JPH0360666U - - Google Patents
Info
- Publication number
- JPH0360666U JPH0360666U JP12121189U JP12121189U JPH0360666U JP H0360666 U JPH0360666 U JP H0360666U JP 12121189 U JP12121189 U JP 12121189U JP 12121189 U JP12121189 U JP 12121189U JP H0360666 U JPH0360666 U JP H0360666U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- passage
- pressure chamber
- opening
- opening pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
- Safety Valves (AREA)
Description
第１図、第２図はそれぞれ本考案による緩作動
開閉弁の異なる実施例を示す縦断面図、第３図は
クリーンルーム内で組み立てられるクリーンバル
ブ部分の断面図である。
１１……バルブボデイ、１２……流体通路、１
３……環状弁座、１４……バルブロツド、１５…
…弁体、１６……スペーサ、１７……コネクタス
リーブ、１８……蛇腹、２０……圧縮ばね、２２
ａ……押え板、２２ｂ……シリンダ、２４……ロ
ーリングダイアフラム、２４ａ……周縁ビード部
、２５……メインブロツク、２６……リテーナ、
２９……ボンネツト、３０……ロツクリング、３
３……開弁圧力室、３４……抵抗圧力室、３６…
…パイロツト圧通路、３７……ニードル弁（流量
制御弁）、３８……ニードル、３９……ニードル
駆動ナツト４２……一方向弁通路、４３……圧縮
ばね、４４……一方向弁、４５……ソレノイド、
４８……アンブレラ（一方向弁）、４９……通気
孔、５０……切換弁、５３……急速開弁通路、５
４……開閉弁。
FIGS. 1 and 2 are longitudinal cross-sectional views showing different embodiments of the slow-acting on-off valve according to the present invention, and FIG. 3 is a cross-sectional view of the clean valve part assembled in a clean room. 11... Valve body, 12... Fluid passage, 1
3... Annular valve seat, 14... Valve rod, 15...
... Valve body, 16 ... Spacer, 17 ... Connector sleeve, 18 ... Bellows, 20 ... Compression spring, 22
a... Holding plate, 22b... Cylinder, 24... Rolling diaphragm, 24a... Peripheral bead portion, 25... Main block, 26... Retainer,
29...bonnet, 30...rock ring, 3
3... Valve opening pressure chamber, 34... Resistance pressure chamber, 36...
... Pilot pressure passage, 37 ... Needle valve (flow rate control valve), 38 ... Needle, 39 ... Needle drive nut 42 ... One-way valve passage, 43 ... Compression spring, 44 ... One-way valve, 45 ... …solenoid,
48... Umbrella (one-way valve), 49... Vent hole, 50... Switching valve, 53... Rapid valve opening passage, 5
4...Opening/closing valve.
Claims (1)
を有するバルブロツド；このバルブロツドを接続
したダイアフラム；このダイアフラムを挟んでそ
れぞれ画成された、該ダイアフラムに開弁圧力を
及ぼす開弁圧力室と、この開弁圧力室と反対側の
抵抗圧力室；この開弁圧力室に連通するパイロツ
ト圧通路；このパイロツト圧通路に設けた流量制
御弁；および上記抵抗圧力室に設けられた、該抵
抗圧力室から室外への空気流を阻止し、その逆の
空気流を許す一方向弁を備えたことを特徴とする
緩作動開閉弁。 (2) 請求項１において、開弁圧力室には、パイ
ロツト圧通路以外の急速開弁通路が設けられてお
り、この急速開弁通路が開閉弁を介して圧力源に
接続されている緩作動開閉弁。 (3) 請求項１または２において、開弁圧力室と
パイロツト圧通路との間は、パイロツト圧通路以
外の一方向弁通路で連通し、この一方向弁通路に
、パイロツト圧通路から開弁圧力室への空気流を
阻止し、その逆の空気流を許す一方向弁が設けら
れている緩作動開閉弁。 (4) 請求項３において、一方向弁には、通電時
に、該一方向弁を前開状態にするソレノイドが付
設されている緩作動開閉弁。[Claims for Utility Model Registration] (1) A valve rod having a valve body that opens and closes a flow path by coming into contact with and away from a valve seat; A diaphragm connecting this valve rod; The diaphragms each defined by sandwiching this diaphragm. a valve-opening pressure chamber that applies a valve-opening pressure to the valve-opening pressure chamber; a resistance pressure chamber on the opposite side of the valve-opening pressure chamber; a pilot pressure passage communicating with the valve-opening pressure chamber; a flow control valve provided in the pilot pressure passage; and the above-mentioned. 1. A slow-acting on-off valve characterized by comprising a one-way valve provided in a resistance pressure chamber that blocks airflow from the resistance pressure chamber to the outside and allows airflow in the opposite direction. (2) In claim 1, the valve-opening pressure chamber is provided with a quick-opening passage other than the pilot pressure passage, and the quick-opening passage is connected to a pressure source via an on-off valve. Open/close valve. (3) In claim 1 or 2, the valve-opening pressure chamber and the pilot pressure passage communicate with each other through a one-way valve passage other than the pilot pressure passage, and the one-way valve passage receives the valve-opening pressure from the pilot pressure passage. Slow-acting on-off valve provided with a one-way valve that prevents airflow into the chamber and allows airflow in the opposite direction. (4) The slow-acting on-off valve according to claim 3, wherein the one-way valve is provided with a solenoid that opens the one-way valve forward when energized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989121211U JP2547135Y2 (en) | 1989-10-17 | 1989-10-17 | Slow-acting on-off valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989121211U JP2547135Y2 (en) | 1989-10-17 | 1989-10-17 | Slow-acting on-off valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360666U true JPH0360666U (en) | 1991-06-14 |
| JP2547135Y2 JP2547135Y2 (en) | 1997-09-10 |
Family
ID=31669248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989121211U Expired - Lifetime JP2547135Y2 (en) | 1989-10-17 | 1989-10-17 | Slow-acting on-off valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2547135Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011036932A1 (en) * | 2009-09-24 | 2011-03-31 | 藤倉ゴム工業株式会社 | Slow operation open/close valve |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54135728U (en) * | 1978-03-15 | 1979-09-20 | ||
| JPS55112819A (en) * | 1978-12-26 | 1980-09-01 | Acf Ind Inc | Improved bypass valve |
| JPS57160472U (en) * | 1981-04-01 | 1982-10-08 |
-
1989
- 1989-10-17 JP JP1989121211U patent/JP2547135Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54135728U (en) * | 1978-03-15 | 1979-09-20 | ||
| JPS55112819A (en) * | 1978-12-26 | 1980-09-01 | Acf Ind Inc | Improved bypass valve |
| JPS57160472U (en) * | 1981-04-01 | 1982-10-08 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011036932A1 (en) * | 2009-09-24 | 2011-03-31 | 藤倉ゴム工業株式会社 | Slow operation open/close valve |
| US8800958B2 (en) | 2009-09-24 | 2014-08-12 | Fujikura Rubber Ltd. | Slow-acting on/off valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2547135Y2 (en) | 1997-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |