JPH0361354A - Method for thermal spraying of ceramic to metallic foil - Google Patents

Method for thermal spraying of ceramic to metallic foil

Info

Publication number
JPH0361354A
JPH0361354A JP1194901A JP19490189A JPH0361354A JP H0361354 A JPH0361354 A JP H0361354A JP 1194901 A JP1194901 A JP 1194901A JP 19490189 A JP19490189 A JP 19490189A JP H0361354 A JPH0361354 A JP H0361354A
Authority
JP
Japan
Prior art keywords
metal foil
ceramic
thermally sprayed
sprayed
metallic foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1194901A
Other languages
Japanese (ja)
Other versions
JP2658412B2 (en
Inventor
Tokuo Okano
岡野 徳雄
Mitsuhiro Inoue
光弘 井上
Hiroshi Hasegawa
寛士 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP1194901A priority Critical patent/JP2658412B2/en
Publication of JPH0361354A publication Critical patent/JPH0361354A/en
Application granted granted Critical
Publication of JP2658412B2 publication Critical patent/JP2658412B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To obtain the metallic foil thermally sprayed with ceramics with high productivity by spraying and forming the thermally spraying layer of the ceramics on the surface to be thermally sprayed of the metallic foil while injecting water from below the metallic foil, with which the un-winding and taking up are once stopped, then moving the point on the metallic foil thermally sprayed to a prescribed position. CONSTITUTION:The formation of the thermally sprayed layer of the ceramics onto the metallic foil 1, such as copper foil, between the un-winding and taking up sides of devices 2, 3 to un-wind the metallic foil 1 from one side and to take up the same to the other side is executed in the following manner: The un-winding and taking up devices 2, 3 are once stopped to bring the metallic foil 1 into standstill and both ends of the metallic foil 1 in the part to be thermally sprayed are fixed. Water is ejected from plural pieces of water shower nozzles 5 installed below the metallic foil 1 and while the rear surface of the surface 6 thermally sprayed of the metallic foil 1 is cooled by bringing the water into contact therewith, the thermally sprayed 6 to be thermally sprayed is thermally sprayed 7. The metallic foil is thermally sprayed with the ceramics by repeating the stage for forming the thermally sprayed layer of the prescribed ceramics onto the surface 6 and the stage for driving the un-winding and taking up devices 2, 3 after the formation of the thermally sprayed layer and moving the point on the metallic foil 1 to be thermally sprayed up to the prescribed position.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、生産性にすぐれるセラミック溶射金属箔の製
造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for manufacturing ceramic sprayed metal foil with excellent productivity.

(従来の技術) セラミック溶射は、セラミックコーティングの一手法と
して広く知られている。特にプラズマ溶射法の出現以来
、その址産性にすぐれることから主に金属製品の耐摩耗
性、耐熱性、表面硬度、電気絶縁性、断熱性等の改良、
すなわち表面改質に広く用いられている。
(Prior Art) Ceramic spraying is widely known as a method of ceramic coating. In particular, since the advent of plasma spraying, it has been used mainly to improve the wear resistance, heat resistance, surface hardness, electrical insulation, and heat insulation properties of metal products due to its excellent durability.
That is, it is widely used for surface modification.

ところが、このセラミック溶射を利用して肉厚の薄い金
属箔にセラミック層を形成しようとすると大きな問題点
がある。
However, when trying to form a ceramic layer on a thin metal foil using this ceramic spraying method, there is a big problem.

それは、セラミックの溶射の原理が酸素−アセチレンガ
スの燃焼炎あるいはアルゴンガス、窒素ガス、ヘリウム
ガス等のプラズマ炎などの超高温雰囲気中に溶射材料で
あるセラミックを供給してこれを溶融させ、溶融物を被
溶射面に衝突させ、冷却、固化させるものであるためで
ある。
The principle of ceramic thermal spraying is to supply ceramic, which is a thermal spraying material, into an ultra-high temperature atmosphere such as a combustion flame of oxygen-acetylene gas or a plasma flame of argon gas, nitrogen gas, helium gas, etc., and melt it. This is because the object is collided with the surface to be thermally sprayed, cooled and solidified.

