにより１１０
反射損失、１２の透過損失を減少させることが出来るが
、波長差が少ないと十分な特性を有するダイクロイック
ミラーの製作が困難となる。In the case of a semi-transparent mirror, the conventional coupler described above is attenuated by about half each due to the reflection loss of the transmitted light beam 11 and the transmission loss of the reflected light beam 12. If the wavelengths are different, use a dichroic mirror to
Although reflection loss and transmission loss of 12 can be reduced, if the wavelength difference is small, it becomes difficult to manufacture a dichroic mirror with sufficient characteristics.
同−波長でも偏光方向が直交した光であれば、偏光子を
用いることにより光ビーム１１の反射損失、光ビーム１
２の透過損失を減少させることが出来るが、無偏光ある
いは円偏光の場合は使用することが出来ない。If the polarization directions are orthogonal even though the wavelength is the same, using a polarizer will reduce the reflection loss of the light beam 11.
However, it cannot be used in the case of unpolarized light or circularly polarized light.
最近、これらの欠点を解決し、円偏光のビームでも損失
を少なく結合可能とするために、第２図（ｃ）に示すよ
うな透過特性を有し、特定の波長の光の透過率は極めて
高いが他の波長の光は反射されてしまうファプリペロー
干渉計を用いた光ビーム結合器の利用が考えられ、一部
で利用されているが、この光結合器は温度変化等により
反射面の間隔が僅かでも変化すると、最大透過率となる
波長が変化する。このことは逆に特定の波長について考
えると透過光量が急激に減少することになり、温度制御
により常に特定波長で最大透過率とｋるようにコントロ
ールすること無しに使用することは出来ない。その温度
制御も外気温のみをコントロールするならさほど大きな
問題とはならないが、ファブリペロ−干渉計内部での光
ビエムの吸収により温度上昇が生ずる場合は、その分の
補正を考慮したコントロールが必要になる。温度上昇を
補正するため、ファプリペロー干渉計の傾き角を僅かに
変え、実効的な反射面の間隔を変えることにより、最大
透過率となる波長なズラす方法も考えられ、特定波長の
透過光量を最大に保つためには有効な方法である。しか
しながら、透過する光ビーム１１はファプリペロー干渉
計の傾き変化による光路のズレ等の影響は殆どないが、
反射する光ビーム１２は反射後の方向が干渉計の傾き角
の２倍だけ変化してしまうと言う問題があり、２つの光
ビームを合成するには適切な方法とは言えない。Recently, in order to solve these drawbacks and make it possible to combine even circularly polarized beams with less loss, we have developed a transmission characteristic as shown in Figure 2 (c), which has an extremely high transmittance for light of a specific wavelength. Although it is possible to use an optical beam coupler using a Fabry-Perot interferometer, which reflects light at other wavelengths, it is considered and is used in some cases. If the value changes even slightly, the wavelength at which the maximum transmittance occurs will change. Conversely, when considering a specific wavelength, the amount of transmitted light decreases rapidly, and it cannot be used without controlling the temperature so that the transmittance always reaches the maximum at a specific wavelength. Temperature control is not a big problem if only the outside temperature is controlled, but if a temperature rise occurs due to the absorption of light beams inside the Fabry-Perot interferometer, control that takes into account the compensation will be necessary. . In order to compensate for the temperature rise, it is possible to slightly change the tilt angle of the Fabry-Perot interferometer and change the effective distance between the reflecting surfaces, thereby shifting the wavelength at which the maximum transmittance occurs. This is an effective method to keep it at its maximum. However, although the transmitted light beam 11 is hardly affected by optical path deviations due to changes in the tilt of the Fabry-Perot interferometer,
There is a problem in that the direction of the reflected light beam 12 after reflection changes by twice the inclination angle of the interferometer, and this is not an appropriate method for combining two light beams.
本発明は、平行な透明物質の両側に誘電体多層膜等を蒸
着するか、または２枚の透明物質の片側に誘電体多層膜
等を蒸着して対向させスペーサにより平行を保たせたフ
ァブリペロ−干渉計、この干渉計を保持し傾き調整をす
るための機構、この機構上で設置されてファブリペロ−
干渉計と常に同一の傾き角となる反射鏡、この機構外に
置かれた一定の角度関係を有する２枚の反射鏡、ファブ
リペロ−干渉計の透過光の強さの測定装置、測定装置か
らの出力が最大になるように傾き調整機構を調整する駆
動装置からなり、温度変化による透過光量の減少を補正
するためにファプリペロー干渉計の傾き角度を変えても
、反射光の方向を変化させないことを特徴とするもので
ある。The present invention is a Fabry-Perot film in which a dielectric multilayer film or the like is deposited on both sides of parallel transparent materials, or a dielectric multilayer film or the like is deposited on one side of two transparent materials so that they face each other and are kept parallel using a spacer. An interferometer, a mechanism for holding this interferometer and adjusting its tilt, and a Fabry-Perot device installed on this mechanism.
