JPH0362681U - - Google Patents
Info
- Publication number
- JPH0362681U JPH0362681U JP11989689U JP11989689U JPH0362681U JP H0362681 U JPH0362681 U JP H0362681U JP 11989689 U JP11989689 U JP 11989689U JP 11989689 U JP11989689 U JP 11989689U JP H0362681 U JPH0362681 U JP H0362681U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- axis reference
- axis
- guide
- reference pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000003780 insertion Methods 0.000 claims 3
- 230000037431 insertion Effects 0.000 claims 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Description
第１図は、本考案に係るレーザ加工機における
トレー位置決め機構の一実施例の平面図、第２図
はその縦断面図、第３図は、トレーが基準ピンに
押し当てられ位置決めされた状態を示した第２図
と同様の平面図である。
１……トレー、２……Ｙ軸基準ピン、３……Ｘ
軸基準ピン、４……プツシヤ機構、５……ストツ
パ、６……ガイド機構、７……ガイドレール、８
……ガイドローラ群、９……ＸＹテーブル。
FIG. 1 is a plan view of an embodiment of the tray positioning mechanism in a laser processing machine according to the present invention, FIG. 2 is a longitudinal sectional view thereof, and FIG. 3 is a state in which the tray is pressed against a reference pin and positioned. FIG. 2 is a plan view similar to FIG. 1...Tray, 2...Y-axis reference pin, 3...X
Axis reference pin, 4... Pusher mechanism, 5... Stopper, 6... Guide mechanism, 7... Guide rail, 8
...Guide roller group, 9...XY table.
Claims (1)
並べ照射位置に供給及び排出するトレーを、ＸＹ
テーブル上に位置決めするレーザ加工機における
トレー位置決め機構において、 前記トレーの挿入方向に垂直なＸ軸方向に並べ
られた２本のＸ軸基準ピンと、 前記トレーの挿入方向に平行なＹ軸方向に設け
られたＹ軸基準ピンであつて、前記トレーを挿入
する際ガイドの役目を兼ねたカムフロア等からな
る回転機構をもつＹ軸基準ピンと、 前記Ｘ軸基準ピン及びＹ軸基準ピンに前記トレ
ーを押し当てるＸ軸方向及びＹ軸方向に往復運動
可能に設置された一対のプツシヤ機構と、 前記トレーの出し入れを円滑に行う様前記トレ
ーの下側に設けられたローラ群と、そして、 前記トレーの挿入時に、前記トレーが前記Ｘ軸
基準ピンに突当たらないようにしてＸＹテーブル
上の所定位置に搬送するガイド機構であつて、前
記プツシヤ機構が動作する際には、前記トレーの
ガイドを解除して前記トレーがＸＹ方向に自由に
移動できるようにするガイド機構と、 を有することを特徴とするレーザ加工機における
トレー位置決め機構。[Claims for Utility Model Registration] A tray for supplying and discharging one or more substrates to be processed with laser light to the irradiation position is
In a tray positioning mechanism in a laser processing machine that positions the tray on a table, two X-axis reference pins are arranged in the X-axis direction perpendicular to the tray insertion direction, and two X-axis reference pins are arranged in the Y-axis direction parallel to the tray insertion direction. a Y-axis reference pin which is a Y-axis reference pin that has a rotating mechanism such as a cam floor that also serves as a guide when inserting the tray, and a Y-axis reference pin that pushes the tray against the a pair of pusher mechanisms installed to be able to reciprocate in the X- and Y-axis directions; a group of rollers provided below the tray to smoothly take in and take out the tray; and insertion of the tray. At times, the guide mechanism transports the tray to a predetermined position on the XY table while preventing the tray from hitting the X-axis reference pin, and when the pusher mechanism operates, the guide for the tray is released. A tray positioning mechanism in a laser processing machine, comprising: a guide mechanism that allows the tray to move freely in XY directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11989689U JPH0362681U (en) | 1989-10-13 | 1989-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11989689U JPH0362681U (en) | 1989-10-13 | 1989-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0362681U true JPH0362681U (en) | 1991-06-19 |
Family
ID=31667992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11989689U Pending JPH0362681U (en) | 1989-10-13 | 1989-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0362681U (en) |
-
1989
- 1989-10-13 JP JP11989689U patent/JPH0362681U/ja active Pending
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