JPH0353475B2 - - Google Patents
Info
- Publication number
- JPH0353475B2 JPH0353475B2 JP60143901A JP14390185A JPH0353475B2 JP H0353475 B2 JPH0353475 B2 JP H0353475B2 JP 60143901 A JP60143901 A JP 60143901A JP 14390185 A JP14390185 A JP 14390185A JP H0353475 B2 JPH0353475 B2 JP H0353475B2
- Authority
- JP
- Japan
- Prior art keywords
- helium
- filter
- vacuum chamber
- exhaust system
- auxiliary exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は真空槽内から気体分子をパネルに凝縮
若しくは吸着して排除するクラオポンプに関す
る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a cryopump that condenses or adsorbs gas molecules onto a panel and removes them from a vacuum chamber.
（従来の技術）
従来、この種ポンプは真空槽内に清浄な真空を
実現することが出来るものとして知られている
が、該真空槽内のヘリウム気体分子の排気は活性
炭などの吸着材を用いたクライオソープシヨンパ
ネルに気体分子を吸着させて行なわれ、該パネル
が飽和状態になると再生操作を行なう必要があ
る。(Prior art) Conventionally, this type of pump has been known to be able to create a clean vacuum in a vacuum chamber, but the helium gas molecules in the vacuum chamber are evacuated using an adsorbent such as activated carbon. This is done by adsorbing gas molecules onto a cryosorption panel that has been previously used, and when the panel reaches a saturated state, it is necessary to carry out a regeneration operation.
（発明が解決しよとする問題点）
クライオポンプにより大量のヘリウムを排気す
るときは、クライオパネルによるヘリウムの吸着
量に制限があるため頻繁に再生を繰返さなければ
ならず、連続して能率的に真空槽内を排気するこ
とが出来ない不便がある。(Problem to be solved by the invention) When pumping out a large amount of helium using a cryopump, there is a limit to the amount of helium adsorbed by the cryopanel, so regeneration must be repeated frequently. However, there is the inconvenience that the inside of the vacuum chamber cannot be evacuated.
本発明は真空槽内のヘリウムを再生操作するこ
となく連続的に排気出来るクライオポンプを提供
することを目的とするものである。 An object of the present invention is to provide a cryopump that can continuously evacuate helium in a vacuum chamber without regenerating it.
（問題点を解決するための手段）
本発明では、真空槽の隔壁を貫通して極めて細
い流路を多数有するフイルタを設け、該フイルタ
の一端側を真空槽とその他端側を補助排気系へ臨
ませ、該フイルタの該一端側にこれを冷却する稀
釈冷凍機その他の冷却手段を設け、該他端側にこ
れを加熱する電気ヒータその他の加熱手段を設け
るようにし、低温の該一端側で凝縮したヘリウム
を高温の該他端側へヘリウムの超流動流により移
動させて真空槽から外部にヘリウムを連続的に排
気出来るようにした。(Means for Solving the Problems) In the present invention, a filter is provided which penetrates the partition wall of a vacuum chamber and has a large number of extremely narrow channels, and one end of the filter is connected to the vacuum chamber and the other end is connected to an auxiliary exhaust system. A dilution refrigerator or other cooling means for cooling the filter is provided at one end of the filter, and an electric heater or other heating means for heating the filter is provided at the other end. The condensed helium was moved to the other high-temperature end side by a superfluid flow of helium, so that helium could be continuously exhausted from the vacuum chamber to the outside.