A reflector that always has the same inclination angle as the interferometer, two reflectors placed outside this mechanism that have a fixed angular relationship, a device for measuring the intensity of transmitted light from the Fabry-Perot interferometer, and a device for measuring the intensity of transmitted light from the measuring device. It consists of a drive device that adjusts the tilt adjustment mechanism to maximize the output, and ensures that the direction of reflected light does not change even if the tilt angle of the Fabry-Perot interferometer is changed to compensate for the decrease in the amount of transmitted light due to temperature changes. This is a characteristic feature.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明による光ビーム結合器の動作を説明する
ためのブロック図である。傾き調整機構５に取付けられ
た第２図（ｃ）に示すような透過特性を有するファプリ
ペロー干渉計３および反射鏡４が、透過光ビーム１に対
してファプリペロー干渉計３の透過光量が最大となる角
度θだけ傾いて設置される。FIG. 1 is a block diagram for explaining the operation of the optical beam combiner according to the present invention. The Fabry-Perot interferometer 3 and the reflecting mirror 4, which are attached to the tilt adjustment mechanism 5 and have transmission characteristics as shown in FIG. It is installed tilted by an angle θ.
一方、透過光ビーム１と波長の異なる反射光ビーム２は
導入反射鏡７にて反射され透過光ビーム１の光軸に対し
て平行にされた後、反射鏡４により反射される。反射鏡
４が紙面に対して垂直になっている場合は紙面上のみで
考えることが出来るので、以後の検討は紙面上で行う０
反射鏡４による反射光は透過光ビーム１の光軸に対して
２θ傾いて出射される。この反射光が更に直交した２枚
の反射鏡６により入射光に対して１８０°の方向に反射
され、透過光ビームｌの光軸に対して２θの傾きでファ
プリペロー干渉計３に入射する。On the other hand, a reflected light beam 2 having a different wavelength from the transmitted light beam 1 is reflected by an introduction reflecting mirror 7, made parallel to the optical axis of the transmitted light beam 1, and then reflected by a reflecting mirror 4. If the reflecting mirror 4 is perpendicular to the paper surface, it can be considered only on the paper surface, so the following discussion will be performed on the paper surface.
The light reflected by the reflecting mirror 4 is emitted at an angle of 2θ with respect to the optical axis of the transmitted light beam 1. This reflected light is further reflected in a direction of 180° relative to the incident light by two orthogonal reflecting mirrors 6, and enters the Fabry-Perot interferometer 3 at an angle of 2θ with respect to the optical axis of the transmitted light beam l.
この光は、ファブリペロ−干渉計３が透過光ビーム１の
波長以外に対して高い反射率を有しているためファブリ
ペロ−干渉計３により反射される。This light is reflected by the Fabry-Perot interferometer 3 because the Fabry-Perot interferometer 3 has a high reflectance for wavelengths other than the transmitted light beam 1.
透過光ビームｌに対してθ傾いているファブリペロ−干
渉計３に対する反射光ビーム２０入射角は ２θ−θ＝
θ 従って反射角もθとなる。即ち、ファブリペロ−干
渉計３により反射された反射光ビーム２は透過光ビーム
１に対して平行となる。かつ導入反射鏡７の位置または
２枚組反射鏡６０間隔を調整することにより、反射光ビ
ーム２を平行移動して、透過光ビーム１と一致させるこ
とも出来る。The angle of incidence of the reflected light beam 20 on the Fabry-Perot interferometer 3, which is tilted θ with respect to the transmitted light beam l, is 2θ−θ=
θ Therefore, the reflection angle is also θ. That is, the reflected light beam 2 reflected by the Fabry-Perot interferometer 3 becomes parallel to the transmitted light beam 1. In addition, by adjusting the position of the introduction reflecting mirror 7 or the interval between the two reflecting mirrors 60, the reflected light beam 2 can be moved in parallel to match the transmitted light beam 1.
