JPH0342U - - Google Patents
Info
- Publication number
- JPH0342U JPH0342U JP5756789U JP5756789U JPH0342U JP H0342 U JPH0342 U JP H0342U JP 5756789 U JP5756789 U JP 5756789U JP 5756789 U JP5756789 U JP 5756789U JP H0342 U JPH0342 U JP H0342U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding parts
- holding
- held
- handle part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の把持ハンドに半導体ウエハー
をセツトした状態を示す斜視図、第２図は保持前
の状態を示す部分断面図、第３図は保持後の状態
を示す部分断面図である。第４図は従来のウエハ
ーホルダーに半導体ウエハーを保持した状態を示
す図。
１…ハンドル部、２…押しノブ、３…円板、４
…保持部、５…半導体ウエハー、６…スプリング
コイル、７…接続ピン、８…保持爪、９…連結板
、１０…Ｕ字溝。
FIG. 1 is a perspective view showing a semiconductor wafer set in the gripping hand of the present invention, FIG. 2 is a partial sectional view showing the state before holding, and FIG. 3 is a partial sectional view showing the state after holding. . FIG. 4 is a diagram showing a state in which a semiconductor wafer is held in a conventional wafer holder. 1...Handle part, 2...Push knob, 3...Disc, 4
... Holding portion, 5... Semiconductor wafer, 6... Spring coil, 7... Connection pin, 8... Holding claw, 9... Connection plate, 10... U-shaped groove.
Claims (1)
プリングの反動力で挟持する拡縮可能な複数の保
持部を結合させ、該保持部にウエハーを水平に保
持できる保持爪を有することを特徴とするウエハ
ー把持用ハンド。 A plurality of expandable and retractable holding parts that are held by the reaction force of a spring are coupled to a disc connected to the push knob of the handle part, and the holding parts have holding claws that can hold the wafer horizontally. Hand for grasping wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756789U JPH0342U (en) | 1989-05-18 | 1989-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756789U JPH0342U (en) | 1989-05-18 | 1989-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0342U true JPH0342U (en) | 1991-01-07 |
Family
ID=31582393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5756789U Pending JPH0342U (en) | 1989-05-18 | 1989-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008285869A (en) * | 2007-05-17 | 2008-11-27 | Sekisui Chem Co Ltd | tile |
-
1989
- 1989-05-18 JP JP5756789U patent/JPH0342U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008285869A (en) * | 2007-05-17 | 2008-11-27 | Sekisui Chem Co Ltd | tile |