JPH0363866U - - Google Patents
Info
- Publication number
- JPH0363866U JPH0363866U JP12454089U JP12454089U JPH0363866U JP H0363866 U JPH0363866 U JP H0363866U JP 12454089 U JP12454089 U JP 12454089U JP 12454089 U JP12454089 U JP 12454089U JP H0363866 U JPH0363866 U JP H0363866U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- measuring device
- surface resistance
- contact terminals
- resistance measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Description
第１図はこの考案の一実施例を示す縦断面図、
第２図は第１図の矢視Ａ方向から見た底面図を測
定器と接続して示す図、第３図は同じくその表面
抵抗測定時の等価回路図、第４図は同じく実験結
果による接触子の荷重と面積抵抗測定値との関係
を示す線図、第５図は従来の表面抵抗測定装置の
一例を示す成図である。
１ａ，１ｂ，１ｃ……接触端子、２……基板、
５……ケーシング、５ａ……鍔部（規制手段）、
９……圧縮バネ（加圧手段）、１３……測定器。
FIG. 1 is a longitudinal sectional view showing an embodiment of this invention.
Figure 2 is a bottom view viewed from the direction of arrow A in Figure 1, connected to a measuring device, Figure 3 is an equivalent circuit diagram when measuring surface resistance, and Figure 4 is based on experimental results. FIG. 5 is a diagram showing the relationship between the load on the contact and the measured sheet resistance value, and FIG. 5 is a diagram showing an example of a conventional surface resistance measuring device. 1a, 1b, 1c...contact terminal, 2...board,
5... Casing, 5a... Flange (regulating means),
9... Compression spring (pressurizing means), 13... Measuring device.
Claims (1)
うちの１個の接触端子からそれぞれ所定距離離れ
た位置に他の２個の接触子を相互に電気的に接続
して設けたことを特徴とする表面抵抗測定装置。 ２ 請求項１記載の表面抵抗測定装置において、
基板をケーシング内に移動可能に収納するととも
に、該基板の移動量を規制する規制手段と、該基
板を一方向に加圧する加圧手段とを設けたことを
特徴とする表面抵抗測定装置。[Claims for Utility Model Registration] 1. Three contact terminals are provided on an insulating substrate, and two other contact terminals are electrically connected to each other at a predetermined distance from one of the contact terminals. A surface resistance measuring device characterized by being connected and provided. 2. The surface resistance measuring device according to claim 1,
A surface resistance measuring device characterized in that a substrate is movably housed in a casing, and is provided with regulating means for regulating the amount of movement of the substrate and pressurizing means for pressurizing the substrate in one direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12454089U JPH075419Y2 (en) | 1989-10-26 | 1989-10-26 | Surface resistance measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12454089U JPH075419Y2 (en) | 1989-10-26 | 1989-10-26 | Surface resistance measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0363866U true JPH0363866U (en) | 1991-06-21 |
| JPH075419Y2 JPH075419Y2 (en) | 1995-02-08 |
Family
ID=31672450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12454089U Expired - Lifetime JPH075419Y2 (en) | 1989-10-26 | 1989-10-26 | Surface resistance measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075419Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007205682A (en) * | 2006-02-06 | 2007-08-16 | Kazuhiko Iwasaki | Indoor decoration table of sacred arrow |
| JP2009066239A (en) * | 2007-09-14 | 2009-04-02 | Hiroshi Tanaka | Frame |
| JP2014102193A (en) * | 2012-11-21 | 2014-06-05 | Toshiba Corp | Remaining life assessment probe and measuring device |
-
1989
- 1989-10-26 JP JP12454089U patent/JPH075419Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007205682A (en) * | 2006-02-06 | 2007-08-16 | Kazuhiko Iwasaki | Indoor decoration table of sacred arrow |
| JP2009066239A (en) * | 2007-09-14 | 2009-04-02 | Hiroshi Tanaka | Frame |
| JP2014102193A (en) * | 2012-11-21 | 2014-06-05 | Toshiba Corp | Remaining life assessment probe and measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH075419Y2 (en) | 1995-02-08 |
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