ここで周囲の温度が変化した場合、透過光強度測定装置
２０により透過光ビーム１０強度をモニタして、これが
最大になるように傾き調整機構駆動装置２１によりファ
ブリペロー干渉計３の傾き角を変える。ファブリペロ−
干渉計３をｄθだけ余分に傾け、傾き角を θ十ｄθ
とすることにより透過光量が最大になったとすると、同
じ傾き調整機構５に取付けられている反射鏡４も同じく
θ＋ｄθ傾き、反射鏡４によって反射された反射光ビー
ム２は、透過光ビームｌに対して２（θ＋ｄθ）傾くこ
とになる。２枚組反射鏡６により反射された後も、この
角度は維持されるので、透過光ビーム１の光軸に対して
２（θ十ｄθ）傾いた角度でファブリペロー干渉計３
に対して入射することになる。If the ambient temperature changes here, the intensity of the transmitted light beam 10 is monitored by the transmitted light intensity measurement device 20, and the tilt angle of the Fabry-Perot interferometer 3 is changed by the tilt adjustment mechanism drive device 21 so that the intensity is maximized. . Fabry Perot
Tilt the interferometer 3 by an extra amount of dθ, and make the tilt angle θ + dθ
Assuming that the amount of transmitted light is maximized by setting, the reflector 4 attached to the same inclination adjustment mechanism 5 will also be tilted at the same angle of θ+dθ, and the reflected light beam 2 reflected by the reflector 4 will be different from the transmitted light beam l. Therefore, it will be tilted by 2(θ+dθ). Even after being reflected by the two-piece reflector 6, this angle is maintained, so the Fabry-Perot interferometer 3 is tilted at an angle of 2 (θ + dθ) with respect to the optical axis of the transmitted light beam 1.
It will be incident on .
透過光ビーム１の光軸に対してファブリペロー干渉計３
は θ十ｄθ 傾いているので、ファブリペロー干渉計
３への入射角度は ２（θ十ｄθ）−（θ＋ｄθ）＝θ
＋ｄθ となる。即ち、これにより反射された後は、当
初の場合と同様に透過光ビーム１と平行になる。即ち、
周囲の温度変化等に応じてファブリペロ−干渉計３の傾
き角を変えて、透過光強度が最大となるようにしても、
透過光ビームｌと反射光ビーム２の方向は一致したまま
の状態を保つことが出来る。しかし、厳密には反射ビー
ム２の反射角度は変わらないが、ビームが僅かに平行移
動すると言う問題が有る。傾き調整機構５の回転中心位
置を変えると、反射鏡４に当たる位置が変わり、反射光
ビーム２が平行移動することを利用し、回転中心を適当
な位置に調整することにより、この問題を解決すること
が出来る。A Fabry-Perot interferometer 3 is connected to the optical axis of the transmitted light beam 1.
is tilted by θ0dθ, so the angle of incidence on the Fabry-Perot interferometer 3 is 2(θ0dθ)−(θ+dθ)=θ
+dθ. That is, after being reflected by this, it becomes parallel to the transmitted light beam 1, as in the initial case. That is,
Even if the inclination angle of the Fabry-Perot interferometer 3 is changed according to changes in the surrounding temperature, etc., so that the transmitted light intensity is maximized,
The directions of the transmitted light beam 1 and the reflected light beam 2 can be maintained in the same direction. However, although strictly speaking the reflection angle of the reflected beam 2 does not change, there is a problem in that the beam is slightly shifted in parallel. This problem is solved by adjusting the rotation center to an appropriate position by taking advantage of the fact that when the rotation center position of the tilt adjustment mechanism 5 is changed, the position where it hits the reflecting mirror 4 changes and the reflected light beam 2 moves in parallel. I can do it.
