JPH035981A - Floating head slider supporting mechanism - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a floating head slider support mechanism for a magnetic disk device.

[Prior Art] A floating head slider for a magnetic disk device utilizes the dynamic pressure bearing effect caused by the airflow accompanying the rotation of the magnetic disk to form a minute air film between the slider and the magnetic disk, thereby moving the surface of the magnetic disk. emerge from. To ensure that the floating head slider has sufficient tracking characteristics for the magnetic disk,
In order to improve the reliability of the slider flotation mechanism, the floating head slider support mechanism must have sufficiently low support rigidity (so-called gimbaling) that does not impede the movement of the slider and the required load (pressing load) on the floating head slider. ,
The ability to apply pressing force, load force, or simply load is required. On the other hand, magnetic disk devices are required to have a high-speed data access function, that is, a high-speed read and write function for predetermined data. Furthermore, when the magnetic disk and the slider come into contact with each other while the slider is stopped, water is generated due to capillary aggregation in the tiny space between the slider and the magnetic disk, causing the slider and the magnetic disk to stick together, a so-called adsorption accident (@L sticking accident). Accidents such as the slider rotating with the magnetic disk and being damaged when the magnetic disk is rotated due to adsorption with the magnetic disk, or the magnetic disk not rotating are likely to occur.To prevent this, There is a need for a floating head support mechanism that prevents the magnetic disk and slider from coming into contact even when they are stopped.

Conventionally, as a support mechanism for a floating head slider, the slider is attached via a gimbal spring to the tip of a load arm whose base is supported, and a load is applied to the slider from the load arm endowed with elastic force. Although this is generally used, there is a problem in that the slider's tracking characteristics to the magnetic disk surface deteriorate due to the influence of the inertia and natural frequency of the load arm.

A known example of a floating head slider support mechanism that avoids such problems and meets the above-mentioned requirements is disclosed in Japanese Patent Laid-Open No. 6
There is one disclosed in Japanese Patent No. 2-99967. In this known technique, a slider is attached to a flexible viscoelastic membrane bonded to a support, and the air pressure in the space inside the support on the back side of the viscoelastic membrane is increased or decreased to meet the required load. It is designed to give the slider displacement for loading and unloading.

[Problems to be Solved by the Invention] The above viscoelastic membrane type slider support mechanism has the following problems.

(1) Since the point of application of the acceleration force applied to the slider during data access does not match the center of gravity of the slider, the acceleration force generates a moment (rotational force) on the slider, causing the slider to swing and vibrate. This may impede the reading of data written on the magnetic disk at a predetermined radial position, and may significantly reduce the reliability of the device. That is, when a high acceleration force is applied for high-speed data access, there is a problem in that slider vibration is likely to occur due to the mismatch between the center of gravity and the point of application of the acceleration force.

(2) There is a problem of changes in tension and deterioration due to changes in the viscoelastic membrane over time, and the resulting dust generation from the viscoelastic membrane. That is, the viscoelastic membrane deteriorates over time, and dust may be generated from the viscoelastic membrane as the viscoelastic membrane expands and contracts due to the pressure difference between the slider mounting surface and the space on the opposite side. When dust adheres to the slider, the minute gap between the slider and the magnetic disk decreases, causing the slider and the magnetic disk to come into contact and potentially damaging the data written on the surface of the magnetic disk.

(3) Since the structure is such that the surface of the viscoelastic membrane opposite to the slider mounting surface is pressurized with air to apply a load force to the slider,
The viscoelastic membrane must be bonded to the support in an air-tight manner. Generally, a magnetic disk device has 5 to 1
Since it is required to operate without maintenance for 0 years, it is necessary to ensure that there is no air leakage from the joint surface between the viscoelastic membrane and the support for a maximum of 10 years, but such a joint is difficult to manufacture. This is difficult, and requires inspection for air leaks, which is bad for productivity.

(4) When a load force is generated on the slider, the viscoelastic film is also pressurized from the support in the direction of the magnetic disk surface, and the viscoelastic film narrows the flow path between disks, so multiple sliders can be connected to the same magnetic disk. When installed on a surface, the flow path between the magnetic disks gets pinched, and the airflow turbulence caused by the rotation of the magnetic disk increases the fluff of the magnetic disk, worsening the slider's ability to follow the magnetic disk surface and making it difficult to read data. Signal quality may deteriorate.

(5) The viscoelastic film itself is vibrated by the wind that accompanies the rotation of the disk, which may impair the positioning accuracy of the slider.

