JPH0344842U - - Google Patents
Info
- Publication number
- JPH0344842U JPH0344842U JP10636889U JP10636889U JPH0344842U JP H0344842 U JPH0344842 U JP H0344842U JP 10636889 U JP10636889 U JP 10636889U JP 10636889 U JP10636889 U JP 10636889U JP H0344842 U JPH0344842 U JP H0344842U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- substrate
- pressure sensor
- conductive part
- diaphragms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
Landscapes
- Switches Operated By Changes In Physical Conditions (AREA)
Description
第１図ないし第３図は本考案に係る圧力センサ
の一実施例を示し、第１図は組立断面図、第２図
は第１図における矢視Ａ−Ａ線方向断面図、第３
図は第１図における基板の表面の実施例図である
。第４図は本考案に係る圧力センサの他の実施例
を示す基板の表面の実施例図である。
１……ケース、２……基板、３……ダイヤフラ
ム、５……密封室、７……被導通部。
1 to 3 show an embodiment of the pressure sensor according to the present invention, in which FIG. 1 is an assembled cross-sectional view, FIG. 2 is a cross-sectional view in the direction of arrow A-A in FIG.
The figure is an embodiment view of the surface of the substrate in FIG. 1. FIG. 4 is an embodiment view of the surface of a substrate showing another embodiment of the pressure sensor according to the present invention. 1... Case, 2... Board, 3... Diaphragm, 5... Sealed chamber, 7... Conductive part.
Claims (1)
で密封室を構成し、 基板に接触する前記ダイヤフラムが、所定角度
を有して対向配備し、 前記基板と前記ダイヤフラムとの相対向する一
方の面には、電気的導通特性が変化する被導通部
を備え、 前記相対向する他方の面には、前記被導通部と
導通する導電性を有することを特徴とする圧力セ
ンサ。[Claims for Utility Model Registration] A sealed chamber is constituted by a diaphragm that deforms due to pressure changes and a case, the diaphragms in contact with a substrate are arranged facing each other at a predetermined angle, and the substrate and the diaphragm are opposed to each other. A pressure sensor characterized in that one surface of the pressure sensor includes a conductive part whose electrical conduction characteristics change, and the other opposing surface has conductivity that is electrically conductive with the conductive part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10636889U JPH0344842U (en) | 1989-09-11 | 1989-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10636889U JPH0344842U (en) | 1989-09-11 | 1989-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0344842U true JPH0344842U (en) | 1991-04-25 |
Family
ID=31655099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10636889U Pending JPH0344842U (en) | 1989-09-11 | 1989-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344842U (en) |
-
1989
- 1989-09-11 JP JP10636889U patent/JPH0344842U/ja active Pending