JPH0363031B2 - - Google Patents

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Publication number
JPH0363031B2
JPH0363031B2 JP6147786A JP6147786A JPH0363031B2 JP H0363031 B2 JPH0363031 B2 JP H0363031B2 JP 6147786 A JP6147786 A JP 6147786A JP 6147786 A JP6147786 A JP 6147786A JP H0363031 B2 JPH0363031 B2 JP H0363031B2
Authority
JP
Japan
Prior art keywords
frequency
output
rotating body
signal
doppler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6147786A
Other languages
Japanese (ja)
Other versions
JPS62217177A (en
Inventor
Hideo Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6147786A priority Critical patent/JPS62217177A/en
Publication of JPS62217177A publication Critical patent/JPS62217177A/en
Publication of JPH0363031B2 publication Critical patent/JPH0363031B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、光のドツプラ効果を利用して、音
響機器、情報機器、工作機械等の回転体の回転速
度、回転ムラを計測する回転ムラ測定器に関する
ものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention utilizes the Doppler effect of light to measure the rotational speed and rotational unevenness of rotating bodies such as audio equipment, information equipment, machine tools, etc. It is related to measuring instruments.

〔従来の技術〕[Conventional technology]

音響機器であるレコードプレーヤ、テープレコ
ーダ、VTRの回転速度、回転ムラは録音、録画、
再生時の音質、画質を左右する重要な要素であ
り、回転速度の安定度、回転ムラいわゆるワウ・
フラツタの良し悪しがこれら機器の商品価値を決
定する。
The rotation speed and rotational unevenness of record players, tape recorders, and VTRs, which are audio equipment, are caused by recording, recording,
It is an important element that affects the sound quality and image quality during playback, and the stability of rotation speed and uneven rotation, so-called wow.
The quality of the flutter determines the commercial value of these devices.

従つて、このような分野における回転速度、回
転ムラの測定は、これら機器の検査等に必要不可
欠なものとなつている。
Therefore, measurement of rotational speed and rotational unevenness in such fields has become essential for inspection of these devices.

一般に、回転ムラは第(1)式に示すワウ・フラツ
タW/Fという指標で示される。
Generally, rotational unevenness is expressed by an index called wow/flutter W/F shown in equation (1).

W/F=△V/V×100(%)… (1) ここで、V:回転速度(m/分) △V:回転ムラ速度(m/分) 第(1)式は、回転速度Nに対する回転ムラ速度△
Nの比の百分率で示され、通常周波数成分として
0.2Hz以上の回転ムラ速度について評価される。
W/F=△V/V×100(%)… (1) Here, V: Rotational speed (m/min) △V: Rotational uneven speed (m/min) Equation (1) is the rotational speed N Rotation unevenness speed △
expressed as a percentage of the ratio of N, usually as a frequency component
It is evaluated for uneven rotation speed of 0.2Hz or more.

回転速度V(m/分)は、1分間当りの回転数
N(rpm)の形で求める必要があり、回転数N
(rpm)と回転速度V(m/分)の関係は第(2)式で
示される。
The rotational speed V (m/min) must be determined in the form of the number of revolutions per minute N (rpm), and the number of revolutions N
The relationship between (rpm) and rotational speed V (m/min) is shown by equation (2).