（作用）
クライオポンプは真空槽に取付けられ、クライ
オパネルが4.2K以下に冷却されるとこれに該真
空槽内の気体分子が凝縮して真空排気される。更
に冷却手段により冷却された真空槽に臨む一端側
の温度が2.17K以下になるとフイルタに凝縮した
ヘリウムは超流動状態となり、加熱された該フイ
ルタの補助排気系に臨む他端側へと流れ、該他端
側に於いて流体ヘリウムを蒸発させ、補助ポンプ
で排気する。クライオポンプの運転中、真空槽内
のヘリウムを連続的に該フイルタの一端側から他
端側へと運んで排気することが出来るので、ヘリ
ウムを排気する能力が吸着式のクライオポンプの
ように限度に達することがなく、再生操作を不要
となし得るので長時間に亘り能率良くヘリウムを
排気出来る。(Function) The cryopump is attached to a vacuum chamber, and when the cryopanel is cooled to below 4.2K, the gas molecules in the vacuum chamber are condensed and evacuated. Furthermore, when the temperature of the one end facing the vacuum chamber cooled by the cooling means becomes 2.17K or less, the helium condensed on the filter becomes a superfluid state and flows to the other end of the heated filter facing the auxiliary exhaust system. Fluid helium is evaporated at the other end and evacuated by an auxiliary pump. During operation of the cryopump, the helium in the vacuum chamber can be continuously transported from one end of the filter to the other and exhausted, so the ability to exhaust helium is limited to that of adsorption-type cryopumps. Since the regeneration operation is not required, helium can be efficiently exhausted over a long period of time.
真空槽内の圧力がP1で、該フイルタの真空槽
側即ち一端側の温度がT1、補助排気系の圧力が
P2で、該フイルタの補助排気系側即ち他端側の
温度がT2であるとする。また真空槽側の飽和蒸
気圧が温度T1のときP0（T1）、補助排気系側の飽
和蒸気圧が温度T2のときP0（T2）であるとすれ
ば、真空槽内の排気が行なわれるためにはP1≧
P0（T1）でなけばならず、補助排気系側でヘリウ
ムを蒸発させて排気するためにはP0（T2）≧P2で
なければならない。 The pressure inside the vacuum chamber is P 1 , the temperature on the vacuum chamber side, that is, one end side of the filter is T 1 , and the pressure in the auxiliary exhaust system is
Assume that at P 2 , the temperature on the auxiliary exhaust system side, that is, the other end side of the filter is T 2 . Furthermore, if the saturated vapor pressure on the vacuum chamber side is P 0 (T 1 ) when the temperature is T 1 , and the saturated vapor pressure on the auxiliary exhaust system side is P 0 (T 2 ) when the temperature is T 2 , then In order for the exhaust to take place, P 1 ≧
P 0 (T 1 ) must be satisfied, and in order to evaporate and exhaust helium on the auxiliary exhaust system side, P 0 (T 2 )≧P 2 must be satisfied.
さて、通常の流体ではフイルタ中の圧力損失の
ため必ずP1＞P2となるが、超流動ヘリウムが該
フイルタを通過するときはT1＝T2のときはP1＞
P0（T1）＝P0（T2）＞P2となつてP1＞P2であること
に変りがないが、T1＜T2でP0（T1）＜P0（T2）の
ときにはP1≦P2となる可能性がある。該フイル
タを通つて定常的な超流動流が生ずるとき温度勾
配ΔTと圧力勾配ΔPは同方向でΔP｜／｜ΔT｜
＝ρSであればよく、ρは液体ヘリウムの密度、
Ｓは単位質量あたりのエントロピーである。 Now, in a normal fluid, P 1 > P 2 due to the pressure loss in the filter, but when superfluid helium passes through the filter, when T 1 = T 2 , P 1 >
P 0 (T 1 ) = P 0 (T 2 ) > P 2 , so P 1 > P 2 remains true, but T 1 < T 2 and P 0 (T 1 ) < P 0 (T 2 ), there is a possibility that P 1 ≦P 2 . When a steady superfluid flow occurs through the filter, the temperature gradient ΔT and the pressure gradient ΔP are in the same direction and ΔP|/|ΔT|
= ρS, where ρ is the density of liquid helium,
S is the entropy per unit mass.
