JPH0359636U - - Google Patents
Info
- Publication number
- JPH0359636U JPH0359636U JP12012789U JP12012789U JPH0359636U JP H0359636 U JPH0359636 U JP H0359636U JP 12012789 U JP12012789 U JP 12012789U JP 12012789 U JP12012789 U JP 12012789U JP H0359636 U JPH0359636 U JP H0359636U
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- liquid level
- processing device
- wet processing
- chemical bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図はこの考案の一実施例による構成を示す
図。第２図は従来の構成を示す図。 図において、１……薬液槽、２……薬液、６…
…超音波センサー部、７……電気配線、８……ア
ンプユニツトを示す。なお、図中、同一符号は同
一、または相当部分を示す。
図。第２図は従来の構成を示す図。 図において、１……薬液槽、２……薬液、６…
…超音波センサー部、７……電気配線、８……ア
ンプユニツトを示す。なお、図中、同一符号は同
一、または相当部分を示す。
Claims (1)
- 各種化学薬液の入つている薬液槽中にウエハを
浸して処理を行なう湿式処理装置の薬液槽におい
て、薬液の液面を非接触にて、検出可能としたこ
とを特徴とする湿式処理装置液面センサー。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12012789U JPH0359636U (ja) | 1989-10-14 | 1989-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12012789U JPH0359636U (ja) | 1989-10-14 | 1989-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359636U true JPH0359636U (ja) | 1991-06-12 |
Family
ID=31668217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12012789U Pending JPH0359636U (ja) | 1989-10-14 | 1989-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359636U (ja) |
-
1989
- 1989-10-14 JP JP12012789U patent/JPH0359636U/ja active Pending
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