N=V/2πr… (2) ここで、r:回転半径(m) 第3図は、従来の非接触光学式速度センサを用
い、回転速度、回転ムラを計測する回転ムラ測定
器を示す構成図であり、1はモータまたはモータ
等に直結して回転する回転体、2はレーザ装置、
3はレーザ装置2からのレーザ光を二分割するビ
ームスプリツタ、4a,4b,4cはレーザ光の
方向を変えるためのミラー、5は回転体1から散
乱された光を受信するためのレンズ、6は受信光
を電気信号に変換する光検出器、7は交流増幅
器、8は周波数追跡器、9は周波数追跡器8の出
力周波数をこの周波数に比例したアナログ電圧に
変換する周波数−電圧変換器(以下F−V変換器
という。)、10は周波数追跡器8の出力パルス周
波数をカウントする周波数カウンタ、11はF−
V変換器9の出力電圧を可変する可変抵抗器等で
代表される可変減衰器、12は可変減衰器11の
出力信号のうち直流成分をカツトする高域フイル
タ、13は可変減衰器11の出力信号のうち高周
波成分をカツトする低域フイルタ、14はF−V
変換器9の出力信号を受けて利得を調整して出力
するための利得調整器である。
N=V/2πr... (2) Here, r: radius of rotation (m) Figure 3 shows the configuration of a rotational unevenness measuring device that measures rotational speed and rotational unevenness using a conventional non-contact optical speed sensor. In the figure, 1 is a motor or a rotary body that is directly connected to a motor or the like and rotates, 2 is a laser device,
3 is a beam splitter that splits the laser beam from the laser device 2 into two; 4a, 4b, and 4c are mirrors for changing the direction of the laser beam; 5 is a lens for receiving the light scattered from the rotating body 1; 6 is a photodetector that converts received light into an electrical signal, 7 is an AC amplifier, 8 is a frequency tracker, and 9 is a frequency-voltage converter that converts the output frequency of the frequency tracker 8 into an analog voltage proportional to this frequency. (hereinafter referred to as an F-V converter), 10 is a frequency counter that counts the output pulse frequency of the frequency tracker 8, and 11 is an F-V converter.
A variable attenuator represented by a variable resistor etc. that varies the output voltage of the V converter 9; 12 is a high-pass filter that cuts the DC component of the output signal of the variable attenuator 11; 13 is the output of the variable attenuator 11. A low-pass filter that cuts out high frequency components of the signal, 14 is F-V
This is a gain adjuster for receiving the output signal of the converter 9, adjusting the gain, and outputting the adjusted gain.

以上の構成の回転ムラ測定器において、レーザ
装置2から発信したレーザ光はビームスプリツタ
3で二分割され、一方のレーザビームはミラー4
b,4cで、他方のレーザビームはミラー4aで
方向を変えて、回転体1上の回転半径r(m)に
交差させて照射すると、各々の照射ビームに対応
した回転体1の散乱光の波長は回転体1の回転半
径r(m)における回転速度V(m/分)に応じて
いわゆる正負のドツプラシフトを起こす。
In the rotational unevenness measuring device having the above configuration, the laser beam emitted from the laser device 2 is split into two by the beam splitter 3, and one laser beam is split into two by the mirror 4.
In b and 4c, the other laser beam changes its direction with a mirror 4a and irradiates the rotating body 1 so as to intersect the radius of rotation r (m), so that the scattered light of the rotating body 1 corresponding to each irradiation beam is The wavelength undergoes a so-called positive and negative Doppler shift depending on the rotation speed V (m/min) of the rotating body 1 at the rotation radius r (m).

この二つの正負のドツプラシフトを受けた散乱
光をレンズ5で集光し光検出器6に導き電気信号
に変換すると、この電気信号の中には、受信光の
強さに比例する直流信号と第(3)式に示すドツプラ
周波数fdの交流信号(以下ドツプラ信号という)
が存在する。
When the scattered light that has undergone the two positive and negative Doppler shifts is focused by a lens 5, guided to a photodetector 6, and converted into an electrical signal, this electrical signal contains a DC signal proportional to the intensity of the received light, and a DC signal proportional to the intensity of the received light. AC signal with Doppler frequency f d shown in equation (3) (hereinafter referred to as Doppler signal)
exists.

fd=2V/λ・sin/2… (3) ここにV:回転体の回転半径r(m)における
回転速度 λ:レーザ光の波長 :二つの照射ビームの交差角 光検出器6で電気信号に変換されたドツプラ信
号は、微弱でかつS/Nが低いため交流増幅器7
で増幅され、周波数追跡器8でS/N改善すると
第(3)式に示す回転体1の回転半径r(m)におけ
る回転速度Vに比例したドツプラ周波数fdがパル
ス信号として検出できる。回転速度Vの中の回転
ムラ速度△Vは、周波数追跡器8のドツプラ周波
数fdの中の周波数変調量△fdとして検出される。
f d = 2V/λ・sin/2... (3) where V: Rotation speed at rotation radius r (m) of the rotating body λ: Wavelength of laser light: Intersection angle of two irradiation beams The Doppler signal converted into a signal is weak and has a low S/N, so the AC amplifier 7
When the S/N is improved by the frequency tracker 8, a Doppler frequency f d proportional to the rotation speed V at the rotation radius r (m) of the rotating body 1 as shown in equation (3) can be detected as a pulse signal. The rotational unevenness speed ΔV in the rotational speed V is detected as the frequency modulation amount Δf d in the Doppler frequency f d of the frequency tracker 8 .