すなわち、一般的な被溶射体である金属板、金属ロール
等に溶射する条件で金属箔にセラミックを溶射すると、
溶射時に金属箔に溶融状態で固着したセラミックの熱が
金属箔に蓄積し、その熱によって金属箔が酸化したりあ
るいは金属箔が溶融して破断したりして満足な製品は得
られない。
In other words, when ceramic is sprayed on metal foil under the conditions for spraying on general objects to be sprayed, such as metal plates and metal rolls,
During thermal spraying, the heat of the ceramic adhered to the metal foil in a molten state accumulates in the metal foil, and the metal foil oxidizes or melts and breaks due to the heat, making it impossible to obtain a satisfactory product.

これを改善するためには、セラミック溶射において一般
に行われている溶射ガンの両わきにエアノズルを設け、
被溶射面に冷却エアを吹き付けながら溶射する方法が考
えられるが、この方法を用いても溶射時の金属箔の変色
あるいは破断を防止することはできない。
In order to improve this, air nozzles are installed on both sides of the thermal spray gun, which is commonly used in ceramic thermal spraying.
One possible method is to perform thermal spraying while blowing cooling air onto the surface to be thermally sprayed, but even if this method is used, discoloration or breakage of the metal foil during thermal spraying cannot be prevented.

従来の技術を用いて欠陥のないセラミック溶射金属箔を
得る方法は1種々検討した結果溶射条件を金属箔への熱
影響を少なくする方向で行うしかないことがわかった。
As a result of various studies, it has been found that the only way to obtain defect-free ceramic thermal sprayed metal foil using conventional techniques is to adjust the thermal spraying conditions in a way that reduces the thermal influence on the metal foil.

すなわち、溶射ガンの出力を低くシ、シかもセラミック
の単位時間当たりの溶射量を極めて少なくしなければな
らない。
That is, the output of the thermal spray gun must be kept low, and the amount of ceramic sprayed per unit time must be extremely small.

(発明が解決しようとする課題) しかし、上記の方法によれば良好なセラミック溶射金属
箔を得ることができるが、この方法には大きな問題点が
ある。
(Problems to be Solved by the Invention) However, although a good ceramic sprayed metal foil can be obtained according to the above method, there are major problems with this method.

つまり、金属箔への熱影響を低くするために溶射ガンの
出力を低くし、しかもセラミックの単位時間当たりの溶
射量を極めて少なくしているために極めて生産性が低い
点である。
In other words, the output of the thermal spray gun is lowered to reduce the thermal effect on the metal foil, and the amount of ceramic sprayed per unit time is extremely small, resulting in extremely low productivity.

さらに説明すると、セラミックの単位時間当たりの溶射
量はセラミック層の成膜速度にほぼ正比例する。したが
って、溶射量を極めて少なくするということは生産性を
極めて低くすることになる。また、溶射ガンの出力を低
くするとセラミックを溶融させる炎の温度が低くなるた
めにセラミックは溶融しにくくなる。そのために、溶射
ガンへのセラミック供給量が同量であっても、溶射ガン
の出力が低いとセラミックの溶融が不完全であり、また
溶融したものも温度が低いために被溶射体に付着しに<
<、付着効率が低くなる。
To explain further, the amount of ceramic sprayed per unit time is approximately directly proportional to the deposition rate of the ceramic layer. Therefore, reducing the amount of thermal spraying to an extremely low level results in extremely low productivity. Furthermore, when the output of the thermal spray gun is lowered, the temperature of the flame that melts the ceramic becomes lower, making it difficult to melt the ceramic. Therefore, even if the amount of ceramic supplied to the thermal spray gun is the same, if the output of the thermal spray gun is low, the ceramic will not be completely melted, and the melted material will also adhere to the object to be sprayed due to the low temperature. To<
<, the adhesion efficiency becomes low.

これらのために従来の技術で、金属箔にセラミックを溶
射してセラミック層を形成するのは極めて生産性が低い
ものであり、金属板など肉厚の厚いものへ溶射する場合
と比較するとその溶射時間は10倍から20倍程度を要
しとても量産化は望めない。
For these reasons, using conventional techniques to form a ceramic layer by thermally spraying ceramic onto metal foil has extremely low productivity, and compared to thermally spraying thick materials such as metal plates, the thermal spraying process is It takes about 10 to 20 times as much time, so mass production cannot be expected.

本発明は上記の欠点を改良し、高生産性なセラミック溶
射金属箔の製造方法を提供するものである。
The present invention aims to improve the above-mentioned drawbacks and provide a highly productive method for manufacturing ceramic sprayed metal foil.

(課題を解決するための手段) すなわち、本発明は金属箔を一方から巻出し他方へ巻き
取る装置の巻出側と巻取側の間での金属箔へのセラミッ
ク溶射層の形成を、−揚巻出し・巻取装置を停止し金属
箔を静止させ被溶射箇所の両端部を固定するとともに該
金属箔の下方にあらかじめ設置しておいた複数個の水シ
ヤワーノズルから水を噴出させて金属箔の被溶射面裏面
に水を接触させることによって冷却しながら金属箔の被
溶射面に溶射を行い所定のセラミック溶射層を形成する
工程と該セラミック溶射層を形成した後巻出し・巻取り
装置を駆動し、次に溶射すべき金属箔上の箇所を所定の
位置に移動させる工程との繰り返しで行うことを特徴と
するものである。
(Means for Solving the Problems) That is, the present invention provides a method for forming a ceramic sprayed layer on a metal foil between the unwinding side and the winding side of a device that unwinds the metal foil from one side and winds it onto the other side. The unwinding and winding device is stopped, the metal foil is held still, and both ends of the area to be thermally sprayed are fixed, and water is jetted out from multiple water shower nozzles that were previously installed below the metal foil. A step of spraying the sprayed surface of the metal foil while cooling it by bringing water into contact with the back surface of the sprayed surface to form a predetermined ceramic sprayed layer, and after forming the ceramic sprayed layer, an unwinding/winding device is used. This method is characterized by repeating the steps of driving the metal foil and then moving the spot on the metal foil to be sprayed to a predetermined position.

従来の技術では、被溶射体の冷却は溶射ガンに取り付け
たエアノズルから圧縮空気を噴射し被溶射面に吹きつけ
る方法がもっばら用いられている。ところが、この方法
では肉厚の薄い金属箔への溶射においては、金属箔は一
般の被溶射体であるバルク材に比べると肉厚が薄いため
に熱容量が小さく、そのために溶射時に金属箔に与えら
れた熱は金属箔に蓄積しやすく、金属箔はその熱により
変色あるいは破断等が生じやすい。したがって、金属箔
に効率よくしかも変色、破断等を発生させずにセラミッ
クを溶射するにはより効果的な冷却法が必要である。
In conventional techniques, the most common method for cooling the object to be thermally sprayed is to inject compressed air from an air nozzle attached to a thermal spray gun onto the surface to be thermally sprayed. However, with this method, when spraying onto thin metal foil, the metal foil has a smaller heat capacity than the bulk material that is generally the subject of thermal spraying, so the amount of heat applied to the metal foil during thermal spraying is small. The generated heat tends to accumulate in the metal foil, and the metal foil tends to discolor or break due to the heat. Therefore, a more effective cooling method is required to thermally spray ceramic onto metal foil efficiently and without causing discoloration or breakage.

そこで、本発明者らは効果的な冷却法を種々検討した結
果、金属箔の裏面にその下に設けた水スプレーノズルか
ら冷却水をシャワー状に噴出、接触させて冷却しながら
溶射する方法が効果的であることをはい出した。
Therefore, the inventors of the present invention have investigated various effective cooling methods, and have found a method in which cooling water is sprayed onto the back surface of the metal foil in a shower form from a water spray nozzle provided below, and then thermally sprayed while cooling the metal foil. It has proven to be effective.

このようにすると、水スプレーノズルからシャワー状に
噴出した水は金属箔の裏面に当たり。
In this way, the water sprayed out in a shower from the water spray nozzle hits the back side of the metal foil.

溶射時に金属箔に伝えられた熱をすばやく奪い取ってく
れる。それによって溶射時の金属箔の過熱を防止するこ
とができる。
It quickly removes the heat transferred to the metal foil during thermal spraying. This can prevent overheating of the metal foil during thermal spraying.

なお、金属箔の裏面を水で冷却する方法は種々考えられ
るが、本発明において水スプレーノズルを用いるのは次
のような利点がある。すなわち、水スプレーノズルから
噴出した水はシャワー状であり、小さな水滴となって四
方へ広がり金属箔の裏面を少ない水量でむらなく濡らす
ことができる。また、金属箔の裏面には常に新しい冷た
い水が当たるために常に一定の冷却能力を保つことがで
きる。
Although various methods can be considered for cooling the back surface of the metal foil with water, the use of a water spray nozzle in the present invention has the following advantages. That is, the water ejected from the water spray nozzle has a shower-like shape, and spreads in all directions as small droplets, making it possible to evenly wet the back surface of the metal foil with a small amount of water. In addition, since fresh cold water is always applied to the back side of the metal foil, a constant cooling capacity can be maintained at all times.

