JPH0355888B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a disk member cleaning apparatus for cleaning a disk member on which a recording layer is formed, such as a magnetic disk or an optical disk.

2. Description of the Related Art As a disk member, for example, a magnetic disk is made by smoothing a disk member made of an annular plate made of aluminum or the like by grinding such as wrapping, and then applying a magnetic material to the surface of the disk member. By coating, a magnetic recording layer is formed. Here, in order to make the film thickness of the recording layer uniform as described above, it is necessary to apply the magnetic material after making sure that no foreign matter such as dust is attached to the surface of the disk member in advance. .
For this purpose, the disk member is cleaned before the recording layer is formed and, if necessary, after the recording layer is formed.

Conventionally, this cleaning of disk members has been carried out by immersing a large number of disk members easily attached in a cleaning liquid, vibrating the cleaning liquid at high frequency, or wiping the surface with a cleaning tool such as a sponge in the cleaning liquid. was.

Problems to be Solved by the Invention As mentioned above, if cleaning is performed using high-frequency vibration, the overall structure of the cleaning device becomes complicated.
This method not only has disadvantages such as an increase in the size of the device structure, but also has drawbacks such as the inability to completely remove dirt such as oil stains from the disk members. On the other hand, manual cleaning is time-consuming and has drawbacks such as increased production costs for products such as magnetic disks and optical disks.

The present invention has been made in order to eliminate the above-mentioned drawbacks of the prior art, and an object of the present invention is to provide a disk member cleaning device that can automatically clean the disk member with a simple and compact configuration. The purpose is to

Means for Solving the Problems In order to achieve the above-mentioned object, a disk member cleaning device according to the present invention includes a rotary table that rotates by a predetermined angle, and a rotary table that is partitioned into a plurality of work compartments. and a chuck member installed in each of the work sections and chucks the outer peripheral edge or inner peripheral edge of the disk member,
Among the work compartments, one of the work compartments is used as an attachment/detachment unit for loading and unloading the disk member, and the disc member transferred to each position corresponds to at least some of the work compartments. The feature is that a cleaning member is installed to each perform a predetermined cleaning operation.

Operation To clean disk members using the cleaning device configured as described above, for example, a rack with a large number of disk members in an upright state is transported,
The disk members are taken out one by one from this loading rack and placed in a loading/unloading section for loading and unloading disk members, which is one of the working compartments on the rotary table which is divided into a plurality of working compartments. While the rotary table is rotated by a predetermined angle, a cleaning member is operated to remove foreign matter such as dust and abrasion powder adhering to the surface of the disk member, and to wipe off an oil film adhering to the surface. . This cleaning member can be cleaned by a scrubbing tool or a brush while supplying cleaning water, as well as by spraying cleaning water, showering, or other appropriate means.Cleaning can also be done through processes such as cleaning with detergent, washing with water, and rinsing. It can be done with After this cleaning is completed, when the disk member is returned to the attachment/detachment part of the rotary table, the disk member is dried after being taken out from the attachment/detachment part.
The cleaned disk member is taken out from the carrying-out means.

As mentioned above, the disk member can be cleaned using a cleaning device with a simple and compact configuration by performing multiple cleaning operations while rotating the disk member by a predetermined angle while chucked on the rotary table. can be done automatically. Since the partition wall is provided on the rotary table, there is no problem such as the cleaning liquid in the work section where one cleaning operation is performed staining the disk members installed in the preceding work section.

Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In this embodiment, a case will be described in which a disk member is cleaned after being wrapped.

First, in FIG. 1, reference numeral 1 denotes a housing constituting the main body of the cleaning device, and inside the housing 1 are a loading section 3 for transporting a loading rack 2, and a loading rack 4.
An unloading section 5 for transporting the materials is formed, and a work chamber 6 is also formed.