ファブリペロ−干渉計３について第２図にもとづき詳細
に説明する。ファブリペロ−干渉計は、（ａ）に示すよ
うに平行な透明物質の両面に誘電体多層膜等の反射体を
蒸着した両面蒸着型ファブリペロ−干渉計８と（ｂ）に
示すように片面に誘電体多層膜等の反射体を蒸着した２
枚の透明物質を平行なスペーサを挟んで対向させたスペ
ーサ付き一アアブリペロー干渉計９の二つが有る。どち
らの場合も、平行な反射面の間を往復する光の多重干渉
を利用し、特定の波長の光のみの透過率を向上をはかっ
ている。このファブリペロ−干渉計は、（ｃ）に示すよ
うな透過特性を有している。横軸は波長を縦軸は透過率
を示す、透過率Ｔの算出式を下に示す。The Fabry-Perot interferometer 3 will be explained in detail with reference to FIG. The Fabry-Perot interferometer is a double-sided vapor-deposited Fabry-Perot interferometer 8, in which a reflective material such as a dielectric multilayer film is deposited on both sides of a parallel transparent material, as shown in (a), and a dielectric material on one side, as shown in (b). Reflective material such as multilayer film is deposited 2
There are two Abry-Perot interferometers 9, one with a spacer and the other with a spacer, which are made of sheets of transparent material facing each other with a parallel spacer in between. In both cases, multiple interference of light traveling back and forth between parallel reflecting surfaces is used to improve the transmittance of only light of a specific wavelength. This Fabry-Perot interferometer has transmission characteristics as shown in (c). The horizontal axis shows the wavelength and the vertical axis shows the transmittance. The formula for calculating the transmittance T is shown below.
ｄ′＝ｄＪ「］］百−７１
戸１；入射側反射体の透過率 Ｔ、：出射側反射体の透
過率 Ｒ１；入射側反射体の反射率（Ｉ Ｔｉ）Ｒ２
：出射側反射体の反射率（１−’ｒｚ）ν；光の振動数
Ｃ；光速度 ν／ ｃ ＝λ（波長） θ；光軸と
反射面の傾き角 ｎ；反射体間の物質の屈折率
〔発明の効果〕
以上説明したように本発明は、ファブリペロ−干渉計を
利用した光ビーム結合器において、周囲の温度変化によ
りファブリペロー干渉計の透過率が変化した場合に、こ
のファブリペロ−干渉計の傾き角度を調整することによ
り、常に透過を最大にすることが出来、かつ、この方法
を講じても反射光ビームの方向が変化せず、常時２つの
光ビームを一致させておく事が出来るものである。d' = dJ "]] 100-71 Door 1: Transmittance of the reflector on the input side T,: Transmittance of the reflector on the output side R1; Reflectance of the reflector on the input side (I Ti) R2
: Reflectance of the output side reflector (1-'rz) ν; Frequency of light C; Speed of light ν/c = λ (wavelength) θ; Inclination angle between the optical axis and the reflecting surface n; Refractive Index [Effect of the Invention] As explained above, the present invention provides a light beam coupler using a Fabry-Perot interferometer, in which when the transmittance of the Fabry-Perot interferometer changes due to a change in ambient temperature, the Fabry-Perot By adjusting the tilt angle of the interferometer, the transmission can always be maximized, and even if this method is used, the direction of the reflected light beam will not change, and the two light beams will always be aligned. This is something that can be done.
第１図は本発明の光ビーム結合器のブロック図、第２図
は本発明の主要構成品たるファブリペロ−干渉計の構成
および波長に対する透過率変化の特性図、第３図は一般
的に２つの光ビームを結合するための方法を示す図であ
る。
ｌ・・・・・・透過光ビーム、２・・・・・・反射光ビ
ーム、３・・・・・・ファブリペロ−干渉計、４・・・
・・・反射鏡、５・・・・・・傾き調整機構、６・・・
・・・２枚組反射鏡、７・・・・・・導入用反射鏡、８
・・・・・・両面蒸着型ファブリペロー干渉計、８−１
・・・・・・平行透明物質、８−２・・・・・・誘電体
多層膜等の反射体、９・・・・・・スペーサ付きファブ
リペロ−干渉計、９−１・・・・・・透明物質、９−２
・・・・・・誘電体多層膜等の反射体、９−３・・・・
・・平行スペーサ、１０・・・・・・光ビーム結合素子
、１１・・・・・・透過光ビーム、１２・・・・・・反
射光ビーム、２０・・・・・・透過光強度測定装置、２
１・・・・・・傾き調整機構駆動装置。FIG. 1 is a block diagram of the optical beam combiner of the present invention, FIG. 2 is a diagram of the configuration of a Fabry-Perot interferometer, which is the main component of the present invention, and a characteristic diagram of transmittance change with respect to wavelength. FIG. 3 illustrates a method for combining two light beams; l...Transmitted light beam, 2...Reflected light beam, 3...Fabry-Perot interferometer, 4...
...Reflector, 5...Tilt adjustment mechanism, 6...