金属箔の被溶射面の裏面をもれなく、むらなく冷却する
ことは非常に重要であり、たとえば水の接触していない
部分があると、その部分はとたんに溶射時に変色等の欠
陥が発生してしまう。したがって、溶射を効率良く行う
にはスプレーノズルは複数個必要であり、広い面積を冷
却することが必要である。
It is very important to cool the back side of the metal foil to be thermally sprayed thoroughly and evenly; for example, if there are areas that are not in contact with water, defects such as discoloration will occur during thermal spraying. I end up. Therefore, in order to perform thermal spraying efficiently, a plurality of spray nozzles are required, and it is necessary to cool a wide area.

また、本発明においては金属箔へのセラミック溶射は、
金属箔を一方から巻き出し他方へ巻き取る途中で行う方
法を採用している。この方法は、金属箔を切断し金属箔
を治具へ取り付けてから溶射を行う従来のバッチ式の方
法に比軸し、ロール状の金属箔を切断することなく連続
的に金属箔へセラミック溶射層を形成するために非常に
生産性が優れる。しかし、この金属箔を一方から巻出し
他方へ巻き取る途中で溶射を行う方法において、従来は
溶射中も金属箔は巻出装置から巻取装置へ移動していた
。そのため被溶射面の金属箔の両端部を固定することが
困難であった。従っ°C1溶射された金属箔は、溶射時
のセラミックと金属箔の熱収縮差による変形によってし
わを有するものであった。
In addition, in the present invention, ceramic spraying on metal foil is
A method is adopted in which the metal foil is unrolled from one side and then wound on the other side. This method is different from the conventional batch method in which the metal foil is cut, the metal foil is attached to a jig, and then thermal spraying is applied. It is highly productive because it forms layers. However, in this method of thermal spraying while unwinding the metal foil from one side and winding it up to the other, conventionally the metal foil was moved from the unwinding device to the winding device even during thermal spraying. Therefore, it was difficult to fix both ends of the metal foil on the surface to be thermally sprayed. Therefore, the metal foil sprayed with °C1 had wrinkles due to deformation due to the difference in thermal shrinkage between the ceramic and the metal foil during thermal spraying.

そこで、本発明では金属箔を一方から巻出し他方へ巻取
る装置の巻出側と巻取側の間での金属箔へのセラミック
溶射層の形成を、一旦巻出し・巻取装置を停止し金属箔
を静止させ被溶射箇所の両端部を固定して行うことによ
り、溶射時のセラミックと金属箔の熱収縮の差によるセ
ラミック溶射銅箔の変形を防止することができた。
Therefore, in the present invention, the formation of a ceramic sprayed layer on the metal foil between the unwinding side and the winding side of the device that unwinds the metal foil from one side and winds it to the other side is performed by temporarily stopping the unwinding/winding device. By keeping the metal foil stationary and fixing both ends of the sprayed area, it was possible to prevent the ceramic sprayed copper foil from deforming due to the difference in thermal contraction between the ceramic and the metal foil during thermal spraying.

すなわち1本発明の方法では金属箔を一方から巻出し他
方へ巻き取る途中で溶射を行う方法の高い生産性を保ち
ながら、かつしわのない良好なセラミック溶射金属箔を
得ることができる。
That is, according to the method of the present invention, it is possible to obtain a good ceramic sprayed metal foil without wrinkles while maintaining the high productivity of the method in which thermal spraying is performed while the metal foil is unrolled from one side and wound on the other side.

ここで、被溶射箇所の金属箔の両端部の固定には、エア
シリンダ、油圧シリンダ等を使用しτ金属箔の両端部を
ヒ下からはさんで固定する方法が利用できる。または、
第2図に示すような吸引装置4を用いて吸引装置の開口
面11を被溶射箇所の金属箔の両端部に接するように設
置して、開口部11内の空気を真空吸引することによっ
て金属箔端部を開口面11に吸着させて固定する方法が
適用できる。
Here, to fix both ends of the metal foil at the location to be thermally sprayed, a method can be used in which both ends of the τ metal foil are sandwiched and fixed from below using an air cylinder, a hydraulic cylinder, or the like. or
A suction device 4 as shown in FIG. 2 is installed so that the opening surface 11 of the suction device is in contact with both ends of the metal foil at the location to be thermally sprayed, and the air inside the opening 11 is vacuum-sucked to remove the metal. A method of fixing the foil end by adsorbing it to the opening surface 11 can be applied.