The work chamber 6 is divided into a washing section 7 and a drying section 8, and disk members 9 that have been wrapped in the loading rack 2 are conveyed in an upright state to the work chamber 6. A carry-in handler 11 is provided to take out the pre-cleaned disk members 9 one by one, and a carry-in handler 12 is provided to transfer the disk members 9 after washing and drying to the carry-out rack 4.
are chuck members 11 that chuck the disk member 9 at the tips of the rotating arms 11a and 12a, respectively.
b, 12b, and further includes a transfer handler 13 that transfers the disk members 9 from the carry-in handler 11 to the cleaning section 7, from the cleaning section 7 to the drying section 8, and from the drying section 8 to the unloading handler 12. The transfer handler 13 can reciprocate by a predetermined angle and can also reciprocate back and forth along its rotation axis. The transfer handler 13 has three arm portions 13a, 13b, and 13c, each of which is provided with a chuck member 13d, 13e, and 13f at its tip. ,13f
can be displaced between a chuck position and a chuck release position by a driving means such as a cam mechanism.The cleaning section 7 has a rotary table 14 as shown in FIGS. The top of the table 14 is divided into four working sections by cross-shaped partition walls 15. In FIG. 2, the work section A in the upper part of the figure is an attachment/detachment part for attaching and detaching the disk member 9 to and from the transfer handler 13, and the work section B in the right part of the figure is the part where the disk member 9 is attached and detached from the transfer handler 13. The lower working section C is a rinsing section for rinsing after washing with a rinsing member 17, and the working section D on the right side of the figure is a disk cleaning section using an edge washing member 18. This serves as an edge cleaning section for cleaning the inner and outer peripheral edges of the member 9. And each of the aforementioned work section A,
B, C, and D have three chuck pieces 19a and 19 that hold the outer peripheral edge of the disk member 9, respectively.
A chuck member 19 consisting of b and 19c is installed. This chuck member 19 can be moved between the chuck position shown by a solid line in the working section A in FIG. 2 and the chuck release position shown by a chain line. As shown in working section D, a gear drive 20 is provided for actuating each chuck piece 19d, 19e, 19f. This gear drive section 20
The drive gear 20a is connected to the lever 2 on the back side of the rotary table 14 as shown in FIGS. 3 and 4.
1, and the lever 21 is normally in a position where the spring 22 makes contact with the stopper 23 as shown by the chain line, and at this time the chuck member 19 is in the chuck position and is in the position corresponding to the work section A. An actuating piece 25 connected to a rotation drive unit 24 provided in
By rotating the lever 21 from the chain line position to the solid line position, the lever 21 can be moved to the solid line position and can be moved to the chuck release position where the chuck of the chuck member 19 is released.

Next, as shown in FIG. 5, the cleaning member 16 is
It has a pair of upper and lower arms 26a, 26b, each arm 26a, 26b is fitted with a rotating shaft 27a, 27b, and one end of each rotating shaft 27a, 27b is made of a member such as a sponge. Washing utensils 28
a, 28b are attached, and a pulley 29 is attached to the other end.
a, 29b are attached, and each pulley 29a,
29b and pulleys 31a, 31 provided on the rotating shaft 30
Belts 32a and 32b are wound around and provided between the washing tools 28a and 28b, and by rotating the rotating shaft 30, the washing tools 28a and 28b can be rotated. And these washing tools 28a, 28
By the rotation b, the disk member 9 is rotated while being held by the chuck member 19. Further, the washing tools 28a and 28b have an annular shape, and in order to supply a cleaning liquid made of a neutral detergent or the like into the inside of the washing tools 28a and 28b, rotating shaft support blocks 33a and 33a are attached to the arms 26a and 26b, respectively. Hose 34a, 34b to 33b
are connected to the rotating shafts 27a, 27b in order to supply cleaning liquid from the respective hoses 34a, 34b to the washing tools 28a, 28b.
is drilled.

Further, the rinsing member 17 has the same structure as the cleaning member 16, and has a hose 3 attached to the rinsing tools 36a and 36b.
By supplying rinsing water through 7a and 37b, the disk member 9 can be rinsed after cleaning.

Further, as shown in FIG. 6, the edge cleaning member 18 has outer and inner edge cleaning tools 38 and 39 made of sponges, etc., and the outer edge cleaning tool 38 is attached to a rotating shaft 41 supported by a support arm 40. A pulley 42 is attached to the other end of the rotating shaft 41, and the washing tool 38 is driven to rotate by a belt 44 wound between the pulley 42 and a drive shaft 43. It's getting old. Further, a gear 45 is attached to the rotating shaft 41, and the gear 45 is connected to a gear 46.
As a result, the gear 46 is driven in the opposite direction to the rotating shaft 41. A belt 49 is wound around between this gear 46 and a pulley 48 of a rotating shaft 47 attached to the washing tool 39, so that the washing tool 39
It is designed so that it can be rotated in the opposite direction. Furthermore, the support arm 40 has a nozzle 50 (washing tool 39) that supplies washing water toward the washing tool 38.
A side nozzle (not shown) is attached to the support arm 40. Further, the support arm 40 is swingable by a crank mechanism or the like, so that the washing tools 38 and 39 can be swinged while being rotated during the washing operation.

