JPH0351839U - - Google Patents

Info

Publication number
JPH0351839U
JPH0351839U JP1989113121U JP11312189U JPH0351839U JP H0351839 U JPH0351839 U JP H0351839U JP 1989113121 U JP1989113121 U JP 1989113121U JP 11312189 U JP11312189 U JP 11312189U JP H0351839 U JPH0351839 U JP H0351839U
Authority
JP
Japan
Prior art keywords
chamber
flow rate
detection sensor
mounter
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989113121U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989113121U priority Critical patent/JPH0351839U/ja
Publication of JPH0351839U publication Critical patent/JPH0351839U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H10W72/07341—Controlling the bonding environment, e.g. atmosphere composition or temperature

Landscapes

  • Die Bonding (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係るマウンタの実施例を示す
部分断面正面図である。第２図は従来のマウンタ
を示す部分断面正面図である。 １……被ペレツトマウント部材、４……チヤン
バ、１５……ペレツト、２２……供給パイプ、２
７，２８，２９……流量調整弁、３０……検出セ
ンサ。 FIG. 1 is a partially sectional front view showing an embodiment of a mounter according to the present invention. FIG. 2 is a partially sectional front view showing a conventional mounter. DESCRIPTION OF SYMBOLS 1... Pellet target mounting member, 4... Chamber, 15... Pellet, 22... Supply pipe, 2
7, 28, 29...Flow rate adjustment valve, 30...Detection sensor.

Claims (1)

【実用新案登録請求の範囲】 高温雰囲気のチヤンバ内を通過する被ペレツト
マウント部材にペレツトをマウントするマウンタ
において、 上記チヤンバ内に、チヤンバ内の酸素濃度を検
出する検出センサを配設すると共に、上記チヤン
バに、検出センサからの出力に応じて非酸化性気
体の流量を調整する流量調整弁を具備した供給パ
イプを接続開口したことを特徴とするマウンタ。[Scope of Claim for Utility Model Registration] In a mounter for mounting pellets on a pellet mounting member passing through a chamber in a high temperature atmosphere, a detection sensor for detecting the oxygen concentration in the chamber is disposed in the chamber, and A mounter characterized in that a supply pipe is connected to the chamber and is provided with a flow rate adjustment valve that adjusts the flow rate of the non-oxidizing gas according to the output from the detection sensor.
JP1989113121U 1989-09-26 1989-09-26 Pending JPH0351839U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989113121U JPH0351839U (en) 1989-09-26 1989-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989113121U JPH0351839U (en) 1989-09-26 1989-09-26

Publications (1)

Publication Number Publication Date
JPH0351839U true JPH0351839U (en) 1991-05-20

Family

ID=31661546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989113121U Pending JPH0351839U (en) 1989-09-26 1989-09-26

Country Status (1)

Country Link
JP (1) JPH0351839U (en)

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