なお、本発明に用いられる金属箔は銅箔、ニッケル箔、
アルミニウム箔、亜鉛箔、銀箔、ステンレス箔、インバ
ー合金清などの一般に用いられる金属箔、あるいはこれ
らの合金、クラツド箔などが挙げられる。その中でも銅
箔はプリント配線板としてセラミック溶射鋼箔を用いる
場合1回路層として最も用いやすく、非常に有用であり
、特に好適である。
Note that the metal foil used in the present invention includes copper foil, nickel foil,
Examples include commonly used metal foils such as aluminum foil, zinc foil, silver foil, stainless steel foil, and invar alloy, alloys thereof, and clad foils. Among them, copper foil is the easiest to use as one circuit layer when ceramic sprayed steel foil is used as a printed wiring board, is very useful, and is particularly suitable.

また、溶剤するセラミックとしてはアルミナ。Alumina is also used as a solvent ceramic.

チタニア、ジルコニア、カルシア、マグネシア、チタン
酸バリウム、クロミア、ムライト、スピネル、コージェ
ライト等のセラミックを用いることができる。その中で
もプリント配線板に用ハス倶仝7I、fテスμ セラよ
11.り某桁戸Lτ実績があり溶射性も良いアルミナが
好適である。
Ceramics such as titania, zirconia, calcia, magnesia, barium titanate, chromia, mullite, spinel, and cordierite can be used. Among them, there are 11. Alumina, which has a proven track record in a certain number of girders and has good thermal sprayability, is suitable.

(作 用) 従来の技術では溶射時の熱影響により金祇箔に変色、溶
断などの欠陥が発生しやすく、これを防止するためには
溶射ガンの出力を極力低くし、しかも単位時間当たりの
溶射量を極めて少なくする必要があった。そのために量
産性は極めて低く、歩留りすなわち金属箔へのセラミッ
クの付着効率も低いものであった。
(Function) With conventional technology, defects such as discoloration and melting are likely to occur in Kingi leaf due to the thermal effects during thermal spraying.To prevent this, the output of the thermal spray gun must be kept as low as possible, and the The amount of thermal spraying had to be extremely small. For this reason, mass productivity was extremely low, and the yield, ie, the efficiency of adhering ceramic to metal foil, was also low.

ところが本発明の方法によれば、金属箔の被溶射面の裏
面はその下に設けたスプレーノズルから噴出する水が接
触し絶えず冷却しているので、溶射時に金属箔に伝えら
れた熱はすばやく水に伝わり溶射時の金属箔の過熱を防
止することができる。それによって従来は不可能であっ
た、一般的なバルク材への溶射と同様な高出力・大量溶
射が可能となり著しく量産性、歩留りを向上することが
できる。
However, according to the method of the present invention, the back side of the metal foil to be thermally sprayed is constantly cooled by contact with the water jetted from the spray nozzle installed below, so the heat transferred to the metal foil during thermal spraying is quickly absorbed. It is transmitted to water and can prevent overheating of the metal foil during thermal spraying. This makes it possible to perform high-output, large-volume thermal spraying similar to the thermal spraying on general bulk materials, which was previously impossible, and significantly improves mass productivity and yield.

さらに本発明は、金属箔への溶射を金属箔の巻出装置と
巻取装置の間で行うため非常に生産性が優れている。
Furthermore, the present invention has excellent productivity because the thermal spraying onto the metal foil is performed between the metal foil unwinding device and the winding device.

また、溶射中には一旦巻出し巻取装置を停止し金属箔を
静止させ被溶射箇所の端部を固定するので、セラミック
と金属箔の熱収縮の差によって発生する変形を防止する
ことが可能であり、良好なセラミック溶射銅箔が得られ
る。
Additionally, during thermal spraying, the unwinding and winding device is temporarily stopped, the metal foil is held still, and the edges of the area to be thermally sprayed are fixed, making it possible to prevent deformation caused by the difference in thermal contraction between the ceramic and the metal foil. Therefore, a good ceramic sprayed copper foil can be obtained.

