JPH0339833U - - Google Patents
Info
- Publication number
- JPH0339833U JPH0339833U JP1989100869U JP10086989U JPH0339833U JP H0339833 U JPH0339833 U JP H0339833U JP 1989100869 U JP1989100869 U JP 1989100869U JP 10086989 U JP10086989 U JP 10086989U JP H0339833 U JPH0339833 U JP H0339833U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- divided
- heats
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989100869U JPH0339833U (he) | 1989-08-28 | 1989-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989100869U JPH0339833U (he) | 1989-08-28 | 1989-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339833U true JPH0339833U (he) | 1991-04-17 |
Family
ID=31649852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989100869U Pending JPH0339833U (he) | 1989-08-28 | 1989-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339833U (he) |
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1989
- 1989-08-28 JP JP1989100869U patent/JPH0339833U/ja active Pending