JPH0359362U - - Google Patents

Info

Publication number
JPH0359362U
JPH0359362U JP11892189U JP11892189U JPH0359362U JP H0359362 U JPH0359362 U JP H0359362U JP 11892189 U JP11892189 U JP 11892189U JP 11892189 U JP11892189 U JP 11892189U JP H0359362 U JPH0359362 U JP H0359362U
Authority
JP
Japan
Prior art keywords
side chamber
opening
input side
valve
output side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11892189U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11892189U priority Critical patent/JPH0359362U/ja
Publication of JPH0359362U publication Critical patent/JPH0359362U/ja
Pending legal-status Critical Current

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  • Safety Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本実施例に係る弁装置を示す構成図、
第２図は本実施例に係るスプリングの一例を示す
平面図、第３図は本実施例に係る弁装置の動作を
示す経過図、第４図は本実施例に係るリーク流量
の変化を示す特性図、第５図は本実施例の他の例
を示す構成図、第６図は従来例によるリーク方法
を示す構成図、第７図は従来例に係るリーク流量
の変化を示す特性図である。 Ａは弁装置、Ｂは真空装置、１は仕切壁、２ａ
は入力側室、２ｂは出力側室、３は導入口、４は
導出口、５は開口部、６は第１の弁、７は貫通孔
、８はスプリング、１１は挿通孔、１２は第２の
弁、１３はベローズである。

Claims (1)

  1. 【実用新案登録請求の範囲】 入力側室と出力側室間に両者を連通する開口部
    を有し、 上記開口部よりもその径が小さく、初期状態が
    閉となされた貫通孔を要し、かつ上記入力側室と
    上記出力側室の圧力差が所定圧力に達したとき、
    上記開口部に対して開とされる弁が上記入力側室
    内に配されてなる弁装置。
JP11892189U 1989-10-11 1989-10-11 Pending JPH0359362U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11892189U JPH0359362U (ja) 1989-10-11 1989-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11892189U JPH0359362U (ja) 1989-10-11 1989-10-11

Publications (1)

Publication Number Publication Date
JPH0359362U true JPH0359362U (ja) 1991-06-11

Family

ID=31667062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11892189U Pending JPH0359362U (ja) 1989-10-11 1989-10-11

Country Status (1)

Country Link
JP (1) JPH0359362U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001036851A1 (en) * 1999-11-18 2001-05-25 Asahi Organic Chemicals Industry Co., Ltd. Constant pressure regulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001036851A1 (en) * 1999-11-18 2001-05-25 Asahi Organic Chemicals Industry Co., Ltd. Constant pressure regulator

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