JPH0357963U - - Google Patents
Info
- Publication number
- JPH0357963U JPH0357963U JP11818789U JP11818789U JPH0357963U JP H0357963 U JPH0357963 U JP H0357963U JP 11818789 U JP11818789 U JP 11818789U JP 11818789 U JP11818789 U JP 11818789U JP H0357963 U JPH0357963 U JP H0357963U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- growth
- raw material
- jig
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 1
- 238000007670 refining Methods 0.000 claims 1
Landscapes
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
第１図は本考案の液相エピタキシヤル成長治具
の一実施例を示す断面図である。
１：原料溶液ホルダー、２Ａ，２Ｂ，２Ｃ，２
Ｄ：原料溶液、３：基板、４：基板ホルダー、５
：成長溶液ホルダー、６Ａ，６Ｂ，６Ｃ，６Ｄ：
溶液溜、７Ａ，７Ｂ，７Ｃ，７Ｄ：間隙部。
FIG. 1 is a sectional view showing an embodiment of the liquid phase epitaxial growth jig of the present invention. 1: Raw material solution holder, 2A, 2B, 2C, 2
D: Raw material solution, 3: Substrate, 4: Substrate holder, 5
: Growth solution holder, 6A, 6B, 6C, 6D:
Solution reservoir, 7A, 7B, 7C, 7D: gap.
Claims (1)
液ホルダーと、基板を保持してスライドする基板
ホルダーと、前記原料溶液を精製して得られる成
長溶液を収納する成長溶液ホルダーとを備え、前
記基板をスライドさせその表面に前記成長溶液を
順次接触させて多層エピタキシヤル層を成長させ
る液相エピタキシヤル成長治具において、前記成
長溶液ホルダーの下面と前記基板ホルダー上面と
の間に前記基板ホルダーの移動方向に順次高くな
る間隙部が設けてあることを特徴とする液相エピ
タキシヤル成長治具。 A raw material solution holder that stores a plurality of raw material solutions having different compositions, a substrate holder that holds and slides a substrate, and a growth solution holder that stores a growth solution obtained by refining the raw material solution, In a liquid phase epitaxial growth jig in which a multilayer epitaxial layer is grown by sliding the growth solution onto the surface of the jig in order, the substrate holder is moved in the direction of movement between the bottom surface of the growth solution holder and the top surface of the substrate holder. 1. A liquid phase epitaxial growth jig, characterized in that a gap portion is provided that gradually increases in height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818789U JPH0357963U (en) | 1989-10-06 | 1989-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11818789U JPH0357963U (en) | 1989-10-06 | 1989-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357963U true JPH0357963U (en) | 1991-06-05 |
Family
ID=31666372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11818789U Pending JPH0357963U (en) | 1989-10-06 | 1989-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357963U (en) |
-
1989
- 1989-10-06 JP JP11818789U patent/JPH0357963U/ja active Pending
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