(実施例) 本発明の一実施例を第1図及び第2図に基づき説明する
。幅540mm、厚み18μmのロール状の銅箔1を巻
出装置2から巻出し、巻取装置3へ巻取るように取り付
けた。巻出し装置2゜巻取装置3を停止し銅箔1を静止
させ、銅箔1下面に設置した吸引装置4で銅箔1を吸引
装置4の開口部11に吸着して固定する。吸引装置4の
外観を第2図に示す。吸引装置4は銅箔1と接触する面
、すなわち上面に開口部11を有し、該開口部11は銅
箔1の被溶射面6の裏面を取り囲む形になっている。
(Example) An example of the present invention will be described based on FIGS. 1 and 2. A roll-shaped copper foil 1 having a width of 540 mm and a thickness of 18 μm was unwound from an unwinding device 2 and attached to a winding device 3 so as to be wound up. The unwinding device 2 and the winding device 3 are stopped to make the copper foil 1 stand still, and the suction device 4 installed under the copper foil 1 attracts and fixes the copper foil 1 to the opening 11 of the suction device 4. The external appearance of the suction device 4 is shown in FIG. The suction device 4 has an opening 11 on the surface that contacts the copper foil 1, that is, the upper surface, and the opening 11 is shaped to surround the back surface of the sprayed surface 6 of the copper foil 1.

この吸引装置4はホース12で真空ポンプ(図示せず)
に接続されており、間口部11内の空気を吸引すること
により銅箔1端部を開口部11に吸着する構造となって
いる。このようにして被溶射面6の両端部を固定した銅
箔の裏面に対して銅箔1の被溶射面6の下方、すなわち
吸引装置4の内側に設置した複数の水スプレーノズル5
からシャワー状の水を噴出し、銅箔1を冷却した。水ス
プレーノズル5は被溶射面6の裏面をむらなく冷却する
ために100個設置した。このようにして被溶射面6の
裏山に水をあてて冷却しなから被溶射面6にプラズマ溶
射ガン7を用いてアルミナ溶射層を100μmの厚さに
形成した。このときのプラズマ溶射ガンの出力は、従来
金属箔への溶射には適用できなかった一般のバルク材へ
溶射するときの条件と同等以上である溶射電流900A
、アルミナ供給Ik50 g / m t nとした。
This suction device 4 is connected to a vacuum pump (not shown) using a hose 12.
It has a structure in which the end portion of the copper foil 1 is attracted to the opening 11 by suctioning the air in the frontage 11 . A plurality of water spray nozzles 5 are installed below the sprayed surface 6 of the copper foil 1, that is, inside the suction device 4, on the back side of the copper foil with both ends of the sprayed surface 6 fixed in this manner.
The copper foil 1 was cooled by spraying water in the form of a shower. 100 water spray nozzles 5 were installed in order to uniformly cool the back surface of the surface 6 to be thermally sprayed. In this way, water was applied to the back of the surface to be thermally sprayed 6 to cool it, and then an alumina thermal spray layer was formed on the surface to be thermally sprayed 6 to a thickness of 100 μm using a plasma spray gun 7. The output of the plasma spray gun at this time was a spraying current of 900 A, which is equivalent to or higher than the conditions used when spraying general bulk materials, which could not be applied to metal foil.
, the alumina supply Ik was 50 g/mtn.

このようにして一つの被溶射面6へのアルミナ溶射を完
了した後には、被溶射面6の端部の固定を解除し巻出装
置2、巻取装置3を駆動し、ν+ylF+ 会シtL+
ット −♂Δ 仝1七ζ 1  し ハ抽詠3 h千ふ
 Rん δl;l;中漬位置で移動させた。
After completing the alumina spraying on one sprayed surface 6 in this way, the fixation of the end of the sprayed surface 6 is released, the unwinding device 2 and the winding device 3 are driven, and ν+ylF+
It was moved at the middle pick position.

以上の工程を繰り返し行いロール状の銅箔1に対し、銅
箔1を切断することなく溶射を行った。
The above steps were repeated and thermal spraying was performed on the roll-shaped copper foil 1 without cutting the copper foil 1.

このようにしてアルミナ溶射層を形成した銅箔1には、
従来問題となっていた銅箔1の過熱による変色や破断、
さらに溶射時のアルミナと銅箔1の熱収縮の差によって
起こる変形やしわは全く発生しなかった。すなわち、銅
箔1の被溶射面6の裏面を水スプレーノズル5から噴出
させた水で冷却することにより、銅箔1の過熱による変
色や破断を防止するとともに被溶射面6の銅箔1の端部
を吸引装置4の開口部11に吸着して固定することによ
って溶射時のアルミナと銅箔1の熱収縮の差によって起
こる変形やしわの発生を防止することもできた。
The copper foil 1 with the alumina sprayed layer formed in this way has
Discoloration and breakage due to overheating of the copper foil 1, which was a problem in the past,
Further, no deformation or wrinkles caused by the difference in thermal shrinkage between alumina and copper foil 1 during thermal spraying occurred. That is, by cooling the back side of the thermally sprayed surface 6 of the copper foil 1 with water jetted from the water spray nozzle 5, discoloration and breakage of the copper foil 1 due to overheating are prevented, and the copper foil 1 on the thermally sprayed surface 6 is cooled. By adsorbing and fixing the end portion to the opening 11 of the suction device 4, it was also possible to prevent deformation and wrinkles caused by the difference in thermal contraction between the alumina and the copper foil 1 during thermal spraying.

その結果、大きさ540mm角の被溶射面6ヘアルミナ
溶射層を100μmの厚さで形成するのに要した時間は
、従来の変色を防止するためIF廼0中+ん幼−丁波計
すス有辻アらnmln以上であったのにくらべ、本発明
の方法では、その1/10以下の5 m I nであり
著しく量産性を高めることができた。さらfこ1本発明
の方法ではロール状の銅箔1を切断することなく。
As a result, it was found that the time required to form a 100 μm thick alumina sprayed layer on the sprayed surface 6 with a size of 540 mm square was reduced by using the conventional IF 00 medium + 300 mm metering method to prevent discoloration. Compared to Aritsuji et al., which had a nmln or more, the method of the present invention had a value of 5mIn, which was less than 1/10 of that, making it possible to significantly improve mass productivity. Furthermore, the method of the present invention does not require cutting the rolled copper foil 1.

巻出し・巻取りの途中で銅箔1へ溶射ができるため非常
に能率的である。
It is very efficient because the copper foil 1 can be thermally sprayed during unwinding and winding.

(発明の効果) 以上述べてきたように、本発明の方法、すなわち金属箔
を一方から巻出し他方へ巻き取る装置の巻き出し・巻取
側の間での金属箔へのセラミック溶射層の形成を、一旦
巻出し・巻取装置を停止し金属箔を静止させ、被溶射部
の金属箔両端部を固定するとともに金属箔の下方に設置
した複数個の水シヤワーノズルから水を噴出させて金属
箔の被溶射面裏面に水を接触させることによって冷却し
ながら金属箔の被溶射面に溶射を行い所定のセラミック
溶射層を形成する工程と該セラミック溶射層を形成した
後巻出し・巻取装置を駆動し1次に溶射すべき金属箔上
の箇所を所定の位置にまで移動させる工程との繰4゜ り返しで行うことを特徴とする金属箔へのセラミックの
溶射方法を用いれば、金属箔の過熱による変色や破断、
さらに溶射時のセラミックと金属箔の熱収縮の差によっ
て発生する変形やしわを防止しながら、一般バルク材へ
の溶射時と同等以上の溶射出力で溶射が可能となり、量
産性にすぐれた金属箔へのセラミック溶射ができる。
(Effects of the Invention) As described above, the method of the present invention, that is, the formation of a ceramic sprayed layer on a metal foil between the unwinding and winding sides of a device that unwinds the metal foil from one side and winds it to the other side. The unwinding/winding device is stopped once, the metal foil is held still, both ends of the metal foil in the area to be thermally sprayed are fixed, and water is jetted out from multiple water shower nozzles installed below the metal foil to coat the metal foil. A step of spraying the sprayed surface of the metal foil while cooling it by bringing water into contact with the back surface of the foil to form a predetermined ceramic sprayed layer, and an unwinding/winding device after forming the ceramic sprayed layer. If a method for thermal spraying ceramic onto metal foil is used, which is characterized in that the process is repeated 4 degrees with the first step of moving the spot on the metal foil to a predetermined position, Discoloration or breakage due to overheating of the foil,
Furthermore, while preventing deformation and wrinkles that occur due to the difference in thermal contraction between ceramic and metal foil during thermal spraying, it is possible to thermal spray with a thermal spray output equal to or higher than that when thermal spraying on general bulk materials, making metal foil excellent for mass production. Ceramic spraying is possible.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例である銅箔へのアルミナ溶射
の様子を示す斜視図、第2図は本発明の吸引装置の斜視
図である。 符号の説明 2・・・巻出装置 4・・・吸引装置 6・・・被溶射面 1・・・銅箔 3・・・巻取装置 5・・・水スプレーノズル 7・・・プラズマ溶射ガン 11・・・開口部 12・・・ホース
FIG. 1 is a perspective view showing alumina thermal spraying on copper foil according to an embodiment of the present invention, and FIG. 2 is a perspective view of a suction device of the present invention. Explanation of symbols 2... Unwinding device 4... Suction device 6... Surface to be sprayed 1... Copper foil 3... Winding device 5... Water spray nozzle 7... Plasma spray gun 11... Opening 12... Hose

