JPH0347752U - - Google Patents

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Publication number
JPH0347752U
JPH0347752U JP10887089U JP10887089U JPH0347752U JP H0347752 U JPH0347752 U JP H0347752U JP 10887089 U JP10887089 U JP 10887089U JP 10887089 U JP10887089 U JP 10887089U JP H0347752 U JPH0347752 U JP H0347752U
Authority
JP
Japan
Prior art keywords
carrier
gear
double
sided polishing
sun gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10887089U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10887089U priority Critical patent/JPH0347752U/ja
Publication of JPH0347752U publication Critical patent/JPH0347752U/ja
Pending legal-status Critical Current

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  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１実施例を示す要部断面図
、第２図は従来例の概略構成図である。 １……上定盤、２……下定盤、３……太陽歯車
、４……内歯歯車、５……キヤリヤ、６……ワー
ク、２３……液槽、２９……電源装置、３０……
絶縁物。

Claims (1)

  1. 【実用新案登録請求の範囲】 ワークを保持するキヤリヤと、該キヤリヤを遊
    星歯車状に駆動する太陽歯車及び内歯歯車と、キ
    ヤリヤに保持されたワークを両側から挾んで研磨
    する上下の定盤とを備えた両面研磨装置において
    、 下定盤と内歯歯車及び太陽歯車との間を液密に
    シールすることにより電解ドレツシング用クーラ
    ント液を充填するための液槽を形成し、上下の定
    盤を電源装置の一方の電極に接続すると共に、キ
    ヤリヤを内歯歯車又は太陽歯車のうち少なくとも
    一つを介して他方の電極に接続し、該キヤリヤと
    下定盤との間に絶縁物を介在させたことを特徴と
    する電解ドレツシング両面研磨装置。
JP10887089U 1989-09-18 1989-09-18 Pending JPH0347752U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10887089U JPH0347752U (ja) 1989-09-18 1989-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10887089U JPH0347752U (ja) 1989-09-18 1989-09-18

Publications (1)

Publication Number Publication Date
JPH0347752U true JPH0347752U (ja) 1991-05-07

Family

ID=31657486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10887089U Pending JPH0347752U (ja) 1989-09-18 1989-09-18

Country Status (1)

Country Link
JP (1) JPH0347752U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006053965A (ja) * 2004-08-10 2006-02-23 Fuji Electric Device Technology Co Ltd 磁気記録媒体用基板の製造方法並びにそれに用いる両面研磨装置及び基板研磨用キャリア

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01188266A (ja) * 1988-01-22 1989-07-27 Rikagaku Kenkyusho 研削加工装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01188266A (ja) * 1988-01-22 1989-07-27 Rikagaku Kenkyusho 研削加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006053965A (ja) * 2004-08-10 2006-02-23 Fuji Electric Device Technology Co Ltd 磁気記録媒体用基板の製造方法並びにそれに用いる両面研磨装置及び基板研磨用キャリア

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