JPH0346895U - - Google Patents
Info
- Publication number
- JPH0346895U JPH0346895U JP10800189U JP10800189U JPH0346895U JP H0346895 U JPH0346895 U JP H0346895U JP 10800189 U JP10800189 U JP 10800189U JP 10800189 U JP10800189 U JP 10800189U JP H0346895 U JPH0346895 U JP H0346895U
- Authority
- JP
- Japan
- Prior art keywords
- mounting plate
- substrate
- pressing
- spacer
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Description
第１図はこの考案の一実施例の斜視図、第２図
は第１図の−断面図、第３図は第１図の−
断面図、第４図はこの実施例の平面図である。
１……回転載置台、２……基板、３……載置板
、４……スペーサ、５，１０……凹部、１６……
スプリング、２３，２４，３４……スプリング（
弾性部材）、２５，２７，３０……マイクロメー
タヘツド（押圧手段）、２９……コイルバネ（弾
性部材）。
Fig. 1 is a perspective view of an embodiment of this invention, Fig. 2 is a cross-sectional view of Fig. 1, and Fig. 3 is a - of Fig. 1.
The sectional view and FIG. 4 are plan views of this embodiment. DESCRIPTION OF SYMBOLS 1... Rotating mounting table, 2... Substrate, 3... Placing plate, 4... Spacer, 5, 10... Recess, 16...
Spring, 23, 24, 34... Spring (
25, 27, 30... micrometer head (pressing means), 29... coil spring (elastic member).
Claims (1)
基板と、底面に略すり鉢形状の第二の凹部が形成
された載置板と、形状が球体もしくは部分球であ
つて、基板の第一の凹部及び載置板の第二の凹部
に嵌合して基板と載置板を離隔の状態に保つため
のスペーサと、基板と載置板との間に介在されて
基板に対して載置板を押圧し、基板と載置板との
相対位置をスペーサを中心にして互いに直交し合
う三方向をそれぞれ軸線として回転させ得る第一
、第二、及び第三の押圧手段と、基板と載置板と
の間に介在され、前記第一、第二、第三の押圧手
段のそれぞれの押圧力に対して逆方向に付勢力が
働く第一、第二、第三の弾性部材が備えられてな
る回転載置台。 A substrate having a first concave portion shaped like a mortar on its top surface, a second concave portion shaped like a mortar shape on its bottom surface, and a mounting plate having a shape of a sphere or a partial sphere; a spacer that fits into the recess of the substrate and the second recess of the mounting plate to keep the substrate and the mounting plate apart; first, second, and third pressing means capable of pressing the plate and rotating the relative positions of the substrate and the mounting plate about the spacer and about three mutually orthogonal directions as axes; and the substrate and the mounting plate. First, second and third elastic members are interposed between the mounting plate and the first, second and third elastic members that act in a direction opposite to the respective pressing forces of the first, second and third pressing means. Rotating mounting table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10800189U JPH0346895U (en) | 1989-09-14 | 1989-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10800189U JPH0346895U (en) | 1989-09-14 | 1989-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0346895U true JPH0346895U (en) | 1991-04-30 |
Family
ID=31656665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10800189U Pending JPH0346895U (en) | 1989-09-14 | 1989-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346895U (en) |
-
1989
- 1989-09-14 JP JP10800189U patent/JPH0346895U/ja active Pending
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