...Reflector set of 2, 7...Reflector for introduction, 8
・・・・・・Double-sided evaporation type Fabry-Perot interferometer, 8-1
... Parallel transparent material, 8-2 ... Reflector such as dielectric multilayer film, 9 ... Fabry-Perot interferometer with spacer, 9-1 ...・Transparent substance, 9-2
...Reflector such as dielectric multilayer film, 9-3...
... Parallel spacer, 10 ... Light beam coupling element, 11 ... Transmitted light beam, 12 ... Reflected light beam, 20 ... Transmitted light intensity measurement device, 2
1...Inclination adjustment mechanism drive device.
Claims (1)
または２枚の透明物質の片側に誘電体多層膜等を蒸着し
て対向させスペーサにより平行を保たせたファブリペロ
ー干渉計と、この干渉計を保持し傾き調整をするための
機構と、この機構上に設置されてファブリペロー干渉計
と常に同一の傾き角となる反射鏡と、この機構外に置か
れた一定の角度関係を有する２枚の反射鏡と、ファブリ
ペロー干渉計の透過光の強さの測定装置と、測定装置か
らの出力が最大になるように傾き調整機構を調整する駆
動装置とからなる光ビーム結合器。Either deposit a dielectric multilayer film on both sides of parallel transparent materials, or
Or a Fabry-Perot interferometer made by depositing a dielectric multilayer film or the like on one side of two transparent materials and keeping them parallel with a spacer, a mechanism for holding this interferometer and adjusting its inclination, and this mechanism. There is a reflecting mirror installed above that always has the same inclination angle as the Fabry-Perot interferometer, and two reflecting mirrors placed outside this mechanism that have a certain angular relationship, and the intensity of the transmitted light of the Fabry-Perot interferometer. An optical beam combiner consisting of a tilt measuring device and a drive device that adjusts a tilt adjustment mechanism so that the output from the measuring device is maximized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17653189A JPH0339712A (en) | 1989-07-06 | 1989-07-06 | Light beam coupler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17653189A JPH0339712A (en) | 1989-07-06 | 1989-07-06 | Light beam coupler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339712A true JPH0339712A (en) | 1991-02-20 |
Family
ID=16015241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17653189A Pending JPH0339712A (en) | 1989-07-06 | 1989-07-06 | Light beam coupler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339712A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0602832A3 (en) * | 1992-12-16 | 1995-07-12 | At & T Corp | Methods and apparatus for combining arrays of light beams. |
| US6040940A (en) * | 1998-02-04 | 2000-03-21 | Olympus Optical Co., Ltd. | Reflecting fluorescence microscope |
| EP1376080A1 (en) * | 2002-06-19 | 2004-01-02 | John R. Sandercock | Stabilized Fabry-Perot interferometer with oblique reference beams |
| JP2014233344A (en) * | 2013-05-31 | 2014-12-15 | Hoya株式会社 | Optical filter element, wavelength variable optical bandpass filter module, wavelength variable light source apparatus, and spectroscopic endoscope apparatus |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5532019A (en) * | 1978-08-26 | 1980-03-06 | Fujitsu Ltd | Branching filter of light wavelength region variable type |
| JPS58150929A (en) * | 1982-03-02 | 1983-09-07 | Nec Corp | Wavelength selecting element |
| JPS6347623A (en) * | 1986-08-15 | 1988-02-29 | Nec Corp | Wavelength multiplying and dividing element |
-
1989
- 1989-07-06 JP JP17653189A patent/JPH0339712A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5532019A (en) * | 1978-08-26 | 1980-03-06 | Fujitsu Ltd | Branching filter of light wavelength region variable type |
| JPS58150929A (en) * | 1982-03-02 | 1983-09-07 | Nec Corp | Wavelength selecting element |
| JPS6347623A (en) * | 1986-08-15 | 1988-02-29 | Nec Corp | Wavelength multiplying and dividing element |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0602832A3 (en) * | 1992-12-16 | 1995-07-12 | At & T Corp | Methods and apparatus for combining arrays of light beams. |
| US6040940A (en) * | 1998-02-04 | 2000-03-21 | Olympus Optical Co., Ltd. | Reflecting fluorescence microscope |
| EP1376080A1 (en) * | 2002-06-19 | 2004-01-02 | John R. Sandercock | Stabilized Fabry-Perot interferometer with oblique reference beams |
| JP2014233344A (en) * | 2013-05-31 | 2014-12-15 | Hoya株式会社 | Optical filter element, wavelength variable optical bandpass filter module, wavelength variable light source apparatus, and spectroscopic endoscope apparatus |
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