JPH0361546U

JPH0361546U -

Info

Publication number: JPH0361546U
Application number: JP12260289U
Authority: JP
Priority date: 1989-10-19
Filing date: 1989-10-19
Publication date: 1991-06-17

Description

[Brief explanation of drawings]

第１図は請求項１の本考案の具体的実施例であ
る圧力センサの断面構造図、第２図は第１図の圧
力センサの動作の説明に供する図、第３図は第１
図のその他の実施例を示す図、第４図は請求項２
の本考案の２重ダイアフラム構造から成る具体的
実施例である圧力センサの断面構造図、第５図は
第４図の圧力センサの動作の説明に供する図、第
６図は従来の２重ダイアフラム構造から成る圧力
センサの断面構造図である。１，１０，１００……圧力センサ、２……配管
、３……ケーブル、Ｑ……測定流体、１１……セ
ンサボデイ、１２……伝達用流体封入ケース、１
０ｆ_１，１０ｆ_２，１００ｆ_１，１００ｆ_２……
シールダイアフラム、１０ｅ，１００ｅ_１，１０
０ｅ_２……圧力伝達用流体、１３……圧力検出素
子受圧部。 1 is a cross-sectional structural diagram of a pressure sensor which is a specific embodiment of the present invention as claimed in claim 1, FIG. 2 is a diagram for explaining the operation of the pressure sensor of FIG. 1, and FIG.
A diagram showing another embodiment of the diagram, FIG. 4 is claim 2
A cross-sectional structural diagram of a pressure sensor which is a specific example of the double diaphragm structure of the present invention, FIG. 5 is a diagram for explaining the operation of the pressure sensor of FIG. 4, and FIG. 6 is a diagram showing a conventional double diaphragm structure. FIG. 1, 10, 100...Pressure sensor, 2...Piping, 3...Cable, Q...Measurement fluid, 11...Sensor body, 12...Transmission fluid enclosure case, 1
0f ₁ , 10f ₂ , 100f ₁ , 100f ₂ ...
Seal diaphragm, 10e, 100e ₁ , 10
0e ₂ ... Pressure transmission fluid, 13 ... Pressure detection element pressure receiving part.

Claims

[Claims for Utility Model Registration] (1) In order to prevent the measurement fluid from coming into direct contact with the pressure detection element, a pressure receiving body and a pressure transmitting fluid are interposed between the pressure detection element and the measurement fluid. A pressure sensor for measuring the pressure of a fluid includes a sensor body having an inlet for the measurement fluid, a transmission fluid enclosure provided within the sensor body, and both ends of the transmission fluid enclosure being formed of the same material. A pressure-receiving case comprising a pressure-receiving body, a sensing element pressure-receiving part comprising a pressure sensing element disposed in the center of the pressure-receiving case joined to a sensing element mounting part, and a sensing element pressure-receiving part assembled to the sensing element mounting part of the sensing element pressure-receiving part. A pressure sensor comprising a reference pressure introduction section attached to the sensor, and a pressure transmitting fluid that surrounds the detection element pressure receiving section and is sealed inside the pressure receiving case. (2) In the pressure sensor according to claim 1, the first
an inner sensor body provided with an inflow port, an outer sensor body provided at a position facing the inner sensor body and having an outer periphery larger than the outer periphery of the inner sensor body, and a second inflow port provided to cover the inner sensor body. a sensor case whose outer periphery is attachable to the outer periphery of the outer sensor body and which forms a certain space between the inner sensor body and the outer sensor body; and a detection element mounting portion formed at the center of the inner sensor body and the outer sensor body. a pair of pressure detection elements arranged symmetrically with respect to the center; a first space portion in which a first pressure transmission fluid can be sealed between the pair of pressure detection elements and the pressure detection element on the inner sensor body side; and a first pressure receiving body which is bonded to the inner sensor body symmetrically about the center of the pair of pressure detection elements, and is made of the same material as the first pressure receiving body and is located outside of the first pressure receiving body. and a second space portion which is disposed symmetrically between the outer sensor body and the inner sensor body with respect to the center of the pair of pressure detecting elements and which can be filled with a second pressure transmitting fluid. A pressure sensor consisting of a pressure receiving body.