The present invention solves the above-mentioned problems, does not cause vibration or dust generation of the slider during high-speed access, is easy to manufacture, has little air flow turbulence due to magnetic disk rotation, and is easy to use when loading and unloading operations. An object of the present invention is to provide a floating head slider support mechanism that can easily apply a pressing load.

[Means for Solving the Problems] A floating head slider support mechanism according to the present invention has the structure described in each claim.

[Function] Since the load arm, which is applied with an elastic force, does not apply a pressing load to the slider, there is no problem of deterioration of followability due to the load arm's natural frequency, and it is not a viscoelastic membrane but a gimbal spring. Because it supports the slider,
It is possible to avoid problems such as deterioration over time, dust generation, and sealability at the joint between the viscoelastic membrane and the support.

By supporting the slider with a gimbal spring on a plane passing through its center of gravity, no moment is generated due to acceleration force during access, and no rocking vibration occurs. By adjusting the pressure in the cavity within the support, a pressure difference is created between the outside and outside of the window, even though there is some air inflow and outflow through the window, thereby causing a loading or unloading operation that moves the slider closer or further away from the magnetic disk. It can be performed. Further, by maintaining the pressure difference at an appropriate value while the magnetic disk is rotating, a necessary pressing force can be applied to the slider.

[Example] Before entering into the description of the example, first, a positive pressure type slider and a negative pressure type slider will be described with reference to FIGS. 19 and 20. The large arrows in these figures indicate the direction of airflow as the magnetic disk rotates. FIG. 19 is a perspective view of a positive pressure slider, and the upper surface side in the figure is the surface facing the magnetic disk. The arrow indicates the direction of movement of the magnetic disk surface. Reference numeral 37 denotes a levitation rail, and when its surface comes close to the rotating magnetic disk surface, positive pressure is generated between the levitation rail 37 and the magnetic disk by the airflow accompanying the rotation of the magnetic disk, and the slider 3 The floating position is such that this positive pressure balances the load force (pressing force) separately applied to the slider 3.

Note that the atrium 39 is a groove, and no pressure is generated here.

On the other hand, FIG. 20 is a perspective view of a negative pressure type slider. In this slider 3, the floating rails 37 on both sides are connected at a bank portion 37° on the air inlet side, and a negative pressure generating pocket 38 is formed by these rails. Although positive pressure is generated between the floating rail 37 and the magnetic disk due to the air flow accompanying the rotation of the magnetic disk, as in the case of a positive pressure slider, negative pressure is generated in the pocket 38. - Once this state is reached, the slider 3 will find a floating position where the positive pressure generated on the rail 37 and the negative pressure generated on the pocket 38 are balanced, without applying any additional pressing force to the slider. You can keep taking it.

Examples of positive pressure sliders are given in Japanese Patent Publication No. 57-569, and examples of negative pressure sliders are given in U.S. Pat. It is described in Kosho 1i3-56625, etc.

Next, a first embodiment of the present invention will be explained in detail using FIGS. 1 to 4. FIG. 1 is a sectional view showing the floating head slider support mechanism of this embodiment. The floating head slider support mechanism of this embodiment is arranged between two magnetic disks 2 fixed to a rotating shaft 1. This floating head slider support mechanism is provided with a plurality of negative pressure type sliders 3 arranged in the radial direction of the magnetic disks for each of the two magnetic disks 2.degree. Each floating head slider 3 is equipped with an electromagnetic transducer 4. Each slider 3 is supported by a gimbal spring 5 (hereinafter referred to as a car gimbal) made of an elastic metal plate that has a sufficiently low support rigidity that does not restrict the movement of the slider. They are connected to each other. The support body 7 is
Two channel-shaped support members 71 with a U-shaped cross section. ．． 72
Its flange parts 711, 721 and 712, 722
By fastening them together, a rectangular cylindrical structure with a hollow interior is formed as a whole. This fastening is performed using bolts 11 or the like. The support body 7 is provided with a pressure adjustment passage 9 for adjusting the pressure of the internal cavity, and a bellows pump, for example, is connected to the other end of the pressure adjustment passage 9 as a pressure adjustment means 10. There is. However, the pressure adjusting means 10 may be a combination of a -M pressure pump and a vacuum pump.

FIG. 2(a) is a view of the support member 71 seen from the magnetic disk surface side (slider air bearing surface side), and FIG. It is a diagram. As shown in the figure, a plurality of windows 6 (four in this embodiment) are provided in the supporting member frame 1 and arranged in the same straight line in the radial direction of the magnetic disk, and the slider 3 is mounted in the window 6 on a gimbal. Supported by 5. The gimbal 5 and the slider 3 are bonded together using an adhesive or the like, and the gimbal 5 is bonded to the support member 71 by spot welding or the like. Flanges 711 and 712 are provided at both ends of the support member 71, and are fastened to the support member 72 with bolts 11.

