JPH036000U - - Google Patents
Info
- Publication number
- JPH036000U JPH036000U JP6463189U JP6463189U JPH036000U JP H036000 U JPH036000 U JP H036000U JP 6463189 U JP6463189 U JP 6463189U JP 6463189 U JP6463189 U JP 6463189U JP H036000 U JPH036000 U JP H036000U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- cover part
- diffusion pump
- prediction system
- warns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の一実施例の構成概略図、第２
図は本考案による拡散ポンプ温度推移グラフ、第
３図は本考案による拡散ポンプ立ち上げ温度グラ
フである。
１……ヒーター、２……予知システム、２ａ…
…温度モニター部、２ｂ……警報部、３……オイ
ル、４……冷却水配管。
Figure 1 is a schematic diagram of the configuration of an embodiment of the present invention;
The figure is a diffusion pump temperature transition graph according to the present invention, and FIG. 3 is a diffusion pump startup temperature graph according to the present invention. 1...Heater, 2...Prediction system, 2a...
...Temperature monitor section, 2b...Alarm section, 3...Oil, 4...Cooling water piping.
Claims (1)
る温度モニターと前記カバー部の異常温度を警告
する警報部とからなる予知システムを備えたこと
を特徴とする拡散ポンプ。 A diffusion pump characterized by being equipped with a prediction system consisting of a temperature monitor that detects the temperature of a cover part of an oil heater and an alarm part that warns of abnormal temperature of the cover part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6463189U JPH036000U (en) | 1989-06-01 | 1989-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6463189U JPH036000U (en) | 1989-06-01 | 1989-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH036000U true JPH036000U (en) | 1991-01-21 |
Family
ID=31595746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6463189U Pending JPH036000U (en) | 1989-06-01 | 1989-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036000U (en) |
-
1989
- 1989-06-01 JP JP6463189U patent/JPH036000U/ja active Pending