この周波数変調信号である周波数追跡器8の出
力信号をF−V変換器9に入力すると、F−V変
換器9の出力はドツプラ周波数fdに比例した大き
さの直流電圧Eとその直流電圧Eを中心に回転ム
ラの大きさに比例して上下する交流電圧△Eの両
方を重畳したアナログ信号となる。
When the output signal of the frequency tracker 8, which is this frequency modulation signal, is input to the F-V converter 9, the output of the F-V converter 9 is a DC voltage E proportional to the Doppler frequency f d and the DC voltage This becomes an analog signal in which both the alternating current voltage ΔE, which increases and decreases around E as the center in proportion to the magnitude of rotational unevenness, are superimposed.

一方、周波数追跡器8の出力信号は、周波数カ
ウンタ10にも接続されており、ドツプラ周波数
fdを計数表示し直読できるようになつている。
On the other hand, the output signal of the frequency tracker 8 is also connected to the frequency counter 10, and is connected to the Doppler frequency
f d can be displayed as a count and read directly.

F−V変換器9の出力側に接続された可変減衰
器11は、減衰量が周波数値で目盛られ、変換出
力を入力周波数に比例して減衰させる働きを有し
ており、可変減衰器11の目盛周波数を周波数カ
ウンタ10で測定した表示周波数に合わせること
により、可変減衰器11の出力には、回転体1の
回転速度Vの大きさに関係なく回転ムラ速度△V
成分を第(1)式に示すように回転速度Vとの比率関
係で取り出し得ることになる。
The variable attenuator 11 connected to the output side of the F-V converter 9 has an attenuation amount scaled by a frequency value, and has the function of attenuating the conversion output in proportion to the input frequency. By adjusting the scale frequency to the display frequency measured by the frequency counter 10, the output of the variable attenuator 11 contains the rotational uneven speed ΔV regardless of the magnitude of the rotational speed V of the rotating body 1.
The components can be extracted in proportion to the rotational speed V as shown in equation (1).

高域フイルタ12は0.2Hz以上のワウ・フラツ
タ成分のみを通過させるものであり、低域フイル
タ13は、F−V変換器9の出力のうちドツプラ
周波数成分(搬送波)の影響を除去するためのも
ので回転体1の回転速度Vに応じてカツトオフ周
波数が可変できるようになつている。このように
して、回転体1の回転ムラ速度△Vを第(1)式に示
すワウ・フラツタW/Fとして求めることができ
る。
The high-pass filter 12 is for passing only wow and flutter components of 0.2 Hz or higher, and the low-pass filter 13 is for removing the influence of Doppler frequency components (carrier waves) from the output of the F-V converter 9. The cutoff frequency can be varied according to the rotational speed V of the rotating body 1. In this way, the rotational unevenness speed ΔV of the rotating body 1 can be determined as the wow and flutter W/F shown in equation (1).

また、第(2)式に示す回転体1の1分間当りの回
転数N(rpm)は、回転体1上に照射したレーザ
ビームの位置すなわち回転半径r(m)をあらか
じめ計測し、この回転半径r(m)の計測値を使
つてF−V変換器9の出力に接続された利得調整
器14の利得Gを第(2)、第(3)式から導かれる第(4)
式で示される値に設定することにより利得調整器
14の出力として得られる。
The number of rotations per minute N (rpm) of the rotating body 1 shown in equation (2) is determined by measuring the position of the laser beam irradiated onto the rotating body 1, that is, the radius of rotation r (m), in advance. Using the measured value of the radius r (m), the gain G of the gain adjuster 14 connected to the output of the F-V converter 9 is determined by the equation (4) derived from equations (2) and (3).
It is obtained as the output of the gain adjuster 14 by setting the value shown by the formula.

G=λ/4π・sin(/2)・r… (4) 〔発明が解決しようとする問題点〕 上記従来の回転ムラ測定器は、回転体1の回転
数Nを求めるために、回転体1の回転速度Vと回
転体1上に照射したレーザビームの位置から回転
半径r(m)を別途測定し、上記計測した回転速
度Vと上記回転半径r(m)から第(2)式の演算を
行う必要があり、直接回転数Nを計測できないと
いう問題点を有していた。
G=λ/4π・sin(/2)・r… (4) [Problem to be solved by the invention] The above-mentioned conventional rotational unevenness measuring device measures the number of revolutions N of the rotating body 1 by Separately measure the radius of rotation r (m) from the rotation speed V of 1 and the position of the laser beam irradiated onto the rotating body 1, and use the measured rotation speed V and the radius of rotation r (m) to calculate the equation (2). There was a problem in that it was necessary to perform calculations and the rotational speed N could not be directly measured.

この発明は、かかる問題点を解決するためにな
されたもので、回転体1の回転数と回転ムラを直
接同時に計測できる回転ムラ測定器を得ることを
目的とする。
The present invention was made to solve such problems, and an object of the present invention is to provide a rotational unevenness measuring device that can directly and simultaneously measure the rotational speed and rotational unevenness of the rotating body 1.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係わる回転ムラ測定器は、光検出器
6の後に、回転体1の表面の傷、粗さ等による受
信光の1回転毎に現われる周期的なレベル変動か
ら回転体1の回転数を検出する直流増幅器、帯域
フイルタ、レベルメータ、波形整形器、パルスカ
ウンタを設けたものである。
The rotational unevenness measuring device according to the present invention measures the rotational speed of the rotating body 1 from periodic level fluctuations that appear every rotation of the received light due to scratches, roughness, etc. on the surface of the rotating body 1 after the photodetector 6. It is equipped with a DC amplifier for detection, a band filter, a level meter, a waveform shaper, and a pulse counter.

〔作用〕[Effect]

この発明においては、回転体1の表面の傷、粗
さ等による受信光の1回転毎に現われる周期的な
レベル変動からその周期を帯域フイルタで抽出
し、パルスカウントすることで、回転半径rを計
測することなしに回転体1の回転数が計測可能と
なる。
In this invention, the rotation radius r is determined by extracting the period from the periodic level fluctuation that appears every rotation of the received light due to scratches, roughness, etc. on the surface of the rotating body 1 using a bandpass filter and counting the pulses. The rotational speed of the rotating body 1 can be measured without measurement.

〔実施例〕 第1図は、この発明による一実施例を示す回転
ムラ測定器の構成図であり、以下図面に従い説明
する。
[Embodiment] FIG. 1 is a block diagram of a rotational unevenness measuring instrument showing an embodiment of the present invention, and will be described below with reference to the drawings.

図中、1〜13は上記従来と同じものである。 In the figure, numerals 1 to 13 are the same as those of the above-mentioned conventional device.

15は光検出器6の出力のうち低周波成分を増
幅する直流増幅器、16は直流増幅器15出力信
号のうち回転体1の1回転毎に現われる周期信号
を抽出する帯域フイルタ、17は帯域フイルタ1
6の出力レベルをモニタするレベルメータ、18
は波形整形器、19は波形整形器18のパルス信
号の単位時間当りのパルス数またはパルス周期を
計測するパルスカウンタである。
15 is a DC amplifier that amplifies the low frequency component of the output of the photodetector 6; 16 is a band filter that extracts a periodic signal appearing every rotation of the rotating body 1 from among the output signals of the DC amplifier 15; 17 is a band filter 1
Level meter for monitoring the output level of 6, 18
1 is a waveform shaper, and 19 is a pulse counter that measures the number of pulses per unit time or the pulse period of the pulse signal of the waveform shaper 18.

以上の構成の回転ムラ測定器において、回転体
1が回転すると、回転体1の表面の傷、粗さ等に
より、回転体1からの反射光すなわち光検出器6
の受信光は、第2図aに示すごとく回転体1の1
回転ごとに周期T0で直流光P0を中心にして周期
的なレベル変動する。
In the rotational unevenness measuring device having the above configuration, when the rotating body 1 rotates, due to scratches, roughness, etc. on the surface of the rotating body 1, reflected light from the rotating body 1, that is, the photodetector 6
1 of the rotating body 1 as shown in Fig. 2a.
The level fluctuates periodically around the DC light P 0 at a period T 0 for each rotation.

光検出器6の出力を直流増幅器16で増幅した
後、帯域フイルタ16の中心周波数f0をレベルメ
ータ17の指示値が最大になるように調整すれ
ば、帯域フイルタ16の中心周波数f0は、回転体
11回転の周期T0に同調され(f0=1/T0)、帯域 フイルタ16の出力信号は、第2図bに示すごと
く周期T0の正弦波的な信号となり、この信号を
波形整形器18で波形整形し第2図cに示すパル
ス信号に変換した後、上記パルス信号の単位時間
当りのパルス数またはパルス信号の周期T0をパ
ルスカウンタ19で計数することにより、回転半
径rを測定することなしに直接回転体1の回転数
も合わせ計測できる回転ムラ測定器となる。
After amplifying the output of the photodetector 6 with the DC amplifier 16, if the center frequency f 0 of the bandpass filter 16 is adjusted so that the indicated value of the level meter 17 becomes the maximum, the center frequency f 0 of the bandpass filter 16 becomes The output signal of the bandpass filter 16 is tuned to the period T 0 of the rotation of the rotating body 11 (f 0 =1/T 0 ), and the output signal of the bandpass filter 16 becomes a sinusoidal signal with a period T 0 as shown in FIG. 2b. After shaping the waveform in the waveform shaper 18 and converting it into the pulse signal shown in FIG. This rotational unevenness measuring device can directly measure the rotational speed of the rotating body 1 without measuring r.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、回転体1表
面の傷、粗さ等による受信光の1回転ごとに現わ
れる周期的なレベル変動からその周期を帯域フイ
ルタ16で抽出し、パルスカウンタ19で周期を
計数することで、レーザビームの照射位置すなわ
ち回転半径rを測定することなしに直接回転体1
の回転数も合わせ計測できる回転ムラ測定器が提
供できる。
As described above, according to the present invention, the band filter 16 extracts the period from the periodic level fluctuation that appears every rotation of the received light due to scratches, roughness, etc. on the surface of the rotating body 1, and the period is extracted by the pulse counter 19. By counting the period, the rotating body 1 can be directly detected without measuring the irradiation position of the laser beam, that is, the radius of rotation r.
We can provide a rotational unevenness measuring device that can also measure the rotational speed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例を示す回転ムラ測
定器の構成図、第2図は回転ムラ測定器の特性を
示す図、第3図は従来の回転ムラ測定器の構成図
である。 図中、15は直流増幅器、16は帯域フイル
タ、17はレベルメータ、18は波形整形器、1
9はパルスカウンタである。なお、図中同一符号
は同一または相当部分を示す。
FIG. 1 is a block diagram of a rotational unevenness measuring device showing an embodiment of the present invention, FIG. 2 is a diagram showing the characteristics of the rotating unevenness measuring device, and FIG. 3 is a block diagram of a conventional rotational unevenness measuring device. In the figure, 15 is a DC amplifier, 16 is a bandpass filter, 17 is a level meter, 18 is a waveform shaper, 1
9 is a pulse counter. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】 1 特定の波長の光を出力するレーザと、上記レ
ーザの出力ビームを2分割するビームスプリツタ
と、上記2分割したレーザビームの方向を回転体
上に交差させて照射し得るための複数のミラー
と、上記二つの照射ビームの各々について回転体
の速度に応じてドツプラシフトを起した散乱光を
一緒に受信するレンズと、上記レンズで受信した
ドツプラ信号を含む散乱光を電気変換する光検出
器と、上記光検出器の出力を増幅する交流増幅器
と、上記増幅された信号からドツプラ周波数を検
出する周波数追跡器と、上記周波数追跡器の出力
信号であるドツプラ周波数をドツプラ周波数に比
例したアナログ電圧に変換する周波数−電圧変換
器と、上記ドツプラ周波数を計数表示する周波数
カウンタと、上記周波数−電圧変換器の出力信号
を上記周波数カウンタで計数されたドツプラ周波
数に比例して減衰し得る可変減衰器と、上記可変
減衰器のうち直流成分と高周波成分をそれぞれ除
去する高域フイルタおよび低域フイルタを備えた
回転ムラ測定器において、上記回転体表面の傷、
粗さ等により回転体1回転ごと周期的に変動する
上記光検出器の出力信号から回転体の回転数を計
測し得る回転数計測手段を具備したことを特徴と
する回転ムラ測定器。 2 上記光検出器の出力のうち低周波成分を増幅
する直流増幅器と、この直流増幅器の出力を入力
し、回転体の1回転ごとに現われる周期信号を抽
出し、正弦波的な信号を出力する帯域フイルタ
