JPH0360010U - - Google Patents
Info
- Publication number
- JPH0360010U JPH0360010U JP12053489U JP12053489U JPH0360010U JP H0360010 U JPH0360010 U JP H0360010U JP 12053489 U JP12053489 U JP 12053489U JP 12053489 U JP12053489 U JP 12053489U JP H0360010 U JPH0360010 U JP H0360010U
- Authority
- JP
- Japan
- Prior art keywords
- air
- slide base
- slider
- jet ports
- slide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 description 2
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
第１図は、本考案の第１の実施例に係るエアベ
アリングスライド機構の組立斜視図、第２図は第
１図のＢ−Ｂ断面図、第３図は本考案の第２の実
施例のエアスライダーの部分断面図、第４図は従
来のエアベアリングスライド機構の組立斜視図、
第５図は第４図のＡ−Ａ断面図、第６図は測定デ
ータ例図である。
１……スライダー、２……スライドベース、３
……エアホース、４……センサ固定治具、５……
エア噴出口、６……エアベアリング給気口、６ａ
……エア供給孔、６ｂ……通気孔、７……エア噴
出用治具、８……センサ、９……測定対象物。
FIG. 1 is an assembled perspective view of an air bearing slide mechanism according to a first embodiment of the present invention, FIG. 2 is a sectional view taken along line BB in FIG. 1, and FIG. 3 is a second embodiment of the present invention. Figure 4 is a partial cross-sectional view of the air slider shown in Figure 4, and Figure 4 is an assembled perspective view of the conventional air bearing slide mechanism.
FIG. 5 is a sectional view taken along the line AA in FIG. 4, and FIG. 6 is an example of measurement data. 1...Slider, 2...Slide base, 3
...Air hose, 4...Sensor fixing jig, 5...
Air outlet, 6... Air bearing air supply port, 6a
...Air supply hole, 6b...Vent hole, 7...Air jetting jig, 8...Sensor, 9...Measurement object.
Claims (1)
より該スライドベース上を摺動するスライダーに
取付けられたセンサにより測定対象物の表面状態
を測定するエアベアリングスライド機構において
、前記スライダー自身のスライドベース軸方向両
端面にエア噴出口を設け、該エア噴出口よりスラ
イドベース表面にエアを噴出できるよう構成した
ことを特徴とするエアベアリングスライド機構。 In an air bearing slide mechanism that measures the surface condition of an object to be measured using a sensor attached to a slider that is mounted on a slide base and slides on the slide base using supplied air, the axial direction of the slide base of the slider itself is An air bearing slide mechanism characterized in that air jet ports are provided on both end faces, and air is jetted from the air jet ports onto the surface of the slide base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12053489U JPH0360010U (en) | 1989-10-17 | 1989-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12053489U JPH0360010U (en) | 1989-10-17 | 1989-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0360010U true JPH0360010U (en) | 1991-06-13 |
Family
ID=31668607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12053489U Pending JPH0360010U (en) | 1989-10-17 | 1989-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0360010U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000019261A1 (en) * | 1998-09-25 | 2000-04-06 | Nikon Corporation | Image formation position adjusting device, exposure system, image formation adjusting method and exposure method |
-
1989
- 1989-10-17 JP JP12053489U patent/JPH0360010U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000019261A1 (en) * | 1998-09-25 | 2000-04-06 | Nikon Corporation | Image formation position adjusting device, exposure system, image formation adjusting method and exposure method |
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