従つて該フイルタの補助排気系側即ち他端側を
加熱するころで真空槽内の圧力よりも補助排気系
の吸入圧が高くても、連続して真空槽内のヘリウ
ムを排気することが出来る。 Therefore, even if the suction pressure of the auxiliary exhaust system is higher than the pressure inside the vacuum chamber when the auxiliary exhaust system side, that is, the other end side of the filter is heated, the helium in the vacuum chamber can be continuously evacuated. .
連続排気を行なえる条件を要約すれば P1≧P0（T1） P2≦P0（T2） P2−P1≦Pρ（T2−T1） である。 To summarize the conditions under which continuous pumping can be performed, P 1 ≧P 0 (T 1 ) P 2 ≦P 0 (T 2 ) P 2 −P 1 ≦Pρ (T 2 −T 1 ).
またP1＞P2の場合は補助排気系側の温度T2が
ヘリウムの蒸発で低下してP1−P2＜Pρ（T1−T2）
とならないように加熱手段により加熱されていれ
ば超流動流の向きが逆転することはない。 In addition, when P 1 > P 2 , the temperature T 2 on the auxiliary exhaust system side decreases due to helium evaporation, and P 1 − P 2 < Pρ (T 1 − T 2 ).
If the superfluid flow is heated by the heating means so that this does not occur, the direction of the superfluid flow will not be reversed.
このように、補助排気側での加熱による温度勾
配による超流動流の駆動力を、真空槽内から補助
排気側へのヘリウムの運搬に有効に利用すること
が出来る。 In this way, the driving force of the superfluid flow due to the temperature gradient caused by heating on the auxiliary exhaust side can be effectively used to transport helium from the vacuum chamber to the auxiliary exhaust side.
（実施例）
本発明の実施例を図面につき説明するに、第１
図に於いて１は真空排気される真空槽、２は該真
空槽１に取付けられてその内部を真空排気するク
ライオポンプを示し、該クライオポンプ２は後記
のフイルタ６と冷却手段９及び加熱手段１０で構
成される。また、３は熱伝導率の小さな材料で製
作された真空槽と補助排気側との隔壁を示す。該
隔壁３には、微粒子４を充填した管５或は多孔物
質から成り極めて細い流路の多数が形成されたフ
イルタ６を厚さ方向に貫通するようにして設け、
該フイルタ６の一端側６ａが真空槽１に臨み、そ
の他端側６ｂが補助ポンプ７により排気される補
助排気系８に臨むようにした。９は該フイルタ６
の一端側６ａを例えば0.3Kまで冷却する稀釈冷
凍機や 3Heの減圧排気による冷却手段、１０は
フイルタ６の他端側６ｂを加熱する電気ヒータ等
の加熱手段である。(Example) To explain the example of the present invention with reference to the drawings, the first example is as follows.
In the figure, 1 indicates a vacuum chamber to be evacuated, and 2 indicates a cryopump attached to the vacuum chamber 1 to evacuate the inside thereof. Consists of 10. Further, numeral 3 indicates a partition between the vacuum chamber and the auxiliary exhaust side, which is made of a material with low thermal conductivity. The partition wall 3 is provided with a tube 5 filled with fine particles 4 or a filter 6 made of a porous material and formed with a large number of extremely narrow channels so as to pass through the partition wall 3 in the thickness direction.
One end 6a of the filter 6 faces the vacuum chamber 1, and the other end 6b faces an auxiliary exhaust system 8 that is evacuated by an auxiliary pump 7. 9 is the filter 6
10 is a heating means such as a dilution refrigerator that cools one end side 6a of the filter 6 to, for example, 0.3 K, a cooling means using a reduced pressure exhaust of 3 He, and an electric heater that heats the other end side 6b of the filter 6.
クライオポンプ２の周囲には必要に応じて熱シ
ールドが設けられる。該真空槽１内のヘリウムを
排気する場合、該フイルタ６の一端側６ａを
0.3Kに冷却し、他端側６ｂはこれよりも高い温
度に加熱され、例えば0.01Kだけ高くなるように
加熱するとヘリウムに対する到達圧力Pmは3.3×
10-8Torrとなり、他の気体に対する到達圧力は
問題にならないくらい小さくなる。該フイルタ６
を介して真空槽１から補助排気系８へと排気され
る質量流量は、該フイルタ６の長さが10cmで極め
て細い流路の１本の直径が1μｍであれば、流速
は臨界速度の10cm／Ｓ程度であるので、流路１本
当り1.138×10-11Kg／ｓ程度の流量を超流動によ
り流すことが出来る。これに対してフイルタ６の
両端側６ａ，６ｂの圧力差によつて誘起される補
助排気系８から真空槽１への常流動流の流量は
5.85×10-25Kg／ｓ程度であり、超流動流よりも
著しく少ない。 A heat shield is provided around the cryopump 2 as necessary. When exhausting the helium in the vacuum chamber 1, one end 6a of the filter 6 is
If it is cooled to 0.3K and the other end 6b is heated to a higher temperature, for example by 0.01K, the ultimate pressure Pm for helium will be 3.3×
10 -8 Torr, and the ultimate pressure for other gases is so small that it does not matter. The filter 6
If the length of the filter 6 is 10 cm and the diameter of one of the extremely narrow channels is 1 μm, the mass flow rate exhausted from the vacuum chamber 1 to the auxiliary exhaust system 8 is equal to the critical velocity of 10 cm. /S, it is possible to flow a flow rate of about 1.138×10 -11 Kg/s per channel by superfluidity. On the other hand, the flow rate of the normal flow from the auxiliary exhaust system 8 to the vacuum chamber 1 induced by the pressure difference between the opposite ends 6a and 6b of the filter 6 is
It is about 5.85×10 -25 Kg/s, which is significantly lower than that of superfluid flow.
従つて該フイルタ６の真空槽１側の一端部６ａ
を冷却して凝縮したヘリウムを補助排気系８側の
温度の高い他端部６ｂへ超流動流により連続して
流し、該他端部６ｂから蒸発させて排気すること
が出来、従来のクライオポンプのように再生操作
を頻繁に行なうことなく大量のヘリウムを排気し
得る。この場合、フイルタ６の真空槽１側の端面
がクライパネルとして働き、この面にヘリウム気
体分子が凝縮する。 Therefore, one end 6a of the filter 6 on the vacuum chamber 1 side
The cooled and condensed helium can be continuously flowed by a superfluid flow to the other end 6b of the auxiliary exhaust system 8 side where the temperature is high, and the helium can be evaporated and exhausted from the other end 6b, unlike conventional cryopumps. Large amounts of helium can be pumped out without frequent regeneration operations. In this case, the end surface of the filter 6 on the vacuum chamber 1 side functions as a cryopanel, and helium gas molecules condense on this surface.
尚、第２図示の如くフイルタ６の真空槽側にク
ライオパネル１１を取付けることにより、ヘリウ
ム気体分子を凝縮する面積を拡大することが出来
る。 Incidentally, by attaching a cryopanel 11 to the vacuum chamber side of the filter 6 as shown in the second figure, the area for condensing helium gas molecules can be expanded.
この場合にはクライオパネル１１上に凝縮した
液体ヘリウムは、超流動の流れでフイルタ６へ到
達し、フイルタ６を通過して補助ポンプ７で排気
される。 In this case, the liquid helium condensed on the cryopanel 11 reaches the filter 6 in a superfluid flow, passes through the filter 6, and is exhausted by the auxiliary pump 7.
また該フイルタ６は超流動ヘリウムのみが通過
するので例えばトリチウムとヘリウムの混合気体
が存する核融合炉に於いてヘリウムを排気してト
リチウムを分離することを能率良く行なうことが
出来る。 Further, since only superfluid helium passes through the filter 6, it is possible to efficiently exhaust helium and separate tritium, for example, in a nuclear fusion reactor where a mixed gas of tritium and helium exists.