The support member 72 has the same structure as the support member 71 except for the pressure adjustment channel portion.

The support members 71 and 72 are fastened together to form a support body 7 which has a rectangular tubular closed structure except for the window 6 and is hollow inside. This combined support body 7 can be moved only in the radial direction relative to the magnetic disk by a drive means (not shown).

FIG. 3(a) shows a sectional view of the support and the slider taken along the I-1 section in FIG. 2(a). The slider 3 is held by a gimbal 5, and the gimbal 5 is joined to a support 7. Therefore, when the magnetic disk is stationary, the slider 3 is separated from the magnetic disk 2 as shown in the figure. Furthermore, it is structurally symmetrical with respect to the central plane A-A. As mentioned above, the slider 3 may be any type of slider that is generally called a negative pressure slider that generates negative pressure between it and a moving disk using the principle of a hydrodynamic bearing. Negative pressure sliders such as those disclosed in U.S. Pat. This embodiment shows a negative pressure slider disclosed in Japanese Patent Application Laid-Open No. 57-210479.

FIG. 3(b) shows the I! of FIG. 3(a). -11 cross section is shown. The slider 3 is supported within the window 6 by the gimbal 5 such that the edge 61 of the window 6 is intermediate between the slider air bearing surface 31 and the back surface 32. A gimbal 5 is installed on the same plane as the center of gravity G of the slider 3. Therefore, for the purpose of accessing data, the acceleration force F generated when the support and thus the slider radially BwJ acts via the gimbal on the center of gravity G of the slider. Therefore, in principle, problems such as the slider 3 oscillating and vibrating during data access do not occur. This makes it possible to move the slider accurately and in a short time to the magnetic disk radial position where predetermined data is located, and achieve short-time data access, which is one of the most important issues for magnetic disks. Furthermore, by arranging four sliders 3 in the radial direction and providing them on the support body, the travel distance to access data can be shortened to 174 compared to the case where there is only one slider. Therefore, if the access speed of the slider (the speed at which the slider moves in the radial direction) is the same, the access time can be reduced to 1/4 compared to the case with one slider.

Next, the loading and unloading functions of the slider in this embodiment will be explained.

First, the loading function of the slider will be explained with reference to FIGS. 4(a) and 4(b).

Before the start of loading, the slider 3 is moved by the gimbal 5 connected to the support 7 to a predetermined distance II) Is (several tens or more) so as not to generate negative pressure as a negative pressure type slider between the slider 3 and the rotating magnetic disk 2. (on the order of several hundred microns). In this state, when the air in the internal cavity 200 of the rectangular cylindrical structure constituting the support body 7 is pressurized by the mouth-pump 10 shown in FIG. Although the window 6 flows out as an air flow 211 through the gap 51 with the gimbal 5, there is no pressure between the inner cavity 200 and the outer cavity 300 of the support, that is, between the air bearing surface 31 and the back surface 32 of the slider 3. A difference ΔP occurs. When the area of the back surface of the slider 3 is S, FL=Δp-s (1) A loading force (pressure force) FL acts on the slider 3. Since the gimbal 5 has sufficiently low support rigidity, the force PL deforms the gimbal 5, and the slider 3 approaches the surface of the rotating magnetic disk 2. Since the slider 3 is a negative pressure slider, the rotating magnetic disk 2, a negative pressure is generated between the rotating magnetic disk 2 and the slider 3, and this negative pressure presses the slider 3 against the magnetic disk 2. bawl. - Even if the air pressurization to the inside 200 of the support body 7 is stopped once the load due to this negative pressure is generated! The slider is set and maintained at a flying height h (distance between the slider flying surface and the magnetic disk surface) where the negative pressure (load) L, 1 generated between the slider and the magnetic disk and the positive pressure LP are balanced. . Loading is thus achieved. In this way, the slider is loaded onto the rotating magnetic disk surface, and the slider carries its own load. When this occurs, the slider 3 can be maintained at a predetermined flying height h (generally on the order of submicrons) without pressurizing the inside 200 of the support body 7 with the pump 10. FIG. 4(b) shows the floating state of the slider after loading.

