JPH0352685U - - Google Patents
Info
- Publication number
- JPH0352685U JPH0352685U JP11504589U JP11504589U JPH0352685U JP H0352685 U JPH0352685 U JP H0352685U JP 11504589 U JP11504589 U JP 11504589U JP 11504589 U JP11504589 U JP 11504589U JP H0352685 U JPH0352685 U JP H0352685U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- tube
- hole
- inspection means
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 6
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004570 mortar (masonry) Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図〜第３図は本考案に係る機構の動作を示
した要部断面図、第４図は要部構成の平面図、第
５図は可動片を閉じた部分を示す斜視図、第６図
は本考案を実施した装置の外観構成例を示す図で
ある。
５……真空容器、１０……検出手段、１２……
鍔、１６……外側壁、１７……内側壁、２４……
可動片。
1 to 3 are sectional views of the main parts showing the operation of the mechanism according to the present invention, FIG. 4 is a plan view of the main part configuration, FIG. FIG. 6 is a diagram showing an example of the external configuration of an apparatus implementing the present invention. 5... Vacuum container, 10... Detection means, 12...
Tsuba, 16... Outer wall, 17... Inner wall, 24...
Movable piece.
Claims (1)
筒の先端部へ向かう力を受ける鍔を備え、先端部
から電子の照射又は取込みを行う検査手段と、 真空容器の一部の壁を二重構造とし、 この二重構造の外側壁には前記検査手段の筒が
挿入できる径の穴を設け、 内側壁には検査手段のテーパ角度と同じ角度の
テーパが設けられた穴を設け、 前記外側壁と内側壁の間の空間部には、バネ手
段により内側壁の穴を擂鉢状に塞ぐ４個の可動片
を設け、 検査手段を外側壁の穴に挿入することで、検出
手段の鍔がこの穴を塞ぎ、更に検査手段を押し込
んで、前記擂鉢状の部分を筒先で押すことで４個
の可動片を押し開き検査手段の筒のテーパ部と内
側壁のテーパとを圧接するようにした真空を維持
する開口機構。[Scope of Claim for Utility Model Registration] A tube having a tapered tip, a collar that receives a force directed toward the tip of the tube by a spring, and an inspection means for irradiating or capturing electrons from the tip, and a vacuum container. A part of the wall of the double structure has a double structure, the outer wall of this double structure has a hole with a diameter that allows the tube of the inspection means to be inserted, and the inner wall has a taper with the same angle as the taper angle of the inspection means. A hole is provided in the outer wall, and four movable pieces are provided in the space between the outer wall and the inner wall to close the hole in the inner wall in a mortar shape using spring means, and the inspection means is inserted into the hole in the outer wall. As a result, the flange of the detection means closes this hole, and by pushing the inspection means further and pushing the mortar-shaped part with the tip of the tube, the four movable pieces are pushed open and the tapered part of the tube of the inspection means and the inner wall are opened. An opening mechanism that maintains a vacuum by making pressure contact with the taper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11504589U JPH0352685U (en) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11504589U JPH0352685U (en) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0352685U true JPH0352685U (en) | 1991-05-22 |
Family
ID=31663391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11504589U Pending JPH0352685U (en) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0352685U (en) |
-
1989
- 1989-09-29 JP JP11504589U patent/JPH0352685U/ja active Pending