JPH0344656U - - Google Patents
Info
- Publication number
- JPH0344656U JPH0344656U JP10587289U JP10587289U JPH0344656U JP H0344656 U JPH0344656 U JP H0344656U JP 10587289 U JP10587289 U JP 10587289U JP 10587289 U JP10587289 U JP 10587289U JP H0344656 U JPH0344656 U JP H0344656U
- Authority
- JP
- Japan
- Prior art keywords
- image
- information
- sample stage
- recording
- input means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000013500 data storage Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例１を示す制御ブロツク
図、第２図ａは従来の不良解析用顕微鏡を示す構
成図、第２図ｂは量産ライン向き外観チエツカー
を示す制御ブロツク図、第３図は本考案の実施例
２を示す制御ブロツク図である。
１……Ｘ−Ｙテーブル、２……顕微鏡、３……
画像入力手段、４……Ｘ−Ｙテーブル制御手段、
５……Ｘ−Ｙテーブル移動スイツチ、６……Ｘ−
Ｙテーブル現在位置記憶手段、７……キー入力手
段、８……不良モードコード表データ記憶手段、
９……情報制御手段、１０……画像処理手段、１
１……画像記録手段、１２……画像再生手段、１
３……ロツトデータ記憶手段。
Fig. 1 is a control block diagram showing the first embodiment of the present invention, Fig. 2a is a configuration diagram showing a conventional defect analysis microscope, Fig. 2b is a control block diagram showing an external checker suitable for mass production lines, and Fig. The figure is a control block diagram showing a second embodiment of the present invention. 1...X-Y table, 2...Microscope, 3...
Image input means, 4...X-Y table control means,
5...X-Y table movement switch, 6...X-
Y table current position storage means, 7...key input means, 8...failure mode code table data storage means,
9... Information control means, 10... Image processing means, 1
1... Image recording means, 12... Image reproducing means, 1
3...Lot data storage means.
Claims (1)
−Ｙテーブルをモータで駆動制御し、試料ステー
ジを移動させながら試料を顕微鏡で観察する外観
チエツカーにおいて、顕微鏡観察像を画像信号と
して取り込む画像入力手段と、キー入力手段と、
試料ステージ位置情報及び不良モードコード表情
報を記憶する記憶手段と、文字情報を画像情報に
変換して画像入力手段で得られた画像信号に重ね
合わせる画像処理手段と、画像信号を記録する画
像記録手段と、前記記憶手段、画像処理手段及び
画像記録手段を制御する情報制御手段とを含むこ
とを特徴とする不良解析用外観チエツカー。 Place the sample stage on the X-Y table and
- In an appearance checker that drives and controls a Y table with a motor and observes a sample with a microscope while moving the sample stage, an image input means for capturing a microscope observation image as an image signal, and a key input means;
a storage means for storing sample stage position information and failure mode code table information; an image processing means for converting character information into image information and superimposing it on the image signal obtained by the image input means; and an image recording means for recording the image signal. and information control means for controlling the storage means, image processing means, and image recording means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587289U JPH0344656U (en) | 1989-09-08 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10587289U JPH0344656U (en) | 1989-09-08 | 1989-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0344656U true JPH0344656U (en) | 1991-04-25 |
Family
ID=31654627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10587289U Pending JPH0344656U (en) | 1989-09-08 | 1989-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344656U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010085347A (en) * | 2008-10-02 | 2010-04-15 | Edm Kk | Image inspection system |
-
1989
- 1989-09-08 JP JP10587289U patent/JPH0344656U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010085347A (en) * | 2008-10-02 | 2010-04-15 | Edm Kk | Image inspection system |
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