Next, the unloading function will be described using Figures 4 (c) and (d). In FIG. 4(C), when the inside 200 of the support 7 is depressurized by the pump 10 (see FIG. 1), although there is some air inflow 221 from the window 6 into the inside 200 of the support 7, the air bearing surface of the slider A pressure difference ΔP acts between and the back surface due to decompression, and this pressure difference Δ
P generates an unloading cup in a direction that moves the slider away from the magnetic disk surface. The unloading force F is larger than the load Ln due to the negative pressure mentioned above.
The slider is moved away from the magnetic disk by discharging the unloading force Fu that satisfies the following formula 1% (2), and the effect of the hydrodynamic air bearing between the slider air bearing surface and the rotating magnetic disk surface is achieved. It becomes possible to move the slider to a position where neither negative pressure nor positive pressure is generated.

Unloading is thus achieved. FIG. 4(d) shows the positional relationship between the slider and the magnetic disk after unloading.

In order to unload, the pump 10 must generate a pressure difference ΔP that satisfies equation (2). By the way, the negative pressure Ln acting on the slider with respect to the rotational speed N of the magnetic disk is (X:N''・(3)(n>
O) Because of the following relationship, the disk rotation speed N is set lower than that when the magnetic disk device is in operation. If the pressure inside the support body 7 is reduced after reducing the pressure, it is possible to unload with a small pressure difference ΔP from equation (2). As a result, pump 10
can be downsized.

As mentioned above, when the magnetic disk is stationary, the slider is at the unloading position away from the magnetic disk, so water is trapped in the microspace between the stationary magnetic disk and the slider due to capillary condensation. A so-called adsorption accident, in which the slider and magnetic disk are attracted to each other, does not occur. Furthermore, since the slider and the magnetic disk are separated when the magnetic disk is stationary, there is no risk of adsorption accidents caused by the lubricant applied to the surface of the magnetic disk, so it is possible to apply a large amount of lubricant to the surface of the magnetic disk. becomes possible.

Therefore, even if the magnetic disk and the slider come into contact for some reason, the large amount of lubricant protects the magnetic disk and reduces the risk of damage to data written on the magnetic disk.

A second embodiment of the present invention is shown in FIGS. 5(a) to 5(e). This embodiment is the same as the first embodiment except that the structure for attaching the slider to the gimbal 5 is different from the first embodiment. As shown in FIG. 5(a), the slider 3 is divided into a slider back surface member 33 and a slider air bearing surface member 34, and has a structure in which the gimbal 5 is held between the two members. FIG. 5(b) shows a cross section of FIG. 5(a) viewed from the side of the slider. Central member 52 of gimbal 5
is held between the slider back surface member 33 and the slider air bearing surface member 34. Both end members 53 of the gimbal are joined to the support body 7 by spot welding or the like. Figure 5 (C) shows slider 3 and gimbal 5 when attached to gimbal 5.
Figure 5 shows the positional relationship between the
FIG. 5(d) is a side view of FIG. 5(c), and FIG. 5(e) is a view of the state in which the gimbal 5 to which the slider 3 is attached is joined to the support body 7, viewed from the back side of the slider. The gimbal 5 is attached to a surface including the center of gravity G of the slider 3.

This embodiment allows the slider to be easily and securely attached to the gimbal. Furthermore, the height of the slider (
Even when the gimbal is small (thickness), it is possible to easily attach the gimbal to a plane parallel to the air bearing surface of the slider and including the center of gravity G. It goes without saying that this embodiment can also achieve the same effects as the first embodiment.

The third embodiment shown in FIG. 6 is the same as the first embodiment except for the structure of the gimbal and the structure for attaching the slider to the gimbal.

As shown in FIGS. 6(a) and (b), the slider 3
A recess 35 for attaching the gimbal is provided on the side surface of the gimbal 5, and the recess 35 is provided at the tip of the gimbal 5 in the form of four pieces joined to the support 7 (the end not joined to the support 7). Convex portion 5 for entering into 35 and fitting the slider
4 are provided. The gimbal 5 is mounted on a plane parallel to the slider's air bearing surface, which includes the center of gravity G of the slider. FIG. 6(C) is a view of the slider 3, gimbal 5, and support 7 held by the gimbal joined to the support 7, viewed from the back side of the slider. In this embodiment, since the slider can be coupled to the gimbal by fitting, the slider can be easily attached to the gimbal, and productivity can be significantly improved. Furthermore, it goes without saying that the same effects as in the first embodiment can also be obtained. In addition, Fig. 6 (d
), the same effect can be expected even if the slider convex portion 36 is provided and the gimbal 5 is provided with a concave portion 55.