The cleaning tool 15, the rinsing tool 18, and the edge cleaning tool 19 are rotated about their respective rotation axes by the rotation mechanism 51, so that they can be moved to the non-operating position shown by the solid line in FIG. It is adapted to be able to be displaced between the operating positions shown.

This embodiment is constructed as described above, and its operation will be explained next.

The disk member 9 is finished to have an extremely smooth surface by a wrapping device, and placed in an upright state on the carrying rack 2, and in this state the carrying rack 2 is mounted on the carrying section 3. Then, while the carry-in rack 2 is transporting the carry-in section 3, the shower 1
Most of the abrasive powder is washed away by washing with 0. Further, when the carry-in rack 2 reaches a predetermined position in the carry-in section 3, the carry-in handler 11 is rotated toward the carry-in rack 2 side, and the disk member 9 is chucked by the chuck member 11b. After that, the carry-in handler 11 is rotated to remove the disk member 9.
is transferred to the chakra member 13d of the arm portion 13a of the transfer handler 13.

After the disk member 9 is transferred to the transfer handler 13, the transfer handler 13 is transferred to the rotary table 1.
The working section A of the rotary table 14 is moved protrudingly displaced in the direction away from the rotary table 14 and rotated 90 degrees.
The disc member 9 is moved onto the chuck member 19 by being reduced and displaced in a direction approaching the rotary table 14. Then, the disk member 9 transferred to the rotary table 14 is moved to the work section B where cleaning is performed by rotating the rotary table 14 by 90 degrees. After the transfer of the disk member 9 to the work compartment B is completed, the cleaning member 16 is rotated by the rotating mechanism 51 to the position shown by the chain line in FIG. 9 is inserted into the hose 34a,
34b to the washing tool 2.
The washing tools 8a, 28b are supplied and the washing tools 28a, 28b are rotated. As a result, the surface of the disk member 9 is rubbed by the washing tools 28a, 28b, thereby cleaning the disk member 9. Moreover, the washing tools 28a, 28b
By applying rotational force to the disk member 9 by the rotation of the disk member 9, the entire front and back surfaces of the disk member 9 are cleaned.

When this cleaning of the disk member 9 is completed, the rotary table 14 is rotated 90 degrees and transferred to the work section C where rinsing is performed. In this working section C, the cleaning liquid is washed away using the rinsing member 17 in the same manner as in the above-mentioned working section B.

Thereafter, the rotary table 14 is rotated 90 degrees and transferred to the work section D where edge cleaning is performed, and the edge cleaning member 18 is operated to clean the inner and outer peripheral edges of the disk member 9. will be carried out. In the work section D, the washing tool 39 on the inner edge side is removed by tilting the swingable arm 40.
is inserted into the inner periphery of the disk member 9. Then, while swinging the arm 40, the washing tool 3
While rotating the disk member 9 by rotating the disk members 8 and 39, the inner and outer peripheral edges of the disk member 9 are cleaned by supplying pure water as a cleaning liquid from the nozzle 50, thereby removing foreign matter and oil stains from the disk member 9. etc. completely removed. The disk member 9 that has been completely cleaned in this manner is returned to the work compartment A by further rotating the rotary table 14 by 90 degrees.

Here, while the above-mentioned cleaning work is performed by rotating the rotary table 14, the carry-in handler 1
1 and the transfer handler 13 are operated, the disk members 9 of the carrying rack 2 are sequentially transferred to the rotary table 14, and the cleaning work is performed in the steps described above. The member 18 is simultaneously displaced into the operating position and the non-operating position by the rotation mechanism 51.

Since each of the work compartments A, B, C, and D is divided by the partition wall 15, the cleaning liquid, rinsing liquid, etc. in one work compartment cannot intrude into the other work compartment. Therefore, the disk member 9 in the preceding position in the cleaning section 7 will not be soiled due to the influence of cleaning, rinsing, etc. in the subsequent disk member 9. Therefore, a plurality of cleaning processes can be performed on a small-diameter rotary table, making it possible to downsize the cleaning apparatus.