Claims (4)

【特許請求の範囲】[Claims] 1.金属箔を一方から巻出し他方へ巻き取る装置の巻き
出し・巻取側の間での金属箔へのセラミック溶射層の形
成を、一旦巻出し・巻取装置を停止し金属箔を静止させ
被溶射部の金属箔両端部を固定するとともに該金属箔の
下方に設置した複数個のシャワーノズルから水を噴出さ
せて金属箔の被溶射面裏面に水を接触させながら金属箔
の被溶射面に溶射を行い所定のセラミック溶射層を形成
する工程と、該セラミック溶射層を形成した後巻出し・
巻取装置を駆動し、次に溶射すべき金属箔上の箇所を所
定の位置にまで移動させる工程との繰り返しで行うこと
を特徴とする金属箔へのセラミックの溶射方法。
1. To form a ceramic sprayed layer on the metal foil between the unwinding and winding sides of the device that unwinds the metal foil from one side and winds it to the other, the unwinding and winding device is stopped, the metal foil is stopped, and the metal foil is stopped. Both ends of the metal foil in the thermal spraying section are fixed, and water is jetted out from a plurality of shower nozzles installed below the metal foil to bring the water into contact with the back surface of the surface to be thermally sprayed of the metal foil. The process of thermal spraying to form a predetermined ceramic sprayed layer, and the process of unwinding and after forming the ceramic sprayed layer.
A method for thermally spraying ceramic onto metal foil, characterized in that the process is repeated by driving a winding device and then moving the area on the metal foil to be thermally sprayed to a predetermined position.
2.被溶射部の金属箔の両端部の固定を金属箔の両端部
を吸引機能を有する吸引装置の開口部に吸着させること
によって行う請求項1記載の金属箔へのセラミックの溶
射方法。
2. 2. The method for thermally spraying ceramic onto metal foil according to claim 1, wherein both ends of the metal foil of the thermally sprayed portion are fixed by adsorbing both ends of the metal foil to an opening of a suction device having a suction function.
3.金属箔が銅箔である請求項1記載の金属箔へのセラ
ミックの溶射方法。
3. The method of thermal spraying ceramic onto metal foil according to claim 1, wherein the metal foil is copper foil.
4.溶射するセラミックがアルミナを主成分とするもの
である請求項1記載の金属箔へのセラミックの溶射方法
4. 2. The method for spraying ceramic onto metal foil according to claim 1, wherein the ceramic to be sprayed has alumina as a main component.
JP1194901A 1989-07-27 1989-07-27 Method of spraying ceramic on metal foil Expired - Lifetime JP2658412B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1194901A JP2658412B2 (en) 1989-07-27 1989-07-27 Method of spraying ceramic on metal foil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1194901A JP2658412B2 (en) 1989-07-27 1989-07-27 Method of spraying ceramic on metal foil

Publications (2)

Publication Number Publication Date
JPH0361354A true JPH0361354A (en) 1991-03-18
JP2658412B2 JP2658412B2 (en) 1997-09-30

Family

ID=16332217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1194901A Expired - Lifetime JP2658412B2 (en) 1989-07-27 1989-07-27 Method of spraying ceramic on metal foil

Country Status (1)

Country Link
JP (1) JP2658412B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4850275B2 (en) * 2009-07-27 2012-01-11 京セラ株式会社 Manufacturing method of ceramic wiring board

Also Published As

Publication number Publication date
JP2658412B2 (en) 1997-09-30

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