JPH0361189U - - Google Patents
Info
- Publication number
- JPH0361189U JPH0361189U JP12233789U JP12233789U JPH0361189U JP H0361189 U JPH0361189 U JP H0361189U JP 12233789 U JP12233789 U JP 12233789U JP 12233789 U JP12233789 U JP 12233789U JP H0361189 U JPH0361189 U JP H0361189U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- discharge port
- flexible hose
- pipe
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 238000011084 recovery Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Description
第１図は側面図、第２図は分割ケーシング２０
ａ，２０ｂ等の斜視図、第３図は分割ケーシング
の切断正面図、第４図は使用態様を示した平断面
図である。
，，…第１段〜第３段室、１…多段型ル
ーツ式真空ポンプ、２…吸込口、３…吐出口、４
…吸込口管、５，６…分岐管、７…吐出口管、８
，９…分岐管、１０，１１…襞付フレキシブルホ
ース、′〜′，″〜″…室構成片、ａ
−１，ａ−１，ａ−２，ａ−２…隔壁、２
０ａ，２０ｂ…分割ケーシング、２４，２４′…
軸。
Figure 1 is a side view, Figure 2 is a split casing 20
FIG. 3 is a cutaway front view of the divided casing, and FIG. 4 is a plan sectional view showing how it is used. ,,... 1st stage to 3rd stage chamber, 1... Multi-stage Roots type vacuum pump, 2... Suction port, 3... Discharge port, 4
... Suction port pipe, 5, 6... Branch pipe, 7... Discharge port pipe, 8
, 9...Branch pipe, 10, 11...Flexible hose with pleats, '~',''~''...Chamber component, a
-1 , a -1 , a -2 , a -2 ... partition wall, 2
0a, 20b...divided casing, 24, 24'...
shaft.
Claims (1)
吸込口及び吐出口を各別に設けた分割ケーシング
とハウジングにより多段に構成し、各前段の室の
吐出口に連結した吐出口管末端の分岐管に夫々襞
付フレキシブルホースを連結し、その各フレキシ
ブルホースを次段の室の吸込口に連結した吸込口
管入口の分岐管に接続してなり、前記のフレキシ
ブルホースにより空冷した前段の室の吐出ガスを
次段の室に送り込むことを特徴とする主としてフ
ロンガス回収に使用する多段型ルーツ式真空ポン
プ。 The first to nth chambers can be divided into upper and lower parts, and each chamber has a separate suction port and discharge port. It is constructed in multiple stages using a divided casing and housing, and the discharge port pipe is connected to the discharge port of each preceding chamber. A pleated flexible hose is connected to each branch pipe at the end, and each flexible hose is connected to a branch pipe at the inlet of the suction pipe connected to the suction port of the next stage chamber, and the front stage is air-cooled by the flexible hose. A multi-stage Roots-type vacuum pump mainly used for fluorocarbon gas recovery, which is characterized by sending discharged gas from one chamber to the next chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12233789U JPH0361189U (en) | 1989-10-19 | 1989-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12233789U JPH0361189U (en) | 1989-10-19 | 1989-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0361189U true JPH0361189U (en) | 1991-06-14 |
Family
ID=31670340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12233789U Pending JPH0361189U (en) | 1989-10-19 | 1989-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0361189U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004507641A (en) * | 2000-08-21 | 2004-03-11 | アルカテル | Pressure seal for vacuum pump |
| JP2010059872A (en) * | 2008-09-04 | 2010-03-18 | Shinmaywa Industries Ltd | Multistage root type fluid machine |
-
1989
- 1989-10-19 JP JP12233789U patent/JPH0361189U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004507641A (en) * | 2000-08-21 | 2004-03-11 | アルカテル | Pressure seal for vacuum pump |
| JP2010059872A (en) * | 2008-09-04 | 2010-03-18 | Shinmaywa Industries Ltd | Multistage root type fluid machine |
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