JPH0346054B2 - - Google Patents

Info

Publication number
JPH0346054B2
JPH0346054B2 JP60212631A JP21263185A JPH0346054B2 JP H0346054 B2 JPH0346054 B2 JP H0346054B2 JP 60212631 A JP60212631 A JP 60212631A JP 21263185 A JP21263185 A JP 21263185A JP H0346054 B2 JPH0346054 B2 JP H0346054B2
Authority
JP
Japan
Prior art keywords
pressure
optical device
diffraction grating
laser light
physical quantity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60212631A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6273122A (ja
Inventor
Yasuaki Kido
Minoru Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOYAMA KOGYO KOTO SENMON GATSUKOCHO
Original Assignee
TOYAMA KOGYO KOTO SENMON GATSUKOCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOYAMA KOGYO KOTO SENMON GATSUKOCHO filed Critical TOYAMA KOGYO KOTO SENMON GATSUKOCHO
Priority to JP21263185A priority Critical patent/JPS6273122A/ja
Publication of JPS6273122A publication Critical patent/JPS6273122A/ja
Publication of JPH0346054B2 publication Critical patent/JPH0346054B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Optical Transform (AREA)
JP21263185A 1985-09-27 1985-09-27 精密測定用光学装置 Granted JPS6273122A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21263185A JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21263185A JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Publications (2)

Publication Number Publication Date
JPS6273122A JPS6273122A (ja) 1987-04-03
JPH0346054B2 true JPH0346054B2 (fr) 1991-07-15

Family

ID=16625861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21263185A Granted JPS6273122A (ja) 1985-09-27 1985-09-27 精密測定用光学装置

Country Status (1)

Country Link
JP (1) JPS6273122A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4845847B2 (ja) * 2007-10-12 2011-12-28 日本発條株式会社 皿ばね
JP2009236631A (ja) * 2008-03-26 2009-10-15 Tokyo Electron Ltd 温度測定装置、これを有する載置台構造及び熱処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654599A (en) * 1979-10-12 1981-05-14 Furukawa Electric Co Ltd Method of detecting measured amount

Also Published As

Publication number Publication date
JPS6273122A (ja) 1987-04-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term