JPH0361330U - - Google Patents

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Publication number
JPH0361330U
JPH0361330U JP12198789U JP12198789U JPH0361330U JP H0361330 U JPH0361330 U JP H0361330U JP 12198789 U JP12198789 U JP 12198789U JP 12198789 U JP12198789 U JP 12198789U JP H0361330 U JPH0361330 U JP H0361330U
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
transmission means
treatment apparatus
discharging nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12198789U
Other languages
Japanese (ja)
Other versions
JPH0810184Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989121987U priority Critical patent/JPH0810184Y2/en
Publication of JPH0361330U publication Critical patent/JPH0361330U/ja
Application granted granted Critical
Publication of JPH0810184Y2 publication Critical patent/JPH0810184Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る表面処理装置の概要を示
す斜視図、第２図はその要部縦断正面図、第３図
は伝動手段の変形例を示す概要図、第４図〜第６
図は、それぞれ別の実施例を示す要部縦断正面図
、第７図は従来例を示す縦断正面図である。 ２……表面処理室、４……処理剤吐出ノズル、
５……搬送ローラ、１０……伝動手段、１５……
カバー、１７……液溜、Ｈ……処理剤、Ｓ……潤
滑液、Ｗ……基板。 FIG. 1 is a perspective view showing an overview of the surface treatment apparatus according to the present invention, FIG. 2 is a longitudinal sectional front view of the main part thereof, FIG. 3 is a schematic diagram showing a modified example of the transmission means, and FIGS. 4 to 6
The figures are longitudinal sectional front views of main parts showing different embodiments, and FIG. 7 is a longitudinal sectional front view showing a conventional example. 2...Surface treatment chamber, 4...Treatment agent discharge nozzle,
5... Conveyance roller, 10... Transmission means, 15...
Cover, 17...liquid reservoir, H...processing agent, S...lubricating liquid, W...substrate.

Claims (1)

【実用新案登録請求の範囲】 表面処理室内に処理剤吐出ノズルを配置し、処
理剤吐出ノズルに対向させて基板を搬送する複数
の搬送ローラを連設し、各搬送ローラの一側部に
伝動手段を係合させて搬送ローラを連動回転可能
に構成し、伝動手段をカバーで覆い、伝動手段に
水又は溶媒を潤滑液として供給するように構成し
た基板の表面処理装置において、 伝動手段の下側に潤滑液を所定水位で貯溜する
液溜を設け、伝動手段の少なくとも一部を潤滑液
中に浸漬するように構成したことを特徴とする基
板の表面処理装置。[Claims for Utility Model Registration] A processing agent discharging nozzle is arranged in a surface treatment chamber, and a plurality of conveyance rollers for conveying the substrate are arranged in series to face the treatment agent discharging nozzle, and a transmission is applied to one side of each conveyance roller. In a surface treatment apparatus for a substrate, the conveying rollers are configured to be able to rotate in conjunction with each other by engaging means, the transmission means is covered with a cover, and water or a solvent is supplied to the transmission means as a lubricant. 1. A surface treatment apparatus for a substrate, characterized in that a liquid reservoir for storing lubricating liquid at a predetermined water level is provided on the side thereof, and at least a part of the transmission means is immersed in the lubricating liquid.
JP1989121987U 1989-10-17 1989-10-17 Substrate surface treatment equipment Expired - Lifetime JPH0810184Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989121987U JPH0810184Y2 (en) 1989-10-17 1989-10-17 Substrate surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989121987U JPH0810184Y2 (en) 1989-10-17 1989-10-17 Substrate surface treatment equipment

Publications (2)

Publication Number Publication Date
JPH0361330U true JPH0361330U (en) 1991-06-17
JPH0810184Y2 JPH0810184Y2 (en) 1996-03-27

Family

ID=31670008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989121987U Expired - Lifetime JPH0810184Y2 (en) 1989-10-17 1989-10-17 Substrate surface treatment equipment

Country Status (1)

Country Link
JP (1) JPH0810184Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457871B1 (en) * 2013-05-13 2014-11-06 한국성전(주) die for cutting tape

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844850U (en) * 1981-09-21 1983-03-25 日本電気ホームエレクトロニクス株式会社 Dust-free conveyor
JPS62261126A (en) * 1986-05-08 1987-11-13 Dainippon Screen Mfg Co Ltd Surface processor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5844850U (en) * 1981-09-21 1983-03-25 日本電気ホームエレクトロニクス株式会社 Dust-free conveyor
JPS62261126A (en) * 1986-05-08 1987-11-13 Dainippon Screen Mfg Co Ltd Surface processor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101457871B1 (en) * 2013-05-13 2014-11-06 한국성전(주) die for cutting tape

Also Published As

Publication number Publication date
JPH0810184Y2 (en) 1996-03-27

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EXPY Cancellation because of completion of term