JPH034637U - - Google Patents
Info
- Publication number
- JPH034637U JPH034637U JP6495189U JP6495189U JPH034637U JP H034637 U JPH034637 U JP H034637U JP 6495189 U JP6495189 U JP 6495189U JP 6495189 U JP6495189 U JP 6495189U JP H034637 U JPH034637 U JP H034637U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- tip
- outer conductor
- supply section
- cylindrical base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Details Of Connecting Devices For Male And Female Coupling (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Description
第１図は実施例に係る放電灯の概略図、第２図
は放電灯の接続端子および電源部の給電端子の説
明図、第３図は放電灯を半導体ウエハーの露光用
光源として用いる場合の使用の態様を示す説明図
である。
１０……ガラス製発光管、１１……発光空間膨
出部、２１，２２……電極、１２，１３……封止
管部、３１，３２……口金、４０……外導線、５
０……接続端子、５１……筒状基部、５２……フ
ランジ部、５２Ａ……先端面、５３……突起部、
５４……接続固定部、６１……開口、６２……底
壁、６３……筒状内壁、６４……めねじ、７１…
…反射膜、８０……給電端子、８１……凹部、８
２……おねじ、９０……凹面反射鏡、９１……開
口、９２……反射面。
Fig. 1 is a schematic diagram of the discharge lamp according to the embodiment, Fig. 2 is an explanatory diagram of the connection terminal of the discharge lamp and the power supply terminal of the power supply unit, and Fig. 3 is a diagram of the discharge lamp used as a light source for exposing semiconductor wafers. It is an explanatory diagram showing a mode of use. DESCRIPTION OF SYMBOLS 10...Glass arc tube, 11...Emission space bulge, 21, 22...Electrode, 12, 13...Sealing tube part, 31, 32...Base, 40...Outer conductor, 5
0... Connection terminal, 51... Cylindrical base, 52... Flange portion, 52A... Tip surface, 53... Projection,
54... Connection fixing part, 61... Opening, 62... Bottom wall, 63... Cylindrical inner wall, 64... Female thread, 71...
... Reflective film, 80 ... Power supply terminal, 81 ... Recess, 8
2...male thread, 90...concave reflecting mirror, 91...opening, 92...reflecting surface.
Claims (1)
出部およびその両側に伸びる一対の封止管部から
なるガラス製発光管と、これらの封止管部の先端
に取り付けられた口金と、一方の口金を貫通して
外方に伸びるより線からなる外導線と、この外導
線の先端に取り付けられた、電源部の給電端子に
接続するための接続端子とを有してなり、 前記接続端子は、前記外導線の先端が筒内に挿
入されて接続された筒状基部と、この筒状基部の
先端部を覆う位置に形成されたフランジ部と、こ
のフランジ部の先端面に設けられた、前記電源部
の給電端子の先端に設けられた凹部に係合して回
転を阻止する突起部と、前記筒状基部の外周を取
り囲む位置に前後に移動可能に設けられた、前記
筒状基部の外径より大きく前記フランジ部の外径
より小さい開口を有する底壁を備え、その筒状内
壁にめねじが設けられ、前記電源部の給電端子に
設けられたおねじに螺合されて接続される接続固
定部とよりなることを特徴とする放電灯。[Claims for Utility Model Registration] A glass arc tube consisting of a central light emitting space bulge in which a pair of electrodes are arranged facing each other, and a pair of sealed tube sections extending on both sides of the bulge, and the tips of these sealed tube sections. A cap attached to the base, an outer conductor made of a stranded wire extending outward through one cap, and a connection terminal attached to the tip of the outer conductor for connecting to the power supply terminal of the power supply section. The connection terminal includes: a cylindrical base to which a tip of the outer conductor is inserted into a cylinder and connected; a flange portion formed at a position covering the tip of the cylindrical base; a protrusion provided on the distal end surface of the power supply section that engages with a recess provided at the distal end of the power supply terminal of the power supply section to prevent rotation; a bottom wall having an opening larger than the outer diameter of the cylindrical base and smaller than the outer diameter of the flange portion; a female thread provided on the cylindrical inner wall; A discharge lamp characterized by comprising a connection fixing part that is screwed into a male screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6495189U JPH0638358Y2 (en) | 1989-06-05 | 1989-06-05 | Discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6495189U JPH0638358Y2 (en) | 1989-06-05 | 1989-06-05 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH034637U true JPH034637U (en) | 1991-01-17 |
| JPH0638358Y2 JPH0638358Y2 (en) | 1994-10-05 |
Family
ID=31596344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6495189U Expired - Lifetime JPH0638358Y2 (en) | 1989-06-05 | 1989-06-05 | Discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0638358Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100396224B1 (en) * | 2001-06-29 | 2003-09-02 | 임원기 | Reverse reflection type discharge lamp |
| JP2017172554A (en) * | 2016-03-25 | 2017-09-28 | 株式会社豊田自動織機 | Motor compressor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4522024B2 (en) * | 2001-07-27 | 2010-08-11 | キヤノン株式会社 | Mercury lamp, illumination device and exposure device |
-
1989
- 1989-06-05 JP JP6495189U patent/JPH0638358Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100396224B1 (en) * | 2001-06-29 | 2003-09-02 | 임원기 | Reverse reflection type discharge lamp |
| JP2017172554A (en) * | 2016-03-25 | 2017-09-28 | 株式会社豊田自動織機 | Motor compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0638358Y2 (en) | 1994-10-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |