JPH0355873Y2 - - Google Patents
Info
- Publication number
- JPH0355873Y2 JPH0355873Y2 JP16664185U JP16664185U JPH0355873Y2 JP H0355873 Y2 JPH0355873 Y2 JP H0355873Y2 JP 16664185 U JP16664185 U JP 16664185U JP 16664185 U JP16664185 U JP 16664185U JP H0355873 Y2 JPH0355873 Y2 JP H0355873Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- metal diaphragm
- elastic limit
- strain
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 33
- 229910052751 metal Inorganic materials 0.000 claims description 33
- 239000012530 fluid Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 229910000734 martensite Inorganic materials 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910017518 Cu Zn Inorganic materials 0.000 description 1
- 229910017752 Cu-Zn Inorganic materials 0.000 description 1
- 229910017943 Cu—Zn Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は流体の圧力を検出する圧力検出器に関
し、特に金属ダイアフラムを用いた圧力検出器に
関する。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a pressure detector for detecting fluid pressure, and particularly to a pressure detector using a metal diaphragm.
（従来の技術）
従来この種の圧力検出器としては、たとえば金
属ダイアフラムとしてステンレス等の薄板が用い
られ、金属ダイアフラム表面の被検出面に歪ゲー
ジを貼着し、金属ダイアフラムの受圧面に加わる
圧力に応じて応動するダイアフラムの変形量、す
なわち被検出面の歪量を歪ゲージの抵抗値変化に
変換して圧力を検出するようになつていた。金属
ダイアフラムの歪量は受圧面に加わる圧力により
金属ダイアフラムに生じる応力と弾性限度内にお
いて正比例するという性質（フツクの法則）を利
用したものである。(Prior art) Conventionally, in this type of pressure detector, a thin plate made of stainless steel or the like is used as a metal diaphragm, and a strain gauge is attached to the detection surface of the metal diaphragm to measure the pressure applied to the pressure receiving surface of the metal diaphragm. Pressure was detected by converting the amount of deformation of the diaphragm, that is, the amount of strain on the surface to be detected, into a change in the resistance value of the strain gauge. This method utilizes the property (Hook's law) that the amount of strain in a metal diaphragm is directly proportional to the stress generated in the metal diaphragm due to the pressure applied to the pressure-receiving surface within the elastic limit.
（考案が解決しようとする問題点）
しかし斯かる従来例の場合には、流体の圧力に
より金属ダイアフラムに生じる応力が弾性限度を
超えると金属ダイアフラムは塑性変形してしまい
元の形状に戻らなくなる。そのため圧力の測定範
囲は金属ダイアフラムの弾性限度内に制約されて
しまう。そこで高圧流体の圧力を測定する場合に
は、金属ダイアフラムの厚みを増して剛性を高め
たものが使用されていた。ところが金属ダイアフ
ラムの剛性を高めると金属ダイアフラムの流体の
圧力に対する歪量が小さく歪ゲージの抵抗値変化
も小さくなつてしまい測定精度が悪いという問題
があつた。(Problems to be Solved by the Invention) However, in the case of such a conventional example, when the stress generated in the metal diaphragm by the pressure of the fluid exceeds its elastic limit, the metal diaphragm is plastically deformed and cannot return to its original shape. Therefore, the pressure measurement range is limited within the elastic limit of the metal diaphragm. Therefore, when measuring the pressure of high-pressure fluid, a metal diaphragm with increased thickness and rigidity has been used. However, when the rigidity of the metal diaphragm is increased, the amount of strain of the metal diaphragm with respect to the pressure of the fluid is small, and the change in the resistance value of the strain gauge is also small, resulting in a problem of poor measurement accuracy.
本考案は上記した従来技術の問題点を解決する
ためになされたもので、金属ダイアフラムの弾性
限度に制約されることなく、低圧域から高圧域ま
で広い範囲に亘つて圧力を検出でき、しかも測定
精度の高い圧力検出器を提供することにある。 The present invention was developed to solve the problems of the conventional technology described above, and is capable of detecting pressure over a wide range from low pressure to high pressure without being restricted by the elastic limit of metal diaphragms. Our objective is to provide a highly accurate pressure detector.
（問題点を解決するための手段）
上記目的を達成するために、本考案にあつて
は、金属ダイアフラムを、弾性限度を超えて変形
しても応力を除去すればもとの形状に復帰する性
質を有する超弾性材により形成したものから成つ
ている。(Means for solving the problem) In order to achieve the above object, in the present invention, even if the metal diaphragm is deformed beyond its elastic limit, it can return to its original shape by removing stress. It is made of a superelastic material with properties.
（実施例）
以下に本考案を図示の実施例に基づいて説明す
る。本考案の一実施例に係る圧力検出器を示す第
１図において、１は薄板状の金属ダイアフラムで
あり、受圧管２と押えナツト３との間に挟持され
ている。受圧管２は略円筒状部材で一端に図示し
ない油圧装置等の管路に接続される接続端部４を
有し、他端には開口部が金属ダイアフラム１によ
り覆われた圧力室５が設けられており、この圧力
室５は接続端部４側に開口する圧力導入路６によ
り外部と連通されている。押えナツト３は上記受
圧管２外周に設けたねじ部に螺着され、受圧管２
と押えナツト３との対向面間に金属ダイアフラム
１を挾持するようになつている。この押えナツト
３には上記受圧管２の圧力室５に対応して基準圧
力室７が設けられている。なお８は圧力室５を密
封するシール体である。上記金属ダイアフラム１
の反受圧面には半導体式あるいは抵抗線式等の歪
ゲージ９が貼着されており、圧力に応じて応動す
る金属ダイアフラム１表面に生じる歪を電気信号
としての抵抗値変化に変換するようになつてい
る。１０は抵抗値変化を図示しない圧力表示部に
導出するリード線である。(Example) The present invention will be explained below based on the illustrated example. In FIG. 1 showing a pressure detector according to an embodiment of the present invention, reference numeral 1 denotes a thin metal diaphragm, which is held between a pressure receiving tube 2 and a holding nut 3. As shown in FIG. The pressure receiving pipe 2 is a substantially cylindrical member having a connecting end 4 connected to a pipe line of a hydraulic device (not shown) at one end, and a pressure chamber 5 whose opening is covered by a metal diaphragm 1 at the other end. This pressure chamber 5 is communicated with the outside through a pressure introduction path 6 that opens on the connection end 4 side. The retainer nut 3 is screwed onto a threaded portion provided on the outer periphery of the pressure receiving tube 2, and
The metal diaphragm 1 is held between the opposing surfaces of the holding nut 3 and the holding nut 3. This holding nut 3 is provided with a reference pressure chamber 7 corresponding to the pressure chamber 5 of the pressure receiving tube 2. Note that 8 is a seal body that seals the pressure chamber 5. Above metal diaphragm 1
A strain gauge 9, such as a semiconductor type or resistance wire type, is attached to the anti-pressure receiving surface of the diaphragm 1, so that the strain generated on the surface of the metal diaphragm 1, which responds to pressure, is converted into a change in resistance value as an electrical signal. It's summery. Reference numeral 10 denotes a lead wire for leading out resistance value changes to a pressure display section (not shown).
上記金属ダイアフラム１は、弾性限度を超えて
変形しても応力を除去すればもとの形状に復帰す
る性質を有する超弾性材が使用されている。超弾
性材としては本実施例にあつてはたとえばTi−
Ni，Cu−Zn，In−Tl等の熱弾性型マルテンサイ
ト変態を起こす合金（いわゆる形状記憶合金）が
使用されている。この合金はマルテンサイト変態
点以上の温度で使用すると上記した超弾性を示す
ことが知られている。したがつて本実施例では上
記マルテンサイト変態点以上の温度で使用するよ
うになつている。もつともマルテンサイト変態を
起こす合金に限るものではなく、上記超弾性を有
するものであればよい。 The metal diaphragm 1 is made of a superelastic material that has the property of returning to its original shape when the stress is removed even if it is deformed beyond its elastic limit. In this example, the superelastic material is, for example, Ti-
Alloys that undergo thermoelastic martensitic transformation (so-called shape memory alloys), such as Ni, Cu-Zn, and In-Tl, are used. It is known that this alloy exhibits the above-mentioned superelasticity when used at a temperature above the martensitic transformation point. Therefore, in this embodiment, it is used at a temperature above the martensitic transformation point. However, the material is not limited to alloys that undergo martensitic transformation, and any material having the above-mentioned superelasticity may be used.
上記構成の圧力検出器にあつては圧力導入路６
を通じて圧力室５内に流体の圧力が導入され、基
準圧力室７内の圧力よりも高圧になると第２図に
示すように金属ダイアフラム１が基準圧力室７側
に撓み、歪ゲージ９が貼着された金属ダイアフラ
ム１表面が伸びて歪ゲージ９に歪が生じそれに応
じて歪ゲージ９の抵抗値が変化し、抵抗値変化に
対応して図示しない圧力表示部に圧力が表示され
る。流体の圧力により金属ダイアフラム１が弾性
限度以上に変形しても金属ダイアフラム１は塑性
変形しない。弾性限度以上の応力に対する金属ダ
イアフラム１の歪は応力と正比例しなくなるが、
応力と歪は一対一の対応関係があり、歪量に応じ
抵抗値と受圧面に加わる圧力との対応をあらかじ
め計測しておけば、弾性限度以上の応力が生じた
場合でも流体の圧力を正確に検出することができ
る。また上記金属ダイアフラム１は板厚は薄く形
成されているので、流体の圧力による変形量は大
きく、歪ゲージ９貼着面の歪も大きくなつて歪ゲ
ージ９の抵抗値変化は大きい。したがつて微小な
圧力変化も精密に測定される。 In the case of a pressure detector with the above configuration, the pressure introduction path 6
When the pressure of the fluid is introduced into the pressure chamber 5 through the pressure chamber 5, and the pressure becomes higher than the pressure in the reference pressure chamber 7, the metal diaphragm 1 is bent toward the reference pressure chamber 7 as shown in FIG. 2, and the strain gauge 9 is stuck. The surface of the metal diaphragm 1 is stretched, causing strain in the strain gauge 9, and the resistance value of the strain gauge 9 changes accordingly, and the pressure is displayed on a pressure display section (not shown) corresponding to the change in resistance value. Even if the metal diaphragm 1 is deformed beyond its elastic limit due to the pressure of the fluid, the metal diaphragm 1 will not be plastically deformed. The strain of the metal diaphragm 1 due to stress exceeding the elastic limit is no longer directly proportional to the stress, but
There is a one-to-one correspondence between stress and strain, and if you measure the correspondence between the resistance value and the pressure applied to the pressure-receiving surface in advance according to the amount of strain, you can accurately measure the fluid pressure even when stress exceeds the elastic limit. can be detected. Further, since the metal diaphragm 1 is formed to have a thin plate thickness, the amount of deformation due to the pressure of the fluid is large, and the strain on the surface to which the strain gauge 9 is attached is also large, resulting in a large change in the resistance value of the strain gauge 9. Therefore, even minute pressure changes can be precisely measured.
（考案の効果）
本考案は以上の構成および作用から成るもの
で、圧力に応じて応動する金属ダイアフラムを弾
性限度以上の変形させても応力を除去すればもと
の形状に復帰する性質を有する超弾性材により形
成したので、弾性限度以上の高圧の圧力が加わつ
た場合でも従来のように塑性変形を起こすことは
なくなり、低圧域から高圧域までの広い範囲の圧
力検出が可能となる。したがつて高圧流体の圧力
を測定する場合においても耐圧を高めるために従
来のように金属ダイアフラムの板厚を厚くする必
要はなくなり、板厚の薄い金属ダイアフラムを使
用することができ測定精度を高精度にすることが
できる等の種々の効果が得られる。(Effects of the invention) The present invention has the above-mentioned structure and operation, and has the property that even if the metal diaphragm that responds to pressure is deformed beyond its elastic limit, it will return to its original shape when the stress is removed. Since it is made of a superelastic material, even if high pressure exceeding the elastic limit is applied, plastic deformation will not occur as in the past, making it possible to detect pressure in a wide range from low pressure to high pressure. Therefore, when measuring the pressure of high-pressure fluid, it is no longer necessary to increase the thickness of the metal diaphragm as in the past to increase pressure resistance, and a thinner metal diaphragm can be used, increasing measurement accuracy. Various effects such as improved accuracy can be obtained.
第１図は本考案の一実施例に係る圧力検出器の
縦断面図、第２図は第１図の装置の金属ダイアフ
ラムに圧力が加わつた状態を示す要部拡大縦断面
図である。
符号の説明、１……金属ダイアフラム、２……
受圧管、３……押えナツト、５……圧力室、７…
…基準圧力室、９……歪ゲージ。
FIG. 1 is a vertical cross-sectional view of a pressure detector according to an embodiment of the present invention, and FIG. 2 is an enlarged vertical cross-sectional view of a main part of the device shown in FIG. 1, showing a state in which pressure is applied to the metal diaphragm. Explanation of symbols, 1...Metal diaphragm, 2...
Pressure receiving tube, 3... Holder nut, 5... Pressure chamber, 7...
...Reference pressure chamber, 9...Strain gauge.
Claims (1)
の変形量を電気信号に変換して圧力を検出する圧
力検出器において、上記金属ダイアフラムを弾性
限度以上に変形させても応力を除去すればもとの
形状に復帰する性質を有する超弾性材により形成
したことを特徴とする圧力検出器。 In a pressure detector that detects pressure by converting the amount of deformation of a metal diaphragm that responds to fluid pressure into an electrical signal, even if the metal diaphragm is deformed beyond its elastic limit, it will return to its original shape if the stress is removed. 1. A pressure detector characterized in that it is made of a superelastic material that has a property of returning to .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16664185U JPH0355873Y2 (en) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16664185U JPH0355873Y2 (en) | 1985-10-31 | 1985-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275440U JPS6275440U (en) | 1987-05-14 |
| JPH0355873Y2 true JPH0355873Y2 (en) | 1991-12-13 |
Family
ID=31097813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16664185U Expired JPH0355873Y2 (en) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0355873Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005148002A (en) * | 2003-11-19 | 2005-06-09 | Yokogawa Electric Corp | Pressure sensor |
| US7437939B1 (en) * | 2007-04-13 | 2008-10-21 | Rosemount Inc. | Pressure and mechanical sensors using titanium-based superelastic alloy |
-
1985
- 1985-10-31 JP JP16664185U patent/JPH0355873Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6275440U (en) | 1987-05-14 |
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