As described above, the disk member 9 that has been cleaned returns to the work section A and is transferred to the transfer handler 13.
When the disk member 9 is displaced toward the rotary table 14 side, the disk member 9 is chucked by the chuck member 13e of the arm portion 13b. At the same time, the chuck member 13d of the arm 13a is moved to the carry-in handler 11.
The disk member 9 is transferred from the station. After that,
By rotating the transfer handler 13 by 90 degrees, the cleaned disk member 9 is transferred to the drying section 8, where it is dried by high-speed spin drying or the like.

The disk member 9 dried in this way is chucked by the chuck member 13f of the arm 13c of the transfer handler 13 by the operation of the transfer handler 13, and is moved to the unloading handler by the rotation of the transfer handler 13. 3, and by the rotation of the carry-out handler 3, it is placed in the carry-out rack 4. By sequentially repeating this operation, the disk member 9 is cleaned, and by transporting the carry-out rack 4 to the outside from the carry-out section 5, the disk member 9 that has been completely cleaned is taken out.

Next, FIG. 7 shows a second embodiment of the present invention. In this embodiment, one of the four working compartments defined by the partition wall 62 on the rotary table 61 is A is disk member 9
The cleaning member 6 of the work section B constituting the cleaning section is a mounting section to which a cleaning member 6 is attached, and is also pre-cleaned by a preliminary cleaning shower 63.
4, the cleaning liquid is supplied from a nozzle 66 provided on the side of the cleaning tool 65. Further, in the third work compartment C, rinsing by a rinsing member 67 and cleaning of the inner and outer peripheral edges by an edge cleaning member 68 are performed simultaneously, and the fourth work compartment D has a cover 69 that can be opened and closed.
In the drying section, the disk member 9 that has become clean is dried. Further, in this work section D, the disk member 9 that has become clean is taken out.

With this configuration, the disk member 9 can also be automatically cleaned in the same way as described above.

In each of the above-mentioned embodiments, the explanation has been given on the case where the disk member is cleaned after being subjected to the wrapping process, but it goes without saying that the present invention can also be applied to cleaning performed either before or after applying the magnetic material. Since the cleaning device of the present invention compactly stores each member forming a plurality of cleaning steps in the housing, it is suitable for installation in a small device such as in a clean room immediately before applying a magnetic material. Can be used for In addition, the number of work compartments formed by partition walls is not limited to four as described above, but may be formed in a number depending on the type of cleaning process, and the cleaning means include detergent washing, rinsing, and edge washing. In addition, spray cleaning, shower cleaning, etc. may be performed as appropriate, and the cleaning liquid may be not only a neutral detergent, but also pure water, city water, alcohol, Freon, etc.

Effects of the Invention As detailed above, the present invention carries the disk member to the rotary table in the attachment/detachment section, performs cleaning consisting of multiple operations while rotating the disk by a predetermined angle in a chucked state, and then By taking it out when you return to the department,
Disk members can be automatically cleaned using a cleaning device with a simple and compact configuration.

[Brief explanation of drawings]

1 to 6 show a first embodiment of the present invention, and FIG. 1 is an overall configuration diagram of a cleaning device, and FIG.
The figure is an enlarged front view of the cleaning section, and Figure 3 is the
4 is a configuration explanatory diagram showing the operating mechanism of the chuck member of the rotary table, FIG. 5 is a partial cross-sectional front view of the cleaning member, FIG. 6 is a partial cross-sectional front view of the edge cleaning member, and FIG. The figure is a configuration explanatory diagram showing a second embodiment of the present invention. 1: Housing, 7: Cleaning section, 9: Disk member, 14, 61: Rotary table, 15, 6
2: Partition wall, 16, 64: Cleaning member, 17, 6
7: Rinsing member, 18, 68: Edge washing member,
19: Chuck member, 28a, 28b, 38, 3
9, 65: Washing tool, 34a, 34b: Nozzle.

Claims (1)

[Claims] 1 A rotary table that rotates by a predetermined angle,
The rotary table has a partition wall that partitions the rotary table into a plurality of work compartments, and a chuck member that is installed in each of the work compartments and that checks the outer or inner peripheral edge of the disk member, Of these, one work section is used for carrying in the disk members.
In addition to the attachment/detachment section for carrying out, cleaning members are installed at positions corresponding to at least some of the work compartments to perform predetermined cleaning operations on the disk members transferred to each of the positions. Characteristic disk member cleaning device.