FIGS. 7(a), (b), and (c) are the fourth embodiments of the present invention.
An example is shown below. Figure 7(a) is a front view of the vicinity of the slider mounting surface seen from the air bearing surface side of the slider, Figure 7(b) is an I-I joint plane view of Figure 7(a), and Figure 7(c) is Same < I
! -1r i-plane view is shown. This embodiment differs from the first embodiment only in the shape of the gimbal 5. In this embodiment, a gimbal 5 having the shape shown in the figure, which is widely used for supporting the magnetic head of a floppy disk drive, is used. In this embodiment, the support rigidity of the gimbal can be made considerably lower, so that it is expected that the deterioration of the flying characteristics of the slider due to the gimbal attachment will be reduced more than in the first embodiment. Of course, effects similar to those described in the first embodiment can also be expected. Note that the gimbal may have any shape or structure as long as it does not interfere with pitching, rolling, or out-of-plane vibration of the slider.

The fifth embodiment of the present invention is shown in Figures 8, 9 and 10.
This will be explained using figures. In the first embodiment, the plurality of sliders provided on the support body 7 have the same shape and dimensions. However, because the radial distances of the magnetic disks from the glaze are different, the circumferential speeds of the magnetic disks relative to the respective sliders are different. However, since sliders of the same shape and size have a property that the higher the circumferential speed of the magnetic disk is, the greater the flying height is. There is a problem in that each slider has a different flying height. In contrast, the fifth embodiment is intended to solve this problem, and differs from the first embodiment in the structural features described below. (Other configurations are the same as the first embodiment.) Now, regarding each slider shown in FIG. 1, the slider located on the innermost side of the magnetic disk is represented by the number ■, and The positioned sliders will be represented by numbers ■, ■, and ■, respectively. In this fifth embodiment, each of these sliders
,■.

Assuming that the peripheral speed of the magnetic disk is the same for both ① and ②, as shown in Fig. 8, the slider located on the inner circumferential side has a larger flying height from the magnetic disk surface. The flying characteristics of each slider (in this embodiment, a negative pressure slider) are determined. To this end, as shown in FIGS. 9(a) and 9(b), the width R of the flying height rail (positive pressure generation rail) 37 of the innermost slider (■) must be changed to the width R4 of the flying height rail (positive pressure generating rail) 37 of the outermost slider (■). The width N1 of the negative pressure generating pocket 38 is made wider than that of the outermost slider ■ N4
It is narrower than that. The dimensional relationship of the sliders ① and ② located between these two sliders is made to be different in order so as to fall within the above range. Thereby, the flying characteristics shown in FIG. 8 can be obtained. In addition, the 8th
It is also possible to obtain floating characteristics as shown in the figure.

Now, in the fifth embodiment with the above configuration, when the magnetic disk is rotating at a predetermined number of rotations, 1. Since the actual circumferential speeds of the magnetic disks in each of the sliders ■, ■, ■, ■ differ in proportion to the same radial distance from the axis of the magnetic disk to each slider, at this time, as shown in FIG. Due to the slider floating characteristics, each slider ■.

It is possible to make the actual flying heights of (1), (2), and (2) the same. As a result, the signal reading and writing performance of each slider is uniform, and even if the flying height of the slider decreases due to some disturbance and there is a risk that the magnetic disk and the slider will come into contact, the flying height of each slider will be the same. Therefore, the problem of only a specific slider coming into contact with the magnetic disk and being damaged is eliminated, and the reliability of the entire apparatus can be improved. Note that since the basic configuration is the same as that of the first embodiment, it goes without saying that the same effects as those of the first embodiment can be expected.

A sixth embodiment of the present invention is shown in FIGS. 11 and 12. The difference between this embodiment and the first embodiment is that each slider 3 uses a positive pressure type slider as described in Japanese Patent Publication No. 57-569. A positive pressure slider, unlike a negative pressure slider, is a slider that generates only positive pressure between the slider air bearing surface and the rotating magnetic disk surface using the principle of a hydrodynamic air bearing. In this embodiment, when the magnetic disk is stationary, the slider 3 is supported by a gimbal 5 so as to be in contact with the surface of the magnetic disk. A continuous pressurizing pump 11 that can continuously pressurize is attached to the pressure regulating channel 9 connected to the inside of the support 7 through a filter 400. Explain. When the magnetic disk 2 starts rotating and reaches a predetermined rotational speed, a positive pressure is generated between the slider air bearing surface 31 and the magnetic disk 2, and a force Lp is generated that moves the slider away from the magnetic disk surface. In this state, the continuous pressurization pump 11 is operated to send high-pressure air from the pressure adjustment channel 9 to the internal cavity 200 of the support body 7 via the filter 400. As a result, some of the air flows out from the support 7, but a pressure difference ΔP is generated between the back surface of the slider 3 and the flying surface. When the area of the slider back surface 32 is S and the pressure difference between the slider back surface and the air bearing surface is ΔP, the load F that presses the slider against the magnetic disk surface is expressed by the following equation.

FL=S·ΔP (4) The slider's floating height ff1h is the point (balance point) where LP due to the positive pressure described above and the pressing force F are balanced. Therefore, if the pump 11 continues to apply pressure while the disk 2 is rotating, that is, while the magnetic disk is in operation, the slider can be held against the magnetic disk surface with a predetermined flying height.

Further, since FL can be easily adjusted by adjusting ΔP from equation (4), it is also possible to control the flying height of the slider by adjusting the output of the pressure pump 11. Since the positive pressure type slider shown in Japanese Patent Publication No. 57-569 is easier to process than the negative pressure type slider and is widely used, this embodiment can be manufactured easily at a low cost. There is also an advantage.

In addition, by providing a heating means in a part of the pressure adjustment flow path, warm air is supplied to each slider, and the magnetic disk
Water between the sliders is vaporized to release adsorption and prevent adsorption accidents.

The sixth embodiment is a non-autoloading type in which the slider is in contact with the magnetic disk while it is stopped, and the magnetic disk is started in this contact state.
Therefore, if heating means for supplying hot air as described above is not provided, there is a possibility that water droplets will aggregate between the slider and the magnetic disk while the slider is stopped, causing an adsorption accident. Furthermore, a modification of the sixth embodiment described above is also possible, in which the sixth embodiment is of an autoloading type. That is, the first
Assuming that the structure is the same as that shown in Figures 1 and 12, when the magnetic disk is stationary, the slider must be moved at a predetermined distance from the magnetic disk surface (even if the magnetic disk rotates, the accompanying airflow will not apply positive pressure to the slider). After the magnetic disk starts rotating, pressurized air is sent from the pump 11 into the internal space 200 of the support 7, thereby reducing the pressure generated between the inner and outer surfaces of the slider. Loading is performed by bringing the slider close to the magnetic disk surface to a distance where positive pressure due to the airflow accompanying the rotating magnetic disk acts on the slider, and during subsequent operation, the pump is operated as in the sixth embodiment. It is sufficient to continue feeding the pressurized air from the pump 11. Unloading is performed by stopping the feeding of pressurized air from the pump 11.

A seventh embodiment of the present invention will be described with reference to FIG. 13 and FIG. 14, which is a cross section taken along line I--I.

The same reference numerals as those used in FIG. 1 indicate the same parts or parts with the same function as shown in FIG. The difference between this embodiment and the first embodiment is that in the first embodiment, the support 7 has a combined structure of support members 71 and 72, and the slider is held on both sides of the support 7. On the other hand, in this embodiment, the support body 7 is a channel-shaped support member 7 having a U-shaped cross section.
3 and a flat plate-like cover plate 75 form a rectangular tube shape that is closed except for the window 6, and a slider is held on one side of the tube. As a result, the slider support mechanism of this embodiment can be used even in a magnetic disk device having only one magnetic disk. In FIG. 13, two supports 7 each consisting of a support member 73 and a cover plate 75 are installed on both sides of the magnetic disk 2 with a spacer 76 in between. Each support and spacer is provided with a pressure adjustment channel 9, and a pressure adjustment means 10 is provided at the other end. This makes it possible to access data written on both sides of the disk at high speed even in a magnetic disk device having one disk. The outer end of the support 7 (the right end in the figure) is connected to drive means for moving the entire support radially. Note that although a negative pressure slider is used in this example as in the first embodiment, a positive pressure slider may also be used in accordance with the sixth embodiment.

An eighth embodiment of the present invention is shown in FIGS. 15, 16, and 17. FIG. 15 shows 1. of FIG. 16(b). -I cross section,
FIG. 17 shows II-I! of FIG. 16(a)! It represents a cross section. The same reference numerals used in this embodiment as in the first embodiment indicate the same parts as in the first embodiment or parts with similar functions. The difference between this embodiment and the first or seventh embodiment is that the support body 7 is in the form of a flat plate having no internal cavity, and that no pressure regulating means is provided. The support body 7 is a flat plate, and as shown in FIG. 16, the same number of windows 6 as the number of sliders are provided, and the sliders 3 are mounted in the windows 6 by a gimbal 5 that crosses the center of gravity of the slider 3.

In this embodiment, since the support body 7 does not have a sealed structure and loading cannot be performed by applying back pressure to the slider, the gimbal 5 is attached to the magnetic disk when the slider is stopped.
It is a contact start-stop type that maintains contact with the elastic force of . Although there is a possibility that a slider adsorption phenomenon may occur in this embodiment, since the weight of the entire support mechanism can be reduced, there is an advantage that the driving means for moving the slider support mechanism in the radial direction can be downsized. . Although a negative pressure slider is shown in FIGS. 16 and 17, a positive pressure slider may also be used.

FIG. 18 shows a ninth embodiment of the invention. In this embodiment, a pressure adjustment flow path 9 is formed in the support body 7 by extending to the slider 3 located at the innermost position, and a nozzle 91 is further provided in this flow path toward the back surface of each slider. There is. Therefore, the air pressurized by the pump 10 can be guided directly to the back of each slider, so the pump 1
Even if the pressing force of 0 is small, the same effect as in the first embodiment can be expected. Therefore, there is an advantage that the pump 10 can be made smaller.

If a pump capable of continuously applying pressure as shown in FIG. 11 is used instead of the pump 10, the present invention can also be applied to the case where a positive pressure type slider is used.

Note that in each of the above embodiments, a superelastic alloy can also be used for the gimbal 5. Superelastic alloys are also generally shape memory alloys, e.g. Ni-Ti alloy, Cu-A4-N
i alloy or Cu-5n-A4 alloy. When the deformation of a superelastic alloy is increased from zero, it passes through the elastic region and soon enters the superelastic region, but the difference in the superelastic region is much smaller than (increase in stress)/(increase in deformation) in the elastic region. Moreover, when the stress is returned to zero, the deformation also returns to zero. Using this for the gimbal 5 is more preferable in view of the effects of the present invention.

[Effects of the Invention] (1) Since the slider is supported by a gimbal spring on a plane passing through the center of gravity of the slider, no moment is generated by the acceleration force during access, and no rocking vibration of the slider occurs.

(2) There is no problem of influence due to the specific number of motions of the load arm, which is seen in conventional examples in which the load is applied from the load arm to the slider installed at the tip of the load arm, and the slider flying height fluctuates due to good followability. There are few

(3) The slider can be easily loaded and unloaded by adjusting the pressure inside the support.
Further, it becomes possible to easily apply a necessary pressing load, and the flying height of the slider can be easily controlled by adjusting the pressure.

(4) Since a gimbal spring is used to support the slider, there is almost no deterioration in quality over time and there is no fear of dust generation.

(5) Productivity is good because there is no manufacturing difficulty unlike when using a viscoelastic membrane to support the slider.

(6) Accessibility can be further improved by arranging a plurality of sliders in the radial direction of the magnetic disk.

[Brief explanation of the drawing]

Fig. 1 is a sectional view of the first embodiment of the present invention, Fig. 2(a)
Figure 2(b) is a front view of the magnetic disk as seen from the surface side.
is an internal view as seen from plane I-1 in Fig. 1, Fig. 3(a) is a sectional view taken along line 1-1 in Fig. 2(a), and Fig. 3(b) is
II-II sectional view of a), Figure 4 (a), (b)
, (c) and (d) are functional explanatory diagrams of the same embodiment, and FIGS. 5(a) and (b) are assembly diagrams of the slider gimbal of the second embodiment of the present invention, and FIG. 5(C). (d) and (e) are the front view, side view, and top view, and FIGS. 6(a) and (b) are the sixth embodiment of the third embodiment of the present invention.
II-I sectional view in figure (c), same < II-11
6(C) is a top view thereof, FIG. 6(d) is a sectional view of a modification of the third embodiment, and FIGS. 7(a) and (b).
). (C) is a front view, II-I sectional view, and II-I+ sectional view of the fourth embodiment of the present invention; FIG. 8 is a diagram showing the flying characteristics of the slider in the fifth embodiment of the present invention; Figure 9(a)
, (b) is a shape diagram of the slider used in the fifth embodiment,
FIG. 10 is a diagram showing the operation and effect of the fifth embodiment, FIG. 11 is a sectional view of the sixth embodiment of the present invention, FIG. 12 is a functional explanatory diagram thereof, and FIG. A cross-sectional view of Example 7,
Fig. 14 is a sectional view taken along line I-I, and Fig. 15 is an 8th sectional view of the present invention.
I-I sectional view of FIG. 16(b) of the embodiment, FIG. 16(
a) is its front view, FIG. 16(b) is its back view,
7 is a sectional view taken along line II-11 in FIG. 16(a), FIG. 18 is a sectional view of the ninth embodiment of the present invention, FIG. 19 is a perspective view of a positive pressure slider, and FIG. 20 is a negative pressure slider. FIG. 5...Gimbal 7...Support 10...Pump 6...Window 9...Pressure adjustment channel 400...Filter and 1 other person 1...Axis 2...Magnetic disc 3.
...Slider 4...Electromagnetic converter section (a) (b) (b) (b) (c) (d) (d) (7) (Q) ■ (b) (b) Slider number (Slider ■) (Slider ■) Each weight 0 Figure Slider number 3 Figure 4 Figure 7ζ 5 Figure 1 Figure 2 Figure 5 Figure 7 Figure Old figure Figure 9

Claims (1)

[Claims] 1. It is supported at a predetermined distance from the magnetic disk surface, has a window on the surface facing the magnetic disk surface, and has an airtight cavity inside except for the window. with a highly rigid support;
a gimbal spring with low rigidity disposed within the window and coupled to an edge of the window; a slider supported within the window by the gimbal spring so as to be displaceable in a direction out of the plane of the magnetic disk; A floating head slider support mechanism comprising: pressure adjustment means for adjusting the pressure in a cavity within the body; 2. The floating head slider support mechanism according to claim 1, wherein the joint between the slider and the gimbal spring is on a plane passing through the center of gravity of the slider and parallel to the air bearing surface of the slider. 3. A plurality of windows arranged in the radial direction of the magnetic disk are provided on the surface of the support body facing the magnetic disk, and the gimbal spring and the slider supported by the gimbal spring are installed in each of these windows. 3. A floating head slider support mechanism according to claim 1, further comprising a floating head slider support mechanism. 4. The support body is supported between two coaxially attached magnetic disks while maintaining a predetermined distance from each magnetic disk surface, and has the window on the surface facing each magnetic disk, and Claim 1, wherein each window includes the gimbal spring and the slider supported by the gimbal spring.
, 2 or 3. The floating head slider support mechanism according to . 5. The slider is a negative pressure type slider, and loading and unloading operations on the magnetic disk surface of the slider are performed by a pressure difference generated between the inside and outside of the window by adjusting the pressure in the cavity by the pressure adjustment means. The floating head slider support mechanism according to claim 1, 2, 3 or 4. 6. The slider is a positive pressure type slider, and the loading and unloading operations on the magnetic disk surface of the slider are performed by a pressure difference generated between the inside and outside of the window by adjusting the pressure in the cavity by the pressure adjustment means. Claims 1 and 2, wherein a necessary pressing load is applied to the slider during operation of the magnetic disk.
5. The floating head slider support mechanism according to 3 or 4. 7. The slider is a positive pressure type slider, and the slider is supported so as to be in contact with the magnetic disk while the magnetic disk is stopped, and the pressure in the cavity is adjusted by the pressure adjustment means, so that the window is adjusted. Claims 1 and 2, wherein a necessary pressing load is applied to the slider during operation of the magnetic disk by a pressure difference created between the inside and outside.
The floating head slider support mechanism according to , 3 or 4. 8. The floating head slider support mechanism according to claim 7, further comprising means for heating the gas sent from the pressure adjusting means to the cavity in the support body, provided in the middle of a gas path connecting the pressure adjusting means and the cavity. 9. The floating head slider support mechanism according to claim 1, 2, 3, or 4, wherein the airtight cavity in the support body and the pressure adjustment means are not provided, and the slider is not provided with the elasticity of the gimbal spring while the magnetic disk is stopped. A floating head slider support mechanism that is maintained in contact with a magnetic disk surface by force. 10. Even though the circumferential speed of the magnetic disk for each of the sliders arranged in the radial direction of the magnetic disk differs depending on its radial position, the flying height of each slider from the surface of the rotating magnetic disk is equal. Claim 3 characterized in that the flying characteristics of each slider are determined respectively.
10. The floating head slider support mechanism according to any one of claims 1 to 9. 11. The above-mentioned flying characteristics are imparted to each slider by narrowing the width of the positive pressure generating rail of the slider or increasing the size of the negative pressure generating pocket as the slider is closer to the outer circumferential side of the magnetic disk. The floating head slider support mechanism according to claim 10. 12. Claims 1 to 1, characterized in that the slider consists of two members divided along a plane passing through the center of gravity, and these two members are joined together so as to sandwich a gimbal spring.
1. The floating head slider support mechanism according to claim 1. 13. The floating head slider support mechanism according to claim 1, wherein the gimbal spring is coupled to a side surface of the slider by a male-female fitting between a protrusion and a recess. 14. The floating head slider support mechanism according to claim 1, wherein the gimbal spring is made of a superelastic material.