と、この帯域フイルタの出力を波形整形する波形
整形器と、この波形整形器により得られたパルス
信号の単位時間当りのパルス数あるいはパルス周
期を計数するパルスカウンタとにより回転数計測
手段を構成したことを特徴とする特許請求の範囲
第1項記載の回転ムラ測定器。
[Scope of Claims] 1. A laser that outputs light of a specific wavelength, a beam splitter that splits the output beam of the laser into two, and a rotating body that is irradiated with the directions of the two split laser beams crossing each other. a plurality of mirrors for obtaining Doppler signals, a lens for receiving together the scattered light that has undergone a Doppler shift according to the speed of the rotating body for each of the two irradiation beams, and an electric a photodetector for converting, an AC amplifier for amplifying the output of the photodetector, a frequency tracker for detecting the Doppler frequency from the amplified signal, and a Doppler frequency that is the output signal of the frequency tracker for converting the Doppler frequency to the Doppler frequency. a frequency-voltage converter that converts the output signal into an analog voltage proportional to , a frequency counter that counts and displays the Doppler frequency, and attenuates the output signal of the frequency-voltage converter in proportion to the Doppler frequency counted by the frequency counter. In the rotational unevenness measuring device equipped with a variable attenuator that can be used, and a high-pass filter and a low-pass filter that remove DC components and high-frequency components of the variable attenuator, respectively, scratches on the surface of the rotating body;
A rotational unevenness measuring device comprising a rotational speed measuring means capable of measuring the rotational speed of the rotating body from the output signal of the photodetector, which periodically fluctuates every rotation of the rotating body due to roughness or the like. 2. Input a DC amplifier that amplifies the low frequency component of the output of the photodetector and the output of this DC amplifier, extract a periodic signal that appears every rotation of the rotating body, and output a sine wave signal. The rotation speed measuring means is composed of a bandpass filter, a waveform shaper that shapes the waveform of the output of the bandpass filter, and a pulse counter that counts the number of pulses or pulse period per unit time of the pulse signal obtained by the waveform shaper. A rotational unevenness measuring device according to claim 1, characterized in that the rotational unevenness measuring device is configured as follows.
JP6147786A 1986-03-19 1986-03-19 Measuring instrument for rotation irregularity Granted JPS62217177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6147786A JPS62217177A (en) 1986-03-19 1986-03-19 Measuring instrument for rotation irregularity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6147786A JPS62217177A (en) 1986-03-19 1986-03-19 Measuring instrument for rotation irregularity

Publications (2)

Publication Number Publication Date
JPS62217177A JPS62217177A (en) 1987-09-24
JPH0363031B2 true JPH0363031B2 (en) 1991-09-27

Family

ID=13172184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6147786A Granted JPS62217177A (en) 1986-03-19 1986-03-19 Measuring instrument for rotation irregularity

Country Status (1)

Country Link
JP (1) JPS62217177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180096345A (en) * 2017-02-21 2018-08-29 백기현 Membrane filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180096345A (en) * 2017-02-21 2018-08-29 백기현 Membrane filter

Also Published As

Publication number Publication date
JPS62217177A (en) 1987-09-24

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