（発明の効果）
このように本発明によれば、真空槽の隔壁に極
めて細い流路を多数有するフイルタを設けてその
真空槽側の一端部を冷却手段により冷却し、その
補助排気系側の他端部を加熱するようにしたので
超流動流により連続して能率良くヘリウムを排気
出来、該フイルタを通過するのはヘリウムだけで
油その他の不純物は通過しないので真空槽内を汚
染することがなく、核融合炉のヘリウムの排気等
に便利に適用出来る効果がある(Effects of the Invention) According to the present invention, a filter having a large number of extremely narrow channels is provided on the partition wall of a vacuum chamber, one end of the vacuum chamber side is cooled by a cooling means, and the auxiliary exhaust system side of the filter is cooled by a cooling means. Since the other end is heated, helium can be continuously and efficiently evacuated using a superfluid flow. Only helium passes through the filter, and oil and other impurities do not pass through the filter, so there is no possibility of contaminating the inside of the vacuum chamber. It has the effect of being conveniently applicable to helium exhaust in fusion reactors, etc.
第１図は本発明の実施例の截断側面図、第２図
は本発明の第２実施例の截断側面図である。
１……真空槽、２……クライオポンプ、３……
隔壁、６……フイルタ、６ａ……一端側、６ｂ…
…他端側、８……補助排気系、９……冷却手段、
１０……加熱手段。
FIG. 1 is a cutaway side view of an embodiment of the invention, and FIG. 2 is a cutaway side view of a second embodiment of the invention. 1... Vacuum chamber, 2... Cryopump, 3...
Partition wall, 6...filter, 6a...one end side, 6b...
...Other end side, 8...Auxiliary exhaust system, 9...Cooling means,
10... Heating means.
Claims (1)
数有するフイルタを設け、該フイルタの一端側を
真空槽へ臨ませると共にその他端側を補助排気系
へ臨ませ、該フイルタの該一端側にこれを冷却す
る稀釈冷凍機その他の冷却手段を設け、該他端側
にこれを加熱する電気ヒータその他の加熱手段を
設け、低温の該一端側で凝縮したヘリウムを高温
の該他端側へヘリウムの超流動流により移動させ
て排気することを特徴とするヘリウムを連続排気
し得るクライオポンプ。1. A filter having a large number of extremely narrow flow paths that penetrates the partition wall of the vacuum chamber is provided, one end of the filter faces the vacuum chamber, the other end faces the auxiliary exhaust system, and A dilution refrigerator or other cooling means is provided to cool the helium, and an electric heater or other heating means is provided to heat the helium at the other end, and the helium condensed at the low temperature one end is transferred to the high temperature other end. A cryopump capable of continuously exhausting helium, which is characterized by moving and exhausting helium using a superfluid flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14390185A JPS627985A (en) | 1985-07-02 | 1985-07-02 | Cryopump capable of continuously exhausting helium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14390185A JPS627985A (en) | 1985-07-02 | 1985-07-02 | Cryopump capable of continuously exhausting helium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627985A JPS627985A (en) | 1987-01-14 |
| JPH0353475B2 true JPH0353475B2 (en) | 1991-08-15 |
Family
ID=15349697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14390185A Granted JPS627985A (en) | 1985-07-02 | 1985-07-02 | Cryopump capable of continuously exhausting helium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627985A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2278644B (en) * | 1993-05-20 | 1996-01-03 | Euratom | Modified cryogenic diffusion pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59130519A (en) * | 1983-09-05 | 1984-07-27 | Mitsutoshi Kashiwajima | Device for transporting and compressing gas by using porous material |
-
1985
- 1985-07-02 JP JP14390185A patent/JPS627985A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627985A (en) | 1987-01-14 |
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